ASTM D2442-1975(2007) Standard Specification for Alumina Ceramics for Electrical and Electronic Applications《电气和电子设备用矾土陶瓷》.pdf

1、Designation: D 2442 75 (Reapproved 2007)Standard Specification forAlumina Ceramics for Electrical and ElectronicApplications1This standard is issued under the fixed designation D 2442; the number immediately following the designation indicates the year oforiginal adoption or, in the case of revision

2、, the year of last revision. A number in parentheses indicates the year of last reapproval. Asuperscript epsilon (e) indicates an editorial change since the last revision or reapproval.1. Scope1.1 This specification covers the requirements for fabricatedalumina parts suitable for electronic and elec

3、trical applicationsand ceramic-to-metal seals as used in electron devices. Thisstandard specifies limits and methods of test for electrical,mechanical, thermal, and general properties of the bodies usedfor these fabricated parts, regardless of part geometry.1.2 The values stated in SI units are to b

4、e regarded as thestandard. The values given in parentheses are for informationonly.2. Referenced Documents2.1 ASTM Standards:2C20 Test Methods for Apparent Porosity, Water Absorp-tion, Apparent Specific Gravity, and Bulk Density ofBurned Refractory Brick and Shapes by Boiling WaterC 108 Symbols for

5、Heat TransmissionC 242 Terminology of Ceramic Whitewares and RelatedProductsC 408 Test Method for Thermal Conductivity of WhitewareCeramicsC 573 Methods for Chemical Analysis of Fireclay andHigh-Alumina Refractories3C 623 Test Method for Youngs Modulus, Shear Modulus,and Poissons Ratio for Glass and

6、 Glass-Ceramics byResonanceD116 Test Methods for Vitrified Ceramic Materials forElectrical ApplicationsD 149 Test Method for Dielectric Breakdown Voltage andDielectric Strength of Solid Electrical Insulating Materialsat Commercial Power FrequenciesD 150 Test Methods for AC Loss Characteristics and P

7、er-mittivity (Dielectric Constant) of Solid Electrical Insula-tionD 257 Test Methods for DC Resistance or Conductance ofInsulating MaterialsD 618 Practice for Conditioning Plastics for TestingD 1711 Terminology Relating to Electrical InsulationD 1829 Test Method for Electrical Resistance of CeramicM

8、aterials at Elevated Temperatures3D 2149 Test Method for Permittivity (Dielectric Constant)And Dissipation Factor Of Solid Dielectrics At Frequen-cies To 10 MHz And Temperatures To 500CD 2520 Test Methods for Complex Permittivity (DielectricConstant) of Solid Electrical Insulating Materials at Mi-cr

9、owave Frequencies and Temperatures to 1650CE6 Terminology Relating to Methods of Mechanical Test-ingE12 Terminology Relating to Density and Specific Gravityof Solids, Liquids, and Gases3E 122 Practice for Calculating Sample Size to Estimate,With a Specified Tolerable Error, the Average for aCharacte

10、ristic of a Lot or ProcessE 165 Test Method for Liquid Penetrant ExaminationE 228 Test Method for Linear Thermal Expansion of SolidMaterials With a Push-Rod DilatometerF19 Test Method for Tension and Vacuum Testing Metal-lized Ceramic SealsF77 Test Method for Apparent Density of Ceramics forElectron

11、 Device and Semiconductor Application3F 109 Terminology Relating to Surface Imperfections onCeramicsF 134 Test Methods for Determining Hermeticity of Elec-tron Devices with a Helium Mass Spectrometer LeakDetector3F 417 Test Method for Flexural Strength (Modulus of Rup-ture) of Electronic-Grade Ceram

12、ics32.2 Other Standards:1This specification is under the jurisdiction of Committee C21 on CeramicWhitewares and Related Products and is the direct responsibility of SubcommitteeC21.03 on Methods for Whitewares and Environmental Concerns.This specification also includes material and suggestions provi

13、ded by ASTMCommittee D09 on Electrical and Electronic Insulating Materials.Current edition approved May 1, 2007. Published May 2007. Originallyapproved in 1965. Last previous edition approved in 2001 as D 2442 75(2001).2For referenced ASTM standards, visit the ASTM website, www.astm.org, orcontact A

14、STM Customer Service at serviceastm.org. For Annual Book of ASTMStandards volume information, refer to the standards Document Summary page onthe ASTM website.3Withdrawn.1Copyright ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.MIL-STD-105 Samp

15、ling Procedures and Tables for Inspec-tion by Attributes4MIL-STD-883 Test Methods and Procedures for Microelec-tronics5ANSI B46.1 Surface Texture63. Terminology3.1 Definitions:3.1.1 The applicable definitions of terms in the followingdocuments shall apply to this specification: Symbols C 108,and Def

16、initions C 242, D 1711, E6, E12, and F 109.4. Classification4.1 Ceramics covered by this specification shall be classi-fied by alumina content as follows:TypeAlumina ContentWeight percent, minI82II 93III 97IV 995. Basis of Purchase5.1 Purchase orders for ceramic parts furnished to thisspecification

17、shall include the following information:5.1.1 Type designation (see 3.1),5.1.2 Surface finish and allowable defect limits (if required)(Definitions F 109, ANSI B46.1, and Appendix X1),5.1.3 Part drawing with dimensional tolerances (AppendixX1),5.1.4 Specific tests (if required),5.1.5 Certification (

18、if required), and5.1.6 Packing and marking.6. Requirements6.1 This material shall conform to the electrical, mechani-cal, thermal, and general property requirements specified inTable 1, Table 2, Table 3, and Table 4.6.2 Dimensional and surface finish requirements of the partsshall be as agreed betwe

19、en the supplier and the purchaser;however, guidance for establishing such an agreement isprovided in Appendix X1.6.3 Visual Requirements:6.3.1 Parts shall be uniform in color and texture. Cracks,blisters, holes, porous areas, inclusions, and adherent foreignparticles shall not be permitted. The limi

20、ts of surface imper-fections such as pits, pocks, chips (open or closed), surfacemarks, fins, ridges, and flow lines shall be set by mutualagreement between the supplier and the purchaser. Limitingdimensions for these defects, when required for clarification,will be listed in the parts drawing or pu

21、rchase description. Fordefinitions of the surface imperfections enumerated above, seeDefinitions F 109.6.3.2 For hermetic seal applications at least34 of the widthof the seal surface shall remain intact at the location of anydefect.6.3.3 On other surfaces the limits for defects are such thatthe dime

22、nsional tolerances of the part are not affected at thelocation of the defect.7. Test Specimens7.1 The preferred specimens for test are, where possible, theactual part. When necessary, however, specific test specimensshall be prepared from the same batch of material and by thesame processes as those

23、employed in fabricating the ceramicpart insofar as possible.8. Specimen Preparation8.1 The specimens for tests described in 9.1-9.3 shall bepreconditioned in accordance with Procedure A of Test Meth-ods D 618.9. Test Methods9.1 Dielectric Constant and Dissipation FactorDetermine in accordance with T

24、est Methods D 150. Determinevalues at higher frequencies in accordance with Test MethodsD 2520.7Determine values at higher temperatures in accor-dance with Test Method D 2149.4Available from the Superintendent of Documents, Government Printing Office,Washington, D.C. 20402.5Available from Standardiz

25、ation Documents Order Desk, Bldg. 4 Section D, 700Robbins Ave., Philadelphia, PA 19111-5094, Attn: NPODS.6Available from American National Standards Institute (ANSI), 25 W. 43rd St.,4th Floor, New York, NY 10036, http:/www.ansi.org7For another suitable method see Dielectric Materials and Application

26、s, editedby Von Hippel, A., John Wiley and Sons, Inc., New York, N.Y., 1954.TABLE 1 Electrical RequirementsProperty Type I Type II Type III Type IVDielectric constant,max 25C:at 1 MHzat 10 GHz8.88.79.69.69.89.810.110.1Dissipation factor,max 25C:at 1 MHzat 10 GHzVolume resistivity,min Vcm:0.0020.0020

27、.0010.0010.00050.00050.00020.0002at 25C 1014101410141014at 300C 1 3 10101 3 10101 3 10107 3 1010at 500C 4 3 1072 3 1078 3 1071 3 108at 700C 4 3 1062 3 1066 3 1061 3 107at 900C 4 3 1052 3 1058 3 1051 3 106Dielectricstrength:3.175 mm(0.125 in.)min kV/mm9.85(250 V/mil)9.85(250 V/mil)9.85(250 V/mil)9.85

28、(250 V/mil)TABLE 2 Mechanical RequirementsProperty Type I Type II Type III Type IVFlexural strength,min avg,AMPa (psi)240(35 000)275(40 000)275(40 000)275(40 000)Modulus ofelasticity, min,GPa (psi)215(31 3 106)275(40 3 106)310(45 3 106)345(50 3 106)Poissons ratio,average0.20 to 0.25 0.20 to 0.25 0.2

29、0 to 0.25 0.20 to 0.25AMaximum permissible coefficient of variation is 10 percent.D 2442 75 (2007)29.2 Volume ResistivityDetermine in accordance with TestMethods D 257. For elevated temperature measurements useProcedure A of Test Method D 1829.9.3 Dielectric StrengthRun this test under oil in accor-

30、dance with 6.1.1 of Test Methods D 149, with a rise rate of1000 V/s on a 3.175-mm (0.125-in.) thick test specimen.9.4 Flexural StrengthDetermine in accordance with TestMethod F 417 or Methods D116. Somewhat lower values willresult if Methods D116are used. The method to be used shallbe agreed upon be

31、tween the supplier and the purchaser.9.5 Modulus of Elasticity and Poissons RatioDeterminein accordance with Test Method C 623.9.6 Thermal ExpansionDetermine in accordance withTest Method E 228.9.7 Thermal ConductivityDetermine in accordance withTest Method C 408. For temperatures in excess of 149 C

32、 (300F), use a suitable method.89.8 Thermal Shock ResistanceThis test is to be agreedupon between supplier and purchaser. It is suggested that thecold end of the cycle be ice water at 0C. Methods of heatingand conditions at elevated temperatures shall be negotiated.The transfer from one temperature

33、extreme to another shall beimmediate.9.9 Temperature DeformationDetermine deformation at1500C in accordance with Appendix X2.9.10 Apparent DensityDetermine in accordance with TestMethod F77. For large ceramic parts not covered by thismethod, determine in accordance with Test Methods C20.9.11 Composi

34、tional AnalysisUse either quantitative emis-sion spectrographic analysis of the fired ceramic with aluminacontent determined by difference or Methods C 573 afterassuming that all determined metallic and reactive elementsoriginally are present as their highest form of oxide.9.12 Gas ImpermeabilityWhe

35、n air fired at 900C for 30min and handled with tweezers only, then tested on a heliummass spectrometer leak detector capable of detecting a leak of109atmcm3/s, the ceramic is considered impermeable if aspecimen 0.254 mm (0.010 in.) thick shows no indication ofhelium leakage when an area of 322.6 mm2

36、(0.5 in.2) is testedfor 15 s at room temperature (Method 1014, Seal, of MIL-STD-883 and Test Methods F 134).9.13 Liquid ImpermeabilityDetermine in accordance withMethods D116.9.14 Surface ImperfectionsExamine visually for surfaceimperfections with or without the aid of a dye penetrant as inPractice

37、E 165.Agreement by purchaser and supplier regardingspecific techniques is strongly recommended.9.15 Surface FinishIf surface finish is specified, it shallbe determined by any appropriate method agreed upon bypurchaser and supplier.8For a suitable method see Francl, J., and Kingery, W. D., “An Appara

38、tus forDetermining Conductivity by a Comparative Method,” Journal of the AmericanCeramic Society, JACTA Vol 37, 1954, p. 80.TABLE 3 Thermal RequirementsPropertyType I Type II Type III Type IVmin max min max min max min maxMean coefficient of linear thermalexpansion, m/mC:25200C 5.4 6.2 5.2 6.7 5.2 6

39、.5 5.5 6.725500C 6.5 7.0 6.6 7.4 6.7 7.5 6.8 7.625800C 7.0 7.7 7.3 8.1 7.4 8.1 7.3 8.1251000C 7.4 8.2 7.5 8.3 7.6 8.3 7.5 8.4Thermal conductivity, cal/scmC:at 100C 0.023 0.049 0.031 0.077 0.048 0.073 0.052 0.090at 400C 0.015 0.022 0.014 0.036 0.022 0.033 0.023 0.047at 800C 0.009 0.018 0.009 0.021 0.

40、014 0.021 0.014 0.025Thermal shock resistance pass pass pass passMaximal deformation at 1500C . . 0.51 mm(0.02 in.)0.51 mm(0.02 in.)TABLE 4 General RequirementsAPropertyTypeI II III IVDensity, apparent minBg/cm33.37 3.57 3.72 3.78Composition, minweight percent82 93 97 99Gas Impermeability gas tightL

41、iquid Impermeability passMetallizabilityACAVendors shall, upon request, provide information on these properties as wellas a visual standard of a typical microstructure of their specific ceramic bodydepicting its grain size and pore volume. Changes in microstructure of the ceramicare not acceptable a

42、s they can affect the behavior of the ceramic toward ametallizing process.BThe apparent density of a ceramic body is a function of the amount and thedensity of the primary Al2O3phase and the secondary phase plus the amount ofpores inherent to that body. The acceptable density limits for a specific a

43、luminabody must be consistent with the composition and the pore volume of the ceramicsupplied by supplier and shall be agreed upon between the purchaser and thesupplier. Variation in the apparent density of a specific ceramic body shall be within61 percent of the nominal value.CGenerally, very high

44、alumina content results in increased difficulty of metalliz-ing; however, variations in metallizing compositions and techniques can produceexcellent seals in all four types of alumina ceramics. Because of a wide variationin materials and techniques, no specific test is recommended. A referee test fo

45、rseal strength is Method F19.D 2442 75 (2007)310. Inspection10.1 When agreed upon between the manufacturer and thepurchaser, the purchaser may inspect the ceramic parts andverify the test results at the manufacturers facility. Otherwisethe purchaser shall inspect and test the ceramic parts within on

46、emonth of the date of receipt by the purchaser or at such othertimes as may be agreed upon between the purchaser and themanufacturer.10.2 When agreed upon between the manufacturer and thepurchaser, the manufacturer shall supply, prior to fabrication,duplicate test specimens to the purchaser for his

47、testingpurposes. These specimens shall be identical with those testedby the manufacturer, insofar as it is possible.11. Lot Acceptance Procedure11.1 Unless otherwise specified Practice E 122 shall beused. When so specified, appropriate sample sizes shall beselected from each lot according to MIL-STD

48、-105. Eachquality characteristic shall be assigned an AQL value inaccordance with MIL-STD-105 definition for critical, major,and minor classifications. Inspection levels shall be agreedupon between the supplier and the purchaser.12. Certification12.1 Any test results requiring certification shall be

49、 explic-itly agreed upon, in writing, between the purchaser and themanufacturer.13. Packing and Marking13.1 Special packing techniques shall be subject to agree-ment between the purchaser and the manufacturer. Otherwiseall parts shall be handled, inspected, and packed in such amanner as to avoid chipping, scratches, and contamination, andin accordance with the best practices to provide ample protec-tion against damage during shipment.13.2 The ceramics furnished under this specification shallbe identified by the name or symbol f