ASTM E3059-2016 Standard Guide for Workforce Education in Nanotechnology Infrastructure《纳米技术基础设施中劳动力教育的标准指南》.pdf

1、Designation: E3059 16Standard Guide forWorkforce Education in Nanotechnology Infrastructure1This standard is issued under the fixed designation E3059; the number immediately following the designation indicates the year oforiginal adoption or, in the case of revision, the year of last revision. A num

2、ber in parentheses indicates the year of last reapproval. Asuperscript epsilon () indicates an editorial change since the last revision or reapproval.1. Scope1.1 This document provides guidelines for basic workforceeducation in the infrastructure topics related to nanotechnologyto be taught at an un

3、dergraduate college level. This educationshould be broad to prepare an individual to work within one ofthe many areas in nanotechnology research, development, ormanufacturing. The individual so educated may be involved inmaterial handling, manufacture, distribution, storage, use, ordisposal of nanos

4、cale materials.1.2 This guide may be used to develop or evaluate aneducation program for the infrastructure used in the nanotech-nology field. This guide provides listings of key topics thatshould be covered in a nanotechnology education program onthis subject, but it does not provide specific cours

5、e material tobe used in such a program. This approach is taken in order toallow workforce education entities to ensure their programscover the required material while also enabling these institu-tions to tailor their programs to meet the needs of their localemployers.1.3 The values stated in SI unit

6、s are to be regarded asstandard. No other units of measurement are included in thisstandard.1.4 This standard does not purport to address all of thesafety concerns, if any, associated with its use. It is theresponsibility of the user of this standard to establish appro-priate safety and health pract

7、ices and determine the applica-bility of regulatory limitations prior to use.1.5 This standard does not purport to address all of themethods and concepts pertaining to the infrastructure fornanotechnology. It may not cover knowledge and skill objec-tives applicable to local conditions or required by

8、 localregulations.2. Referenced Documents2.1 ASTM Standards:2E2456 Terminology Relating to NanotechnologyE2996 Guide for Workforce Education in NanotechnologyHealth and Safety2.2 ISO Standards:3ISO/TS 80004-1 Nanotechnologies Vocabulary Part 1:Core TermsISO 14644-1 Cleanrooms and Associated Controll

9、ed Envi-ronments Part 1: Classification of Air Cleanliness3. Terminology3.1 Definitions:3.1.1 For definitions of terms related to nanotechnology ingeneral, refer to Terminology E2456 and ISO/TS 80004-1.3.2 Definitions of Terms Specific to This Standard:3.2.1 nanomanufacturing, nintentional synthesis

10、, genera-tion or control of nano-materials, or fabrication steps in thenanoscale, for commercial purposes. ISO/TS 80004-13.2.2 nanomaterial, nmaterial with any external dimen-sion in the nanoscale or having internal structure or surfacestructure in the nanoscale. ISO/TS 80004-13.2.3 nanoscale, adjha

11、ving one or more dimensions fromapproximately 1 to 100 nanometres (nm). E24563.2.4 nanotechnology infrastructure, nthe basic equip-ment and facilities (such as controlled environments) that areneeded to properly conduct nanoscale research and develop-ment or nanomanufacturing.4. Summary of Guide4.1

12、This guide designates a list of topics on nanotechnologyinfrastructure relevant to nanotechnology workforce education.1This guide is under the jurisdiction of ASTM Committee E56 on Nanotech-nology and is the direct responsibility of Subcommittee E56.07 on Education andWorkforce Development.Current e

13、dition approved April 1, 2016. Published April 2016. DOI: 10.1520/E3059-16.2For referenced ASTM standards, visit the ASTM website, www.astm.org, orcontact ASTM Customer Service at serviceastm.org. For Annual Book of ASTMStandards volume information, refer to the standards Document Summary page onthe

14、 ASTM website.3Available from International Organization for Standardization (ISO), ISOCentral Secretariat, BIBC II, Chemin de Blandonnet 8, CP 401, 1214 Vernier,Geneva, Switzerland, http:/www.iso.org.Copyright ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959.

15、 United States1Selection of the techniques, concepts, and materials are basedon inputs from industry, nanotechnology educators, and subjectmatter experts.4.2 In this list, the first two topics pertain to controlledenvironments. The subsequent topics cover vacuum systemsand pressurized gases.5. Signi

16、ficance and Use5.1 The purpose of this guide is to provide a basic educa-tional structure in the infrastructure aspects of nanotechnologyto organizations developing or carrying out education pro-grams for the nanotechnology workforce. This guide helps todescribe the minimum knowledge base for anyone

17、 involved innanomanufacturing, nanomaterials characterization, or nano-materials research.5.2 The basic education should prepare an individual forvaried roles in the nanotechnology workplace. The material inthis guide may require a post-secondary two-year science ortechnology background to be unders

18、tood sufficiently. Depth onthe topics should be sufficient to transfer between variousapplications of nanotechnology such as nanomaterialfabrication, nanomaterial characterization, nanolithography,and patterning.5.3 Nanoscale materials might present unique health andenvironmental hazards due to thei

19、r unique properties. Thehazards, if any, presented by nanomaterials can be verydifferent from those presented by bulk/macroscopic materials.5.4 Because nanotechnology is a rapidly developing field,the individual educated in nanotechnology needs to be cogni-zant of changing and evolving safety proced

20、ures and practices.Individuals should be aware of how to keep current on thetechnology and have a base education that enables synthesis ofemerging safety procedures and practices.6. General Background Knowledge and Skills6.1 Introductory algebra, chemistry, physics, and statistics atthe college leve

21、l.6.2 The environmental, health, and safety (EHS) hazardspresented by nanoscale materials can be very different fromthose presented by bulk materials. Students should have a basicunderstanding of the unique EHS factors when handlingnanoscale materials.NOTE 1See Guide E2996 for details.6.3 Students s

22、hould also have a basic knowledge of thephysical and chemical properties of nanoscale materials.7. Concepts and Skills to be Covered7.1 The methods or topics, or both, relevant for workforceeducation in nanotechnology infrastructure are given in Section8, with important topics to be covered for each

23、 method listedspecifically. Additional methods or topics, or both, may beadded on an as-needed basis.8. Concepts and Techniques Relevant to NanotechnologyInfrastructure8.1 The minimum recommended course content for work-force education in nanotechnology should include education onthe infrastructure

24、used in nanomanufacturing, nanomaterialscharacterization or nanomaterials research.CONTROLLED ENVIRONMENTS8.2 Cleanroom Classification:8.2.1 Cleanliness level standards ISO 14644-1 versus thediscontinued Federal Standard 209E.8.3 Cleanroom Components:8.3.1 Heating, ventilation, and air conditioning

25、(HVAC)system.8.3.2 Air filtration system:8.3.2.1 High Efficiency Particulate Air (HEPA) filters.8.3.2.2 Ultra Low Particulate Air (ULPA) filters.8.3.3 Lighting system.8.3.4 Deionized water system.8.3.5 Scrubbers.8.3.6 Chemical and chemical waste storage systems.8.4 Safety Equipment:8.4.1 Personal pr

26、otective equipment (PPE).8.4.2 Toxic gas and fire detectors and alarms.8.4.3 Eye wash/shower stations.8.5 Site Surveys Applicability of a Room or Environmentfor a Particular Tool or Equipment:8.5.1 Vibration.8.5.2 Electromagnetic field.8.5.3 Controlled temperature/humidity range.8.6 Fume Hoods:8.6.1

27、 Uses and limitations.8.6.2 Constant flow.8.6.3 Constant volume.8.7 Glove Boxes:8.7.1 Uses and limitations.8.7.2 Pump down and transfer procedures.8.8 Training:8.8.1 Safety.8.8.2 Gowning and de-gowning procedures appropriate forcleanliness level.8.8.3 Cleanroom practices.BIO-CONTROLLED ENVIRONMENTS8

28、.9 Laboratory Safety Level Classification:8.9.1 Biosafety Levels 14.NOTE 2See the ABSA/OSHA BSL Factsheet4for details.8.10 Safety Equipment:8.10.1 Personal protective equipment.NOTE 3For 8.10 and 8.11, see “Biosafety in Microbiological andBiomedical Laboratories, 5th Ed,” published by the Centers fo

29、r Diseasecontrol and Prevention5for details.8.10.2 Biological safety cabinet (BSC):4Available from American Biological Safety Association (ABSA), 1200 Allan-son Road, Mundelein, IL 60060-3808, http:/www.absa.org/pdf/OSHABSLFactSheet.pdf.5Available from Centers for Disease Control and Prevention (CDC

30、), 1600Clifton Rd., Atlanta, GA 30329-4027, http:/www.cdc.gov/biosafety/publications/bmbl5/index.htm.E3059 1628.10.2.1 Classes IIII.8.10.3 Decontamination facilities:8.10.3.1 Autoclave.8.10.3.2 Fumigation chamber.8.11 Training:8.11.1 Safety.8.11.2 Microbiological practices.VACUUM SYSTEMS8.12 Vacuum

31、Definitions:8.12.1 Pressure units.8.12.2 Pressure ranges.8.12.3 Vapor pressure.8.12.4 Absolute versus relative pressure.8.12.5 Gas flow:8.12.5.1 Viscous and molecular flow.8.12.5.2 Laminar and turbulent flow.8.12.6 Pump down curves.8.13 Vacuum System Components:8.13.1 Vacuum tubing:8.13.1.1 Flexible

32、 vacuum tubing.8.13.1.2 Rigid vacuum tubing.8.13.2 Vacuum fittings and flanges:8.13.2.1 O-ring fittings and Klein Flange (KF) flanges.8.13.2.2 Swagelok connections.8.13.2.3 Metal sealed connections Vacuum Coupling Ra-diation (VCR) fittings and Conflat (CF) flanges.8.13.3 Vacuum feedthroughs:8.13.3.1

33、 Bellows and flexible line feedthroughs.8.13.3.2 Mechanical feedthroughs.8.13.3.3 Ferrofluidic feedthroughs.8.13.3.4 Electrical feedthroughs.8.13.3.5 Optical feedthroughs.8.13.4 Vacuum valves:8.13.4.1 Ball valves.8.13.4.2 Butterfly valves.8.13.4.3 Needle valves.8.13.4.4 Gate valves.8.14 Vacuum Gauge

34、s:8.14.1 Vacuum gauge ranges and measurement mecha-nisms.8.14.2 Direct force measurement gauges:8.14.2.1 Bourdon tube gauge.8.14.2.2 Capacitance manometer.8.14.3 Thermal conductivity gauges:8.14.3.1 Thermocouple gauge.8.14.3.2 Pirani gauge.8.14.4 Ionization gauges:8.14.4.1 Thermal ionization gauge (

35、ion gauge).8.14.4.2 Residual gas analyzer (RGA).8.15 Vacuum Pumps:8.15.1 Roughing pumps:8.15.1.1 Rotary vane pump.8.15.1.2 Dry scroll pump.8.15.2 High vacuum pumps:8.15.2.1 Turbo molecular pump (turbo pump).8.15.2.2 Diffusion pump.8.15.2.3 Cryogenic pump (cryo pump).8.15.3 Ultra-high vacuum pumps:8.

36、15.3.1 Sputter ion pump (ion pump).8.15.3.2 Titanium sublimation pump (TSP).PRESSURIZED GASES8.16 Gas Cylinders:8.16.1 Compressed Gas Association (CGA) gas cylinderconnections.8.17 Pressure Regulators.8.18 Gas Tubing.9. Keywords9.1 cleanroom; education; fume hood; glove box; health;nanomaterial; nan

37、oparticle; nanotechnology; pressurized gas;safety; vacuumRELATED MATERIALASTM E3001 Standard Practice for Workforce Education in Nanotech-nology CharacterizationASTM E3034 Standard Guide for Workforce Education in Nanotech-nology Pattern GenerationISO 14644 Series Cleanrooms and Associated Controlle

38、d EnvironmentsISO 14698 Series Cleanrooms and Associated Controlled Environments Biocontamination ControlASTM International takes no position respecting the validity of any patent rights asserted in connection with any item mentionedin this standard. Users of this standard are expressly advised that

39、 determination of the validity of any such patent rights, and the riskof infringement of such rights, are entirely their own responsibility.This standard is subject to revision at any time by the responsible technical committee and must be reviewed every five years andif not revised, either reapprov

40、ed or withdrawn. Your comments are invited either for revision of this standard or for additional standardsand should be addressed to ASTM International Headquarters. Your comments will receive careful consideration at a meeting of theresponsible technical committee, which you may attend. If you fee

41、l that your comments have not received a fair hearing you shouldmake your views known to the ASTM Committee on Standards, at the address shown below.This standard is copyrighted by ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959,United States. Individual repr

42、ints (single or multiple copies) of this standard may be obtained by contacting ASTM at the aboveaddress or at 610-832-9585 (phone), 610-832-9555 (fax), or serviceastm.org (e-mail); or through the ASTM website(www.astm.org). Permission rights to photocopy the standard may also be secured from the Copyright Clearance Center, 222Rosewood Drive, Danvers, MA 01923, Tel: (978) 646-2600; http:/ 163