1、 ISO 2013 Surface chemical analysis Vocabulary Part 2: Terms used in scanning-probe microscopy Analyse chimique des surfaces Vocabulaire Partie 2: Termes utiliss en microscopie sonde balayage INTERNATIONAL STANDARD ISO 18115-2 Second edition 2013-11-15 Reference number ISO 18115-2:2013(E) ISO 18115-
2、2:2013(E)ii ISO 2013 All rights reserved COPYRIGHT PROTECTED DOCUMENT ISO 2013 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the interne
3、t or an intranet, without prior written permission. Permission can be requested from either ISO at the address below or ISOs member body in the country of the requester. ISO copyright office Case postale 56 CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail copyrightiso.org Web ww
4、w.iso.org Published in Switzerland ISO 18115-2:2013(E) ISO 2013 All rights reserved iii Contents Page Foreword iv Introduction v 0 Scope . 1 1 Abbreviated terms 1 2 Format . 4 2.1 Use of terms printed boldface in definitions . 4 2.2 Non-preferred and deprecated terms . 4 2.3 Subject fields . 4 3 Def
5、initions of the scanning-pr obe micr osc op y methods 4 4 Acronyms and terms for contact mechanics models .12 5 Terms for scanning-probe methods 13 6 Definitions of supplementary scanning-pr obe micr osc op y methods 37 7 Definitions of supplementary t erms for scanning-pr obe methods 41 Bibliograph
6、y .45 ISO 18115-2:2013(E) Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested
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11、onvenience of users and does not constitute an endorsement. For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment, as well as information about ISOs adherence to the WTO principles in the Technical Barriers to Trade (TBT) see the following URL: Fore
12、word - Supplementary information The committee responsible for this document is ISO/TC 201, Surface chemical analysis, Subcommittee SC 1, Terminology. This second edition cancels and replaces the first edition (ISO 18115-2:2010), which has been technically revised. ISO 18115 consists of the followin
13、g parts, under the general title Surface chemical analysis Vocabulary: Part 1: General terms and terms used in spectroscopy Part 2: Terms used in scanning-probe microscopyiv ISO 2013 All rights reserved ISO 18115-2:2013(E) Introduction Surface chemical analysis is an important area which involves in
14、teractions between people with different backgrounds and from different fields. Those conducting surface chemical analysis might be materials scientists, chemists, or physicists and might have a background that is primarily experimental or primarily theoretical. Those making use of the surface chemi
15、cal data extend beyond this group into other disciplines. With the present techniques of surface chemical analysis, compositional information is obtained for regions close to a surface (generally within 20 nm) and composition-versus-depth information is obtained with surface analytical techniques as
16、 surface layers are removed. The terms covered in this part of ISO 18115 relate to scanning-probe microscopy. The surface analytical terms covered in ISO 18115-1 extend from the techniques of electron spectroscopy and mass spectrometry to optical spectrometry and X-ray analysis. Concepts for these t
17、echniques derive from disciplines as widely ranging as nuclear physics and radiation science to physical chemistry and optics. The wide range of disciplines and the individualities of national usages have led to different meanings being attributed to particular terms and, again, different terms bein
18、g used to describe the same concept. To avoid the consequent misunderstandings and to facilitate the exchange of information, it is essential to clarify the concepts, to establish the correct terms for use, and to establish their definitions. The terms and definitions in this International Standard
19、have been prepared in conformance with the principles and style defined in ISO 1087-1:2000 and ISO 10241:1992. Essential aspects of these standards appear in 2.1 to 2.3. This part of ISO 18115 comprises the 98 abbreviations and 277 definitions of the combined ISO 18115-2:2010 and Amendment 1 to ISO
20、18115-2:2010. Corrections have been made to terms 3.23, 3.25, 3.36, 5.52, 5.53, 5.54, 5.55, 5.73, 5.83, and 5.151 that appeared in ISO 18115-2:2010. The terms are given in alphabetical order, classified under Clauses 3, 4, and 5 from the former International Standard with corrections and Clauses 6 a
21、nd 7 from Amendment 1:Clause 3: Definitions of the scanning-probe microscopy methods;Clause 4: Acronyms and terms for contact mechanics models;Clause 5: Definitions of terms for scanning-probe methods;Clause 6: Definitions of supplementary scanning-probe microscopy methods;Clause 7: Definitions of s
22、upplementary terms for scanning-probe methods. Many terms concerned with profilometry, or more correctly, surface texture measuring instruments, may be found in ISO 3274 and ISO 4287. ISO 3274 specifies the properties of the instrument that influence profile evaluation and provides basic considerati
23、ons of the specification of contact (stylus) instruments (profile meter and profile recorder) whereas ISO 4287 concerns some issues involving surface texture. Those interested in a more detailed understanding of profilometry or surface texture measuring instruments should consult ISO 3274, ISO 4287,
24、 ISO 25178, and other referenced documents. ISO 2013 All rights reserved v Surface chemical analysis Vocabulary Part 2: Terms used in scanning-probe microscopy 0 Scope This International Standard defines terms for surface chemical analysis. ISO 18115-1 covers general terms and those used in spectros
25、copy while this part of ISO 18115 covers terms used in scanning-probe microscopy. 1 Abbreviated terms In the list below, note that the final “M”, given as “microscopy”, may be taken equally as “microscope”, depending on the context. References to the entries where the abbreviations, or keywords in t
26、he abbreviations, are defined are given in brackets. 3D-PFM vector PFM (see 6.21) AFM atomic-force microscopy (see 3.2) AM-AFM amplitude modulation atomic-force microscopy (see 6.1) AM-KPFM amplitude modulation Kelvin-force microscopy (see 6.2) ANSOM apertureless near-field scanning optical microsco
27、py (deprecated) (see 3.36) ASNOM apertureless scanning near-field optical microscopy (deprecated) (see 3.36) BEEM ballistic-electron emission microscopy (see. 5.8) BEES ballistic-electron emission spectroscopy (see 5.8) CFM chemical-force microscopy (see 3.3) CITS current-imaging tunnelling spectros
28、copy (see 3.5) CPAFM conductive-probe atomic-force microscopy (see 3.4) CRAFM contact resonance atomic-force microscopy (see 6.4) CRFM contact resonance force microscopy (see 6.4) DFM dynamic-force microscopy (see 3.6) DMM displacement modulation microscopy DTM differential-tunnelling microscopy EC-
29、AFM electrochemical atomic-force microscopy (see 3.8) ECFM electrochemical-force microscopy EC-SPM electrochemical scanning-probe microscopy EC-STM electrochemical scanning tunnelling microscopy (see 3.9) INTERNATIONAL ST ANDARD ISO 18115-2:2013(E) ISO 2013 All rights reserved 1 ISO 18115-2:2013(E)
30、EFM electrostatic-force microscopy (see 3.7) FFM frictional-force microscopy (see 3.11) FM-AFM frequency modulation atomic-force microscopy (see 3.10) FM-KPFM frequency modulation Kelvin-force microscopy (see 6.6) FMM force modulation microscopy (see 5.60) FRET fluorescent resonance energy transfer
31、see 5.54) FS force spectroscopy (see 5.58) HFM heterodyne force microscopy HPICM hopping probe ion conductance microscopy (see 6.7) IC intermittent contact (see 5.73) IETS inelastic electron tunnelling spectroscopy IFM interfacial-force microscopy KFM Kelvin-force microscopy (deprecated) (see 3.12)
32、 KPM Kelvin-probe microscopy (see 5.76) KPFM Kelvin-probe force microscopy (see 3.12) LFM lateral-force microscopy (see 3.13) LFMM lateral-force modulation microscopy (see 5.77) MDFM magnetic dynamic-force microscopy (see 3.14) MDM microwave dielectric microscopy MFM magnetic-force microscopy (see 3
33、15) MOKE magneto-optic Kerr effect MRFM magnetic-resonance force microscopy (see 3.16) MTA microthermal analysis NC-AFM non-contact atomic-force microscopy (see 3.18) NIS nanoimpedance spectroscopy NSOM near-field scanning optical microscopy (see 3.17) PF-AFM pulsed-force atomic-force microscopy (s
34、ee 5.125) PFM piezoresponse force microscopy (see 5.100) PSTM photon scanning tunnelling microscopy PTMS photothermal micro-spectroscopy (see 3.19) RNSOM reflection near-field scanning optical microscopy (see 5.133) RSNOM reflection scanning near-field optical microscopy (see 5.133)2 ISO 2013 All ri
35、ghts reserved ISO 18115-2:2013(E) SCFM scanning capacitance force microscopy (see 6.13) SCM scanning capacitance microscopy (see 3.20) SCPM scanning chemical-potential microscopy (see 3.21) SECM scanning electrochemical microscopy (see 3.22) SECM-SICM scanning electrochemical microscopy - scanning i
36、on conductance microscopy (see 6.14) SERRS surface-enhanced resonant Raman spectroscopy (see 5.154) SERS surface-enhanced Raman scattering (see 5.151) SFM scanning force microscopy (deprecated) (see 3.2) SGM scanning gate microscopy ShFM shear-force microscopy (see 3.37) SHG second harmonic generati
37、on SHPFM second harmonic piezo force microscopy SHPM scanning Hall probe microscopy (see 3.23) SICM scanning ion conductance microscopy (see 3.24) SIM scanning impedance microscopy SKPM scanning Kelvin-probe microscopy (see 5.76) SMCM scanning micropipette contact method (see 6.17) SMRM scanning mag
38、neto-resistance microscopy (see 3.25) SMSM scanning Maxwell stress microscopy (see 3.26) SMSM is sometimes given as SMM, but the latter acronym is also used for scanning microwave microscopy and scanning magnetic microscopy and so should not be used for scanning Maxwell stress microscopy. SNDM scann
39、ing non-linear dielectric microscopy (see 3.29) SNFUH scanning near-field ultrasound holography (see 3.28) SNOM scanning near-field optical microscopy (see 3.17) s-NSOM scattering near-field scanning optical microscopy (see 3.36) SNTM scanning near-field thermal microscopy (see 3.27) SPM scanning-pr
40、obe microscopy (see 3.30) SP-STM spin-polarized scanning tunnelling microscopy (see 3.38) SP-STS spin-polarized scanning tunnelling spectroscopy (see 3.39) SRTM spin-resolved tunnelling microscopy (deprecated) (see 3.38) SSCM scanning surface confocal microscopy (see 6.18) SSM scanning superconducti
41、ng interference device (SQUID) microscopy ISO 2013 All rights reserved 3 ISO 18115-2:2013(E) s-SNOM scattering scanning near-field optical microscopy (see 3.36) SS-PFM switching spectroscopy piezoresponse force microscopy (see 6.20) SSPM scanning surface potential microscopy (see 3.32) SSRM scanning
42、 spreading-resistance microscopy (see 3.31) STM scanning tunnelling microscopy (see 3.34) SThM scanning thermal microscopy (see 3.33) STHM scanning tunnelling hydrogen microscopy (see 6.19) STS scanning tunnelling spectroscopy (see 3.35) SVM scanning voltage microscopy TECARS tip-enhanced coherent a
43、nti-Stokes Raman scattering TEFS tip-enhanced fluorescence spectroscopy (see 3.41) TERS tip-enhanced Raman spectroscopy (see 3.42) TNSOM transmission near-field scanning optical microscopy TSM thermal-scanning microscopy (deprecated, see 3.33, Note 2) TSNOM transmission scanning near-field optical m
44、icroscopy UFM ultrasonic force microscopy (see 3.43) 2 Format 2.1 Use of t erms print ed boldfac e in definition s A term printed in italics in a definition or a note is defined in another entry in either part of this International Standard. However, the term is printed in italics only the first tim
45、e it occurs in each entry. 2.2 Non-preferred and deprecated terms A term listed lightface is non-preferred or deprecated. The preferred term is listed boldface. 2.3 Subject fields Where a term designates several concepts, it is necessary to indicate the subject field to which each concept belongs. T
46、he field is shown lightface, between angle brackets, preceding the definition, and on the same line. 3 De finiti ons of the s canning-pr obe micr osc op y methods NOTE The following are the definitions of scanned probe microscopy methods. In the list below, note that the final “M” or final “S” in th
47、e acronyms, given as “microscopy” or “spectroscopy”, may also mean “microscope” or “spectrometer”, respectively, depending on the context. For the definition relating to the microscope or spectrometer, replace the words “a method” by the words “an instrument” where that appears.4 ISO 2013 All rights
48、 reserved ISO 18115-2:2013(E) 3.1 apertureless Raman microscopymethod of microscopy involving the acquisition of Raman spectroscopic data utilizing a near-field (5.88) optical source and based upon a metal tip (5.120) in close proximity to the sample surface illuminated with suitably polarized light
49、 3.2 atomic-force microscopy AFM DEPRECATED: scanning force microscopy DEPRECATED: SFM method for imaging surfaces by mechanically scanning their surface contours, in which the deflection of a sharp tip (5.120) sensing the surface forces, mounted on a compliant cantilever (5.18), is monitored Note 1 to entry: AFM can provide a quantitative height image (5.69) of both insulating and conducting surfaces. Note 2 to entry: Some AFM instruments move the sample in the x-, y- and z-directions while keeping the tip position constant and other
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