ASTM E2042 E2042M-2009(2016) Standard Practice for Cleaning and Maintaining Controlled Areas and Clean Rooms《可控区域和清洁室的清洁和维护标准实施规程》.pdf

1、Designation: E2042/E2042M 09 (Reapproved 2016)Standard Practice forCleaning and Maintaining Controlled Areas and CleanRooms1This standard is issued under the fixed designation E2042/E2042M; the number immediately following the designation indicates the yearof original adoption or, in the case of rev

2、ision, the year of last revision. A number in parentheses indicates the year of last reapproval.A superscript epsilon () indicates an editorial change since the last revision or reapproval.1. Scope1.1 This practice covers the procedures to be followed forthe initial cleaning and normal maintenance o

3、f cleanrooms andcontrolled areas. This practice is applicable to aerospace cleanareas where both particles and molecular films (NVR) must becontrolled.1.2 UnitsThe values stated in either SI units or inch-pound units are to be regarded separately as standard. Thevalues stated in each system may not

4、be exact equivalents;therefore, each system shall be used independently of the other.Combining values from the two systems may result in non-conformance with the standard.1.3 This standard does not purport to address all of thesafety concerns, if any, associated with its use. It is theresponsibility

5、 of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.2. Referenced Documents2.1 ASTM Standards:2D1193 Specification for Reagent WaterE1234 Practice for Handling, Transporting, and InstallingNonvola

6、tile Residue (NVR) Sample Plates Used in Envi-ronmentally Controlled Areas for SpacecraftE1235 Test Method for Gravimetric Determination of Non-volatile Residue (NVR) in Environmentally ControlledAreas for SpacecraftE1549 Specification for ESD Controlled Garments Requiredin Cleanrooms and Controlled

7、 Environments for Space-craft for Non-Hazardous and Hazardous OperationsE1560 Test Method for Gravimetric Determination of Non-volatile Residue From Cleanroom WipersE2352 Practice for Aerospace Cleanrooms and AssociatedControlled EnvironmentsCleanroom OperationsF24 Test Method for Measuring and Coun

8、ting ParticulateContamination on SurfacesF25 Test Method for Sizing and Counting Airborne Particu-late Contamination in Cleanrooms and Other Dust-Controlled AreasF50 Practice for Continuous Sizing and Counting of Air-borne Particles in Dust-Controlled Areas and CleanRooms Using Instruments Capable o

9、f Detecting SingleSub-Micrometre and Larger Particles2.2 IEST Standards:3IEST-RP-CC007 Testing ULPA FiltersIEST-RP-CC016 The Rate of Deposition of NonvolatileResidue in CleanroomsIEST-RP-CC0018 Cleanroom Housekeeping and Monitor-ing ProceduresIEST-RP-CC003 Garment System Considerations for Clean-roo

10、ms and Other Controlled EnvironmentsIEST-RP-CC026 Cleanroom OperationsIEST-STD-CC1246D Product Cleanliness Levels and Con-tamination Control Program42.3 US Federal Standards:5FED-STD-209E Airborne Particulate Cleanliness Classes inCleanrooms and Clean Zones6TT-I-735 Isopropyl AlcoholO-A-51 Acetone52

11、.4 US Department of Defense Standards:5MIL-D-16791 Detergents, General Purpose (Liquid, Non-Ionic)1This practice is under the jurisdiction of ASTM Committee E21 on SpaceSimulation and Applications of Space Technology and is the direct responsibility ofSubcommittee E21.05 on Contamination.Current edi

12、tion approved Oct. 1, 2016. Published October 2016. Originallyapproved in 1999. Last previous edition approved in 2009 as E2042 09. DOI:10.1520/E2042_E2042M-09R16.2For referenced ASTM standards, visit the ASTM website, www.astm.org, orcontact ASTM Customer Service at serviceastm.org. For Annual Book

13、 of ASTMStandards volume information, refer to the standards Document Summary page onthe ASTM website.3Available from Institute of Environmental Science and Technology (IEST),5005 Newport Dr., Suite 506, Rolling Meadows, IL 60008-3841.4IEST-STD-CC1246D replaced MIL-STD-1246.5Available from Superinte

14、ndent of Documents, US Government Printing Office,Washington, DC 20402.6Cancelled Nov. 29, 2001 and replaced with ISO 14644-1 and 14644-2.FED-STD-209E may be used by mutual agreement between buyer and seller.Available from U.S. Government Printing Office, Superintendent of Documents,732 N. Capitol S

15、t., NW, Mail Stop: SDE, Washington, DC 20401. FS209Ecleanroom classes are given for reference in parentheses after the ISO classes.Copyright ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States12.5 International Standards:7ISO 14644-1 Cleanrooms and

16、 Associated ControlledEnvironmentsPart 1: Classification of Air CleanlinessISO 14644-2 Cleanrooms and Associated ControlledEnvironmentsPart 2: Specifications for Testing andMonitoring to Prove Continued Compliance with ISO14644-13. Terminology3.1 Definitions of Terms Specific to This Standard:3.1.1

17、clean zone, na defined space in which the concen-tration of airborne particles is controlled to specified limits.3.1.2 cleanroom, na room in which the air filtration, airdistribution, utilities, materials of construction, equipment, andoperating procedures are specified and regulated to controlairbo

18、rne particle concentrations to meet appropriate airborneparticulate cleanliness classifications, as defined by ISO14644-1.3.1.3 cleanroom, as-built, na cleanroom that is completeand ready for operation, with all services connected andfunctional, but without equipment or operating personnel in theroo

19、m.3.1.4 cleanroom, at-rest, na cleanroom that is complete,with all services functioning and with equipment installed andoperable or operating, as specified, but without operatingpersonnel in the room.3.1.5 cleanroom, operational, na cleanroom in normaloperation, with all services functioning and wit

20、h equipmentand personnel, if applicable, present and performing theirnormal work functions in the room.3.1.6 clean facility, nthe total real property required toaccomplish the cleanroom functions.3.1.6.1 DiscussionIn addition to the cleanroom and asso-ciated clean areas, this includes utility rooms,

21、 storage areas,offices, lockers, wash-rooms, and other areas that do notnecessarily require precise environmental control.3.1.7 controlled area, nan environmentally controlledarea, operated as a cleanroom, but without the final stage ofHEPA filters. Controlled areas would meet ISO Class 8.5(FED-STD-

22、209E equivalent to Class 300 000) per Table 1.3.1.7.1 DiscussionOnly rough filters (50 to 60 % effi-ciency) and medium efficiency filters (80 to 85 % efficiency)are required for a controlled area. The maximum allowableairborne particle concentrations in a controlled area are11 100 000 m3per ISO Clas

23、s 8.5 for particles 0.5 m and 92500/m3(2620 particles/ft3per Class 300 000/ft3(FED-STD-209E) for particles 5.0 m.3.1.8 DI water, ndeionized water (see SpecificationD1193).3.1.9 discrete-particle counter (DPC), n an instrument,such as an optical particle counter or condensation nucleuscounter, capabl

24、e of resolving responses from individual par-ticles.3.1.10 HEPA filter, n(high-efficiency particulate air filter)a throwaway, extended-medium, dry-type filter in a rigid7Available from International Organization for Standardization (ISO), 1 rue deVaremb, Case postale 56, CH-1211, Geneva 20, Switzerl

25、and.TABLE 1 Comparison of ISO 14644-1 and FED-STD-209E Cleanliness ClassesISO Class NNominal FS209EClassParticle ConcentrationsMaximum Number of Particles per Cubic Meter / Cubic Footof Air for Particle Sizes Equal to or Greater than the Stated Size0.1 m 0.2 m 0.3 m 0.5 m 1 mA5mISO Class 1 10 2 ISO

26、Class 2 100 24 10 4 FS209E Class 0.1 3 1 ISO Class 3 1000 237 102 35 8 FS209E Class 1 35 7 3 1 ISO Class 4 10 000 2370 1020 352 83 FS209E Class 10 350 75 30 10 2 ISO Class 5 100 000 23 700 10 200 3520 832 29FS209E Class 100 3500B750 300 100 24 ISO Class 6 1 000 000 237 000 102 000 35 200 8320 293FS2

27、09E Class 1000 35 000B7500B3000B1000 236 7ISO Class 6.7C 176 000 41 700 1470FS209E Class 5000B 5000 1180 42ISO Class 7 352 000 83 200 2930FS209E Class 10 000 10 000 2360 70ISO Class 8 3 520 000 832 000 29 300FS209E Class100 000 100 000 23 600 700ISO Class 8.5C 11 100 000 2 630 000 92 500FS209E Class

28、300 000D 300 000 74 500 2620ISO Class 9 35 200 000 8 320 000 293 000FS209E Class1 000 000D 1 000 000 236 000 8280ANo 1 m designation is listed in FS209E Table 1 for particulate classes. The values shown are equivalents of the ISO values.BThese values were not directly listed in FS209E. Allowances ar

29、e made in FS209E for intermediate classes and associated calculations have been shown. If used, anotation should be made indicating that they have been derived.CISO 14644-1 does not include Class 6.7 or 8.5. The values shown are equivalent to those derived for FED-STD-209E Class 5000 and 300 000.DFS

30、209E does not include Class 300 000 and 1 000 000. The values shown are equivalents of the ISO values for ISO Class 8.5 and 9.E2042/E2042M 09 (2016)2frame, having a minimum particle-collection efficiency of99.97 % (that is, a maximum particle penetration of 0.03 %)for 0.3-m particles of thermally ge

31、nerated DOP of specifiedalternative aerosol.3.1.11 HVAC, nheating, ventilating, and air conditioning.3.1.12 nonvolatile residue (NVR), nmatter remaining aftersolvent containing such matter has been evaporated or cleaned.3.1.13 ULPA filter, n(ultra-low-penetration air filter) athrowaway, extended-med

32、ium, dry-type filter in a rigid frame,having a minimum particle-collection efficiency of 99.999 %(that is, a maximum particle penetration of 0.001 %) forparticles in the size range of 0.1 to 0.2 m, when tested inaccordance with the methods of IES-RP-CC007.1.4. Significance and Use4.1 This practice i

33、dentifies methods for cleaning and main-taining controlled areas and clean rooms as defined by ISO14644-1 and ISO 14644-2. Cleaning procedures are described,and cleaning frequency for different classes of facility aregiven. Compliance with this practice will make it easier andmore likely that the re

34、quired level of facility cleanliness will bemaintained. A cleaner facility also will help to protect flighthardware from contamination and should reduce the frequencyfor cleaning flight hardware. This practice does not discussoperation and operational procedures for cleanrooms andcontrolled areas. O

35、ther documents such as IEST-RP-CC026and Practice E2352 provide recommended practices for oper-ating cleanrooms and controlled areas.5. Cleanrooms and Clean Zones5.1 Airborne Particle ConcentrationsThe types of clean-rooms and clean zones used in this practice are based onairflow, air filtration, and

36、 airborne particle concentration limits.The classification of airborne particle concentration limits incleanrooms, clean zones, and controlled areas are defined inTable 1 which is based on ISO 14644-1 and ISO 14644-2.Airflow Air Filtration Typical AirborneParticleConcentrationLimits UnderOperational

37、ConditionsIn AccordanceWithISO 14644-1Type I Unidirectional, formerlyknown as 9laminarflow9HEPA or ULPAfiltered withprefiltersClasses less than 7(Classes lessthan 10 000 perFED-STD-209E)Type II Nonunidirectional,formerly known as“turbulent” flowHEPA filtered withprefiltersClasses 7 to 8.5(Classes 10

38、 000 to300 000 per FED-STD-209E)Type III Nonunidirectional without HEPA orULPA filters butwith prefiltersClasses 8 to 8.5(Classes 100 000to 300 000 perFED-STD-209E)5.2 NVR ConcentrationsThere are two categories forNVR requirements in clean areas:5.2.1 Category ICritical clean areas that require spec

39、ificcontrol and removal of molecular contaminants because ofproducts that either are very sensitive to NVR or can not becleaned. Quantitative NVR measurements may be required asdefined in IEST-STD-CC1246D and IES-RP-CC016. NVRdeposition criteria are defined in Tables 2 and 3.5.2.2 Category IIStandar

40、d clean areas that do not requirequantitative measurements of NVR. All aerospace cleanfacilities, including support shops for the fabrication of com-ponents for aerospace hardware, must limit the deposition ofnonvolatile residue (NVR), also known as molecular films. Thecleaning supplies recommended

41、in this practice are selected forthe minimal production of NVR.5.2.2.1 Some clean areas require very low levels of NVR tobe compatible with product cleanliness requirements. Theseareas require cleaning methods that will remove NVR. Theuser will state when Category I is required and allowable levelso

42、f NVR on surfaces, that is, NVR level in accordance withE2042/E2042M 09 (2016)3IEST-STD-CC1246D (g/cm2or mg/0.1 m2). Category II isassumed unless Category I is expressly specified.5.2.3 NVR VerificationMeasurement of NVR in cleanfacilities may be done in accordance with Practice E1234 andTest Method

43、 E1235 or other methods that are compatible withthe product requirements and types of NVR. Typical NVRcompounds that are found in cleanrooms includehydrocarbons, esters, and silicones.6. Materials Used6.1 Wipers, Cleanroom, polyester or cellulose, low NVRand low particle generation.86.2 Gloves, Clea

44、nroom, polyurethane, nitrile or latex.96.3 Gloves, Cleanroom, lint and powder free, latex.96.4 Coveralls, Hoods, Shoe Covers., see Note 1 and Note 2.NOTE 1Any available source not packaged in pink poly or othermaterial that can transfer molecular contaminants.NOTE 2Garments worn for maintenance shou

45、ld be the same type andquality as those worn by workers in the cleanroom during normaloperations. (See Test Method E1549 and IEST-RP-CC003.)6.5 Deionized Water, shall have a minimum resistance of50 000 ohms and be filtered to remove all particles greater than30 m in size. Total solids (both dissolve

46、d and undissolved)shall not exceed 25 ppm.6.6 Non-Ionic Detergent, MIL-D-16791, Type 1.106.7 Isopropyl Alcohol (IPA), TT-I-735, Grade A.6.8 Acetone, ACS reagent STD11 or Federal SpecificationO-A-51.6.9 Buckets, food grade, stainless steel or polypropylene orpolyethylene. Buckets with two compartment

47、s are recom-mended.6.10 Mop, knit polyester head, roller type, with corrosionresistant handle and mechanism; or knit polyester or polyvinylacetate string mop.8The sole sources of supply of the product known to the committee at this timeare Miracle Wipe 4000, ITWTexwipe Alpha Wipe, ITWTexwipe Alpha 1

48、0,ITWTexwipe/ICP TX 4012, Anticon 100, Allter Al Sorb. If you are aware ofalternative suppliers, please provide this information to ASTM InternationalHeadquarters. Your comments will receive careful consideration at a meeting of theresponsible technical committee,1which you may attend.9The sole sour

49、ces of supply of the products known to the committee at this timeare Pioneer Trionic E-194, QRP Q095, Q125, and Q145 (according to length) and27G-2700 (conductive) and Ansell-Edmont Nitrile. If you are aware of alternativesuppliers, please provide this information to ASTM International Headquarters.Your comments will receive careful consideration at a meeting of the responsibletechnical committee,1which you may attend.10The sole sources of supply of the product