BS EN 16602-70-50-2015 Space product assurance Particles contamination monitoring for spacecraft systems and cleanrooms《航天产品保证 航天器系统和清洁室的颗粒浓度监控》.pdf

1、BSI Standards PublicationBS EN 16602-70-50:2015Space product assuranceParticles contamination monitoring for spacecraft systems and cleanroomsBS EN 16602-70-50:2015 BRITISH STANDARDNational forewordThis British Standard is the UK implementation ofEN 16602-70-50:2015.The UK participation in its prepa

2、ration was entrusted to Technical Committee ACE/68, Space systems and operations.A list of organizations represented on this committee can be obtained on request to its secretary.This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its co

3、rrect application. The British Standards Institution 2015.Published by BSI Standards Limited 2015ISBN 978 0 580 86589 3 ICS 49.140 Compliance with a British Standard cannot confer immunity from legal obligations.This British Standard was published under the authority of the Standards Policy and Stra

4、tegy Committee on 31 January 2015.Amendments/corrigenda issued since publicationDate T e x t a f f e c t e dEUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN 16602-70-50 January 2015 ICS 49.140 English version Space product assurance - Particles contamination monitoring for spacecraft systems and

5、 cleanrooms Assurance produit des projets spatiaux - Surveillance de la contamination aux particules des systmes orbitaux et des salles blanches Raumfahrtproduktsicherung - berwachung der Teilchenkontamination von Raumfahrzeugsystemen und Reinrumen This European Standard was approved by CEN on 25 Oc

6、tober 2014. CEN and CENELEC members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standa

7、rds may be obtained on application to the CEN-CENELEC Management Centre or to any CEN and CENELEC member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN and CENELEC member into

8、its own language and notified to the CEN-CENELEC Management Centre has the same status as the official versions. CEN and CENELEC members are the national standards bodies and national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finlan

9、d, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United Kingdom. CEN-CENELEC Management Centre: Avenue

10、Marnix 17, B-1000 Brussels 2015 CEN/CENELEC All rights of exploitation in any form and by any means reserved worldwide for CEN national Members and for CENELEC Members. Ref. No. EN 16602-70-50:2015 ETable of contents Foreword 4 Introduction 5 1 Scope . 6 2 Normative references . 7 3 Terms, definitio

11、ns and abbreviated terms 8 3.1 Terms defined in other standards . 8 3.2 Terms specific to the present standard . 8 3.3 Abbreviated terms. 11 4 Particulate cleanliness monitoring requirements 12 4.1 Cleanliness requirement specification overview 12 4.2 Cleanliness and contamination control plan 12 5

12、Quantitative method requirements . 13 5.1 Particles sampling from surfaces 13 5.1.1 Tape lift method 13 5.1.2 Direct deposition on silicon wafers 16 5.1.3 Rinsing (direct or indirect) . 18 5.2 Volume sampling 21 5.2.1 Particles sampling from filtered liquid samples 21 5.2.2 Particles sampling from f

13、iltered gas samples. 23 5.2.3 Particles sampling with automatic counters . 25 5.3 Particles counting with microscope . 25 5.3.1 Introduction . 25 5.3.2 General requirements . 25 5.3.3 Apparatus . 26 5.3.4 Method 26 5.3.5 Statistical sampling method . 27 5.3.6 Conversion of particle count to obscurat

14、ion factor . 29 5.4 Particle fallout measurement (PFO) 30 5.4.1 Introduction . 30 5.4.2 General requirements . 30 BS EN 16602-70-50:2015 EN 16602-70-50:2015 (E)5.4.3 Apparatus . 30 5.4.4 Cleaning of the sensors 31 5.4.5 Packing of PFO sensors 31 5.4.6 Transportation of PFO sensors . 31 5.4.7 Exposur

15、e of PFO sensors . 32 5.4.8 Location of the PFO sensors . 32 5.4.9 Fixation of the PFO sensors 33 6 Visual inspection method requirements. 34 6.1 Introduction . 34 6.2 General requirements . 34 6.3 Visual inspection of small items 35 6.3.1 Visual inspection of small contamination sensitive items . 3

16、5 6.3.2 Visual inspection of small non sensitive contamination items 37 6.4 In situ visual inspection of spacecraft 38 6.4.1 Introduction . 38 6.4.2 Apparatus . 38 6.4.3 Method 38 7 Quality assurance . 39 7.1 Records 39 7.2 Report . 39 7.3 Acceptance criteria and nonconformance . 39 Annex A (normati

17、ve) Request for particle contamination monitoring - DRD . 41 Annex B (normative) Particulate contamination monitoring procedure (Work proposal) - DRD 42 Annex C (normative) Report on particle contamination monitoring - DRD . 44 Annex D (normative) Report on visual inspection - DRD 47 Bibliography .

18、50 Figures Figure 5-1: Schematic for vacuum filtering apparatus . 23 Figure 5-2: Gas sampling schematics . 25 Figure 5-3: Mask example for statistical sampling 28 Tables Table 5-1: Ranges and average areas for a single particle in each range 30 BS EN 16602-70-50:2015 EN 16602-70-50:2015 (E)Foreword

19、This document (EN 16602-70-50:2015) has been prepared by Technical Committee CEN/CLC/TC 5 “Space”, the secretariat of which is held by DIN. This standard (EN 16602-70-50:2015) originates from ECSS-Q-ST-70-50C. This European Standard shall be given the status of a national standard, either by publica

20、tion of an identical text or by endorsement, at the latest by July 2015, and conflicting national standards shall be withdrawn at the latest by July 2015. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and/or CENELEC shall no

21、t be held responsible for identifying any or all such patent rights. This document has been prepared under a mandate given to CEN by the European Commission and the European Free Trade Association. This document has been developed to cover specifically space systems and has therefore precedence over

22、 any EN covering the same scope but with a wider domain of applicability (e.g. : aerospace). According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus,

23、Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kin

24、gdom. BS EN 16602-70-50:2015 EN 16602-70-50:2015 (E)Introduction Particulate contaminants can be hazardous to spacecraft in a number of ways including failure of precision mechanisms, light absorption and scattering, points of high local electric field and associated electrostatic discharge, and noi

25、se on electrical contacts. It is therefore important to control, measure and verify the particulate contamination levels on spacecraft systems and the environments in which they reside, in order that an assessment can be made on any hazards that may be present as a result of such contamination. The

26、objective of this standard is to ensure that the particle monitoring of spacecraft systems and cleanrooms utilised in the production of such systems, is carried out in an appropriate manner, and is controlled both in terms of the precision of the measurements and the reproducibility of such measurem

27、ents. BS EN 16602-70-50:2015 EN 16602-70-50:2015 (E)1 Scope This standard defines the requirements and guidelines for the measurement of particulate contamination on the surfaces of spacecraft systems and those of the cleanrooms or other cleanliness controlled areas in which they reside. This includ

28、es the measurement of particulate contamination that is present on the spacecraft or cleanroom surfaces via the use of representative witness samples placed in the vicinity of the spacecraft hardware, the direct measurement of particulate contamination levels on surfaces of spacecraft hardware from

29、the direct surface transfer to adhesive tape-lift samples and particulate contaminant levels within fluids used for the cleaning or rinsing of such spacecraft system components and cleanroom surfaces. This standard also defines the methods to be used for the visual inspection of spacecraft system ha

30、rdware for particulate contamination. The measurement of airborne particulate contamination is not covered in this standard and ISO 14644 “Cleanrooms and associated controlled environments” is applicable in this case. This standard does not cover particulate contamination monitoring for spacecraft p

31、ropulsion hardware which is covered in ECSS-E-ST-35-06. This standard may be tailored for the specific characteristic and constrains of a space project in conformance with ECSS-S-ST-00. BS EN 16602-70-50:2015 EN 16602-70-50:2015 (E)2 Normative references The following normative documents contain pro

32、visions which, through reference in this text, constitute provisions of this ECSS Standard. For dated references, subsequent amendments to, or revision of any of these publications do not apply. However, parties to agreements based on this ECSS Standard are encouraged to investigate the possibility

33、of applying the more recent editions of the normative documents indicated below. For undated references, the latest edition of the publication referred to applies. EN reference Reference in text Title EN 16601-00-01 ECSS-S-ST-00-01 ECSS System - Glossary of terms EN 16602-10-09 ECSS-Q-ST-10-09 Space

34、 product assurance - Nonconformance control system EN 16602-20 ECSS-Q-ST-20 Space product assurance - Quality assurance EN 16602-70-01 ECSS-Q-ST-70-01 Space product assurance - Cleanliness and contamination control ISO 14952-3 Space systems - Surface cleanliness of fluid systems - Part 3: Analytical

35、 procedures for the determination of nonvolatile residues and particulate contamination BS EN 16602-70-50:2015 EN 16602-70-50:2015 (E)3 Terms, definitions and abbreviated terms 3.1 Terms defined in other standards For the purpose of this Standard, the terms and definitions from ECSS-S-ST-00-01 apply

36、. 3.2 Terms specific to the present standard 3.2.1 background count measurement of the contamination levels produced by the measurement method (and associated apparatus) and the measurement environment as distinct from the inherent contamination level of the item to be measured 3.2.2 background subt

37、raction act of subtracting a background count from a measurement 3.2.3 black light illumination illumination which predominantly produces light in the near UV region (310 nm to 400 nm) 3.2.4 bubble volume of trapped gas encapsulated by another medium 3.2.5 cleanliness and contamination control plan

38、plan which defines the organized actions to control the level of contamination 3.2.6 cleanliness controlled area area in which there are specific measures to control and monitor contamination which allows the counting of particles to be performed with sufficient accuracy as defined by the background

39、 count 3.2.7 cleanliness requirement specification specification that defines the requirement for allowable contamination levels 3.2.8 cleanliness verification activity intended to verify that the actual cleanliness conditions of the spacecraft system, the cleanrooms, and other environments in which

40、 the BS EN 16602-70-50:2015 EN 16602-70-50:2015 (E)spacecraft system will reside, are in conformance with the applicable specifications and other cleanliness requirements 3.2.9 compatible not deteriorating the functionality, performance and integrity of any item or surface 3.2.10 contamination poten

41、tial potential amount of contaminant in the source which can produce contamination defined in terms of the obscuration factor per unit time NOTE The obscuration factor per unit time can be expressed in (mm2/m2)/h. 3.2.11 contamination sensitive article which, if exposed to contamination, can be adve

42、rsely affected in terms of its designed function 3.2.12 effective sample area area on a surface that has been exposed to a contamination source 3.2.13 lint-free resistant to fibre generation 3.2.14 membrane filter polymer film with specific pore sizes, designed to separate particles from liquids or

43、gases 3.2.15 non-shedding resistant to particle generation 3.2.16 obscuration factor ratio of the projected area of all particles to the total surface area on which they rest 3.2.17 particle unit of matter with observable length, width and thickness NOTE For the purposes of this standard the particl

44、es have typical dimensions of 0,1 m to 1000 m. 3.2.18 particulate contamination airborne or surface contamination relating to particles 3.2.19 particle fallout accumulated deposit of particulate matter on a surface BS EN 16602-70-50:2015 EN 16602-70-50:2015 (E)3.2.20 representative sample sample whi

45、ch is designed to be the same as another item, either in physical form or the environment in which it resides, or both 3.2.21 ripple topographical in-homogeneity usually in the form of a wave pattern 3.2.22 sensitive surface surface that has a high probability of damage 3.2.23 spectral grade measure

46、 of solvent purity determined from its absorption spectrum NOTE Typically spectral grade solvents have a purity of greater than 99,5 %. 3.2.24 tape-lift method of transferring particulate contamination from a surface with an adhesive tape 3.2.25 tape-lift sample length of transparent adhesive tape t

47、hat has been used for a tape lift and subsequently applied to a clean substrate to encapsulate any contamination 3.2.26 trained inspector inspector certified by a third party certification body, or with proven on the job experience that is agreed with or recognized by the customer 3.2.27 ultrasonic

48、bath bath containing liquid and a transducer which produces ultrasonic waves which produce microscopic cavitation bubbles in the liquid which aids in the removal of particles from surfaces of an item placed in the liquid NOTE Typical frequency of ultrasonic waves is from 15 kHz to 400 kHz. 3.2.28 vi

49、sibly clean absence of surface contamination when examined with a specific light source, angle of incidence and viewing distance using normal or magnified vision NOTE 1 Different inspection methods are available, depending on: hardware to be inspected, in term of size and accessibility and sensitivity to contamination inspection distance light spectra (including UV), intensities and angles NOTE 2 The “visibly clean” level roughly corresponds to an obscuration factor smaller than 300 mm2/m2BS EN 16602-70-50:2015 EN 16602-70-50:2015 (E)when inspected from a distance of 30 cm