ANSI STM11.11-2015 SURFACE RESISTANCE MEASUREMENT OF STATIC DISSIPATIVE PLANAR MATERIALS.pdf

1、ANSI/ESD STM11.11-2015 Revision of ANSI/ESD STM11.11-2006 for the Protection of Electrostatic Discharge Susceptible Items Surface Resistance Measurement of Static Dissipative Planar Materials Electrostatic Discharge Association 7900 Turin Road, Bldg. 3 Rome, NY 13440-2069 An American National Standa

2、rd Approved July 8, 2015ANSI/ESD STM11.11-2015 ESD Association Standard Test Method for the Protection of Electrostatic Discharge Susceptible Items - Surface Resistance Measurement of Static Dissipative Planar Materials Approved May 17, 2013 EOS/ESD Association, Inc. ANSI/ESD STM11.11-2015 Electrost

3、atic Discharge Association (ESDA) standards and publications are designed to serve the public interest by eliminating misunderstandings between manufacturers and purchasers, facilitating the interchangeability and improvement of products and assisting the purchaser in selecting and obtaining the pro

4、per product for his particular needs. The existence of such standards and publications shall not in any respect preclude any member or non-member of the Association from manufacturing or selling products not conforming to such standards and publications. Nor shall the fact that a standard or publica

5、tion is published by the Association preclude its voluntary use by non-members of the Association whether the document is to be used either domestically or internationally. Recommended standards and publications are adopted by the ESDA in accordance with the ANSI Patent policy. Interpretation of ESD

6、A Standards: The interpretation of standards in-so-far as it may relate to a specific product or manufacturer is a proper matter for the individual company concerned and cannot be undertaken by any person acting for the ESDA. The ESDA Standards Chairman may make comments limited to an explanation or

7、 clarification of the technical language or provisions in a standard, but not related to its application to specific products and manufacturers. No other person is authorized to comment on behalf of the ESDA on any ESDA Standard. THE CONTENTS OF ESDAS STANDARDS AND PUBLICATIONS ARE PROVIDED “AS-IS,”

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11、OYEES OR OTHER REPRESENTATIVES WILL BE LIABLE FOR DAMAGES ARISING OUT OF, OR IN CONNECTION WITH, THE USE OR MISUSE OF ESDA STANDARDS OR PUBLICATIONS, EVEN IF ADVISED OF THE POSSIBILITY THEREOF. THIS IS A COMPREHENSIVE LIMITATION OF LIABILITY THAT APPLIES TO ALL DAMAGES OF ANY KIND, INCLUDING WITHOUT

12、 LIMITATION, LOSS OF DATA, INCOME OR PROFIT, LOSS OF OR DAMAGE TO PROPERTY AND CLAIMS OF THIRD PARTIES. Published by: Electrostatic Discharge Association 7900 Turin Road, Bldg. 3 Rome, NY 13440 Copyright 2015 by ESD Association All rights reserved No part of this publication may be reproduced in any

13、 form, in an electronic retrieval system or otherwise, without the prior written permission of the publisher. Printed in the United States of America ISBN: 1-58537-280-3 CAUTION NOTICE DISCLAIMER OF WARRANTIES DISCLAIMER OF GUARANTY LIMITATION ON ESDAs LIABILITY ANSI/ESD STM11.11-2015 i (This forewo

14、rd is not part of ESD Association standard test method ANSI/ESD STM11.11-2015) FOREWORD This standard test method1 was developed to fulfil a need to measure static dissipative planar materials not provided for by existing ASTM resistivity measurement methods. A static dissipative material, as define

15、d by the ESD Associations glossary of terms, may have volume or surface resistive characteristics, or both. This procedure is a resistance measurement on the surface of the material and is applied without regard to the samples mechanism of conduction. In cases where it is valid to convert resistance

16、 to resistivity, the resistivity values are a factor of ten higher than the resistance values obtained by this test method. This standard test method specifies test fixture configuration, environmental conditions, a systems verification procedure and the test voltages. This test method has been prov

17、en to be repeatable within one half-order of magnitude through inter-laboratory tests. This standard test method was originally designated EOS/ESD S11.11-1993 and approved on February 9, 1993. ANSI/ESD STM11.11-2001 was a reaffirmation of EOS/ESD S11.11-1993 and approved on May 20, 2001. ANSI/ESD ST

18、M11.11-2006 was a reaffirmation of ANSI/ESD STM11.11-2006 and approved on September 10, 2006. ANSI/ESD STM11.11-2015 is a revision of ANSI/ESD STM11.11-2006 and was approved on May 17, 2013. At the time ANSI/ESD STM11.11-2015 was prepared, the 11.0 Packaging Subcommittee had the following members: D

19、avid E. Swenson, Chair Affinity Static Control Consulting, LLC Kevin Duncan Seagate Technology Kurt Edwards Lubrizol Conductive Polymers Gene Felder Desco Industries, Inc. Reinhold Gaertner, TAS Rep Infineon Technologies AG Steve Gerken United States Air Force Doug Holtz Conductive Containers, Inc.

20、Gregory Manning NASA/ARES Technical Services Gene Monroe NASA - LARC Dale Parkin Seagate Technology Timothy Prass Raytheon Francisco Rodriguez 3M Jeff Salisbury Finisar Julius Turangan Ovation, Inc. Robert Vermillion RMV Technology Group, LLC Scott Ward Texas Instruments Stanley Weitz Electro-Tech S

21、ystems, Inc. Craig Zander Transforming Technologies 1 ESD Association Standard Test Method (STM): A definitive procedure for the identification, measurement and evaluation of one or more qualities, characteristics, or properties of a material, product, system, or process that yield a reproducible te

22、st results. ANSI/ESD STM11.11-2015 ii The following individuals made significant contributions to ANSI/ESD STM11.11-2015: Brent Beamer Meghan Hodge 3M At the time ANSI/ESD STM11.11-2006 was prepared, the 11.0 Packaging Subcommittee had the following members: Brent Beamer, Chairperson 3M Don Boehm Do

23、u Yee Enterprises Kurt Edwards Lubrizol Conductive Polymers Jay Hamlin Medtronic Rick Knight Elaine Olson Intel Corporation Dale Parkin Seagate Technology Timothy Prass Raytheon Jeff Salisbury Flextronics Julius Turangan Ovation, Inc. Robert Vermillion RMV Technology Group, LLC Stanley Weitz Electro

24、-Tech Systems, Inc. Craig Zander Prostat Corporation Thomas Yuan Heng Zhang Hyperion Catalysis International, Inc. At the time the EOS/ESD S11.11-1993 version was prepared, the 11.0 Packaging Subcommittee had the following members: Ronald J. Gibson, Chair IBM Canada Ltd. Vicky Ambuehl U.S. Air Force

25、 Brent Beamer Static Control Components, Inc. Roger Drain Web Technologies, Inc. Mary Fouts Seco Industries Inc. David Hines Cryovac John T. Kinnear Jr., TAC IBM Stephen Koehn 3M Company Howard Myers Motorola, GEG Robert Renninger AT&T Bell Labs Stan Weitz Electro-Tech Systems ESD DSTM11.11-2015 iii

26、 The following individuals made significant contributions to EOS/ESD S11.11-1993: Godfrey (Ben) Baumgartner Lockheed Steve Fowler OSI, Inc. Stephen Halperin SH&A Andrew Murello Harris Semiconductor David E. Swenson 3M Company Fred Tenzer Interpac Technologies Joel Weidendorf IBM ANSI/ESD STM11.11-20

27、15 iv TABLE OF CONTENTS 1.0 PURPOSE AND SCOPE . 1 1.1 PURPOSE . 1 1.2 SCOPE . 1 2.0 REFERENCED PUBLICATIONS 1 3.0 DEFINITION OF TERMS . 1 4.0 REPEATABILITY 1 5.0 PERSONNEL SAFETY . 1 6.0 GENERAL DISCUSSION 2 7.0 TEST EQUIPMENT . 2 7.1 ELECTRODE ASSEMBLY . 2 7.2 INSULATIVE SUPPORT SURFACE 3 7.3 INSTR

28、UMENTATION 3 7.4 SYSTEM VERIFICATION FIXTURES 3 7.4.1 Lower Resistance Range Fixture 3 7.4.2 Upper Resistance Range Fixture 3 8.0 SAMPLE PREPARATION AND CONDITIONING 3 9.0 LOWER RESISTANCE RANGE SYSTEM VERIFICATION PROCEDURE 4 10.0 UPPER RESISTANCE RANGE SYSTEM VERIFICATION PROCEDURE AND DETERMINATI

29、ON OF ELECTRIFICATION PERIOD 4 11.0 TESTING SPECIMENS . 4 12.0 REPORTING THE SURFACE RESISTANCE DATA . 5 13.0 CONVERSION TO RESISTIVITY . 5 ANNEXES Annex A (Informative): Use of 5 Pound Resistance Measurement Electrodes 9 Annex B (Informative): ANSI/ESD STM11.11-2015 Revision History 10 FIGURES Figu

30、re 1: Electrode Assembly and Hook-up . 6 Figure 2: Lower Resistance Range Verification Fixture . 7 Figure 3: Upper Resistance Range Verification Fixture . 8ESD Association Standard Test Method ANSI/ESD STM11.11-2015 1 ESD Association Standard Test Method for Protection of Electrostatic Discharge Sus

31、ceptible Items Surface Resistance Measurement of Static Dissipative Planar Materials 1.0 PURPOSE AND SCOPE 1.1 Purpose This standard test method provides a measurement procedure to determine the surface resistance of planar materials in the static dissipative range. 1.2 Scope This standard test meth

32、od describes a direct current measurement method that is used for the static dissipative resistance range of planar materials. This test method is not intended for electrically conductive or insulative materials. 2.0 REFERENCED PUBLICATIONS Unless otherwise specified, the following documents of the

33、latest issue, revision or amendment form a part of this standard test method to the extent specified herein: ESD ADV1.0, ESD Associations Glossary of Terms2 ASTM D257, Standard Test Method for D-C Resistance or Conductance of Insulating Materials3 3.0 DEFINITION OF TERMS The terms used in the body o

34、f this document are in accordance with the definitions found in ESD ADV1.0, ESD Associations Glossary of Terms available for complimentary download at www.esda.org. 4.0 REPEATABILITY This test method has been shown to have a repeatability of approximately one-half order of magnitude through inter-la

35、boratory tests. 5.0 PERSONNEL SAFETY THE PROCEDURES AND EQUIPMENT DESCRIBED IN THIS DOCUMENT MAY EXPOSE PERSONNEL TO HAZARDOUS ELECTRICAL CONDITIONS. USERS OF THIS DOCUMENT ARE RESPONSIBLE FOR SELECTING EQUIPMENT THAT COMPLIES WITH APPLICABLE LAWS, REGULATORY CODES, AND BOTH EXTERNAL AND INTERNAL PO

36、LICY. USERS ARE CAUTIONED THAT THIS DOCUMENT CANNOT REPLACE OR SUPERSEDE ANY REQUIREMENTS FOR PERSONNEL SAFETY. GROUND FAULT CIRCUIT INTERRUPTERS (GFCI) AND OTHER SAFETY PROTECTION SHOULD BE CONSIDERED WHEREVER PERSONNEL MIGHT COME INTO CONTACT WITH ELECTRICAL SOURCES. 2 EOS/ESD Association, Inc., 7

37、900 Turin Rd, Bldg. 3, Rome, NY 13440, 315-339-6937, www.esda.org 3 ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA, 19428-2959 USA, 215-299-5400 ANSI/ESD STM11.11-2015 2 ELECTRICAL HAZARD REDUCTION PRACTICES SHALL BE EXERCISED AND PROPER GROUNDING INSTRUCTIONS FOR EQUI

38、PMENT SHOULD BE FOLLOWED. THE RESISTANCE MEASUREMENTS OBTAINED THROUGH THE USE OF THIS TEST METHOD SHALL NOT BE USED TO DETERMINE THE RELATIVE SAFETY OF PERSONNEL EXPOSED TO HIGH AC OR DC VOLTAGES. 6.0 GENERAL DISCUSSION This procedure is recommended instead of ASTM D257 for measuring the surface re

39、sistance of static dissipative planar materials. A static dissipative material, as defined by ESD ADV1.0, may have volume or surface resistive characteristics, or both. This procedure is a resistance measurement on the surface of the material and is applied without regard to the samples mechanism of

40、 conduction. This standard test method consists of the following steps: - Sample preparation and conditioning. - Setup instrumentation including calibration of electrode assembly. - Determination of the systems electrification period. - Test procedure. - Documentation and reporting of data. NOTE: Su

41、rface resistance is a direct measurement on a materials surface. This measurement should not be confused with surface resistivity as previously employed in ASTM D257 references for insulative materials. 7.0 TEST EQUIPMENT The test equipment required for surface resistance measurements are described

42、below. 7.1 Electrode Assembly The electrode assembly consists of two concentric rings made of conductive materials which make contact with the material under test (see Figure 1). 7.1.1 The contact surface material of the electrode assembly shall be a conductive material having a hardness of 50 to 70

43、 on the Shore-A Durometer scale. 7.1.2 The conductive material shall have a volume resistivity of less than 10 ohm-cm. 7.1.3 The inner electrode shall be a solid disk, 30.48 0.64 mm (1.20 0.025 inches) in diameter. 7.1.4 The outer electrode shall be a ring having an inner diameter of 57.15 0.64 mm (

44、2.25 0.025 inches). The width of the outer ring shall be 3.180 0.254 mm (0.125 0.010 inches). 7.1.5 The total weight of the complete electrode assembly shall be 2.27 kg 56.7 grams (5 pounds 2 ounces). ANSI/ESD STM11.11-2015 3 7.2 Insulative Support Surface The material shall be tested on a smooth, f

45、lat insulative surface. Surface resistance of the support surface shall be greater than 1.0 x 1012 ohms when tested at 100 volts as described in this procedure. 7.3 Instrumentation The instrumentation may consist of either a power supply and an ammeter, or an integrated instrument that combines thes

46、e functions. 7.3.1 The instrument(s) voltage shall be 100 volts ( 5%) under load for measurements of 1.0x106 ohms and above, and 10 volts ( 5%) under load for measurements less than 1.0x106 ohms. 7.3.2 The instrumentation must be capable of making measurements from 1.0 x 103 to 1.0 x 1013 ohms. 7.4

47、System Verification Fixtures 7.4.1 Lower Resistance Range Fixture This fixture shall conform to the electrode assembly dimensions and have 20 individual pads which make contact with the inner electrode surface, and 20 individual pads which make contact with the outer electrode surface. The fixture s

48、hall consist of 20 each, 10 megohm, 1% resistors. Each resistor shall be individually connected between an inner and an outer pad (see Figure 2). 7.4.2 Upper Resistance Range Fixture This fixture shall conform to the electrode assembly dimensions and have metal surfaces or pads, which make contact w

49、ith the electrode surfaces. The fixture shall employ a single resistor of 1.0 x 1012 ohms ( 5 %) connected between the inner and the outer contact surfaces (see Figure 3). 8.0 SAMPLE PREPARATION AND CONDITIONING A. The samples shall not be handled or marked in the measurement area. B. A minimum of six representative samples of the material under test shall be prepared. C. The minimum sample size shall be at least 76 x 127 mm (3 x 5 inches). D. The sample surfaces must be clearly marked to identify the samples orientation (e.g., top, bottom, side A, side B,