ASTM F1594-1995(2003) Standard Specification for Pure Aluminum (Unalloyed) Source Material for Vacuum Coating Applications《真空镀膜用纯铝(未掺杂质)原材料标准规范》.pdf

1、Designation: F 1594 95 (Reapproved 2003)Standard Specification forPure Aluminum (Unalloyed) Source Material for VacuumCoating Applications1This standard is issued under the fixed designation F 1594; the number immediately following the designation indicates the year oforiginal adoption or, in the ca

2、se of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. Asuperscript epsilon (e) indicates an editorial change since the last revision or reapproval.1. Scope1.1 This specification covers pure aluminum metal (unal-loyed) for use as raw material for ma

3、king evaporation sources,sputtering targets, and superconducting wires.1.2 This specification sets purity grade levels, physicalattributes, analytical methods, and packaging requirements.2. Referenced Documents2.1 ASTM Standards:2E29 Practice for Using Significant Digits in Test Data toDetermine Con

4、formance with SpecificationsE112 Test Method for Determining the Average Grain Sizeof Metals3. Terminology3.1 Definitions:3.1.1 raw material lota quantity of material that is melted,consolidated, or purified, or both, in one equipment run as anominally uniform batch of metal.4. Classification4.1 Gra

5、des of aluminum are defined in Table 1.4.2 Purity and total metallic impurity levels are based uponelements listed in Table 2.5. Ordering Information5.1 Orders for these products shall include the following:5.1.1 Grade (see 4.1).5.1.2 Configuration (see 8.1).5.1.3 Whether or not certification is req

6、uired (see 12.1).5.1.4 Whether or not a sample representative of the finishedproduct is required to be provided by the supplier to thepurchaser.6. Impurities6.1 The suite of metallic elements to be assayed for isdefined in Table 2. Acceptable analysis methods are specifiedin Section 12. Elements not

7、 detected will be counted andreported as present at the detection limit. Additional elementsmay be analyzed and reported, as agreed upon betweensupplier and purchaser, but these shall not be counted indefining the grade designation.6.2 Acceptable concentration limits for individual elementsand analy

8、tical techniques shall be agreed upon between thesupplier and the purchaser.7. Physical Properties7.1 Grain size and measurement method for grain size shallbe agreed upon between the supplier and the purchaser. Whenthe grain morphology is equiaxied, refer to Practice E112.8. Dimensions8.1 Each produ

9、ct shall conform to an appropriate engineer-ing drawing.8.2 Nominal dimensions, tolerances, and other attributesshall be agreed upon between the supplier and the purchaser.9. Workmanship, Finish, and Appearance9.1 Workmanship, finish, and appearance shall be agreedupon between the supplier and the p

10、urchaser.9.2 Surface must be free of any contaminates such as moldrelease, dirt, or oils that could adversely affect the purity of thematerial when remelted, unless otherwise agreed upon betweensupplier and purchaser.1This specification is under the jurisdiction of ASTM Committee F01 onElectronics a

11、nd is under the direct responsibility of Subcommittee F01.17 on SputterMetallization.Current edition approved April 15, 1995. Published June 1995.2For referenced ASTM standards, visit the ASTM website, www.astm.org, orcontact ASTM Customer Service at serviceastm.org. For Annual Book of ASTMStandards

12、 volume information, refer to the standards Document Summary page onthe ASTM website.TABLE 1 Aluminum GradesGrade Purity, %Maximum Total MetallicImpurity Level (by weight),ppm4N5 99.995 504N 99.99 1003N8 99.98 2003N5 99.95 5001Copyright ASTM International, 100 Barr Harbor Drive, PO Box C700, West Co

13、nshohocken, PA 19428-2959, United States.10. Sampling10.1 Analyses for impurities shall be performed on a samplethat is representative of the finished material lot provided bythe supplier.11. Analytical Methods11.1 Analysis for impurities in Table 2 and 6.2 shall beperformed using optical emission s

14、pectroscopy, atomic absorp-tion, or any other technique that meets the purchaser-requireddetection limits.11.2 Impurity levels shall be reported using Practice E29.12. Certification12.1 When required by the purchaser, a certificate ofanalysis/compliance that represents the finished material lotshall

15、 be provided for each lot by the supplier.12.2 The certificate of analysis/compliance shall state themanufacturers or suppliers name, the suppliers lot number,impurity levels, method of analysis, and any other informationagreed upon between the supplier and the purchaser.12.3 Impurity levels may be

16、reported in the certificate ofanalysis/compliance using actual analytical results for thematerial lot, or by a certificate of analysis/compliance usingtypical analytical results based upon historical statistical datafor the same process. Certification and the manner of reportingimpurity levels shall

17、 be agreed upon between the supplier andthe purchaser.13. Packaging13.1 Each piece shall be enclosed in a shipping carton thatensures product integrity during shipment.14. Keywords14.1 aluminum source; evaporation; thin films; vacuumcoatingASTM International takes no position respecting the validity

18、 of any patent rights asserted in connection with any item mentionedin this standard. Users of this standard are expressly advised that determination of the validity of any such patent rights, and the riskof infringement of such rights, are entirely their own responsibility.This standard is subject

19、to revision at any time by the responsible technical committee and must be reviewed every five years andif not revised, either reapproved or withdrawn. Your comments are invited either for revision of this standard or for additional standardsand should be addressed to ASTM International Headquarters

20、. Your comments will receive careful consideration at a meeting of theresponsible technical committee, which you may attend. If you feel that your comments have not received a fair hearing you shouldmake your views known to the ASTM Committee on Standards, at the address shown below.This standard is

21、 copyrighted by ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959,United States. Individual reprints (single or multiple copies) of this standard may be obtained by contacting ASTM at the aboveaddress or at 610-832-9585 (phone), 610-832-9555 (fax), or serviceastm.org (e-mail); or through the ASTM website(www.astm.org).TABLE 2 Minimum Metallic Elements to be Assayedboron beryllium bismuth calcium cadmium cobalt chromium copper iron gallium vanadiumlithium magnesium manganese sodium nickel lead silicon tin strontium titanium zinczirconiumF 1594 95 (2003)2