BS EN ISO 10692-1-2001 Gas cylinders - Gas cylinder valve connections for use in the microelectronics industry - Outlet connections《气瓶 用于微电子工业的储气瓶 出气口连接件》.pdf

1、BRITISH STANDARD BS EN ISO 10692-1:2001 Gas cylinders Gas cylinder valve connections for use in the microelectronics industry Part 1: Outlet connections The European Standard EN ISO 10692-1:2001 has the status of a British Standard ICS 23.020.30 NO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED

2、BY COPYRIGHT LAWBS EN ISO 10692-1:2001 This British Standard, having been prepared under the direction of the Engineering Sector Policy and Strategy Committee, was published under the authority of the Standards Policy and Strategy Committee on 12 September 2001 BSI 12 September 2001 ISBN 0 580 37522

3、 6 National foreword This British Standard is the official English language version of EN ISO 10692-1:2001. It is identical with ISO 10692-1:2001. The UK participation in its preparation was entrusted by Technical Committee PVE/3, Gas containers, to Subcommittee PVE/3/1, Valve fittings to gas cylind

4、ers, which has the responsibility to: A list of organizations represented on this committee can be obtained on request to its secretary. Cross-references Attention is drawn to the fact that CEN and CENLEC Standards normally annex which lists normative references to international publications. The Br

5、itish Standards which implement these international or European publications may be found in the BSI Standards Catalogue under the section entitled “International Standards Correspondence Index”, or by using the “Find” facility of the BSI Standards Electronic Catalogue. A British Standard does not p

6、urport to include all the necessary provisions of a contract. Users of British Standards are responsible for their correct application. Compliance with a British Standard does not of itself confer immunity from legal obligations. aid enquirers to understand the text; present to the responsible inter

7、national/European committee any enquiries on the interpretation, or proposals for change, and keep the UK interests informed; monitor related international and European developments and promulgate them in the UK. Summary of pages This document comprises a front cover, an inside front cover, the EN I

8、SO title page, the EN ISO foreword page, the ISO title page, pages ii to iv, pages 1 to 17, a blank page, the Annex ZA page and a back cover. The BSI copyright date displayed in this document indicates when the document was last issued. Amendments issued since publication Amd. No. Date CommentsEUROP

9、EANSTANDARD NORMEEUROPENNE EUROPISCHENORM ENISO106921 August2001 ICS23.020.30 Englishversion GascylindersGascylindervalveconnectionsforuseinthe microelectronicsindustryPart1:Outletconnections(ISO 106921:2001) BouteillesgazRaccordspourrobinetsdebouteilles gazpourlindustriedelamicrolectroniquePartie1:

10、 Raccordsdesortie(ISO106921:2001) OrtsbeweglicheGasflaschenVentilanschlssefrdie AnwendunginderMikroelektonikTeil1:Seitenanschlsse (ISO106921:2001) ThisEuropeanStandardwasapprovedbyCENon16June2001. CENmembersareboundtocomplywiththeCEN/CENELECInternalRegulationswhichstipulatetheconditionsforgivingthis

11、Europe an Standardthestatusofanationalstandardwithoutanyalteration.Uptodatelistsandbibliographicalreferencesconcernings uchnational standardsmaybeobtainedonapplicationtotheManagementCentreortoanyCENmember. ThisEuropeanStandardexistsinthreeofficialversions(English,French,German).Aversioninanyotherlan

12、guagemadebytra nslation undertheresponsibilityofaCENmemberintoitsownlanguageandnotifiedtotheManagementCentrehasthesamestatusasthe official versions. CENmembersarethenationalstandardsbodiesofAustria,Belgium,CzechRepublic,Denmark,Finland,France,Germany,Greece, Iceland,Ireland,Italy,Luxembourg,Netherla

13、nds,Norway,Portugal,Spain,Sweden,SwitzerlandandUnitedKingdom. EUROPEANCOMMITTEEFORSTANDARDIZATION COMITEUROPENDENORMALISATION EUROPISCHESKOMITEEFRNORMUNG ManagementCentre:ruedeStassart,36B1050Brussels 2001CEN Allrightsofexploitationinanyformandbyanymeansreserved worldwideforCENnationalMembers. Ref.N

14、o.ENISO106921:2001EINESO01296:1002(1E) 2 Foreword ThetextoftheInternationalStandardISO106921:2001hasbeenpreparedbyTechnical CommitteeISO/TC58“Gascylinders“incollaborationwithTechnicalCommitteeCEN/TC23 “Transportablegascylinders“,thesecretariatofwhichisheldbyBSI. ThisEuropeanStandardshallbegiventhest

15、atusofanationalstandard,eitherbypublication ofanidenticaltextorbyendorsement,atthelatestbyFebruary2002,andconflictingnational standardsshallbewithdrawnatthelatestbyFebruary2002. AccordingtotheCEN/CENELECInternalRegulations,thenationalstandardsorganizationsof thefollowingcountriesareboundtoimplementt

16、hisEuropeanStandard:Austria,Belgium, CzechRepublic,Denmark,Finland,France,Germany,Greece,Iceland,Ireland,Italy, Luxembourg,Netherlands,Norway,Portugal,Spain,Sweden,SwitzerlandandtheUnited Kingdom. Endorsementnotice ThetextoftheInternationalStandardISO106921:2001wasapprovedbyCENasa EuropeanStandardwi

17、thoutanymodification. NOTE:NormativereferencestoInternationalStandardsarelistedinannexZA(normative). ENISO106921:20014Reference number ISO 10692-1:2001(E) OSI 1002 INTERNATIONAL STANDARD ISO 10692-1 First edition 2001-08-15 Gas cylinders Gas cylinder valve connections for use in the micro-electronic

18、s industry Part 1: Outlet connections Bouteilles gaz Raccords pour robinets de bouteilles gaz pour lindustrie de la microlectronique Partie 1: Raccords de sortieii ISO 10692-1:2001(E)iii Contents Page Foreword.iv 1 Scope 1 2 Normative references 1 3 General requirements1 4 General design.2 5 Dimensi

19、ons.2 6 630 and 640 series connections.2 7 710 and 720 series connections.6 8 Components common to both series 10 9 Thread profile.12 10 Allocation of outlet to single gases listed in annex A .12 11 Allocation of other gases and of gas mixtures to outlets .13 Annex A (normative) Mandatory outlet all

20、ocations for selected single gases.14 Annex B (informative) Examples showing how to use the information given in clauses 10 and 1116 Bibliography17 4egaP ENISO106921:2001PD 62762:001 1002-70 ISB i Annex ZA (normative) Normative references to international publications with their relevant European pu

21、blicationsInside back coverISO 10692-1:2001(E) iv Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each

22、 member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the Internationa

23、l Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 3. Draft International Standards adopted by the technical committees are circulated to the member bodies for

24、voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of this part of ISO 10692 may be the subject of patent rights. ISO shall not be held responsible for identifying an

25、y or all such patent rights. International Standard ISO 10692-1 was prepared by Technical Committee ISO/TC 58, Gas cylinders, Subcommittee SC 2, Cylinder fittings. ISO 10692 consists of the following parts, under the general title Gas cylinders Gas cylinder valve connections for use in the micro-ele

26、ctronics industry: Part 1: Outlet connections Part 2: Specification and type testing for valve to cylinder connections Annex A forms a normative part of this part of ISO 10692. Annex B is for information only. 4egaP ENISO106921:2001 INTENRATIONAL TSANDADR ISO -296011:(1002E)1 Gas cylinders Gas cylin

27、der valve connections for use in the micro-electronics industry Part 1: Outlet connections 1 Scope This part of ISO 10692 applies to the outlet connections of gas cylinder valves for gases and gas mixtures and concerns special requirements where the highest levels of cleanliness and freedom from par

28、ticles are demanded for the manufacture of microelectronic components or similar applications. 2 Normative references The following normative documents contain provisions which, through reference in this text, constitute provisions of this part of ISO 10692. For dated references, subsequent amendmen

29、ts to, or revisions of, any of these publications do not apply. However, parties to agreements based on this part of ISO 10692 are encouraged to investigate the possibility of applying the most recent editions of the normative documents indicated below. For undated references, the latest edition of

30、the normative document referred to applies. Members of ISO and IEC maintain registers of currently valid International Standards. ISO 68-2, ISO general-purpose screw threads Basic profile Part 2: Inch screw threads. ISO 6506-1, Metallic materials Brinell hardness test Part 1: Test method. ISO 10156,

31、 Gases and gas mixtures Determination of fire potential and oxidizing ability for the selection of cylinder valve outlets. ISO 10297, Gas cylinders Refillable gas cylinder valves Specification and type testing. ISO 10298, Determination of toxicity of a gas or gas mixture. ISO 11114-1, Transportable

32、gas cylinders Compatibility of cylinder and valve materials with gas contents Part 1: Metallic materials. 3 General requirements 3.1 Materials The following materials and specifications are recommended: For valve and nipple: AISI 316L, microfinished, hardness at least 130 HBW in accordance with ISO

33、6506-1; For the union nut: AISI 304, threading silver plated. Other materials and values may be chosen if they give at least equivalent performance in terms of yield stress and resistance to corrosion (see ISO 11114-1). Page5 1002:129601OSINE4egaP ENISO106921:2001 ISO 10692-1:2001(E) 2 3.2 Operation

34、 For these connections the outboard leak rate shall not exceed a value of 1 10 7 mbar l s 1 at 137 bar helium when the connection is tightened to 50 N m. When this outboard leak rate is obtained, an inboard helium leak rate shall be no greater than 1 10 9 mbar l s 1 . The gasket shall be an unused r

35、ecessed flat, uncoated gasket of Ni 200, fully annealed with the requirements of 8.1. Its hardness shall be HBW 2,5/62,5: 80 to 100 HBW (in accordance with ISO 6506-1) with a surface finish 0,8 m turned in the sealing area. Gaskets of other materials, e.g. polymers, may be used if they do not compro

36、mise the leak integrity of the connection and are compatible with the duty. These gaskets shall be used at a torque appropriate for the material. NOTE Conditions of use may cause significant differences in both the inboard and outboard leak rates, e.g. nickel gaskets should be used only once. 3.3 Ma

37、rking The valves shall be marked with the requirements listed in ISO 10297, as far as appropriate. In addition to all the required valve marking the letters “nnn“, where nnn is the outlet number, shall be marked. 4 General design Figure 1 shows the connection in the assembled state (view from the to

38、p). The nipple tip has two notches to facilitate the removal of the gasket. A pair of keys on the nipple and of the corresponding key ways on the valve prevent rotation of the parts during assembly. The keys shall be opposite to each other and vertically oriented. The antirotational device shall alw

39、ays be in place. The nut shall not engage on the outlet thread until the antirotational pins fitted to the plug are engaged in the slots on the valve outlet. An alternative way to design the antirotational device of the nipple is described in 8.3. The union nut shall have two venting holes opposite

40、to each other. 5 Dimensions Dimensions for the outlet connections are given in Figures 2 to 9. Only dimensions explicitly given there are mandatory. Others shall be chosen as appropriate. All dimensions are in millimetres. The thread definition is given in clause 9. The diameters d A , d B , d M and

41、 d N are not dimensioned in the figures because they assume different values for each connection. They are chosen in such a way that combinations other than the intended ones are impossible. The diameters d A and d B on the valve outlet as well as d M and d N on the nipple shall be concentric within

42、 0,05 mm full indicator movement because these are critical dimensions for safety. 6 630 and 640 series connections Details of the valve outlet are given in Figure 2. Figure 3 gives details of the nipple. The values of the diameters d A , d B , d M and d N for the 630 and 640 series connections are

43、given in Table 1. Figure 4 shows the union nut. 6egaP ENISO106921:2001 ISO 10692-1:2001(E)3 Key 1 Valve outlet 2 Nipple 3 Union nut 4 Gasket and circlips Figure 1 Assembly drawing of the connections (view from the top) Table 1 Index diameters of the 630 and 640 series connections d A d B d M d N No.

44、 min. max. min. max. min. max. min. max. 632 16,49 16,58 20,22 20,32 16,31 16,40 20,04 20,14 634 16,84 16,94 19,86 19,96 16,66 16,76 19,69 19,79 636 17,2 17,3 19,51 19,61 17,02 17,12 19,33 19,43 638 17,55 17,65 19,15 19,25 17,37 17,48 18,97 19,08 640 17,91 18,00 18,80 18,89 17,73 17,83 18,62 18,71 6

45、42 18,26 18,36 18,26 18,36 18,08 18,18 18,08 18,18 7egaP ENISO106921:2001 ISO 10692-1:2001(E) 4 l 1 11,1 min. d 1 10,62u d 1 u 10,71 l 2 8,38 0,25 0,13 d 2 8,13 max. l 3 8,38 0 0,25 d 3 23,37u d 3 u 23,49 l 4 9,14 0,25 0 d 4 1,030 external a l 5 17,15 0 0,25 r 1 0,25u r 1 u 0,38 l 6 42,54 max. r 2 0

46、,76u r 2 u 0,89 l 7 4,09u l 7 u 4,19 45 5 l 8 0,76u l 8 u 0,89 30 5 60 1 a Nominal diameter in inches. Figure 2 Valve outlet of the 630 and 640 series connections (view from the top) 8egaP ENISO106921:2001 ISO 10692-1:2001(E)5 l 1 2,29 0,13 d 1 14,61u d 1 u 14,73 l 2 8,76 0,25 0 d 2 10,62u d 2 u 10,

47、71 l 3 4,75 0,25 0 d 3 8,13 maximum l 4 3,38u l 4 u 3,47 d 4 17,32u d 4 u 17,45 l 5 5,85 minimum d 5 23,42 0,13 l 6 17,78 0,25 0 r 1 0,25u r 1 u 0,38 l 7 1,52 0,05 r 2 4,8 0,25 l 8 3,78u l 8 u 3,84 r 3 0,76u r 3 u 0,89 l 9 0,76u l 9 u 0,89 30 5 l 10 8,51u l 10 u 8,76 60 1 l 11 2,11 maximum Figure 3 Nipple of the 630 and 640 series connections 9egaP ENISO106921:2001 ISO 10692-1:2001(E) 6 l 1 18,14 0,13 d 1 26,59 0,25 l 2 11,4 min. d 2 1,035 internal a l 3 23,24 0 0,25 d 3 17,70 0,13 l 4 28,7 0,25 d 5 1,98 l 5 31,8 hexagonal 30 5 a Nominal diameter in inches. Figure 4 Union nut