IEC 61943-1999 Integrated circuits - Manufacturing line approval application guideline《集成电路 生产线批准应用指南》.pdf

1、NORME INTERNATIONALE CEI IEC INTERNATIONAL STANDARD 61943 QC211001 Premiredition Firstedition 199903 Circuitsintgrs Guidedapplicationpourlagrment deslignesdefabrication Integratedcircuits Manufacturinglineapproval applicationguideline Numroderfrence Referencenumber CEI/IEC61943:1999Numrosdespublicat

2、ions Depuisle1erjanvier1997,lespublicationsdelaCEI sontnumrotespartirde60000. Publicationsconsolides Lesversionsconsolidesdecertainespublicationsde laCEIincorporantlesamendementssontdisponibles. Parexemple,lesnumrosddition1.0,1.1et1.2 indiquentrespectivementlapublicationdebase,la publicationdebasein

3、corporantlamendement1,et lapublicationdebaseincorporantlesamendements1 et2. Validitdelaprsentepublication LecontenutechniquedespublicationsdelaCEIest constammentrevuparlaCEIafinquilreflteltat actueldelatechnique. Desrenseignementsrelatifsladatedere confirmationdelapublicationsontdisponiblesdans leCa

4、taloguedelaCEI. Lesrenseignementsrelatifsdesquestionsltudeet destravauxencoursentreprisparlecomittechnique quiatablicettepublication,ainsiquelalistedes publicationstablies,setrouventdanslesdocuments cidessous: SitewebdelaCEI* CataloguedespublicationsdelaCEI Publiannuellementetmisjour rgulirement (Ca

5、talogueenligne)* BulletindelaCEI DisponiblelafoisausitewebdelaCEI* etcommepriodiqueimprim Terminologie,symbolesgraphiques etlittraux Encequiconcernelaterminologiegnrale,lelecteur sereporteralaCEI60050: VocabulaireElectro techniqueInternational (VEI). Pourlessymbolesgraphiques,lessymboleslittraux etl

6、essignesdusagegnralapprouvsparlaCEI,le lecteurconsulteralaCEI60027: Symboleslittraux utiliserenlectrotechnique,laCEI60417:Symboles graphiquesutilisablessurlematriel.Index,relevet compilationdesfeuillesindividuelles, etlaCEI60617: Symbolesgraphiquespourschmas. * Voiradressesitewebsurlapagedetitre. Nu

7、mbering Asfrom1January1997allIECpublicationsare issuedwithadesignationinthe60000series. Consolidatedpublications ConsolidatedversionsofsomeIECpublications includingamendmentsareavailable.Forexample, editionnumbers1.0,1.1and1.2refer,respectively,to thebasepublication,thebasepublicationincor poratinga

8、mendment1andthebasepublication incorporatingamendments1and2. Validityofthispublication ThetechnicalcontentofIECpublicationsiskept underconstantreviewbytheIEC,thusensuringthat thecontentreflectscurrenttechnology. Informationrelatingtothedateofthereconfirmation ofthepublicationisavailableintheIECcatal

9、ogue. Informationonthesubjectsunderconsiderationand workinprogressundertakenbythetechnicalcom mitteewhichhaspreparedthispublication,aswellas thelistofpublicationsissued,istobefoundatthe followingIECsources: IECwebsite* CatalogueofIECpublications Publishedyearlywithregularupdates (Onlinecatalogue)* I

10、ECBulletin AvailablebothattheIECwebsite*and asaprintedperiodical Terminology,graphicalandletter symbols Forgeneralterminology,readersarereferredto IEC60050:InternationalElectrotechnicalVocabulary (IEV). Forgraphicalsymbols,andlettersymbolsandsigns approvedbytheIECforgeneraluse,readersare referredtop

11、ublicationsIEC60027: Lettersymbolsto beusedinelectricaltechnology ,IEC60417: Graphical symbolsforuseonequipment.Index,surveyand compilationofthesinglesheets andIEC60617: Graphicalsymbolsfordiagrams. * Seewebsiteaddressontitlepage.NORME INTERNATIONALE CEI IEC INTERNATIONAL STANDARD 61943 QC211001 Pre

12、miredition Firstedition 199903 Circuitsintgrs Guidedapplicationpourlagrment deslignesdefabrication Integratedcircuits Manufacturinglineapproval applicationguideline Commission Electrotechnique Internationale InternationalElectrotechnicalCommission Pourprix,voircatalogueenvigueur Forprice,seecurrentc

13、atalogue IEC1999Droitsdereproductionrservs Copyrightallrightsreserved Aucunepartiedecettepublicationnepeuttrereproduiteni utilisesousquelqueformequecesoitetparaucunprocd, lectroniqueoumcanique,ycomprislaphotocopieetles microfilms,sanslaccordcritdelditeur. Nopartofthispublicationmaybereproducedorutil

14、izedin anyformorbyanymeans,electronicormechanical, includingphotocopyingandmicrofilm,withoutpermissionin writingfromthepublisher. InternationalElectrotechnicalCommission 3,ruedeVarembGeneva,Switzerland Telefax:+41229190300 email:inmailiec.ch IECwebsitehttp:/www.iec.ch CODEPRIX PRICECODE T2 61943 CEI

15、:1999 SOMMAIRE Pages AVANTPROPOS .4 Articles 1 Gnralits 6 1.1 Domainedapplicationetobjet. 6 1.2 Rfrencenormative. 6 2 Dfinitions 6 3 Principesdelagrmentpourlalistedefabricantsqualifis(QML) 8 3.1 Identificationetdfinitiondesmtiers 8 3.2 Spcificationsdeproduits . 10 4 Conceptiondefilire(mtier1). 10 4.

16、1 Domainedecomptence. 10 4.2 Descriptiondesactivits 10 4.3 Interfacesetprocduresdesoustraitance 10 4.4 Procduresdeconceptionetvrificationdesmodles . 12 4.5 Procduresdintgrationetdevalidation . 12 5 Conceptiondecircuitsintgrs(mtier2). 14 5.1 Domainedecomptence. 14 5.2 Descriptiondesactivits 14 5.3 In

17、terfaces 16 5.4 Procduresdeconceptionetvrification . 20 5.5 Procduredevalidation. 20 6 Fabricationdeplaquettes(mtier3) . 22 6.1 Domainedecomptence. 22 6.2 Descriptiondesactivits 22 6.3 Interfaces 26 6.4 Procduredevalidation. 28 7 Caractrisationdeprocd(mtier4). 30 7.1 Domainedecomptence. 30 7.2 Descr

18、iptiondesactivits 30 7.3 Interfaces 32 7.4 Procduresdecaractrisation . 32 8 Assemblageetencapsulation(mtier5) . 34 8.1 Domainedecomptence. 34 8.2 Descriptiondesactivits 34 8.3 Interfaces 38 8.4 Procduresdevalidation. 40 9 Tests(mtier6)42 9.1 Domainedecomptence. 42 9.2 Descriptiondesactivits 42 9.3 I

19、nterfacesValidationdesinformationsfourniesparleclientoulesoustraitant 42 9.4 Procdures . 42 9.5 Procduresdevalidation. 4661943 IEC:1999 3 CONTENTS Page FOREWORD 5 Clause 1 General 7 1.1 Scopeandobject 7 1.2 Normativereference 7 2 Definitions 7 3 Principlesforqualifiedmanufacturerlist(QML)approval. 9

20、 3.1 Identificationanddefinitionoftasks. 9 3.2 Productspecifications . 11 4 Processdesign(task1) 11 4.1 Fieldofapplication 11 4.2 Descriptionofactivities . 11 4.3 Interfacesandsubcontractingprocedures . 11 4.4 Proceduresfordesignandverificationofmodels. 13 4.5 Proceduresforintegrationandvalidation.

21、13 5 Integratedcircuitsdesign(task2). 15 5.1 Fieldofapplication 15 5.2 Descriptionofactivities . 15 5.3 Interfaces 17 5.4 Proceduresfordesignandverification. 21 5.5 Validationprocedure . 21 6 Waferfabrication(task3). 23 6.1 Fieldofapplication 23 6.2 Descriptionofactivities . 23 6.3 Interfaces 27 6.4

22、 Validationprocedure . 29 7 Processcharacterization(task4) 31 7.1 Fieldofapplication 31 7.2 Descriptionofactivities . 31 7.3 Interfaces 33 7.4 Characterizationprocedures 33 8 Assemblyandpackaging(task5) . 35 8.1 Fieldofapplication 35 8.2 Descriptionofactivities . 35 8.3 Interfaces 39 8.4 Validationp

23、rocedures 41 9 Tests(task6) .43 9.1 Fieldofapplication 43 9.2 Descriptionofactivities . 43 9.3 InterfacesValidationofinformationprovidedbythecustomerorsubcontractor . 43 9.4 Procedures . 43 9.5 Validationprocedures 474 61943 CEI:1999 COMMISSIONLECTROTECHNIQUEINTERNATIONALE _ CIRCUITSINTGRSGUIDEDAPPL

24、ICATIONPOURLAGRMENT DESLIGNESDEFABRICATION AVANTPROPOS 1) LaCEI(CommissionElectrotechniqueInternationale)estuneorganisationmondialedenormalisationcompose delensembledescomitslectrotechniquesnationaux(ComitsnationauxdelaCEI).LaCEIapourobjetde favoriserlacooprationinternationalepourtouteslesquestionsd

25、enormalisationdanslesdomainesde llectricitetdellectronique.Aceteffet,laCEI,entreautresactivits,publiedesNormesinternationales. Leurlaborationestconfiedescomitsdtudes,auxtravauxdesquelstoutComitnationalintressparle sujettraitpeutparticiper.Lesorganisationsinternationales,gouvernementalesetnongouverne

26、mentales,en liaisonaveclaCEI,participentgalementauxtravaux.LaCEIcollaboretroitementaveclOrganisation InternationaledeNormalisation(ISO),selondesconditionsfixesparaccordentrelesdeuxorganisations. 2) LesdcisionsouaccordsofficielsdelaCEIconcernantlesquestionstechniquesreprsentent,danslamesure dupossibl

27、eunaccordinternationalsurlessujetstudis,tantdonnquelesComitsnationauxintresss sontreprsentsdanschaquecomitdtudes. 3) Lesdocumentsproduitsseprsententsouslaformederecommandationsinternationales.Ilssontpublis commenormes,rapportstechniquesouguidesetagrscommetelsparlesComitsnationaux. 4) Danslebutdencou

28、ragerlunificationinternationale,lesComitsnationauxdelaCEIsengagentappliquerde faontransparente,danstoutelamesurepossible,lesNormesinternationalesdelaCEIdansleursnormes nationalesetrgionales.ToutedivergenceentrelanormedelaCEIetlanormenationaleourgionale correspondantedoittreindiqueentermesclairsdansc

29、ettedernire. 5) LaCEInafixaucuneprocdureconcernantlemarquagecommeindicationdapprobationetsaresponsabilit nestpasengagequandunmatrielestdclarconformelunedesesnormes. 6)LattentionestattiresurlefaitquecertainsdeslmentsdelaprsenteNormeinternationalepeuventfaire lobjetdedroitsdepropritintellectuelleouded

30、roitsanalogues.LaCEInesauraittretenuepour responsabledenepasavoiridentifidetelsdroitsdepropritetdenepasavoirsignalleurexistence. LaNormeinternationaleCEI61943attablieparlesouscomit47A:Circuitsintgrs,du comitdtudes47delaCEI:Dispositifssemiconducteurs. Letextedecettenormeestissudesdocumentssuivants: F

31、DIS Rapportdevote 47A/533/FDIS 47A/546/RVD Lerapportdevoteindiqudansletableaucidessusdonnetouteinformationsurlevoteayant aboutilapprobationdecettenorme. LenumroQCquifiguresurlapagedecouverturedelaprsentepublicationestlenumrode spcificationdansleSystmeCEIdassurancedelaqualitdescomposantslectroniques

32、(IECQ).61943 IEC:1999 5 INTERNATIONALELECTROTECHNICALCOMMISSION _ INTEGRATEDCIRCUITSMANUFACTURINGLINEAPPROVAL APPLICATIONGUIDELINE FOREWORD 1) TheIEC(InternationalElectrotechnicalCommission)isaworldwideorganizationforstandardizationcomprising allnationalelectrotechnicalcommittees(IECNationalCommitte

33、es).TheobjectoftheIECistopromote internationalcooperationonallquestionsconcerningstandardizationintheelectricalandelectronicfields.To thisendandinadditiontootheractivities,theIECpublishesInternationalStandards.Theirpreparationis entrustedtotechnicalcommittees;anyIECNationalCommitteeinterestedinthesu

34、bjectdealtwithmay participateinthispreparatorywork.International,governmentalandnongovernmentalorganizationsliaising withtheIECalsoparticipateinthispreparation.TheIECcollaboratescloselywiththeInternationalOrganization forStandardization(ISO)inaccordancewithconditionsdeterminedbyagreementbetweenthetw

35、o organizations. 2) TheformaldecisionsoragreementsoftheIEContechnicalmattersexpress,asnearlyaspossible,an internationalconsensusofopinionontherelevantsubjectssinceeachtechnicalcommitteehasrepresentation fromallinterestedNationalCommittees. 3) Thedocumentsproducedhavetheformofrecommendationsforintern

36、ationaluseandarepublishedintheform ofstandards,technicalreportsorguidesandtheyareacceptedbytheNationalCommitteesinthatsense. 4) Inordertopromoteinternationalunification,IECNationalCommitteesundertaketoapplyIECInternational Standardstransparentlytothemaximumextentpossibleintheirnationalandregionalsta

37、ndards.Any divergencebetweentheIECStandardandthecorrespondingnationalorregionalstandardshallbeclearly indicatedinthelatter. 5) TheIECprovidesnomarkingproceduretoindicateitsapprovalandcannotberenderedresponsibleforany equipmentdeclaredtobeinconformitywithoneofitsstandards. 6)Attentionisdrawntotheposs

38、ibilitythatsomeoftheelementsofthisInternationalStandardmaybethesubject ofpatentrights.TheIECshallnotbeheldresponsibleforidentifyinganyorallsuchpatentrights. InternationalStandardIEC61943hasbeenpreparedbysubcommittee47A:Integratedcircuits, ofIECtechnicalcommittee47:Semiconductordevices. Thetextofthis

39、standardisbasedonthefollowingdocuments: FDIS Reportonvoting 47A/533/FDIS 47A/546/RVD Fullinformationonthevotingfortheapprovalofthisstandardcanbefoundinthereporton votingindicatedintheabovetable. TheQCnumberthatappearsonthefrontcoverofthispublicationisthespecificationnumber intheIECQualityAssessmentS

40、ystemforElectronicComponents(IECQ).6 61943 CEI:1999 CIRCUITSINTGRSGUIDEDAPPLICATIONPOURLAGRMENT DESLIGNESDEFABRICATION 1Gnralits 1.1 Domainedapplicationetobjet Laprsentenormeinternationaledfinitdequellefaonlesprincipesetlesexigencesdela CEI61739sontappliqusauxcircuitsintgrsmonolithiques.Elleestappli

41、cableaux fabricantsdecircuitsintgrs(CI)quidemandentlagrmentdunelignedefabrication. Lobjetdeceguideestdtablirlacohrencedesexigencesutilisesparlesfabricantsetles auditeurspourlestechnologieslieslafabricationdecircuitsintgrs. Chaquefabricantpeutavoirsespropresmthodespoursatisfaireaucontenudelaprsente n

42、orme,pourvuqueleniveaurequisdecontrledelalignedefabricationsoitatteint. 1.2Rfrence normative Ledocumentnormatifsuivantcontientdesdispositionsqui,parsuitedelarfrencequiyest faite,constituedesdispositionsvalablespourlaprsenteNormeinternationale.Pourles rfrencesdates,lesamendementsultrieursoulesrvisionsdecespublicationsne sappliquentpas.Toutefois,lespartiesprenantesauxaccordsfondssurlaprsenteNorme internationalesontinvitesrechercherlapossibilitdappliquerlditionlaplusrcentedu documentnormatifindiquciaprs.Pourlesrfrencesnondates,laderniredition dudocumentnormatifenrfr