1、Designation: F1376 92 (Reapproved 2012)Standard Guide forMetallurgical Analysis for Gas Distribution SystemComponents1This standard is issued under the fixed designation F1376; the number immediately following the designation indicates the year oforiginal adoption or, in the case of revision, the ye
2、ar of last revision. A number in parentheses indicates the year of last reapproval. Asuperscript epsilon () indicates an editorial change since the last revision or reapproval.INTRODUCTIONSemiconductor clean rooms are serviced by high-purity gas distribution systems. This guidepresents a procedure t
3、hat may be applied for the evaluation of one or more components considered foruse in such systems.1. Scope1.1 This guide covers corrosion resistant metallic alloys ofthe general class stainless steel, containing chromium, nickel,manganese, and silicon as major alloying additions and possi-bly molybd
4、enum, that are qualified or specified for the mate-rials of components used in high-purity gas supply systems forthe semiconductor industry. This guide is primarily intendedfor testing to determine conformance to applicable compositionand metallurgical specifications as stated in supplier productspe
5、cifications or customer purchase specifications, or both.1.2 Elements analyzed and reported in this guide are asfollows:1.2.1 The alloying additions chromium, nickel, and molyb-denum (if specified in alloy, as in type 316L),1.2.2 The minor elements and residuals manganese, silicon,copper, cobalt, an
6、d stabilizers such as titanium and columbium(niobium), if present,1.2.3 Carbon, sulfur and phosphorus,1.2.4 Nitrogen and oxygen gases,1.2.5 Any additional minor element additions that may bemade as part of the melting and casting practice, such asaluminum and calcium,1.2.6 Available standard analyti
7、cal and reporting techniquesare described for these elements.1.3 Metallurgical characteristics to be analyzed and reportedare inclusion contents, grain structure, mechanical properties,and intergranular corrosion susceptibility.1.4 Limitations:1.4.1 This guide is limited to corrosion resistant metal
8、alloys of the general class stated in the Scope.1.4.2 The test methods cited in this guide are not intended topreclude the use of other generally accepted techniques ofdemonstrated equivalent or superior precision and bias.1.4.3 Inclusion of testing and analysis procedures for anygiven element or me
9、tallurgical characteristic in this guide is notto be construed as being a requirement for incorporation of thatelement or metallurgical characteristic into any specifications.1.5 The values stated in SI units are to be regarded as thestandard. The inch-pound units given in parentheses are forinforma
10、tion only.1.6 This standard does not purport to address all of thesafety concerns, if any, associated with its use. It is theresponsibility of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.2. Re
11、ferenced Documents2.1 ASTM Standards:2A262 Practices for Detecting Susceptibility to IntergranularAttack in Austenitic Stainless SteelsA370 Test Methods and Definitions for Mechanical Testingof Steel ProductsA479/A479M Specification for Stainless Steel Bars andShapes for Use in Boilers and Other Pre
12、ssure VesselsA484/A484M Specification for General Requirements forStainless Steel Bars, Billets, and Forgings2A751 Test Methods, Practices, and Terminology for Chemi-cal Analysis of Steel ProductsE8 Test Methods for Tension Testing of Metallic MaterialsE45 Test Methods for Determining the Inclusion
13、Content ofSteel1This guide is under the jurisdiction of ASTM Committee F01 on Electronicsand is the direct responsibility of Subcommittee F01.10 on Contamination Control.Current edition published July 1, 2012. Published August 2012. Originallyapproved in 1992. Last previous edition approved in 2005
14、as F137692(2005). DOI:10.1520/F1376-92R12.2For referenced ASTM standards, visit the ASTM website, www.astm.org, orcontact ASTM Customer Service at serviceastm.org. For Annual Book of ASTMStandards volume information, refer to the standards Document Summary page onthe ASTM website.Copyright ASTM Inte
15、rnational, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States1E112 Test Methods for Determining Average Grain SizeE353 Test Methods for Chemical Analysis of Stainless,Heat-Resisting, Maraging, and Other Similar Chromium-Nickel-Iron AlloysE572 Test Method for Analysis
16、 of Stainless and Alloy Steelsby X-ray Fluorescence SpectrometryE1019 Test Methods for Determination of Carbon, Sulfur,Nitrogen, and Oxygen in Steel, Iron, Nickel, and CobaltAlloys by Various Combustion and Fusion TechniquesE1086 Test Method for Atomic Emission Vacuum Spectro-metric Analysis of Stai
17、nless Steel by Point-to-Plane Ex-citation TechniqueE1122 Practice for Obtaining JK Inclusion Ratings UsingAutomatic Image Analysis (Withdrawn 2006)3E1245 Practice for Determining the Inclusion or Second-Phase Constituent Content of Metals by Automatic ImageAnalysisE1282 Guide for Specifying the Chem
18、ical Compositions andSelecting Sampling Practices and Quantitative AnalysisMethods for Metals, Ores, and Related MaterialsE1382 Test Methods for Determining Average Grain SizeUsing Semiautomatic and Automatic Image Analysis3. Terminology3.1 Definitions:3.1.1 heat analysischemical analysis of the hea
19、t of stain-less steel determined by analyzing a sample obtained duringthe pouring of the heat for the elements designated in aspecification.3.1.2 inclusiondiscrete second phases (oxides, sulfides,carbides, inter-metallic compounds) that are distributed in themetal matrix.3.1.3 verification analysisc
20、hemical analysis of a semifin-ished or finished product for the purpose of determiningconformance to applicable specifications.4. Significance and Use4.1 This guide defines a procedure for testing componentsbeing considered for installation into a high-purity gas distri-bution system. Application of
21、 this guide is expected to yieldcomparable data among components tested for purposes ofqualification for this installation.4.2 This guide establishes a procedure for determining theelemental composition and metallurgical characteristics ofmetal used to fabricate components for high purity gas distri
22、-bution systems in the semiconductor industry. The compositionand metallurgy of stainless steel may be expected to affectproperties of importance to this application, including surfaceroughness, incidence of surface defects, passivation, corrosionresistance, and welding.5. Materials and Manufacture5
23、.1 Materials and instrumentation are specified in theASTM test methods utilized in this guide.6. Procedure6.1 The general requirements of Specification A484/A484Mprevail for verification analysis, sampling, and test methods.6.2 Specification A479/A479M prevails for the determina-tion of conformance
24、of test results to ASTM standard require-ments.6.3 Chemical Analysis:6.3.1 The definitions, reference methods, practices, andreporting related to the chemical analysis of stainless steelalloys for this application shall be in accordance with TestMethods A751.6.3.2 Use the following wet chemical test
25、 methods ascontrol test methods and as the basis for standardizing instru-mental analysis techniques, in accordance with Test MethodE353:ElementConcentrationRange, %Test Method E353,SectionsChromium 0.10 to 35.00 212 to 220Nickel 10.1 to 48.00 172 to 179Molybdenum 1.5 to 7.0 242 to 249Manganese 0.01
26、 to 5.00 8 to 17Silicon 0.05 to 4.00 46 to 52Copper 0.01 to 5.00 82 to 89Copper 0.01 to 5.00 109 to 118Cobalt 0.01 to 5.00 61 to 70Titanium 0.01 to 0.35 231 to 241Sulfur 0.005 to 0.50 37 to 45Phosphorus 0.002 to 0.35 18 to 29Phosphorus 0.02 to 0.35 164 to 171Aluminum 0.003 to 0.20 71 to 816.3.2.1 Ap
27、paratus, test procedures and data analysis aredescribed in the appropriate sections of the Test Method E353.6.3.3 Use the method of optical emission vacuum spectro-metric analysis in accordance with Method E1086 for heatanalysis or verification analysis of stainless steel samples thatcan be prepared
28、 with a flat surface of 13-mm (0.5-in.)minimum diameter. This test method provides analysis of thefollowing elements in the concentration ranges shown:ElementConcentrationRange,%Chromium 17.0 to 23.0Nickel 7.5 to 13.0Molybdenum 0.01 to 3.0Manganese 0.01 to 2.0Silicon 0.01 to 0.90Copper 0.01 to 0.30C
29、arbon 0.005 to 0.25Phosphorus 0.003 to 0.15Sulfur 0.003 to 0.0656.3.3.1 Apparatus, test procedures, and data analysis aredescribed in the appropriate sections of Method E1086.6.3.4 Use the method of X-ray emission spectrometricanalysis in accordance with Test Method E572 for heat analysisor verifica
30、tion analysis of stainless steel. This test methodprovides for the analysis of the following elements in theconcentration ranges shown:Element ConcentrationRange,%Chromium 11.0 to 19.0Nickel 0.20 to 13.0Molybdenum 0.05 to 3.00Manganese 0.40 to 2.00Copper 0.05 to 3.50Cobalt 0.05 to 0.50Columbium (Nio
31、bium) 0.30 to 0.703The last approved version of this historical standard is referenced onwww.astm.org.F1376 92 (2012)26.3.4.1 Apparatus, test procedures and data analysis aredescribed in the appropriate sections of Test Method E572.6.3.5 The following test methods may be used for heatanalysis and ve
32、rification analysis for the determination ofcarbon, sulfur, nitrogen, and oxygen in stainless steel, inaccordance with Test Method E1019.ElementConcentrationRange, %Test Method E1019,SectionsCarbon 0.005 to 4.5 9 to 19Sulfur 0.001 to 0.010 20 to 30Nitrogen 0.001 to 0.200 31 to 41Oxygen 0.001 to 0.00
33、5 42 to 536.3.5.1 Apparatus, test procedures, and data analysis aredescribed in the appropriate sections of Test Method E1019.6.3.6 Guide the development of specifications for composi-tional requirements and the identification of appropriate sam-pling and quantitative analysis methodologies referenc
34、ed inproduct specifications in accordance with Guide E1282.6.3.7 An example of data for chemical analysis is providedin Table 1.6.4 Inclusion Contents:6.4.1 Determine the extent and types of inclusions that formas a result of deoxidation practice or limited solubility in solidsteel by Method A, Plat
35、e III, of Practice E45, for the fourcategories of inclusions addressed. Alternatively, obtain inclu-sion ratings by automatic image analysis techniques in accor-dance with Practice E1122. Do not rate inclusions such ascarbides, nitrides, carbonitrides, borides, and intermetallicphases using these me
36、thods.6.4.2 Perform characterization of the amount, number, size,and spacing of any discrete second phase in stainless steel byautomatic image analysis in accordance with Practice E1245.6.4.3 The definitions, apparatus, methods, practices, andreporting relating to the determination of inclusion cont
37、ents instainless steel alloys for this application are in accordance withthe ASTM practice used (see 6.4.1 and 6.4.2).6.4.4 An example of data for inclusion contents is providedin Table 2.6.5 Grain Size:6.5.1 Perform estimation of the average grain size in stain-less steel in accordance with Test Me
38、thods E112. Thedefinitions, apparatus, methods, practices, and reporting statedin this test method apply.6.5.2 Alternatively, the average grain size may be deter-mined by automatic image analysis in accordance with TestMethod E1382.6.5.3 An example of data for grain size is provided in Table3.6.6 Me
39、chanical Properties:6.6.1 The definitions, practices, and reporting of the me-chanical properties of stainless steel alloys for this applicationare in accordance with Test Methods and Definitions A370.6.6.2 The tension test properties (tensile strength, yieldstrength, elongation and reduction of are
40、a) of metals for thisapplication are determined in accordance with Test MethodsE8. Apparatus, test procedures, and data analysis are describedin the appropriate sections of this test method.6.6.3 An example of data for mechanical properties isprovided in Table 4.6.7 Susceptibility to Intergranular C
41、orrosion:6.7.1 Susceptibility to intergranular attack due to precipita-tion of chromium carbides at the grain boundaries is detectedby the test methods of Practices A262. Apparatus, test proce-dures and data analysis are described in the appropriatesections of Practices A262.6.7.2 Screen samples for
42、 susceptibility to intergranular at-tacks by use of Practices A262, Practice A. Etch structuresclassified as“ Step” or “Dual” shall be acceptable.6.7.3 Subject etch structures classified as “Ditch Structures”as described in Practices A262, Practice A, must be furthertested in accordance with Practic
43、es A262, Practice E, todetermine susceptibility to intergranular attack. Acceptancecriteria is in accordance with Practice E. Report results.7. Keywords7.1 alloy composition; components; composition; contami-nation; corrosion; gas distribution components; metallurgicalanalysis; metals; semiconductor
44、 processing; stainless steelTABLE 1 Chemical AnalysisAAnalyzed composition in weight, %Chromium 17.34Nickel 11.69Molybdenum 2.13Manganese 1.62Silicon 0.42Copper 0.10Cobalt 0.05Titanium .Columbium .Carbon 0.018Sulfur 0.009Phosphorus 0.023Nitrogen 0.040Oxygen 0.002Aluminum 0.005Calcium .AComposition m
45、eets the chemical requirements for S31603 (Type 316L) stainlesssteel in accordance with Specification A479/A479M.TABLE 2 Inclusion ContentsSampleInclusion TypeAType A Type B Type C Type DThin Heavy Thin Heavy Thin Heavy Thin Heavy110.50.50000.5021.50000.50003100.50000.50410.5000000ARating in accorda
46、nce with Practice E45, MethodA, Plate III, sampled from billets.TABLE 3 Grain StructureAverage grain size number in accordance with Test Methods E1125to6F1376 92 (2012)3ASTM International takes no position respecting the validity of any patent rights asserted in connection with any item mentionedin
47、this standard. Users of this standard are expressly advised that determination of the validity of any such patent rights, and the riskof infringement of such rights, are entirely their own responsibility.This standard is subject to revision at any time by the responsible technical committee and must
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49、esponsible technical committee, which you may attend. If you feel that your comments have not received a fair hearing you shouldmake your views known to the ASTM Committee on Standards, at the address shown below.This standard is copyrighted by ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959,United States. Individual reprints (single or multiple copies) of this standard may be obtained by contacting ASTM at the aboveaddress or at 610-832-9585 (phone), 610-832-9555 (fax), or serviceastm.org (e-mail); or through the ASTM website(www.astm.o
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