ANSI ASME B89.1.8-2011 Performance Evaluation of Displacement-Measuring Laser Interferometers《位移测量激光干涉仪的性能评估》.pdf

1、 ASME B89.1.8-2011Performance Evaluation of Displacement-Measuring Laser InterferometersAN AMERICAN NATIONAL STANDARDASME B89.1.8-2011PerformanceEvaluation ofDisplacement-Measuring LaserInterferometersAN AMERICAN NATIONAL STANDARDThree Park Avenue New York, NY 10016 USADate of Issuance: March 30, 20

2、12This Standard will be revised when the Society approves the issuance of a new edition.ASME issues written replies to inquiries concerning interpretations of technical aspects of thisStandard. Periodically certain actions of the ASME B89 Committee may be published as Cases. Casesand interpretations

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10、ions of this document issued in accordance with the establishedASME procedures and policies, which precludes the issuance of interpretations by individuals.No part of this document may be reproduced in any form,in an electronic retrieval system or otherwise,without the prior written permission of th

11、e publisher.The American Society of Mechanical EngineersThree Park Avenue, New York, NY 10016-5990Copyright 2012 byTHE AMERICAN SOCIETY OF MECHANICAL ENGINEERSAll rights reservedPrinted in U.S.A.CONTENTSForeword ivCommittee Roster . vCorrespondence With the B89 Committee vi1 Scope. 12 Definitions 13

12、 System Performance Evaluation: General Considerations . 54 Test Procedure Laser Interferometer Comparison Test. 75 Verifying Test Performance, Estimating Bias in the Test, and Uncertainty ofResults . 166 Measurement Evaluation . 197 References 22Figure2-1 Schematic Illustration of the Abbe Offset 2

13、Tables4.2-1 Recommended Target Positions . 84.7.2-1 Sensitivity Coefficients Associated With LDE 124.8-1 Wavelength Corrections (Parts in 106) for Low Humidity Air (25% RH) 134.8-2 Wavelength Corrections (Parts in 106) for Medium Humidity Air (50% RH) 134.8-3 Wavelength Corrections (Parts in 106) fo

14、r High Humidity Air (75% RH) . 144.8-4 Combinations of Environmental Conditions . 14Forms4.10-1 Reporting Results for Intercomparison Test . 174.10-2 Reporting Results for Sensor Calibration 174.10-3 Reporting Overall Result . 176-1 Sample Uncertainty Budget: Errors Predictable by Manufacturer . 206

15、-2 Sample Uncertainty Budget: Combining Manufacturers Reported UncertaintyWith Additional Sources of Error for a Metrology Laboratory . 21Nonmandatory AppendicesA Uncertainty Budget for Interferometric Length Measurements . 25B Methods for Comparing Two Interferometer Systems 33C Performing Accurate

16、 Linear Measurements With a Laser InterferometerSystem Best Procedures and Practices 41D Retesting of Interferometer Systems 49E AC Interferometers Versus DC Interferometers 50F Suggestions for Testing the Master Interferometer and EstimatingUncertainty 51iiiFOREWORDLaser interferometry has become t

17、he preferred way to measure machine tool and coordinatemeasuring machine (CMM) linear displacement accuracy. Laser interferometers are also used asthe main incremental radius-measuring devices in other dimensional measuring systems, suchas laser trackers. The laser interferometer is preferred becaus

18、e of its versatility, portability,robustness, high bandwidth, and high accuracy, and because the laser frequency can be measuredwith a high degree of accuracy relative to a HeNe iodine stabilized laser, which, for all practicalpurposes, may be considered to be an intrinsic length standard. The vacuu

19、m laser wavelength,the basic unit of measure, is a direct function of this frequency. Commercial instruments basedon laser interferometry offer an extremely high degree of measurement accuracy to the user.This Standard is written to help users evaluate the accuracy of laser interferometer systems.A

20、folded common path test is included to permit users to functionally compare systems foraccuracy, even if the laser systems use different wavelengths or measurement techniques. Ameasurement uncertainty table is included to allow users to evaluate a measurement or comparecompeting laser systems. A Non

21、mandatory Appendix covering best practices gives the userguidance in the proper application of laser systems to practical incremental distance measurement.This Standard was approved by the American National Standards Institute on July 15, 2011.ivASME B89 COMMITTEEDimensional Metrology(The following

22、is the roster of the Committee at the time of approval of this Standard.)STANDARDS COMMITTEE OFFICERSB. Parry, ChairS. D. Phillips, Vice ChairF. Constantino, SecretarySTANDARDS COMMITTEE PERSONNELD. Beutel, CaterpillarJ. B. Bryan, Bryan and AssociatesT. Charlton, Jr., Charlton AssociatesD. J. Christ

23、y, Mahr Federal, Inc.F. Constantino, The American Society of Mechanical EngineersG. A. Hetland, International Institute of Geometric Dimensioningand TolerancingR. J. Hocken, University of North CarolinaSUBCOMMITTEE 1 LENGTHD. Sawyer, Chair, National Institute of Standards and TechnologyC. J. Blackbu

24、rn, National Institute of Standards and TechnologyM. Braine, National Institute of Standards and TechnologyD. J. Carlson, The L.S. Starrett Co.D. J. Christy, Mahr Federal, Inc.T. D. Doiron, National Institute of Standards and TechnologyPROJECT TEAM 1.8 LASER DEVELOPMENT AND APPLICATIONSM. R. Hamar,

25、Chair, Hamar Laser Instruments, Inc.M. Chapman, Renishaw plcM. L. Fink, The Boeing Co.K. W. John, U.S. Air Force Metrology LabvM. P. Krystek, Physikalisch-Technische BundesanstaltM. Liebers, Professional Instruments Co.E. P. Morse, University of North CarolinaB. Parry, The Boeing Co.S. D. Phillips,

26、National Institute of Standards and TechnologyJ. G. Salsbury, Mitutoyo America Corp.D. Sawyer, National Institute of Standards and TechnologyR. L. Thompson, U.S. Air Force Metrology LabM. R. Hamar, Hamar Laser Instruments, Inc.D. T. Harris, Glastonbury Souther GageK. Kokal, Micro Laboratories, Inc.E

27、. S. Stanfield, National Institute of Standards and TechnologyW. A. Watts, Glastonbury Souther GageJ. Stone, National Institute of Standards and TechnologyB. R. Taylor, Renishaw plcC. P. Wang, Optodyne, Inc.K. J. Wayne, Agilent TechnologiesCORRESPONDENCE WITH THE B89 COMMITTEEGeneral. ASME Standards

28、 are developed and maintained with the intent to represent theconsensus of concerned interests. As such, users of this Standard may interact with the Committeeby requesting interpretations, proposing revisions, and attending Committee meetings. Corre-spondence should be addressed to:Secretary, B89 S

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37、mat may be rewritten in the appropriate format by the Committeeprior to being answered, which may inadvertently change the intent of the original request.ASME procedures provide for reconsideration of any interpretation when or if additionalinformation that might affect an interpretation is availabl

38、e. Further, persons aggrieved by aninterpretation may appeal to the cognizant ASME Committee or Subcommittee. ASME does not“approve,” “certify,” “rate,” or “endorse” any item, construction, proprietary device, or activity.Attending Committee Meetings. The B89 Standards Committee regularly holds meet

39、ings thatare open to the public. Persons wishing to attend any meeting should contact the Secretary ofthe B89 Standards Committee.viASME B89.1.8-2011PERFORMANCE EVALUATION OF DISPLACEMENT-MEASURINGLASER INTERFEROMETERS1 SCOPEThis Standard establishes requirements and methodsfor the specification, ev

40、aluation, setup, and use of laserinterferometers. This Standard will explicitly discussonly single-pass optics and a single axis of linear dis-placement measurement.The Standard is currently limited to ionized gas laserinterferometer systems. Only single-color lasers will beconsidered in this editio

41、n of the Standard. Single colorwill include both homodyne systems and heterodynesystems (see Nonmandatory Appendix E) where alloperating frequencies lie within a Doppler-broadenedfrequency band associated with one specific atomic tran-sition or Zeeman multiplet. Diode laser systems, chirpsystems, an

42、d two-color interferometers may be includedin future editions of this Standard. It should be notedthat the folded common path comparison technique ofthis Standard could be used to compare any of the abovesystems to a standard HeNe laser interferometer.Testing of laser interferometers as described in

43、 thisStandard has bearing on a number of other standards,such as ASME B89.4.19, ASME B5.54, ASME B5.57,ISO 230-1, ISO 230-2, ISO 230-3, and ISO 230-6 (seereferences 17 in section 7).2 DEFINITIONSThis section contains brief definitions of the majorityof technical terms used in this Standard. Omission

44、sshould be reported to ASME. In this section, some defini-tions have been taken from the International Vocabularyof Metrology (VIM) 8, others are taken from the Guideto the Expression of Uncertainty in Measurement (GUM)9, and some are taken from ASME B89 or ASME B5standards as indicated. References

45、to all of these stan-dards are given in section 7.Abbe offset: the instantaneous value of the perpendiculardistance between the displacement-measuring systemof a machine (scales) and the measurement line wherethe displacement in that coordinate is being measured. Aschematic illustration of this conc

46、ept is shown in Fig. 2-1.Abbe offset error: the measurement error resulting fromangular motion of a movable component and an Abbeoffset between the scales measuring the motion of thatcomponent and the measurement line (see Fig. 2-1).1accuracy 8: the closeness of agreement between a mea-sured quantit

47、y value and a true quantity value of ameasurand. See reference 8 for a detailed discussion.air dead path: distance imbalance between the interferom-eter reference and measurement arms when the lasersystem readout is set to zero. If the refractive index ofthe air within the interferometer changes dur

48、ing themeasurement, there will be a measurement error unlessthe laser system includes a dead path correctioncapability.air turbulence: regions of varying refraction in air, usuallycaused by thermal gradients. Air turbulence is a com-mon source of fluctuations in the reading of an interfer-ometer. Th

49、is weakens the signal and, if severe enough,interrupts the measurement.back-to-back test: a test for comparing the performanceof two laser systems arranged in a back-to-back configu-ration, as defined in Nonmandatory Appendix B.beamsplitter: optical component in an interferometer thatdivides the light beam into reference and measurementbeams. In most interferometer designs, the beamsplitteris also used to recombine the reference and measurementbeams on their return so that interference fringes maybe detected or observed.calibration 8: an operation that, under s