ASTM E2217-2002(2007) Standard Practice for Design and Construction of Aerospace Cleanrooms and Contamination Controlled Areas《航空航天清洁舱和污染控制区的设计和建造的标准实施规程》.pdf

1、Designation: E 2217 02 (Reapproved 2007)Standard Practice forDesign and Construction of Aerospace Cleanrooms andContamination Controlled Areas1This standard is issued under the fixed designation E 2217; the number immediately following the designation indicates the year oforiginal adoption or, in th

2、e case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. Asuperscript epsilon (e) indicates an editorial change since the last revision or reapproval.1. Scope1.1 The purpose of this practice is to provide design andconstruction guidelines for cont

3、amination controlled facilitiesused in the assembly and integration of aerospace hardware.The guidelines herein are intended to ensure that the facilities,when used properly, will meet the cleanliness requirements ofaerospace hardware and processes. The objective is to limitcontamination due to the

4、deposition of particulate and molecu-lar contaminants on flight hardware surfaces.1.2 One cleanliness classification of a facility is the airborneparticle concentrations in accordance with ISO 14644-1 and14644-2. Airborne particle concentrations in accordance withFED-STD-209E are included for refere

5、nce. This simple clas-sification is inadequate to describe a facility that will supportthe assembly and integration of spacecraft. The extendedduration of hardware exposure during fabrication and testing,the sensitivity of the hardware to hydrocarbons and othermolecular contaminants, and the changin

6、g requirements duringassembly and integration must be considered in addition to theairborne particle concentrations.1.3 The guidelines specified herein are intended to providefacilities that will effectively restrict contaminants from enter-ing the facility, limit contamination generated by and with

7、inthe facility, and continuously remove airborne contaminantsgenerated during normal operations. Some items of supporthardware, such as lifting equipment, stands, and shoe cleaners,are addressed since these items are often purchased andinstalled with the facility and may require accommodation inthe

8、design of the facility.1.4 Active filtration of molecular contaminants (such ashydrocarbons, silicones, and other chemicals) is discussed.Such active filtration of molecular contaminants may berequired for the processing of highly sensitive optical devices,especially infrared and cryogenic sensors.

9、Control of micro-biological contamination is not included although HEPA (HighEfficiency Particulate Air) filtration will provide some controlof airborne bacteria, spores, and other viable contaminants thatare typically carried on particles of sizes 0.3 m and larger.Control of radioactive contaminati

10、on and accommodation ofvery hazardous materials such as propellants, strong acids orcaustics, or carcinogens are not addressed.1.5 No facility will compensate for excessive contaminationgenerated inside the facility. In addition to an effective facilitydesign, the user must also institute a routine

11、maintenanceprogram (see Practice E 2042) for the facility, and personneland operational disciplines that limit the transfer of contami-nants through entry doors and contaminant generation insidethe facility.1.6 This practice only addresses guidelines for contamina-tion control in facility design. It

12、 must be implemented incompliance with all mandatory government and regulatorybuilding and safety codes. References to related cleanroomstandards and U.S. building codes and standards may be foundin IEST-RP-CC012.1.7 The values stated in SI units are to be regarded as thestandard. The values given i

13、n parentheses are provided forinformation only and are not considered standard.1.8 This standard does not purport to address all of thesafety concerns, if any, associated with its use. It is theresponsibility of the user of this standard to establish appro-priate safety and health practices and dete

14、rmine the applica-bility of regulatory limitations prior to use.2. Referenced Documents2.1 ASTM Standards:2E 595 Test Method for Total Mass Loss and CollectedVolatile Condensable Materials from Outgassing in aVacuum EnvironmentE 1216 Practice for Sampling for Particulate Contaminationby Tape LiftE 1

15、234 Practice for Handling, Transporting, and InstallingNonvolatile Residue (NVR) Sample Plates Used in Envi-ronmentally Controlled Areas for SpacecraftE 1235 Test Method for Gravimetric Determination of Non-volatile Residue (NVR) in Environmentally Controlled1This practice is under the jurisdiction

16、of ASTM Committee E21 on SpaceSimulation and Applications of Space Technology and is the direct responsibility ofSubcommittee E21.05 on Contamination.Current edition approved April 1, 2007. Published April 2007. Originallyapproved in 2002. Last previous edition approved in 2002 as E 2217 - 02.2For r

17、eferenced ASTM standards, visit the ASTM website, www.astm.org, orcontact ASTM Customer Service at serviceastm.org. For Annual Book of ASTMStandards volume information, refer to the standards Document Summary page onthe ASTM website.1Copyright ASTM International, 100 Barr Harbor Drive, PO Box C700,

18、West Conshohocken, PA 19428-2959, United States.Areas for SpacecraftE 1548 Practice for Preparation of Aerospace Contamina-tion Control PlansE 2042 Practice for Cleaning and Maintaining ControlledAreas and Clean RoomsE 2088 Practice for Selecting, Preparing, Exposing, andAnalyzing Witness Surfaces f

19、or Measuring Particle Depo-sition in Cleanrooms and Associated Controlled Environ-mentsF24 Test Method for Measuring and Counting ParticulateContamination on SurfacesF25 Test Method for Sizing and Counting Airborne Par-ticulate Contamination in Cleanrooms and Other Dust-Controlled AreasF50 Practice

20、for Continuous Sizing and Counting of Air-borne Particles in Dust-Controlled Areas and Clean RoomsUsing Instruments Capable of Detecting Single Sub-Micrometre and Larger Particles2.2 ISO Standards:3ISO 14644-1 Cleanrooms and Associated Controlled Envi-ronments Part 1: Classification of Air Cleanline

21、ssISO 14644-2 Cleanrooms and Associated Controlled Envi-ronments Part 2: Specifications for Testing and Monitor-ing to Provide Continued Compliance with ISO 14644-1ISO 14644-3 Cleanrooms and Associated Controlled Envi-ronments Part 3: Metrology and Test MethodsISO 14644-4 Cleanrooms and Associated C

22、ontrolled Envi-ronments Part 4: Design, Construction and Start-up2.3 Institute of Environmental Science and TechnologyStandards:IEST-RP-CC001 HEPA and ULPA Filters4IEST-RP-CC006 Testing Cleanrooms4IEST-RP-CC007 Testing ULPA Filters4IEST-RP-CC012 Considerations in Cleanroom Design4IEST-RP-CC022 Elect

23、rostatic Charge in Cleanrooms andOther Controlled Environments4IEST-RP-CC034 HEPA and ULPA Filter Leak Tests4IEST-STD-CC1246 Product Cleanliness Levels and Con-tamination Control Program52.4 U.S Government Standards:FED-STD-209E Airborne Particulate Classes for Clean-rooms and Clean Zones62.5 Other

24、Publications:Procedural Standards for Certified Testing of Cleanrooms,National Environmental Balancing Bureau (NEBB)73. Terminology3.1 Definitions:3.1.1 aerosol, na gaseous suspension of fine solid orliquid particles.3.1.2 airfilters:3.1.2.1 HEPA (High Effciency Particulate Air) filter, naparticulat

25、e air filter having a minimum particle collectionefficiency of 99.97 % of particles greater than 0.3 m inaccordance with IEST-RP-CC001.3.1.2.2 ULPA (Ultra Low Penetration Air) filter, na par-ticulate air filter having a minimum particle collection effi-ciency of 99.999 % of particles of sizes equal

26、to and larger than0.12 m.3.1.2.3 prefilters, nair filters that are installed upstream ofthe HEPA or ULPA filters.3.1.2.4 DiscussionThese usually consist of rough filtersand medium efficiency filters that remove larger particles thanare removed by the HEPA and ULPA filters; They are used toreduce the

27、 number of particles trapped on the high efficiencyfilters, thereby extending the lifetimes of the HEPA and ULPAfilters.3.1.3 airflow:3.1.3.1 unidirectional airflow, ncontrolled airflowthrough the entire cross-section of a cleanroom or clean zonewith a steady velocity and approximately equal streaml

28、ines.3.1.3.2 DiscussionThe airflow in a cleanroom may beeither vertical down-flow or horizontal with air leaving theroom either through nearly continuous floor or wall vents.Equipment and personnel in the room will cause air turbulence,but the airflow is still considered unidirectional.3.1.3.3 nonun

29、idirectional airflow, nair distribution wherethe supply air entering the cleanroom or clean zone mixes withthe internal air by means of induction.3.1.3.4 DiscussionAir typically enters through registersdistributed around the room above the working area and exitsthrough registers at floor level.3.1.3

30、.5 mixed airflow, nair distribution in a cleanroom orclean zone in which the airflow is a mixture of both unidirec-tional and nonunidirectional.3.1.3.6 DiscussionDifferent locations in a cleanroom canhave different types of airflow. This is especially true in largecleanrooms. A cleanroom design may

31、include mixed airflow.3.1.4 changing room, nroom where people using a clean-room change into, or out of, cleanroom apparel.3.1.5 cleanroom, na specialized enclosed room employ-ing control over the airborne particle concentrations, tempera-ture, humidity, pressure, molecular contaminants, and opera-t

32、ions.3.1.5.1 cleanroom (alternate), na room in which theconcentration of airborne particles, temperature, humidity,pressure, molecular contaminants, and operations are con-trolled, and which is constructed and used in a manner tominimize the introduction, generation, and retention of con-taminants i

33、nside the room.3.1.6 cleanroom occupancy states:3.1.6.1 as-built, adjcondition where the installation iscomplete with all services connected and functioning but withno equipment, flight hardware and materials, or personnelpresent.3Available from International Organization for Standardization (ISO),

34、1 rue deVaremb, Case postale 56, CH-1211, Geneva 20, Switzerland.4Available from the Institute of Environmental Sciences and Technology, 940East Northwest Highway, Mount Prospect, IL 60056.5This replaces MIL-STD-1246C which is inactive.6This standard was cancelled 29 Nov. 2001 and is replaced by ISO

35、 14644-1 andISO 14644-2. Copies of FED-STD-209E are available from the Institute ofEnvironmental Sciences and Technology, 940 East Northwest Highway, MountProspect, IL 60036, and from U.S. government sources.7National Environmental Balancing Bureau, 8575 Grovemont Circle, Gaithers-burg, MD 20877-412

36、1.E 2217 02 (2007)23.1.6.2 DiscussionFor contractual purposes, the partiesinvolved should have an agreement that defines this state.3.1.6.3 at-rest, adjcondition where the installation iscomplete with equipment installed and operating in a manneragreed upon by the customer and supplier, but with nop

37、ersonnel present.3.1.6.4 operational, adjcondition where the installation isfunctioning in the specified manner, with the specified numberof personnel present and working in the agreed upon manner.3.1.7 clean zone, ndedicated space in which the concen-tration of airborne particles is controlled, whi

38、ch is constructedand used in a manner to minimize the introduction, generation,and retention of particles inside the zone, and in which otherrelevant parameters, for example, temperature, humidity, pres-sure, and molecular contaminants, are controlled as necessary.3.1.8 contaminant, nany particulate

39、, molecular, non-particulate, and biological entity that can adversely affect theproduct or process.3.1.9 contaminant deposition, nparticulate and molecularcontaminants that form on surfaces resulting from processessuch as fallout, condensation, electrostatic attraction, and othermechanisms.3.1.10 c

40、ontamination controlled area, na specialized en-closed facility employing control over the particulate matter inair, temperature, and humidity that may not meet the require-ments of ISO 14644-1 or FED-STD-209E because of no HEPAor ULPA type filters.3.1.10.1 DiscussionFor example, without a final sta

41、ge ofHEPAor ULPAfilters, the airborne particle concentrations mayonly meet ISO Class 8.5 (FS209E Class 300 000) for particlesequal to and greater than 0.3 m but may meet ISO Class 8(FS209E Class 100 000) for particles equal to and greater than5 m.3.1.11 electrostatic discharge (ESD), nthe rapid, spo

42、nta-neous transfer of electrostatic charge induced by a highelectrostatic field.3.1.11.1 DiscussionUsually, the charge flows through aspark between two bodies at different electrostatic potentials asthey approach one another.3.1.12 electromagnetic interference (EMI), ninterference,generally at radio

43、 frequencies, that is generated inside systems,as contrasted to radio-frequency interference coming fromsources outside a system.3.1.13 facility (clean facility), nthe total real propertyrequired to accomplish the cleanroom functions.3.1.13.1 DiscussionThis includes all the buildings, clean-rooms, o

44、ffices, laboratories, storage areas, HVAC equipment,and other support areas for operations and personnel.3.1.14 gas phase adsorber cell, na modular container foran adsorbent to trap contaminant gases from air and other gasesused in processing.3.1.15 installation, ncleanroom or one or more cleanzones

45、, together with all associated structures, air-treatmentsystems, services, and utilities.3.1.16 macroparticle, na particle with an equivalent di-ameter greater than 5 m.3.1.16.1 DiscussionThe M descriptor defines the mea-sured or specified concentrations of macroparticles per cubicmeter of air. This

46、 is defined in ISO 14644-1.3.1.17 monitoring, nobservations made by measurementin accordance with a defined method and plan to provideevidence of the performance of an installation.3.1.18 nonvolatile residue (NVR), ncontaminant residuewithout distinct dimensions. It typically consists of hydrocar-bo

47、ns, silicones, and other higher molecular weight speciesdeposited through condensation, direct contact transmission(that is, fingerprints) or as residue remaining after evaporationof a liquid.3.1.19 outgassing, nthe evolution of gas from a material,usually in a vacuum. Outgassing also occurs in a hi

48、gherpressure environment.3.1.19.1 DiscussionWhile outgassing is typically consid-ered a vacuum phenomenon, some materials, such as polyvinylchloride, contain volatile components, such as plasticizers, thatwill diffuse from bulk materials and evaporate under standardtemperatures and pressures. These

49、volatile components arehighly contaminating to sensitive aerospace hardware.3.1.20 particle fallout, nparticulate matter that accumu-lates on surfaces due to gravity settling. This matter is often ofa particulate size larger than that measured by airborne particlecounters.3.1.21 radio-frequency interference (RFI), ninterferencefrom sources of energy outside a system or systems, ascontrasted from electromagnetic interference generated insidesystems.3.1.22 test aerosol, na gaseous suspension of solid orliquid particles, or both, with known a