ASTM E2042 E2042M-2009 Standard Practice for Cleaning and Maintaining Controlled Areas and Clean Rooms《可控区域和清洁室的清洁和维护的标准实施规程》.pdf

1、Designation: E 2042/E 2042M 09Standard Practice forCleaning and Maintaining Controlled Areas and CleanRooms1This standard is issued under the fixed designation E 2042/E 2042M; the number immediately following the designation indicates theyear of original adoption or, in the case of revision, the yea

2、r of last revision. A number in parentheses indicates the year of lastreapproval. A superscript epsilon () indicates an editorial change since the last revision or reapproval.1. Scope1.1 This practice covers the procedures to be followed forthe initial cleaning and normal maintenance of cleanrooms a

3、ndcontrolled areas. This practice is applicable to aerospace cleanareas where both particles and molecular films (NVR) must becontrolled.1.2 UnitsThe values stated in either SI units or inch-pound units are to be regarded separately as standard. Thevalues stated in each system may not be exact equiv

4、alents;therefore, each system shall be used independently of the other.Combining values from the two systems may result in non-conformance with the standard.1.3 This standard does not purport to address all of thesafety concerns, if any, associated with its use. It is theresponsibility of the user o

5、f this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.2. Referenced Documents2.1 ASTM Standards:2D 1193 Specification for Reagent WaterE 1234 Practice for Handling, Transporting, and InstallingNonvolatile Residue

6、 (NVR) Sample Plates Used in Envi-ronmentally Controlled Areas for SpacecraftE 1235 Test Method for Gravimetric Determination of Non-volatile Residue (NVR) in Environmentally ControlledAreas for SpacecraftE 1549 Specification for ESD Controlled Garments Re-quired in Cleanrooms and Controlled Environ

7、ments forSpacecraft for Non-Hazardous and Hazardous OperationsE 1560 Test Method for Gravimetric Determination of Non-volatile Residue From Cleanroom WipersE 2352 Practice for Aerospace Cleanrooms and AssociatedControlled EnvironmentsCleanroom OperationsF24 Test Method for Measuring and Counting Par

8、ticulateContamination on SurfacesF25 Test Method for Sizing and Counting Airborne Par-ticulate Contamination in Cleanrooms and Other Dust-Controlled AreasF50 Practice for Continuous Sizing and Counting of Air-borne Particles in Dust-Controlled Areas and Clean RoomsUsing Instruments Capable of Detect

9、ing Single Sub-Micrometre and Larger Particles2.2 IEST Standards:3IEST-RP-CC007 Testing ULPA FiltersIEST-RP-CC016 The Rate of Deposition of NonvolatileResidue in CleanroomsIEST-RP-CC0018 Cleanroom Housekeeping and Monitor-ing ProceduresIEST-RP-CC003 Garment System Considerations forCleanrooms and Ot

10、her Controlled EnvironmentsIEST-RP-CC026 Cleanroom OperationsIEST-STD-CC1246D Product Cleanliness Levels and Con-tamination Control Program42.3 US Federal Standards:5FED-STD-209E Airborne Particulate Cleanliness Classes inCleanrooms and Clean Zones6TT-I-735 Isopropyl AlcoholO-A-51 Acetone52.4 US Dep

11、artment of Defense Standards:5MIL-D-16791 Detergents, General Purpose (Liquid, Non-Ionic)2.5 International Standards:7ISO 14644-1 Cleanrooms and Associated ControlledEnvironmentsPart 1: Classification of Air CleanlinessISO 14644-2 Cleanrooms and Associated Controlled1This practice is under the juris

12、diction of ASTM Committee E21 on SpaceSimulation and Applications of Space Technology and is the direct responsibility ofSubcommittee E21.05 on Contamination.Current edition approved April 1, 2009. Published April 2009. Originallyapproved in 1999. Last previous edition approved in 2004 as E 2042 04.

13、2For referenced ASTM standards, visit the ASTM website, www.astm.org, orcontact ASTM Customer Service at serviceastm.org. For Annual Book of ASTMStandards volume information, refer to the standards Document Summary page onthe ASTM website.3Available from Institute of Environmental Science and Techno

14、logy (IEST),5005 Newport Dr., Suite 506, Rolling Meadows, IL 60008-3841.4IEST-STD-CC1246D replaced MIL-STD-1246.5Available from Superintendent of Documents, US Government Printing Office,Washington, DC 20402.6Cancelled Nov. 29, 2001 and replaced with ISO 14644-1 and 14644-2.FED-STD-209E may be used

15、by mutual agreement between buyer and seller.Available from U.S. Government Printing Office, Superintendent of Documents,732 N. Capitol St., NW, Mail Stop: SDE, Washington, DC 20401. FS209Ecleanroom classes are given for reference in parentheses after the ISO classes.7Available from International Or

16、ganization for Standardization (ISO), 1 rue deVaremb, Case postale 56, CH-1211, Geneva 20, Switzerland.1Copyright ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.EnvironmentsPart 2: Specifications for Testing andMonitoring to Prove Continued Co

17、mpliance withISO 14644-13. Terminology3.1 Definitions of Terms Specific to This Standard:3.1.1 clean zone, na defined space in which the concen-tration of airborne particles is controlled to specified limits.3.1.2 cleanroom, na room in which the air filtration, airdistribution, utilities, materials

18、of construction, equipment, andoperating procedures are specified and regulated to controlairborne particle concentrations to meet appropriate airborneparticulate cleanliness classifications, as defined byISO 14644-1.3.1.3 cleanroom, as-built, na cleanroom that is completeand ready for operation, wi

19、th all services connected andfunctional, but without equipment or operating personnel in theroom.3.1.4 cleanroom, at-rest, na cleanroom that is complete,with all services functioning and with equipment installed andoperable or operating, as specified, but without operatingpersonnel in the room.3.1.5

20、 cleanroom, operational, na cleanroom in normaloperation, with all services functioning and with equipmentand personnel, if applicable, present and performing theirnormal work functions in the room.3.1.6 clean facility, nthe total real property required toaccomplish the cleanroom functions.3.1.6.1 D

21、iscussionIn addition to the cleanroom and asso-ciated clean areas, this includes utility rooms, storage areas,offices, lockers, wash-rooms, and other areas that do notnecessarily require precise environmental control.3.1.7 controlled area, nan environmentally controlledarea, operated as a cleanroom,

22、 but without the final stage ofHEPA filters. Controlled areas would meet ISO Class 8.5(FED-STD-209E equivalent to Class 300 000) per Table 1.3.1.7.1 DiscussionOnly rough filters (50 to 60 % effi-ciency) and medium efficiency filters (80 to 85 % efficiency)are required for a controlled area. The maxi

23、mum allowableairborne particle concentrations in a controlled area are11 100 000/m3per ISO Class 8.5 for particles $0.5 m and 92500/m3(2620 particles/ft3per Class 300 000/ft3(FED-STD-209E) for particles $5.0 m.3.1.8 DI water, ndeionized water (see SpecificationD 1193).3.1.9 discrete-particle counter

24、 (DPC), nan instrument,such as an optical particle counter or condensation nucleuscounter, capable of resolving responses from individual par-ticles.3.1.10 HEPA filter, n(high-efficiency particulate air filter)a throwaway, extended-medium, dry-type filter in a rigidframe, having a minimum particle-c

25、ollection efficiency of99.97 % (that is, a maximum particle penetration of 0.03 %)for 0.3-m particles of thermally generated DOP of specifiedalternative aerosol.3.1.11 HVAC, nheating, ventilating, and air conditioning.3.1.12 nonvolatile residue (NVR), nmatter remaining aftersolvent containing such m

26、atter has been evaporated or cleaned.3.1.13 ULPA filter, n(ultra-low-penetration air filter) athrowaway, extended-medium, dry-type filter in a rigid frame,having a minimum particle-collection efficiency of 99.999 %(that is, a maximum particle penetration of 0.001 %) forparticles in the size range of

27、 0.1 to 0.2 m, when tested inaccordance with the methods of IES-RP-CC007.1.TABLE 1 Comparison of ISO 14644-1 and FED-STD-209E Cleanliness ClassesISO Class NNominal FS209E ClassParticle ConcentrationsMaximum Number of Particles per Cubic Meter / Cubic Footof Air for Particle Sizes Equal to or Greater

28、 than the Stated Size0.1 m 0.2 m 0.3 m 0.5 m 1 mA5mISO Class 1 10 2 ISO Class 2 100 24 10 4 FS209E Class 0.1 3 1 ISO Class 3 1000 237 102 35 8 FS209E Class 1 35 7 3 1 ISO Class 4 10 000 2370 1020 352 83 FS209E Class 10 350 75 30 10 2 ISO Class 5 100 000 23 700 10 200 3520 832 29FS209E Class 100 3500

29、B750 300 100 24 ISO Class 6 1 000 000 237 000 102 000 35 200 8320 293FS209E Class 1000 35 000B7500B3000B1000 236 7ISO Class 6.7C 176 000 41 700 1470FS209E Class 5000B 5000 1180 42ISO Class 7 352 000 83 200 2930FS209E Class 10 000 10 000 2360 70ISO Class 8 3 520 000 832 000 29 300FS209E Class 100 000

30、 100 000 23 600 700ISO Class 8.5C 11 100 000 2 630 000 92 500FS209E Class 300 000D 300 000 74 500 2620ISO Class 9 35 200 000 8 320 000 293 000FS209E Class 1 000 000D 1 000 000 236 000 8280ANo 1 m designation is listed in FS209E Table 1 for particulate classes. The values shown are equivalents of the

31、 ISO values.BThese values were not directly listed in FS209E. Allowances are made in FS209E for intermediate classes and associated calculations have been shown. If used, anotation should be made indicating that they have been derived.CISO 14644-1 does not include Class 6.7 or 8.5. The values shown

32、are equivalent to those derived for FED-STD-209E Class 5000 and 300 000.DFS209E does not include Class 300 000 and 1 000 000. The values shown are equivalents of the ISO values for ISO Class 8.5 and 9.E 2042/E 2042M 0924. Significance and Use4.1 This practice identifies methods for cleaning and main

33、-taining controlled areas and clean rooms as defined byISO 14644-1 and ISO 14644-2. Cleaning procedures are de-scribed, and cleaning frequency for different classes of facilityare given. Compliance with this practice will make it easier andmore likely that the required level of facility cleanliness

34、will bemaintained. A cleaner facility also will help to protect flighthardware from contamination and should reduce the frequencyfor cleaning flight hardware. This practice does not discussoperation and operational procedures for cleanrooms andcontrolled areas. Other documents such as IEST-RP-CC026a

35、nd Practice E 2352 provide recommended practices for oper-ating cleanrooms and controlled areas.5. Cleanrooms and Clean Zones5.1 Airborne Particle ConcentrationsThe types of clean-rooms and clean zones used in this practice are based onairflow, air filtration, and airborne particle concentration lim

36、its.The classification of airborne particle concentration limits incleanrooms, clean zones, and controlled areas are defined inTable 1 which is based on ISO 14644-1 and ISO 14644-2.Airflow Air Filtration Typical AirborneParticleConcentrationLimits UnderOperationalConditionsIn AccordanceWithISO 14644

37、-1Type I Unidirectional, formerlyknown as 9laminarflow9HEPA or ULPAfiltered withprefiltersClasses less than 7(Classes lessthan 10 000 perFED-STD-209E)Type II Nonunidirectional,formerly known as“turbulent” flowHEPA filtered withprefiltersClasses 7 to 8.5(Classes 10 000 to300 000 per FED-STD-209E)Type

38、 III Nonunidirectional without HEPA orULPA filters butwith prefiltersClasses 8 to 8.5(Classes 100 000to 300 000 per FED-STD-209E)5.2 NVR ConcentrationsThere are two categories forNVR requirements in clean areas:5.2.1 Category ICritical clean areas that require specificcontrol and removal of molecula

39、r contaminants because ofproducts that either are very sensitive to NVR or can not becleaned. Quantitative NVR measurements may be required asdefined in IEST-STD-CC1246D and IES-RP-CC016. NVRdeposition criteria are defined in Tables 2 and 3.5.2.2 Category IIStandard clean areas that do not requirequ

40、antitative measurements of NVR. All aerospace clean facili-ties, including support shops for the fabrication of componentsfor aerospace hardware, must limit the deposition of nonvola-tile residue (NVR), also known as molecular films. Thecleaning supplies recommended in this practice are selected for

41、the minimal production of NVR.5.2.2.1 Some clean areas require very low levels of NVR tobe compatible with product cleanliness requirements. Theseareas require cleaning methods that will remove NVR. Theuser will state when Category I is required and alowable levelsof NVR on surfaces, that is, NVR le

42、vel in accordance withIEST-STD-CC1246D (g/cm2or mg/0.1 m2). Category II isassumed unless Category I is expressly specified.5.2.3 NVR VerificationMeasurement of NVR in cleanfacilities may be done in accordance with Practice E 1234 andTest Method E 1235 or other methods that are compatible withthe pro

43、duct requirements and types of NVR. Typical NVRcompounds that are found in cleanrooms include hydrocar-bons, esters, and silicones.6. Materials Used6.1 Wipers, Cleanroom, polyester or cellulose, low NVRand low particle generation.86.2 Gloves, Cleanroom, polyurethane, nitrile or latex.96.3 Gloves, Cl

44、eanroom, lint and powder free, latex.96.4 Coveralls, Hoods, Shoe Covers., see Note 1 and Note 2.NOTE 1Any available source not packaged in pink poly or othermaterial that can transfer molecular contaminants.NOTE 2Garments worn for maintenance should be the same type andquality as those worn by worke

45、rs in the cleanroom during normal8The sole sources of supply of the product known to the committee at this timeare Miracle Wipe 4000, ITWTexwipe Alpha Wipe, ITWTexwipe Alpha 10,ITWTexwipe/ICP TX 4012, Anticon 100, Allter Al Sorb. If you are aware ofalternative suppliers, please provide this informat

46、ion to ASTM InternationalHeadquarters. Your comments will receive careful consideration at a meeting of theresponsible technical committee,1which you may attend.9The sole sources of supply of the products known to the committee at this timeare Pioneer Trionic E-194, QRP Q095, Q125, and Q145 (accordi

47、ng to length) and27G-2700 (conductive) and Ansell-Edmont Nitrile. If you are aware of alternativesuppliers, please provide this information to ASTM International Headquarters.Your comments will receive careful consideration at a meeting of the responsibletechnical committee,1which you may attend.TAB

48、LE 2 Product Cleanliness Levels for NVR Based onIEST-STD-CC1246DNVRLevelNVR LimitASurfacemg/0.1 m2Volumemg/LAA5 0.00001AA4.7 0.00002AA4.3 0.00005AA4 0.0001AA3.7 0.0002AA3.3 0.0105AA3 0.001AA2.7 0.002AA2.3 0.005A/100 0.01 0.1A/50 0.02 0.2A/20 0.05 0.5A/10 0.1 1.0A/5 0.2 2.0A/2 0.5 5.0A1. 0B2 2C3 3D40

49、 4E5. 50F7 7G 10.0 100H 15.0 150J 25.0 250A1 mg/0.1 m2= 1 g/cm2= 0.929 mg/ft2= 10-nm-thick uniform film (r =1g/cm3).E 2042/E 2042M 093operations. (See Test Method E 1549 and IEST-RP-CC003.)6.5 Deionized Water, shall have a minimum resistance of50 000 ohms and be filtered to remove all particles greater than30 m in size. Total solids (both dissolved and undissolved)shall not exceed 25 ppm.6.6 Non-Ionic Detergent, MIL-D-16791, Type 1.106.7 Isopropyl Alcohol (IPA),