ARMY MIL-HDBK-407 NOTICE 1-1984 CONTAMINATION CONTROL TECHNOLOGY PRECISION CLEANING METHODS AND PROCEDURES《污染控制技术的精确清洗方法和程序》.pdf

1、. f i f- -MIL-HDBK-407 3 1 JANUARY 1972 MILITARY STANDARDIZATIN HANDBOOK CONTAMINATION CONTROL TECHNQLOGY PRECISION CLEANING METHODS AND PROCEDURES 7 f Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-MIL-HDBK-407 Contamination Control Technology P

2、recision Cleaning Methods and Procedures 31 January 1972 1. This standardization handbook wasdeveloped by the US Army Missile Command in accordance with establ i shed procedure. 2. This publication was approved on 31 January 1972 for printing and inclusion in the military standardization handbook se

3、ries. 3. This document provides fundamental information on cleaning methods and procedures for use in precision cleaning of materials. The handbook is not intended to be referenced in its entirety for mandatory use in procurement speci fications except for informational purposes, Specific materials

4、may be specified. No criteria herein is intended to supersede any specification requirements. e 4, Every effort has been made to reflect the latest infomation availa- ble. It is the intent to review this handbook periodically to insure its completeness and currency. Users requests for changes and in

5、clusions in this handbook should be sent to: Commanding General US Army Missile Command Standardization Division Redstone Arsenal , Alabama 35809 AMSMI -RCS ii Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-MIL-HDBK-qO7 NOTICE I 36 = 7777770 OOqO

6、73b B MIL-HDBK-407 31 January 1971 FORWARD The purpose of this document was to establish general data for operational and performance characteristics in handbook form in accordance with Defense Standardization Manual 4120.3-M for use in contamination control technology. The information in this handb

7、ook was an accumulation of existing documents, Governmental, Technical Society, and DOD contractor data which after evaluation was considered pertinent to the state-of-the-art. Recomnended cleaning methods and procedures included are those used by military services and industry in gross and precisio

8、n cleaning of materials, parts, and assemblies being processed or assembled under control 1 ed environ- mental conditions. The most feasible sequence of application for each method or procedure in order to obtain maximum results during the precision cleaning cycles of categorized types of sensitive

9、mechanisms (or components) was considered in conjunction with the requirements of Mil-Std-1246A. a iii Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-MIL-HDBK-407 31 January 1972 SAFETY WARNING Adequate safety precautions should be taken when han

10、dling any chemical (solvent, cleaning material, etc.). Inhalation or direct contact with the skin should be avoided. Appropriate protective clothing (suits, gloves, masks, etc.) should be used at all times, while handling chemicals, or when working around them. Some chemicals present fire hazards, o

11、thers vary in toxicity, and others are asphyxiants. The Threshold Limit Values (TLV) or Maximum Allowable Concentration (MAC) is listed for most chemicals encountered in the clean room environ- ment. These are recomnended values only, and should be used as a guide, as some individuals are more sensi

12、tive to certain chemicals than others. When combinations of chemicals are used together or in proximity to each other the effects of the different hazards should be considered as additive. That is the sum of the following fractions. MIL-HDBK-qO7 NOTICE L 3b W 7777970 0040737 T W Cl, C2, and Cn = Con

13、centrations of the const Tl, Te, and T, = TLV Exam le. Assume that the air contains 15 ppm carbontetrachloride (TLV=25), trichloroethylene (TLV=200) y and 200 pprn methyl ethyl ketone (TLV=250) . Thus the accumulated threshold limit is exceeded. Note. More detailed information may be obtained from t

14、he Governmental Industrial Hygienists, 1014 Broadway, Cincinnati , Ohio -45202 or the Handbook of Toxicology, Vol. 1, Acute Toxicities, prepared by The National Academw - Research Council. iv i tuen ts Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,

15、-,-MIL-HDBK-407 NOTICE L 36 9999970 0040938 L W MIL-HDBK-407 NOTICE 1 20 January 1984 MILITARY HANDBOOK CONTAMINATION CONTROL TECHNOLOGY PRECISION CLEANING METHODS AND PROCEDURES TO ALL HOLDERS OF MIL-HDBK-407: “ . .1. THE FOLLOWING PAGES OF MIL-HDBK-407 HAVE BEEN RJIIISED AND SUPERSEDE THE PAGES LI

16、STED: NEW PAGE DATE SUPERSEDED PAGE -.c DATE 39 31 January 1972 REPRINTED WITHOUT CHANGE 40 20 January 1984 40 31 January 1372 41 20 January 1984 41 31 January 1972 42 31 January 1972 REPRINTED WITHOUT CHANGE 2. RETAIN THIS NOTICE AND INSERT BEFORE TABLE OF CONTENTS. 3. Holders of MIL-HDBK-407 will

17、verify that page changes and addit.ions indicated above have been entered. This notice page will be retained as a check sheet. This issuance, together with appended pages, is a separate publication. Eacn notice is to be retained by stocking points until the Military Handbook is completely revised or

18、 cancelled. Custodians: Amy-MI Navy-AS Air Force-99 Review Activities: Army- ER, AR, ME, AT Navy- SA, SH Air Force- 12, 13, 15, 16, 17, 19, 43, 84 User Activities: Defense Supply Center- GS, PS, ES Civil Agencies- JFK, MSF, FAA Preparing Activity : Army-MI (Project 36944032) FSC 3694 Provided by IHS

19、 Not for Resale No reproduction or networking permitted without license from IHS -,-,-NIL-HDBK-407 NOTICE I 36 7777770 0040739 3 MIL-HDBK-407 31 January 1972 (“ Scti on CONTENTS Page 1 Introduction . 1 1.1 Objective . 1 1.1.1 Purpose 1 1.1.2 Contaminant. 1 1.1 2.1 Effects . 1 1.1.3 Reason 1 1.2 Scop

20、e . 1 1.2.1 Contamination Control 1 1.2.2 Precision Cleaning . 2 1.3 Major Problem Areas . 2 1.3.1 Attitudes of Personnel and Management 2 1.3.2 Training of Clean Room Personnel . 2 Compati bi 1 i ty 2 1.4 Responsi bi 1 i ty . 2 1.5 References 3 1.3.3 Cleaning Solution to Material 2 Glossary of Term

21、s 5 2.1 Definitions . 5 2.2 References ; . 28 3 Abbrevi ations 33 3.1 Abbreviations Defined . 33 3.2 References 35 4 History of Contamination Control Technology 37 41 First Application . 37 4.1.1 War time Influence . 37 4.1.2 Earliest Clean Rooms . 37 4.1.3 Advancement by Industry 37 4.1.4 Imp1 i ca

22、tions of Techno1 ogi cal Advancements. 38 4.2 Cleanliness Standards . 38 4.2.1 Technical Order 00-25-203. . 38 4.2.2 Federal Standard 209. 38 4.2.2.1 Air Cleanliness Classes . 38 4.2.3 Mil-Std-1246 A . 39 4.2.4 NAS 1638 . 42 4.3 References 42 5 Contaminants Defined . 43 5.1 General Definition 43 5.1

23、.1 Pertaining to Contamination Control Technology . 43 5.1.1.1 Categories of Contamination., . 43 5.1.2 Earth Atmosphere . 43 5.1.3 Everyday Environmental Contamination . 43 5.1.4 Contaminant Sizes 43 5.1.5 Sources and Forms 44 V Provided by IHS Not for Resale No reproduction or networking permitted

24、 without license from IHS -,-,-MIL-HDBK“i07 NOTICE II 3b 7977970 O040940 T m MIL-HDBK-407 31 January 1972 Sect i on Page 5.2 Origin of Contaminants . 46 5,2.7 Control of Atmospheric Contamination 46 5.2.2 Control of Clean Room Contamination . 46 5.3 Transportation of Contaminants . 46 5.3.1 Fluids 4

25、6 5.3.2 Solids 46 5.3.3 Physical Contact Carriers . 46 5.3.4 Waves . 47 5.4 Contamination Retention 48 5.4.1 Comnon Mechanisms of Retention 48 5.5 References . 49 6 Contamination Control Through Product Design 51 6.1 Effect of Product Design on Contamination Control. . 51 6.2.2 Control of Manufactur

26、ing Environment., 51 6.2.3 Other Considerations 51 6.3 Specific Steps to Control Contamination 52 6.4 Checklist for Contamination Control Measures . 52 6.5 Factors which may Affect Contamination of a Product 53 6.5.1 Considerations . 53 6.5.2 Techniques for Control 53 6.5.3 Specific Methods., 53 6.6

27、 Performance Levels . 58 6.7 References . 59 6. 2 Methods of Contamination Control in Product Design . 51 6.2.1 Anticipate Effects of Contaminants 51 7 Corrosion . 61 7.1 Corrosion Defied 61 7.1.1 Chemical Corrosion 61 7.1.2 Electrochemical Corrosion. . 61 7.2 Effects of . Environment on Metals . 61

28、 7.2.7 Meta7 Properties., 67 7.2.2 Environment . 61 7.3 Mil-Std-1250 . 62 7.4 Corrosion Forms 62 7.4.7 Intergranular Corrosion . 62 7.4.2 Crevice Corrosion . 62 7.4.3 Stress Corrosion. . 62 7.4,4 Hydrogen Embrittlement., 63 7.4.5 Galvanic Corrosion 63 7.5 Other Contributors to Corrosion. . 63 7.5.1

29、Porous Castings. 63 7.5.2 Fungi and Bacteria 63 vi Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,- 7.6 7.7 7.8 7.9 MIL-HDBK-407 31 January 1972 Page Corrosion Prevention 7.6.1 Intergranular Corrosion 7.6.2 Crevice Corrosion 7.6.3 Stress Corrosion

30、 . 7.6.4 Hydrogen Embri ttlement . 7.6.5 Galvani c Corrosion . 7.6.6 Fungi 7.6.7 Metalic Coatings . 7.6.8 Material Choices . Methods of Corrosion Removal Corrosi on Gui de . 7.8.1 Reference Notes for Corrosion Guide Table XVI References 8 Clean Rooms and Work Stations . 8.1 8.2 i 8.3 Clean Room Trai

31、ning Program 8.1.1 Presentation of Training Program . 8.1.2 Basic Curriculum . 8.1.2.1 Simulated Clean Room 8.1.3 8.1.2.2 Management Training . 8.1.3 Specific Program . 8.1.4 Specialized Courses., 8.1.5 Testing Types of Clean Rooms 8.2.1 Conventional Flow Clean Room (Non-laminar Ai rf 1 ow) . 8.2.1.

32、1 Advantages 8.2.1.2 Disadvantages 8.2.2 Laminar Airflow Clean Room 8.2.2.1 Advantages . 8.2.2.2 Disadvantages 8.2.3 Vertical Laminar Airflow Clean 8.2.3.1 Advantages . 8.2.3.2 Di sadvantages Room 8.2.4 Horizontal Laminar i rfl ow Clean Room 8.2.4.1 Advantages 8.2.4.2 Disadvantages . 8.2.5 Horizonta

33、l Laminar Airflow Tunnel 8.2.5.1 Advantages 8.2.5.2 Disadvantages . Work Stations . 8.3.1 Verti cal Laminar Airflow Portable Curtain 8.3.1.1 Advantages 8.3.1.2 Di sadvantages . 8.3.2 Vertical Laminar Airflow Work Bench 8.3.2.1 Advantages 8.3.2.2 Disadvantages . 63 63 63 63 65 65 68 69 70 70 72 72 83

34、 85 85 85 85 85 85 85 86 87 87 87 87 88 88 89 89 89 90 90 91 92 92 92 93 94 94 95 95 95 96 97 97 97 vi i Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-MIL-HDBK-407 NOTICE I 36 W 9999970 0040942 3 MIL-HDBK-407 31 January 1972 Section Page 8.3.3 H

35、orizontal Laminar Airflow Work Bench . 98 8.3.3.1 Advantages. 98 8.3.3.2 Disadvantages 98 8.3.4 Balanced Laminar Airflow Hood . 99 8.3.4.1 Limitations 99 8.3.4.2 Functions 100 8.3.5 Non-Lami nar Airflow Work Bench 100 8.3.6 Fume Hoods 100 8.3.6.1 Standard Types . 100 8.3.6.2 Requirements for Operati

36、on . 101 8.4. References. 103 9 Clean Room Construction Features and Equipment . 105 9.1 Clean Room Construction Features . 105 9.1.1 Location 105 9.1.2 Construction Materials and Design Features 105 9.1.2.1 Wood . 105 9.1.2.2 Dry-Wal 1 Construction 105 9.1.2.3 Walls and Ceilings . 105 9.1 2.4 Floor

37、s., . 106 9.1.2.5 Plenums and Ducting 106 9.1.2.6 Air Inlets . 106 . 9.1.2.7 Airlocks . 106 9.1.2.8 Doors 107 9.1.2.9 Anterooms. . 107 9.2 Clean Room Furniture. 107 9.2.1 Chairs or Stools 107 9.2.2 Benches and Work SuPfaces . 108 9.3 Equipment 108 9.4 References., 108 10 Air Filters for Contaminatio

38、n Control Facilities 111 10.1 Characteristics of Filters Used in Clean Rooms. . 111 10.1.1 Method of Particle Entrapment. 111 10.1.2 Airflow . 111 10.1.3 Service Life 111 10.1.4 Resistance Increase . 111 10.1.5 Efficiency Rating . 112 10.2.1 Industrial Filters 113 10.2.2 Ventilation Fi1.ters . 113 1

39、0.2 Types of Air Filters 113 10.2.3 Intemediate Efficiency Filters . 113 10.2.4 High Efficiency Particulate Air (HEPA) Filters. . 114 10.3 Selecting Air Filters . 114 10.3.1 Factors to Consider . 114 10.3.2 Interrelated Factors 115 viii Provided by IHS Not for Resale No reproduction or networking pe

40、rmitted without license from IHS -,-,-MIL-HDBK-407 NOTICE Z 36 7777770 0040743 5 Section (” 10.4 10.5 10.3.3 10.3.4 compos (HEPA) 10.4.1 10.4.2 10.4.3 MIL-HDBK-407 31 January 1972 Page 115 115 115 116 116 116 116 117 117 117 117 117 118 118 118 119 119 119 120 121 123 123 123 123 123 123 123 123 124

41、 124 124 124 124 124 125 125 125 125 126 126 126 127 127 Procurement SDeci fi cation . Prefil tration . ition of High Efficiency Particulate Air Filter Efficiency Rating . Fragi 1 i ty of HEPA Fil ter Gasket Fitting, . 10.4.4 Effect of Changes in Air Pressure,. . 10.4.5 HEPA Fi 1 ters for Clean Room

42、s Ai r-Supply Conditioning . 10.5.1 Purpose . 10.5.2 Factors Influencing Air Condition Design 10 10 10 10 - 5.3 Special Considerations. . 5.4 Control of Airborne Contaminants,. 10.5.4.1 Removal of Particulate Matter . 10.5.4.2 Control of Gases and Vapors . 5.5 Section of Filters. 5.6 Filters for Rem

43、oval of Gaseous Contaminants . 1 O. 5.6.1 Sel ecti on of Absorbents. 10.5.6.1.1 Activated Charcoal 10.6 References. . 11 Temperature and Humidity in Clean ROM Facilities . 11.1 Factors Influencing Selection of Temperature and Humidity Limits 11.1.1 Location. . 11.1.2 Amount of Air . Faci 1 i ties 11

44、.1.3 Heat 11.2 Temperature Control . 11.2.1 Temperature Monitoring 1 1 .2.1.1 Nonrecordi ng Au tomated Equipment 11.2.1.2 Automated Recording Devices . 11.3 Humi di ty 11.3.1 Minimum Relative Humidity (RH) Values . 11.3.2 Humidity Monitoring . 11.4 References 11.1.2.1 Air Volume in Non-Laminar and L

45、aminar 12 Clean Room Garments. 12.1 Primary Purpose for Garmenting, . 12.2 Fabrics . 12.2.1 General Description of Some Synthetic Fabrics . 12 . 2.2 Combination Fabrics 12.3 Garment Construction 12.4 Soiling and Laundering 12.4.1 Anti-Static Treatment, 12.4.2 Fire-proofing . ix Provided by IHS Not f

46、or Resale No reproduction or networking permitted without license from IHS -,-,-L MIL-HDBK-407 NOTICE I 3b 7999.970 0040944 7 m MIL-HDBK-407 31 January 1972 Sec ti on Page 12.5 Available Garments 127 12.6 Garment Specification. 128 12.7 References 128 13 Airborne Contamination . 129 13.1 Natural Atm

47、ospheric Air . 129 13.1.1 Effect of Human Activities on Natural Air . 130 13.1.2 Airborne Contaminant 130 13.1.3 Natural and Foreign Airborne Contaminants 130 13.1.3.1 Natural Sources . 130 13.1.3.2 Man-made Sources 130 13.1.4 Saturation Potential 131 13.1.5 Air-Pollution Potential . 131 13.2 Classi

48、fication and Sources of Airborne Contaminants . 131 13.2.1 Contaminant Classification., 131 13.2.1.1 Organic Gases ! 132 13.2.1.2 Inorganic Gases . 132 13.2.1.3 Aerosols . 132 13.2.2 Contaminant Sources . 133 13.2.2.1 Petroleum Industry 133 13.2.2.2 Metallurgical Industry 133 13.2.2.3 Organic Solven

49、t Usage. 133 13.2.2.4 Mineral Processing 134 13.2.2.5 Motor Vehicles 134 13.2.2.6 Combustion Processes 134 13,2.2.7 Other Industry 135 13.2.2.8 Natural Environment . 135 73.3 Control Techniques for Atmospheric Air 137 Contaminants . a 137 13.3.1 Elimination . 137 13.3.2 Zoning. . 137 Techniques 137 13.4 Air Pollution Control Devices. 138 13.4.1 Aerosols 138 13.4.2