ASTM F1513-1999(2003) Standard Specification for Pure Aluminum (Unalloyed) Source Material for Electronic Thin Film Applications《电子薄膜器件用纯铝(非合金)原材料标准规范》.pdf

1、Designation: F 1513 99 (Reapproved 2003)Standard Specification forPure Aluminum (Unalloyed) Source Material for ElectronicThin Film Applications1This standard is issued under the fixed designation F 1513; the number immediately following the designation indicates the year oforiginal adoption or, in

2、the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. Asuperscript epsilon (e) indicates an editorial change since the last revision or reapproval.1. Scope1.1 This specification covers pure aluminum metal (unal-loyed) for use in evaporation s

3、ources and sputtering targets.This material is intended as a raw material for electronicapplications. The material is used as-supplied in some cases(for example, as e-beam evaporation sources). In other in-stances it may be remelted, alloyed, cast and processed by thepurchaser to make finished produ

4、cts (for example, sputteringtargets).1.2 This specification sets purity grade levels, physicalattributes, analytical methods, and packaging.1.3 The values stated in SI units are to be regarded as thestandard. The values given in parentheses are for informationonly.2. Referenced Documents2.1 ASTM Sta

5、ndards:2D 1971 Practices for Digestion of Samples for Determina-tion of Metals by Flame Atomic Absorption or PlasmaEmission Spectroscopy3. Terminology3.1 material lotmaterial melted and cast from one cru-cible charge.4. Classification4.1 Grades of aluminum are defined in Table 1. Impuritycontents ar

6、e reported in parts per million by weight (wt ppm).4.2 Purity and total metallic impurity levels are based uponelements listed in Table 2.5. Ordering Information5.1 Orders for pure aluminum source material shall includethe following:5.1.1 Grade (4.1),5.1.2 Configuration (8.1 and 8.2),5.1.3 Whether o

7、r not certification is required (12.1), and5.1.4 Whether or not a sample representative of the finishedproduct is required to be provided by the supplier to thepurchaser.6. Impurities6.1 The minimum suite of metallic impurity elements to beanalyzed is defined in Table 2. Acceptable analysis methodsa

8、nd detection limits are specified in Section 11. Elements notdetected will be counted and reported as present at thedetection limit. Additional elements may be analyzed andreported, as agreed upon between the supplier and the pur-chaser, but these shall not be counted in defining the gradedesignatio

9、n.6.2 Nonmetalic elements to be analyzed and reported are C,H, O, N, and S.1This specification is under the jurisdiction of ASTM Committee F01 onElectronics and is the direct responsibility of Subcommittee F01.17 on SputterMetallization.Current edition approved Dec. 10, 1999. Published February 2000

10、. Originallypublished as F 151394. Last previous edition F 151394.2For referenced ASTM standards, visit the ASTM website, www.astm.org, orcontact ASTM Customer Service at serviceastm.org. For Annual Book of ASTMStandards volume information, refer to the standards Document Summary page onthe ASTM web

11、site.TABLE 1 Aluminum GradesGrade Purity, %Maximum Metallic ImpurityContent (by weight), ppm6N 99.9999 15N5 99.9995 55N 99.999 10TABLE 2 Minimum Suite of Metallic Elements to be AnalyzedAntimony Gold SilverArsenic Iron SodiumBeryllium Lithium ThoriumBoron Magnesium TinCalcium Manganese TitaniumCeriu

12、m Nickel UraniumCesium Phosphorus VanadiumChromium Potassium ZincCopper Silicon Zirconium1Copyright ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.6.3 Acceptable limits and analytical techniques for particu-lar elements in critical application

13、s shall be as agreed uponbetween the supplier and the purchaser.6.4 Fluorine and chlorine may be important impurities insome applications. Acceptable limits and analytical techniquesshall be agreed upon between the supplier and the purchaser.7. Grain Size7.1 Grain size and measurement method for gra

14、in size shallbe agreed upon between the supplier and the purchaser.8. Dimensions8.1 Each product shall conform to an appropriate engineer-ing drawing, as agreed upon between the supplier and thepurchaser.8.2 Nominal dimensions, tolerances, and other attributesshall be agreed upon between the supplie

15、r and the purchaser.9. Workmanship, Finish, and Appearance9.1 Workmanship, finish, and appearance shall be agreedupon between the supplier and the purchaser.9.2 Surface must be free of any contaminates such as moldrelease, dirt, or oils that could adversely effect the purity of thematerial when reme

16、lted, unless otherwise agreed upon betweensupplier and purchaser.10. Sampling10.1 Analyses for impurities shall be performed on asamples that are representative of the suppliers finishedmaterial lots.11. Analytical Methods11.1 Analysis for impurities in 6.2 and Table 2 shall beperformed as follows:1

17、1.1.1 Alkalies (Potassium, Lithium, Sodium)Atomic ab-sorption (AA), glow discharge mass spectrometer (GDMS) orany other technique with a minimum detection limit (mdl) of0.05 wt. ppm. Use Practices D 1971, as applicable, for samplepreparation.11.1.2 Carbon, Oxygen, and SulfurFusion and gasextraction/

18、infrared spectroscopy or GDMS; mdl 10 wt. ppm.11.1.3 NitrogenFusion and gas extraction/thermal con-ductivity analysis; mdl 5 wt. ppm.11.1.4 HydrogenFusion and gas extraction/thermal con-ductivity; mdl 0.3 wt. ppm.11.1.5 All OthersAA, inductively coupled plasma (ICP)emission spectroscopy, spark sourc

19、e mass spectroscopy(SSMS), or GDMS; mdl 0.01 wt. ppm for 6N grade, 0.1 wt.ppm for 5N5 and 5N grade. Use Practices D 1971, as appli-cable, for sample preparation.11.1.6 Other analytical techniques may be used providedthey can be proved equivalent to the methods specified, andhave minimum detection li

20、mits of the specified methods.12. Certification12.1 When required by the purchaser, a certificate ofanalysis/compliance that represents the finished material lotshall be provided for each lot by the supplier.12.2 The certificate of analysis/compliance shall state themanufacturers or suppliers name,

21、the suppliers lot number,the grade level (Section 4), impurity levels (Section 6), methodof analysis (Section 11), and any other information as agreedupon between the supplier and the purchaser.12.3 Impurity levels are to be reported in the certificate ofanalysis/compliance using actual analytical (

22、not “typical”)results for the material lot. All impurity levels, except uraniumand thorium, shall be reported in wt. ppm. Uranium andthorium are ordinarily controlled at very low levels in thismaterial and may be reported in parts per billion by weight (wt.ppb). Nondetected trace impurities shall be

23、 reported as presentat the mdl concentrations (6.1).13. Packaging and Package Marking13.1 Each piece shall be enclosed in a shipping carton thatinsures product integrity during shipment.14. Keywords14.1 aluminum; coating; evaporation; sputtering; targets;thin films; vacuum coatingASTM International

24、takes no position respecting the validity of any patent rights asserted in connection with any item mentionedin this standard. Users of this standard are expressly advised that determination of the validity of any such patent rights, and the riskof infringement of such rights, are entirely their own

25、 responsibility.This standard is subject to revision at any time by the responsible technical committee and must be reviewed every five years andif not revised, either reapproved or withdrawn. Your comments are invited either for revision of this standard or for additional standardsand should be add

26、ressed to ASTM International Headquarters. Your comments will receive careful consideration at a meeting of theresponsible technical committee, which you may attend. If you feel that your comments have not received a fair hearing you shouldmake your views known to the ASTM Committee on Standards, at

27、 the address shown below.This standard is copyrighted by ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959,United States. Individual reprints (single or multiple copies) of this standard may be obtained by contacting ASTM at the aboveaddress or at 610-832-9585 (phone), 610-832-9555 (fax), or serviceastm.org (e-mail); or through the ASTM website(www.astm.org).F 1513 99 (2003)2