IEC 62047-28-2017 Semiconductor devices - Micro-electromechanical devices - Part 28 Performance testing method of vibration-driven MEMS electret energy harvesti.pdf

1、 IEC 62047-28 Edition 1.0 2017-01 INTERNATIONAL STANDARD Semiconductor devices Micro-electromechanical devices Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices IEC 62047-28:2017-01(en) colour inside THIS PUBLICATION IS COPYRIGHT PROTECTED Copyright 2017

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11、ical devices Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices INTERNATIONAL ELECTROTECHNICAL COMMISSION ICS 31.080.99 ISBN 978-2-8322-3819-6 Registered trademark of the International Electrotechnical Commission Warning! Make sure that you obtained this

12、publication from an authorized distributor. colour inside 2 IEC 62047-28:2017 IEC 2017 CONTENTS FOREWORD . 3 1 Scope 5 2 Normative references 5 3 Terms and definitions 5 4 Vibration testing equipment . 5 4.1 General . 5 4.2 Vibration exciter 6 4.3 Mounting bracket 6 4.4 Vibration or acceleration det

13、ector . 6 4.5 Output detector . 7 4.6 Data recorder 7 5 Vibration-driven MEMS energy harvesting devices for testing 7 5.1 General . 7 5.2 Electrical output 7 6 Test conditions 7 6.1 Vibration frequency . 7 6.2 Vibration acceleration . 7 6.3 Waveform . 7 6.4 External load. 7 6.5 Testing time 7 6.6 Te

14、st environment 8 7 Measuring procedures . 8 7.1 General . 8 7.2 Vibration frequency response 8 7.3 Vibration acceleration response 8 7.4 Measuring conditions and electric characteristics of the external load . 8 8 Test report . 8 Annex A (informative) Example of measurement for electret energy harve

15、ster . 10 A.1 General . 10 A.2 Numerical model of electret energy harvester . 10 A.3 An example of in-plane electret energy harvester with comb drives . 14 A.4 Experimental setup and procedure 15 A.5 Experimental result . 16 Bibliography 17 Figure 1 Testing equipment for vibration driven MEMS electr

16、et energy harvesting devices . 6 Figure A.1 Basic configuration of in-plane electret energy harvester 11 Figure A.2 Alternative configuration of in-plane electret energy harvester with patterned electrets and electrodes 13 Figure A.3 In-plane electret energy harvester with comb drives 14 Figure A.4

17、In-plane electret energy harvester with comb drives mounted onto a PC board 14 Figure A.5 Output detector for electret energy harvester 15 Figure A.6 Experimental results . 16 IEC 62047-28:2017 IEC 2017 3 INTERNATIONAL ELECTROTECHNICAL COMMISSION _ SEMICONDUCTOR DEVICES MICRO-ELECTROMECHANICAL DEVIC

18、ES Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices FOREWORD 1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising all national electrotechnical committees (IEC National Committees). The object

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29、2047-28 has been prepared by subcommittee 47F: Micro- electromechanical systems, of IEC technical committee 47: Semiconductor devices. The text of this International Standard is based on the following documents: FDIS Report on voting 47F/266/FDIS 47F/271/RVD Full information on the voting for the ap

30、proval of this International Standard can be found in the report on voting indicated in the above table. This document has been drafted in accordance with the ISO/IEC Directives, Part 2. 4 IEC 62047-28:2017 IEC 2017 A list of all parts in the IEC 62047 series, published under the general title Semic

31、onductor devices Micro-electromechanical devices, can be found on the IEC website. The committee has decided that the contents of this document will remain unchanged until the stability date indicated on the IEC website under “http:/webstore.iec.ch“ in the data related to the specific document. At t

32、his date, the document will be reconfirmed, withdrawn, replaced by a revised edition, or amended. A bilingual version of this publication may be issued at a later date. IMPORTANT The colour inside logo on the cover page of this publication indicates that it contains colours which are considered to b

33、e useful for the correct understanding of its contents. Users should therefore print this document using a colour printer. IEC 62047-28:2017 IEC 2017 5 SEMICONDUCTOR DEVICES MICRO-ELECTROMECHANICAL DEVICES Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting device

34、s 1 Scope This part of IEC 62047 specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application. This document applies to vibration driven electret ener

35、gy harvesting devices whose electrodes with a gap below 1 000 m are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition. 2 Normative references There are no normative references in this document. 3 Terms and definit

36、ions For the purposes of this document, the following terms and definitions apply. 3.1 vibration frequency frequency of the periodic motion of vibration-driven MEMS electret energy harvesting devices 3.2 vibration acceleration acceleration applied to the vibration-driven MEMS electret energy harvest

37、ing devices 3.3 amplitude maximum displacement in movement of the vibration-driven MEMS electret energy harvesting devices 3.4 vibration direction direction of vibration applied to the vibration-driven MEMS electret energy harvesting device 4 Vibration testing equipment 4.1 General Figure 1 provides

38、 fundamental configurations consisted of functional blocks or components for vibration testing equipment for MEMS electrets energy harvesting devices at a specified constant frequency and constant acceleration. Details of the functional blocks or components named as the keys are provided in the foll

39、owing 4.2 to 4.5. 6 IEC 62047-28:2017 IEC 2017 Key 1 DUT: Device under test 2 Vibration exciter 3 Vibration controller 4 Mounting bracket 5 Vibration detector 6 External load/output detector 7 Data recorder Figure 1 Testing equipment for vibration driven MEMS electret energy harvesting devices 4.2 V

40、ibration exciter The vibration exciter shall generate vibration acceleration of necessary frequency along with necessary direction. Also the amplitude of the vibration perpendicular to the driving direction should be small enough. The vibration acceleration control can be performed by either of the

41、following methods: a) Constant amplitude control: To maintain the vibration acceleration, by detecting and controlling the amplitude of the vibration for given vibration frequency; b) Constant acceleration control: To maintain the vibration acceleration, by detecting and controlling vibration accele

42、ration directly for given vibration frequency. 4.3 Mounting bracket The mounting bracket shall fix the MEMS electret energy harvesting device under testing to the vibration exciter so that the generated vibration can drive the test device correctly. In addition, the direction of the vibration genera

43、ted by the vibration exciter shall be within 2 degrees from the determined direction of vibration of the tested device. 4.4 Vibration or acceleration detector The vibration or acceleration detector shall measure the vibration amplitude or vibration acceleration of the bracket or the DUT. IEC 1 2 3 5

44、 6 7 4 IEC 62047-28:2017 IEC 2017 7 4.5 Output detector The output detector and relevant equipment shall measure the voltage across the external load and the output power of the MEMS electret energy harvesting device within 3 % measurement error. The sampling frequency of the output detector shall b

45、e high enough to capture the wave form of the output voltage. In addition, the wiring between the electrical output and the DUT shall be short enough to minimize unwanted effect of parasitic capacitance. 4.6 Data recorder The test system of vibration driven MEMS electret energy harvesting devices sh

46、all include data recorder to collect recording data as shown in 7.4. 5 Vibration-driven MEMS energy harvesting devices for testing 5.1 General The vibration-driven MEMS energy harvesting devices for testing shall indicate way of mounting and direction of vibration. Furthermore the device for testing

47、 shall be mounted on the vibration exciter with the mounting bracket, and driven with determined vibration frequency and acceleration. 5.2 Electrical output The device for testing shall comprise an electrical output. 6 Test conditions 6.1 Vibration frequency Vibration frequency shall be constant dur

48、ing testing. When changing frequency, vibration shall be stopped before adjusting frequency. In case of sweeping frequency, sweep rate shall be low enough to minimize unintentional influence to characteristics of power generation. Data for sweeping in both directions (low to high or vice versa) shal

49、l be recorded. Also the testing vibration frequency range shall include the resonant frequency. NOTE Resonant frequency is the frequency given in specification, or the frequency that generates peak output power in case of frequency sweeping. 6.2 Vibration acceleration Vibration acceleration shall be constant during testing. 6.3 Waveform Waveform of vibration shall be sinusoidal wave. 6.4 External load External load shall be pure resistor of known value. Also parasitic capacitance of the