ASTM E1504-2006 Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)《次级离子质谱法(SIMS)中质谱数据报告的标准实施规程》.pdf

1、Designation: E 1504 06Standard Practice forReporting Mass Spectral Data in Secondary Ion MassSpectrometry (SIMS)1This standard is issued under the fixed designation E 1504; the number immediately following the designation indicates the year oforiginal adoption or, in the case of revision, the year o

2、f last revision. A number in parentheses indicates the year of last reapproval. Asuperscript epsilon (e) indicates an editorial change since the last revision or reapproval.1. Scope1.1 This practice provides the minimum information neces-sary to describe the instrumental, experimental, and datareduc

3、tion procedures used in acquiring and reporting second-ary ion mass spectrometry (SIMS) mass spectral data.1.2 This standard does not purport to address all of thesafety concerns, if any, associated with its use. It is theresponsibility of the user of this standard to establish appro-priate safety a

4、nd health practices and determine the applica-bility of regulatory limitations prior to use.2. Referenced Documents2.1 ASTM Standards:2E 673 Terminology Relating to Surface Analysis3. Terminology3.1 DefinitionsFor definitions of terms used in this prac-tice, refer to Terminology E 673.4. Summary of

5、Practice4.1 Experimental conditions and reporting procedures thataffect SIMS mass spectral data are presented in order tostandardize the reporting of such data to facilitate comparisonswith other laboratories and analytical techniques.5. Significance and Use5.1 This practice is intended for use in r

6、eporting theexperimental and data reduction procedures described in otherpublications.6. Information to be Reported6.1 Instrumentation:6.1.1 If a standard commercial SIMS instrument is used,specify the manufacturer, model number, and type of analyzerused. Specify the manufacturer and model number of

7、 anyaccessory or auxiliary equipment that would affect the datacontained within the mass spectrum (for example, additionalvacuum pumping attachments, primary ion mass filter, primaryion sources, electron flood guns, etc.). If any nonstandardmodification has been made to the instrumentation, describe

8、the modification in detail.6.1.2 If a noncommercial SIMS system is used, specify thecomponents composing the system (for example, ion gun,pumping system, vacuum chamber, and mass filter). Specifythe manufacturer and model number if the components are ofcommercial origin. If the components are home-b

9、uilt, specifythem in such detail that their potential effect on the obtainedmass spectrum may be deduced by an individual experiencedin SIMS and vacuum technology.6.2 SpecimenDescribe the specimen in as much detail aspossible. Such factors would include, but are not limited to,sample preparation and

10、 handling, sample history, bulk andtrace composition, physical dimensions, sample homogeneity,crystallinity, and any preanalysis cleaning procedure used.Describe in detail the method of sample mounting. Describeany conductive coating or grids placed on the sample forcharge compensation. If a subsrat

11、e is used, include substratecomposition, purity, and any methods of cleaning.6.3 Experimental Conditions:6.3.1 Primary Ion Source and Ion Optical ColumnIf acommercial ion source is being used, then the manufacturerand model number should be specified. If the ion source is acustom design, the it shou

12、ld be described in detail andappropriate literature references given, if applicable. Thespecies extracted from the ion source must be specified. If thePrimary Ion Column provides mass filtering, then the selectedmass-filer species must be specified. If there is no mass-filtering, then the purity of

13、the material used for ion productionmust be specified. State the ion energy and the impact energyof the primary beam. State the angle of incidence of theprimary ion beam with respect to the surface normal of thesample as well as the ion current (and the method by which thisis measured). State whethe

14、r the ion beam is rastered and the1This practice is under the jurisdiction of ASTM Committee E42 on SurfaceAnalysis and is the direct responsibility of Subcommittee E42.06 on SIMS.Current edition approved Nov. 1, 2006. Published November 2006. Originallyapproved in 1992. Last previous edition approv

15、ed in 2001 as E 1504 92 (2001).2For referenced ASTM standards, visit the ASTM website, www.astm.org, orcontact ASTM Customer Service at serviceastm.org. For Annual Book of ASTMStandards volume information, refer to the standards Document Summary page onthe ASTM website.1Copyright ASTM International,

16、 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.dwell time, the spot size, and the total irradiated area. Specifythe primary ion dose (ions-m2) that was sued to obtain thespectrum. If the primary ion beam is modulated (that is,Time-of-Flight SIMS), details of the

17、 modulation should bedescribed (pulse width, repetition rate, extent of beam bunch-ing, and so forth). In addition, any special alignment or tuningof the primary column should be specified or referenced.6.3.2 Secondary Ion Mass SpectrometerSpecify the areaof the sample from which the ions were colle

18、cted. Specifywhether any electronic gating methods were used, the param-eters of the gating, and how the gating method affects thespectrum (such as, for special selection as in a Time-of-Flightspectrometer or raster-gating). Specify the conditions of themass spectrometer, such as, but not limited to

19、, collection angle,energy-filtering parameters, reflectron voltages, pulsing condi-tions, the use of collimation or beam-defining apertures andslits, post-acceleration voltages, and so forth. If appropriate,state how the condition influenced the mass spectral data (thatis, energy filtering to reduce

20、 polyatomic ion species). If chargecompensation is used, describe the type of system used and theparameters of the system. If an electron flood gun is used, thenthe current or dose (electrons/m2) should be specified. Specifyand describe the type of secondary ion detection system used(such as, Farada

21、y Cup, pulse-counting electron multiplier,pulse counting channel plate, and so forth).6.3.3 Mass Spectral BackgroundSpecify the pressure inthe primary ion column, specimen chamber, and mass spec-trometer prior to sample introduction and during analysis.Specify the type of vacuum pumping in each sect

22、ion of theinstrument. Describe any significant or unusual contaminants,if known. Provide the composition of any reactive gas used forsample flooding,3along with the method used to determine thepartial pressure of the reactive gas.6.4 Results:6.4.1 Display of Mass Spectral DataThe vertical axis of aS

23、IMS mass spectral display gives the secondary ion intensity inunits of either counts/s, total integrated counts (specify whetherthe integration is over total spectra acquired or time), orpercent of the most intense peak displayed in the spectrum. Thehorizontal axis should display the mass/charge rat

24、io. Anycorrections (such as for dead time, or background subtraction)applied to the spectrum must be stated.46.4.2 CalibrationSpecify the method used to establish themass scale, especially the number of calibration points usedand the form of any algorithm used.6.4.3 Mass ResolutionSpecify the mass r

25、esolution of themass spectrometer. This should be calculated as M/DM, whereDM is the full width at half maximum intensity for an ion peakat mass M. Because many mass spectrometers vary in massresolution over their mass range, specify both the DM and Mvalues used to calculate the specified mass resol

26、ution.7. Keywords7.1 mass spectral data; SIMSASTM International takes no position respecting the validity of any patent rights asserted in connection with any item mentionedin this standard. Users of this standard are expressly advised that determination of the validity of any such patent rights, an

27、d the riskof infringement of such rights, are entirely their own responsibility.This standard is subject to revision at any time by the responsible technical committee and must be reviewed every five years andif not revised, either reapproved or withdrawn. Your comments are invited either for revisi

28、on of this standard or for additional standardsand should be addressed to ASTM International Headquarters. Your comments will receive careful consideration at a meeting of theresponsible technical committee, which you may attend. If you feel that your comments have not received a fair hearing you sh

29、ouldmake your views known to the ASTM Committee on Standards, at the address shown below.This standard is copyrighted by ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959,United States. Individual reprints (single or multiple copies) of this standard may be obt

30、ained by contacting ASTM at the aboveaddress or at 610-832-9585 (phone), 610-832-9555 (fax), or serviceastm.org (e-mail); or through the ASTM website(www.astm.org).3Bernheim, M. and Slodzian, G., “Effect of Oxygen on the Sputtering ofAluminum Targets Bombarded with Argon Ions”, International Journal of MassSpectrometry and Ion Physics, Vol 12, 1973, p. 93.4Hues, S. M., Colton, R. J., Wyatt, J. R., and Schultz, J. A., “A Pulsed Alkali-IonGun for Time-of-Flight Secondary Ion Mass Spectrometry”, Review of ScientificInstruments, Vol 60, 1989, p. 1239.E1504062