ANSI G-13-2015 Storage and Handling of Silane and Silane Mixtures (Third Edition ).pdf

1、 CGA G-132015 STORAGE AND HANDLING OF SILANE AND SILANE MIXTURES THIRD EDITION PAGE II COMPRESSED GAS ASSOCIATION, INC. CGA G-132015 PREFACE: As part of a program of harmonization of industry standards, the Compressed Gas Association (CGA) has pub-lished CGA G-13, Storage and Handling of Silane And

2、Silane Mixtures, jointly produced by members of the International Harmonization Council. This publication is intended as an international harmonized standard for the worldwide use and application of all members of the Asia Industrial Gases Association (AIGA), Compressed Gas Association (CGA), Europe

3、an Industrial Gases Association (EIGA), and Japan Industrial and Medical Gases Association (JIMGA). Each as-sociations technical content is identical, except for regional regulatory requirements and minor changes in for-matting and spelling. PLEASE NOTE: The information contained in this document wa

4、s obtained from sources believed to be reliable and is based on technical information and experience currently available from members of the Compressed Gas Association, Inc. and others. However, the Association or its members, jointly or severally, make no guarantee of the results and assume no liab

5、ility or responsibility in connection with the information or suggestions herein contained. Moreover, it should not be assumed that every acceptable commodity grade, test or safety procedure or meth-od, precaution, equipment or device is contained within, or that abnormal or unusual circumstances ma

6、y not warrant or suggest further requirements or additional procedure. This document is subject to periodic review, and users are cautioned to obtain the latest edition. The Associa-tion invites comments and suggestions for consideration. In connection with such review, any such comments or suggesti

7、ons will be fully reviewed by the Association after giving the party, upon request, a reasonable op-portunity to be heard. Proposed changes may be submitted via the Internet at our website, . This document should not be confused with Federal, state, provincial, or municipal specifications or regulat

8、ions; insurance requirements; or national safety codes. While the Association recommends reference to or use of this document by government agencies and others, this document is purely voluntary and not binding. A listing of all publications, audiovisual programs, safety and technical bulletins, and

9、 safety posters is available via the Internet at our website at . For more information contact CGA at Phone: 703-788-2700, ext. 799. E-mail: . Work Item 06-056 Specialty Gases Committee NOTE Due to the extensive changes in this standard, technical changes from the previous changes are not identified

10、. NOTEAppendices A and B (Informative) are for information only. NOTEAppendices C and D (Normative) are requirements. THIRD EDITION: 2015 SECOND EDITION: 2006 FIRST EDITION: 2000 2015 The Compressed Gas Association, Inc. All rights reserved. All materials contained in this work are protected by Unit

11、ed States and international copyright laws. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical including photocopying, recording, or any infor-mation storage and retrieval system without permission in writing from The Compressed Gas Associatio

12、n, Inc. All requests for permission to reproduce material from this work should be directed to The Compressed Gas Association, Inc., 14501 George Carter Way, Suite 103, Chantilly VA 20151. You may not alter or remove any trademark, copyright or other notice from this work. CGA G-132015 COMPRESSED GA

13、S ASSOCIATION, INC. PAGE iii Contents Page 1 Introduction . 1 2 Scope and purpose 1 2.1 Scope 1 2.2 Purpose . 2 2.3 Equivalency . 2 3 Definitions . 2 4 Physical and chemical properties . 8 4.1 Description. 8 4.2 Properties 9 4.3 Pyrophoric nature of silane 9 5 Packaging information 10 5.1 General 10

14、 5.2 Container outlet . 10 5.3 Cap (plug) of container outlet 10 6 Outdoor storage and use 11 6.1 Applicability 11 6.2 General 11 6.3 Distances to exposures and separation 13 6.4 Silane delivery systems . 18 7 Indoor storage and use 20 7.1 Applicability 20 7.2 Indoor storage and use 21 7.3 Nonbulk s

15、ources and systems. 21 7.4 Barricade constructionunattended operations . 21 7.5 Egress . 21 7.6 Explosion control . 21 7.7 Electrical requirements 21 7.8 Ventilation 21 7.9 Quantity limits 21 7.10 Separation from incompatible materials 21 7.11 Gas cabinets 22 7.12 Shutdown and source isolation 22 8

16、System configurationcylinder sources 22 8.1 Outdoor installations 22 8.2 Indoor installations. 23 9 System configurationbulk sources 25 9.1 Use equipment 25 9.2 Outdoor installations 26 9.3 Bulk containers 26 9.4 Bulk source process gas panel 27 9.5 Valve manifold boxes 27 10 Piping and components 2

17、7 10.1 Piping system design 27 10.2 Components 29 10.3 Support of piping systems . 31 11 Gas and flame detection 31 11.1 Gas monitoring 31 11.2 Flame detection . 32 PAGE IV COMPRESSED GAS ASSOCIATION, INC. CGA G-132015 12 Fire protection system 33 12.1 General 33 12.2 Outdoor systems . 33 12.3 Indoo

18、r systems 34 13 Ventilation systems 34 13.1 Outdoor systems . 34 13.2 Indoor systems 35 14 Venting and treatment 36 14.1 General 36 14.2 Disposal options 36 14.3 Treatment system requirements 37 14.4 Direct venting into exhaust ducts. 37 14.5 Dedicated process vent . 37 15 Purge gas system . 37 15.1

19、 Purging of the delivery system 37 15.2 Dedicated purge source 38 15.3 Controls . 38 15.4 Vacuum generator purge gas source 39 16 Electrical requirements . 39 16.1 General 39 16.2 Emergency power 39 16.3 Outdoor electrical systems 39 17 Fundamental supervisory control requirements . 39 17.1 Indoor r

20、equirements 39 17.2 Outdoor requirements 40 18 Container filling . 40 18.1 Container filling facilities 41 18.2 Filling system . 43 18.3 Filling safeguards 44 18.4 Manufacturing/Filling plant storage 45 19 References . 46 20 Additional references 48 Figures Figure 1Instrument nomenclature 5 Figure 2

21、Support structure protection against flame impingement . 18 Figure 3Typical end user outdoor cylinder layout 19 Figure 4Typical bulk source container layout . 20 Figure 5Typical silane process gas panel . 22 Figure 6Typical silane purge gas panel . 23 Figure 7Valve manifold box flow schematic 25 Fig

22、ure 8Typical bulk system process flow diagram . 26 Figure 9Inert purge gas flow schematic . 38 Tables Table 1Physical and chemical properties of silane 9 Table 2DOT packaging information . 11 Table 3Distances to exposure for outdoor cylinders in storage or use up to 50 L . 15 Table 4Distance to expo

23、sures for outdoor silane tube trailers, ISO modules, ton tank, and cylinder packs in use 16 Table 5Distance to exposures for outdoor silane tube trailers, ISO modules, and ton tanks in storage 17 CGA G-132015 COMPRESSED GAS ASSOCIATION, INC. PAGE v Table 6Minimum ventilation volumetric flow rate for

24、 gas cabinets and valve manifold boxes unattended operations . 36 Table 7Indoor requirements for supervisory controlsilane systems containing silane in concentrations exceeding 1.37% by volume . 40 Table 8Outdoor requirements for supervisory controlsilane systems containing silane in concentrations

25、exceeding 1.37% by volume . 40 Table 9Minimum ventilation volumetric flow rate for exhausted enclosures 42 Appendices Appendix APersonnel protection (Informative) 50 Appendix BExplanatory material (Informative) 52 Appendix CThermal radiation (Normative) 55 Appendix DGuidance on overpressure based se

26、paration distances for bulk silane storage or use (Normative) 77 Appendices Figures Figure B-1Silane compressability 52 Figure B-2Observed ignition distance for different silane flow velocity from 4.32 mm port connectors 53 Figure C-1Thermal dose for ISO modules or tube trailers with 0.85 in pressur

27、e relief device 59 Figure C-2Thermal dose for ISO modules or tube trailers with 0.64 in pressure relief device 59 Figure C-3Thermal dose for ISO modules or tube trailers with 0.45 in pressure relief device 60 Figure C-4Thermal dose for ton tank with 0.57 in pressure relief device, 100% flow for use

28、60 Figure C-5Thermal dose for ton tank with 0.57 in pressure relief device, 50% flow for storage . 61 Figure C-6Thermal dose for ton tank with 0.39 in pressure relief device, 100% flow for use 61 Figure C-7Thermal dose for ton tank with 0.39 in pressure relief device, 50% flow for storage . 62 Figur

29、e C-8Thermal dose for ton tank with 0.28 in pressure relief device, 100% flow for use 62 Figure C-9Thermal dose for ton tank with 0.28 in pressure relief device, 50% flow for storage . 63 Figure C-10Pressure relief device release time for a ton tank (450 L container) 63 Figure C-11Pressure relief de

30、vice release time for tube in ISO container (40 ft tube for .85 in Off-site transportation of compressed gases regulated by the U.S. Department of Transportation (DOT), European Agreement concerning the International Carriage of Dangerous Goods by Road (ADR), or other regulatory authorities; and Req

31、uirements within the jurisdiction of local, state, provincial/territorial, and national regulatory authorities with laws or regulations that preempt the provisions of this standard. When such is the case, it is recom-mended that the authority having jurisdiction (AHJ) be guided by this standard in d

32、etermining requirements. 1 References are shown by bracketed numbers and are listed in order of appearance in the reference section. PAGE 2 COMPRESSED GAS ASSOCIATION, INC. CGA G-132015 This standard is not intended to replace or fulfill the requirements of a Risk Management Program (RMP) as mandate

33、d under Section 112(r) of the Clean Air Act, generally referred to as the Environmental Protection Agency (EPA) RMP rule. A full RMP is comprised of a hazard assessment, a management system, a preven-tion program, and an emergency response program. Such programs and assessments shall be developed on

34、 a case-by-case basis in response to the requirements of the RMP and the circumstances found at each individual company where silane is stored or used. 2.2 Purpose The purpose of this standard is to prescribe the controls for the installation of silane systems and the recom-mended methods for storag

35、e or transfer of silane or its mixtures from a source of supply to a point of use to provide protection against injury, loss of life, and property damage. 2.3 Equivalency Nothing in this standard is intended to prevent the use of systems, methods, or devices of equivalent or superi-or quality, stren

36、gth, fire-resistance, effectiveness, durability, and safety over those prescribed by this standard. Systems, methods, or devices to be used as equivalents shall be supported by technical documentation that demonstrates equivalency. The use of equivalencies shall be subject to approval by the AHJ. 3

37、Definitions For the purpose of this standard, the following definitions apply. 3.1 Publication terminology 3.1.1 Shall Indicates that the procedure is mandatory. It is used wherever the criterion for conformance to specific recom-mendations allows no deviation. 3.1.2 Should Indicates that a procedur

38、e is recommended. 3.1.3 May Indicates that the procedure is optional. 3.1.4 Will Is used only to indicate the future, not a degree of requirement. 3.1.5 Can Indicates a possibility or ability. 3.2 Technical definitions 3.2.1 Barricade construction Room, building, or enclosed structure of such type,

39、size, and construction as to limit in a prescribed manner the effect of an explosion on nearby buildings or within the building in which an explosion occurs. 3.2.2 Barrier, shield Partition constructed of materials to isolate the hazard from contact with personnel. NOTEBarriers are designed with str

40、uctural strength and arranged to resist physical forces. NOTESee Appendix A for information on personnel protection. 3.2.3 Burning velocity Intrinsic property of burning gases or vapors expressed as the motion of the flame relative to the motion of the unburned gas. CGA G-132015 COMPRESSED GAS ASSOC

41、IATION, INC. PAGE 3 3.2.4 Container 3.2.4.1 Cylinder Seamless pressure vessel having a nominal water capacity up to 50 L. 3.2.4.1.1 Cylinder packs Arrangement of cylinders into a cluster where the cylinders are confined into a grouping or arrangement with a strapping or frame system and connections

42、are made to a common manifold. For silane service, each cylinder shall be fitted with an individual shutoff valve. The frame system is allowed to be on skids or wheels to permit movement. 3.2.4.1.2 ISO module Multi-modal assembly of cylinders, tubes, or bundles of cylinders that are interconnected b

43、y a manifold and assembled within a framework. NOTEThe ISO module includes service equipment and structural equipment necessary for the transport of gases. The frame of an ISO module and its corner castings are specially designed and dimensioned for use in multi-modal transporta-tion service on cont

44、ainer ships, special highway chassis, and container-on-flatcar railroad equipment. An ISO module may also be referred to in regulations as a MEGC and its equivalent. 3.2.4.1.3 Multiple-element gas container (MEGC) Assembly of cylinders, tubes, or bundles of cylinders that are interconnected by a man

45、ifold and are assembled within a framework. NOTEThe MEGC module includes service equipment and structural equipment necessary for the transport of gases. 3.2.4.2 Packages greater than 50 L Any individual or manifolded collection of seamless pressure vessel(s) having a collective nominal water capac-

46、ity greater than 50 L. NOTEThese can include an ISO module, multiple-element gas containers (MEGCs), tubes, tube trailers, cylinder packs, nominal 450 L (ton tank), or other packages as defined by regulations or codes. 3.2.4.2.1 Ton tank(s) Seamless pressure vessel having a nominal water capacity of

47、 450 L. 3.2.4.2.2 Tube trailers Truck or semitrailer on which a number of tubes have been mounted and manifolded into a common piping system. 3.2.4.2.3 Tubes Seamless pressure vessel having a nominal water capacity exceeding 150 L but not more than 3000 L. 3.2.5 Deflagration Exothermic reaction such

48、 as extremely rapid oxidation of a flammable dust or vapor in air in which the reaction progresses through the unburned material at a rate less than the velocity of sound. NOTEA deflagration will have an explosive effect. 3.2.6 Detonation Exothermic reaction characterized by the pressure of a shock

49、wave in material that establishes and maintains the reaction. NOTEThe reaction zone progresses through the material at a rate greater than the velocity of sound. The principal heating mechanism is one of shock compression. A detonation will have an explosive effect. 3.2.7 Emergency response containment vessel (ERCV) Nationally or regionally approved pressure vessel used to contain leaking gas cylinders for transportation. PAGE 4 COMPRESSED GAS ASSOCIATION, INC. CGA G-132