BS EN 60749-5-2017 Semiconductor devices Mechanical and climatic test methods Steady-state temperature humidity bias life test《半导体器件 机械和气候试验方法 稳态温度湿度偏差寿命试验》.pdf

1、Semiconductor devices Mechanical and climatic test methodsPart 5: Steady-state temperature humidity bias life testBS EN 60749-5:2017BSI Standards PublicationWB11885_BSI_StandardCovs_2013_AW.indd 1 15/05/2013 15:06EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN 60749-5 July 2017 ICS 31.080.01 Su

2、persedes EN 60749-5:2003 English Version Semiconductor devices - Mechanical and climatic test methods - Part 5: Steady-state temperature humidity bias life test (IEC 60749-5:2017) Dispositifs semiconducteurs - Mthodes dessais mcaniques et climatiques - Partie 5: Essai continu de dure de vie sous tem

3、prature et humidit avec polarisation (IEC 60749-5:2017) Halbleiterbauelemente - Mechanische und klimatische Prfverfahren - Teil 5: Lebensdauerprfung bei konstanter Temperatur und Feuchte unter elektrischer Beanspruchung (IEC 60749-5:2017) This European Standard was approved by CENELEC on 2017-05-15.

4、 CENELEC members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained

5、 on application to the CEN-CENELEC Management Centre or to any CENELEC member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CENELEC member into its own language and notified to th

6、e CEN-CENELEC Management Centre has the same status as the official versions. CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus, the Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hu

7、ngary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom. European Committee for Electrotechnical Standardization Comit Europen de Normalisation Elec

8、trotechnique Europisches Komitee fr Elektrotechnische Normung CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels 2017 CENELEC All rights of exploitation in any form and by any means reserved worldwide for CENELEC Members. Ref. No. EN 60749-5:2017 E National forewordThis British Standar

9、d is the UK implementation of EN 60749-5:2017. It is identical to IEC 60749-5:2017. It supersedes BS EN 60749-5:2003 which is withdrawn.The UK participation in its preparation was entrusted to Technical Committee EPL/47, Semiconductors.A list of organizations represented on this committee can be obt

10、ained on request to its secretary.This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. The British Standards Institution 2017 Published by BSI Standards Limited 2017ISBN 978 0 580 95800 7ICS 31.080.01Compliance wi

11、th a British Standard cannot confer immunity from legal obligations.This British Standard was published under the authority of the Standards Policy and Strategy Committee on 31 July 2017.Amendments/corrigenda issued since publicationDate Text affectedBRITISH STANDARDBS EN 60749-5:2017EUROPEAN STANDA

12、RD NORME EUROPENNE EUROPISCHE NORM EN 60749-5 July 2017 ICS 31.080.01 Supersedes EN 60749-5:2003 English Version Semiconductor devices - Mechanical and climatic test methods - Part 5: Steady-state temperature humidity bias life test (IEC 60749-5:2017) Dispositifs semiconducteurs - Mthodes dessais mc

13、aniques et climatiques - Partie 5: Essai continu de dure de vie sous temprature et humidit avec polarisation (IEC 60749-5:2017) Halbleiterbauelemente - Mechanische und klimatische Prfverfahren - Teil 5: Lebensdauerprfung bei konstanter Temperatur und Feuchte unter elektrischer Beanspruchung (IEC 607

14、49-5:2017) This European Standard was approved by CENELEC on 2017-05-15. CENELEC members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibli

15、ographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CENELEC member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the res

16、ponsibility of a CENELEC member into its own language and notified to the CEN-CENELEC Management Centre has the same status as the official versions. CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus, the Czech Republic, Denmark, Estonia, Fin

17、land, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom. European Committee

18、for Electrotechnical Standardization Comit Europen de Normalisation Electrotechnique Europisches Komitee fr Elektrotechnische Normung CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels 2017 CENELEC All rights of exploitation in any form and by any means reserved worldwide for CENELEC M

19、embers. Ref. No. EN 60749-5:2017 E BS EN 60749-5:2017EN 60749-5:2017 2 European foreword The text of document 47/2367/FDIS, future edition 2 of IEC 60749-5, prepared by IEC/TC 47 “Semiconductor devices“ was submitted to the IEC-CENELEC parallel vote and approved by CENELEC as EN 60749-5:2017. The fo

20、llowing dates are fixed: latest date by which the document has to be implemented at national level by publication of an identical national standard or by endorsement (dop) 2018-02-15 latest date by which the national standards conflicting with the document have to be withdrawn (dow) 2020-05-15 This

21、document supersedes EN 60749-5:2003. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CENELEC shall not be held responsible for identifying any or all such patent rights. Endorsement notice The text of the International Standard IE

22、C 60749-5:2017 was approved by CENELEC as a European Standard without any modification. BS EN 60749-5:2017EN 60749-5:2017 2 European foreword The text of document 47/2367/FDIS, future edition 2 of IEC 60749-5, prepared by IEC/TC 47 “Semiconductor devices“ was submitted to the IEC-CENELEC parallel vo

23、te and approved by CENELEC as EN 60749-5:2017. The following dates are fixed: latest date by which the document has to be implemented at national level by publication of an identical national standard or by endorsement (dop) 2018-02-15 latest date by which the national standards conflicting with the

24、 document have to be withdrawn (dow) 2020-05-15 This document supersedes EN 60749-5:2003. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CENELEC shall not be held responsible for identifying any or all such patent rights. Endorse

25、ment notice The text of the International Standard IEC 60749-5:2017 was approved by CENELEC as a European Standard without any modification. EN 60749-5:2017 3 Annex ZA (normative) Normative references to international publications with their corresponding European publications The following document

26、s, in whole or in part, are normatively referenced in this document and are indispensable for its application. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. NOTE 1 When an International

27、Publication has been modified by common modifications, indicated by (mod), the relevant EN/HD applies. NOTE 2 Up-to-date information on the latest versions of the European Standards listed in this annex is available here: www.cenelec.eu Publication Year Title EN/HD Year IEC 60749-4 - Semiconductor d

28、evices - Mechanical and climatic test methods - Part 4: Damp heat, steady state, highly accelerated stress test (HAST) EN 60749-4 - BS EN 60749-5:2017This page deliberately left blank 2 IEC 60749-5:2017 IEC 2017 CONTENTS FOREWORD . 3 1 Scope 5 2 Normative references 5 3 Terms and definitions 5 4 Gen

29、eral . 5 5 Equipment . 6 5.1 Equipment summary . 6 5.2 Temperature and relative humidity 6 5.3 Devices under stress 6 5.4 Minimizing release of contamination . 6 5.5 Ionic contamination . 6 5.6 Deionized water 6 6 Test conditions 6 6.1 Test conditions summary 6 6.2 Temperature, relative humidity and

30、 duration . 6 6.3 Biasing guidelines . 7 6.4 Biasing choice and reporting . 7 7 Procedures 8 7.1 Mounting . 8 7.2 Ramp-up . 8 7.3 Ramp-down 8 7.4 Test clock . 8 7.5 Bias 8 7.6 Read-out . 8 7.7 Handling . 9 8 Failure criteria . 9 9 Safety 9 10 Summary . 9 Table 1 Temperature, relative humidity and du

31、ration 6 Table 2 Criteria for choosing continuous or cyclical bias 8 2 IEC 60749-5:2017 IEC 2017 CONTENTS FOREWORD . 3 1 Scope 5 2 Normative references 5 3 Terms and definitions 5 4 General . 5 5 Equipment . 6 5.1 Equipment summary . 6 5.2 Temperature and relative humidity 6 5.3 Devices under stress

32、 6 5.4 Minimizing release of contamination . 6 5.5 Ionic contamination . 6 5.6 Deionized water 6 6 Test conditions 6 6.1 Test conditions summary 6 6.2 Temperature, relative humidity and duration . 6 6.3 Biasing guidelines . 7 6.4 Biasing choice and reporting . 7 7 Procedures 8 7.1 Mounting . 8 7.2 R

33、amp-up . 8 7.3 Ramp-down 8 7.4 Test clock . 8 7.5 Bias 8 7.6 Read-out . 8 7.7 Handling . 9 8 Failure criteria . 9 9 Safety 9 10 Summary . 9 Table 1 Temperature, relative humidity and duration 6 Table 2 Criteria for choosing continuous or cyclical bias 8 BS EN 60749-5:2017IEC 60749-5:2017 IEC 2017 3

34、INTERNATIONAL ELECTROTECHNICAL COMMISSION _ SEMICONDUCTOR DEVICES MECHANICAL AND CLIMATIC TEST METHODS Part 5: Steady-state temperature humidity bias life test FOREWORD 1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising all national elec

35、trotechnical committees (IEC National Committees). The object of IEC is to promote international co-operation on all questions concerning standardization in the electrical and electronic fields. To this end and in addition to other activities, IEC publishes International Standards, Technical Specifi

36、cations, Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested in the subject dealt with may participate in this preparatory work. Internatio

37、nal, governmental and non-governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely with the International Organization for Standardization (ISO) in accordance with conditions determined by agreement between the two organizations. 2) The formal d

38、ecisions or agreements of IEC on technical matters express, as nearly as possible, an international consensus of opinion on the relevant subjects since each technical committee has representation from all interested IEC National Committees. 3) IEC Publications have the form of recommendations for in

39、ternational use and are accepted by IEC National Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any misinterpretation by any end user. 4) In

40、 order to promote international uniformity, IEC National Committees undertake to apply IEC Publications transparently to the maximum extent possible in their national and regional publications. Any divergence between any IEC Publication and the corresponding national or regional publication shall be

41、 clearly indicated in the latter. 5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any services carried out by independent certificat

42、ion bodies. 6) All users should ensure that they have the latest edition of this publication. 7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and members of its technical committees and IEC National Committees for any personal injury,

43、property damage or other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC Publications. 8) Attention is drawn to the Normative references cited

44、 in this publication. Use of the referenced publications is indispensable for the correct application of this publication. 9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of patent rights. IEC shall not be held responsible for identifying

45、 any or all such patent rights. International Standard IEC 60749-5 has been prepared by IEC technical committee 47: Semiconductor devices. This second edition cancels and replaces the first edition published in 2003. This edition constitutes a technical revision. This edition includes the following

46、significant technical changes with respect to the previous edition: a) correction of an error in an equation; b) inclusion of notes for guidance; c) clarification of the applicability of test conditions. BS EN 60749-5:2017IEC 60749-5:2017 IEC 2017 3 INTERNATIONAL ELECTROTECHNICAL COMMISSION _ SEMICO

47、NDUCTOR DEVICES MECHANICAL AND CLIMATIC TEST METHODS Part 5: Steady-state temperature humidity bias life test FOREWORD 1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising all national electrotechnical committees (IEC National Committees).

48、 The object of IEC is to promote international co-operation on all questions concerning standardization in the electrical and electronic fields. To this end and in addition to other activities, IEC publishes International Standards, Technical Specifications, Technical Reports, Publicly Available Spe

49、cifications (PAS) and Guides (hereafter referred to as “IEC Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested in the subject dealt with may participate in this preparatory work. International, governmental and non-governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely with the International Organization for Standardization (ISO) in accordance with conditions