ASTM E2312-2004 Standard Practice for Tests of Cleanroom Materials《洁净室材料试验的标准规程》.pdf

1、Designation: E 2312 04Standard Practice forTests of Cleanroom Materials1This standard is issued under the fixed designation E 2312; the number immediately following the designation indicates the year oforiginal adoption or, in the case of revision, the year of last revision. A number in parentheses

2、indicates the year of last reapproval. Asuperscript epsilon (e) indicates an editorial change since the last revision or reapproval.1. Scope1.1 This practice identifies test methods used to evaluate theproperties of various materials and products used in clean-rooms and for cleanroom construction.1.

3、2 This standard does not purport to address all of thesafety concerns, if any, associated with its use. It is theresponsibility of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.2. Referenced Doc

4、uments2.1 ASTM Standards:2E 595 Test Method for Total Mass Loss and Volatile Con-densable Materials from Outgassing in a VacuumE 1216 Practice for Sampling for Surface Particulate Con-tamination by Tape LiftE 1234 Practice for Handling, Transportation and InstallingNonvolatile Residue (NVR) Sample P

5、lates Used in Envi-ronmentally Controlled Areas for SpacecraftE 1235 Test Method for Gravimetric Determination of Non-volatile Residue (NVR) in Environmentally ControlledAreas for SpacecraftE 1549 Specification for ESD Controlled Garments Re-quired in Cleanrooms and Environmentally ControlledAreas f

6、or Spacecraft for Non-Hazardous and HazardousOperationsE 1559 Test Method for Contamination Outgassing Charac-teristics of Spacecraft MaterialsE 1560 Test Method for Gravimetric Determination of Non-Volatile Residue (NVR) from Cleanroom WipersE 1731 Test Method for Gravimetric Determination of Non-V

7、olatile Residue (NVR) from Cleanroom GlovesE 2088 Practice for Selecting, Preparing, Exposing, andAnalyzing Witness Surfaces for Measuring Particle Depo-sition in Cleanrooms and Associated Controlled Environ-mentsE 2090 Test Method for Size-Differentiated Counting ofParticles and Fibers Released fro

8、m Cleanroom WipersUsing Optical and Scanning Optical MicroscopyE 2217 Practice for Design and Construction of AerospaceCleanrooms and Contamination Controlled AreasF 25 Test Method for Sizing and Counting Airborne Par-ticulate Matter in Cleanrooms and Other Dust-ControlledAreasF 51 Test Method for S

9、izing and Counting ParticulateContamination in and on Cleanroom GarmentsF 739 Test Method for Resistance of Protective ClothingMaterials to Permeation by Liquids or Gases Under Con-ditions of Continuous Contact2.2 IEST Standards:3IEST RP-CC003 Garment System Considerations forCleanrooms and Controll

10、ed EnvironmentsIEST RP-CC004 Evaluating Wiping Materials Used inCleanroomsIEST RP-CC005 Gloves and Finger Cots Used in Clean-rooms and Other Controlled EnvironmentsIEST RP-CC020 Substrates and Forms for Documentationin CleanroomsIEST RP-CC022 Electrostatic Charge in Cleanrooms andOther Controlled En

11、vironments3. Terminology3.1 Definitions:3.1.1 ESDelectrostatic discharge, the transfer of electro-static charge between bodies that have different electric poten-tial.3.1.2 fiberparticle having an aspect (length-to-width) ra-tio of 10 or more.3.1.3 microorganismliving organism of microscopic sizecap

12、able of growth and reproduction. Examples include bacte-ria, yeasts, and molds.3.1.4 non-volatile residue (NVR)that quantity of molecu-lar matter remaining after the filtration of a solvent containingcontaminants and evaporation of the solvent at a specifiedtemperature.3.1.5 outgassingevolution of v

13、olatile components froman item exposed to elevated temperature, normally in vacuum.1This practice is under the jurisdiction of ASTM Committee E21 on SpaceSimulation and the Applications of Space Technology and is the direct responsibilityof Subcommittee E21.05 on Contamination.Current edition approv

14、ed Apr. 1, 2004. Published April 2004.2For referenced ASTM standards, visit the ASTM website, www.astm.org, orcontact ASTM Customer Service at serviceastm.org. For Annual Book of ASTMStandards volume information, refer to the standards Document Summary page onthe ASTM website.3Available from Institu

15、te of Environmental Sciences and Technology (IEST),5005 Newport Dr., Suite 506, Rolling Meadows, IL 60008-3841.1Copyright ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.3.1.6 particlesmall piece of matter with defined physicalboundaries.4. Sum

16、mary of Practice4.1 A number of tests for materials and products used incleanrooms or to fabricate cleanrooms have been issued byvarious organizations such as ASTM and IEST. The purpose ofthis practice is to identify test methods used to determine theproperties of various materials and products used

17、 in clean-rooms. A brief description and some of the features of thevarious tests are also given to aid interested users in selectingthe test or groups of tests that have the ability to meet theirneeds for evaluating existing and candidate cleanroom prod-ucts.4.2 Table 1 lists the tests suggested to

18、 measure specificproperties of various cleanroom materials and products. Whereno test is presently listed it is probable that a test will berequired and must be identified or developed if none exist atpresent.5. Significance and Use5.1 This practice is not intended to advocate or discourageuse of an

19、y particular test method. It is intended for informationonly, and to provide a useful guide for further detailed study,test, and evaluation of cleanroom materials and products.6. Hazards6.1 Hazards can be present when using many of the refer-enced tests. Each of the referenced test methods warn ofpo

20、ssible hazards and suggest means to minimize them. If toxicor other hazardous materials are identified, they must behandled properly per the reference documents.7. Procedure7.1 Table 1 lists the types of materials and cleanroomproducts of present interest and recommends the test methodsto be used to

21、 evaluate these materials. Where several tests arelisted, it is suggested that all of them be considered at leastinitially to evaluate the product and allow properties to beevaluated. Test results will provide relative values for theproperties tested such as particle count per unit area, NVR perunit

22、 area or mass, or outgassing at a given temperature,typically at 125C. No pass/fail values or minimum require-ments are specified because there are no established values forcleanliness for any of the products that are listed. Users shouldrank materials for contamination generation potential andsuita

23、bility for cleanroom use based upon test results and addedfactors such as conditions of use, consistency of test results,testing bias, and cost and availability of the products as-used incleanrooms. It is normal for properties to vary somewhat fromlot to lot, so it is important to test several lots

24、to evaluatereproducibility of results and product consistency.NOTE 1If there is a specific interest in identifying or developing testmethods for areas shown as having no tests at present, or that the test isNot Applicable, Committee E21 will consider any such suggestions.7.2 Test methods as noted in

25、 the table are available fromASTM or IEST.TABLE 1 Test MethodsTests of Cleanroom Materials and ProductsTests Garments Wipers Gloves Swabs Documents Tote BoxCleanrooms,SurfacesParticles IEST RP003Sect. 10.1-10.3IEST RP004Sect. 5.1-5.2ASTM E 1216ASTM E 2090ASTM F 51IEST RP005Sect. 7ASTM E 1216IEST RP0

26、04Sect. 5, 5.1-5.2IEST RP020Sect. 6, 7ASTM E 1216ASTM E 1216 ASTM F 25ASTM E 1216ASTM E 2088ASTM E 1234ASTM E 1235Extractable,NVRIEST RP003Sect. 10.4ASTM E 1549IEST RP004Sect. 6, 6.2ASTM E 1560ASTM E 1731IEST RP005Sect. 8ASTM E 1560ASTM E 1731IEST RP004Sect. 6-6.2ASTM E 1560IEST RP020Sect. 7.2ASTM E

27、 1560 ASTM E 1560Microorganisms None IEST RP004Sect. 11, 13None None NA NA NoneChemicalCompatibilityASTM E 1549ASTM F 739None IEST RP005Sect. 6.3None NA None NoneBarrier ASTM E 1549 None IEST RP005Sect. 6.4NA NA NA NonePermeability ASTM E 1549 NA IEST RP005Sect. 6.6NA NA NA NAStatic, ESD IEST RP003S

28、ect. 10.7ASTM E 1549IEST RP004Sect. 8IEST RP005Sect. 8NA NA None IEST RP022Outgassing IEST RP003Sect. 9ASTM E 595ASTM E 1559ASTM E 595ASTM E 1559ASTM E 595ASTM E 1559NA NA ASTM E 595ASTM E 1559ASTM E 595ASTM E 1559Heat Resistance ASTM E 1549 NA IEST RP005Sect. 6.1NA NA NA NAAcceleratedAgingNA NA IES

29、T RP005Sect. 6.2NA NA NA NADesign,ConstructionIEST RP003Sect. 9ASTM E 1549NA None NA None None ASTM E 2217Filter Efficiency IEST RP003Sect. 7.3NA NA NA NA NA ASTM E 2217Sorbancy None IEST RP004Sect. 7None None NA NA NAE23120428. Report8.1 The report should identify the material or product tested,the

30、 vendor, supplier or source, any part number or otheridentifying specification, the test or tests performed, and theactual test results.8.2 The report also may compare test results for differentlots from the same manufacturer or supplier, or for differenttypes of products, and rank performance and t

31、est results. It alsois useful to identify specific products or materials as beingacceptable for use in particular types of facility or for specificuses or applications.9. Precision and Bias9.1 There is no precision or bias value possible for thispractice. Many of the referenced documents do include

32、preci-sion and bias statements. They should be considered on anindividual basis for each test method.10. Keywords10.1 cleanroom products; contamination control; gloves;materials evaluation; materials properties; material testing;product evaluation; product properties; product testing; testmethods; w

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35、andardsand should be addressed to ASTM International Headquarters. Your comments will receive careful consideration at a meeting of theresponsible technical committee, which you may attend. If you feel that your comments have not received a fair hearing you shouldmake your views known to the ASTM Co

36、mmittee on Standards, at the address shown below.This standard is copyrighted by ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959,United States. Individual reprints (single or multiple copies) of this standard may be obtained by contacting ASTM at the aboveaddress or at 610-832-9585 (phone), 610-832-9555 (fax), or serviceastm.org (e-mail); or through the ASTM website(www.astm.org).E2312043