BS EN ISO 11554-2017 Optics and photonics Lasers and laser-related equipment Test methods for laser beam power energy and temporal characteristics《光学和光子学 激光和相关激光设备 激光束功率、能量和时间特性的试验.pdf

1、Optics and photonics Lasers and laser-related equipment Test methods for laser beam power, energy and temporal characteristics (ISO 11554:2017)BS EN ISO 11554:2017BSI Standards PublicationWB11885_BSI_StandardCovs_2013_AW.indd 1 15/05/2013 15:06National forewordThis British Standard is the UK impleme

2、ntation of EN ISO 11554:2017. It is identical to ISO 11554:2017. It supersedes BS EN ISO 11554:2008, which is withdrawn.The UK participation in its preparation was entrusted to Technical Committee CPW/172, Optics and Photonics.A list of organizations represented on this committee can be obtained on

3、request to its secretary.This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. The British Standards Institution 2017 Published by BSI Standards Limited 2017ISBN 978 0 580 91060 9ICS 31.260Compliance with a British

4、 Standard cannot confer immunity from legal obligations. This British Standard was published under the authority of the Standards Policy and Strategy Committee on 31 October 2017.Amendments/corrigenda issued since publicationDate Text affectedBRITISH STANDARDBS EN ISO 11554:2017EUROPEAN STANDARDNORM

5、E EUROPENNEEUROPISCHE NORMEN ISO 11554September 2017ICS 31.260 Supersedes EN ISO 11554:2008EUROPEAN COMMITTEE FOR STANDARDIZATIONCOMIT EUROPEN DE NORMALISATIONEUROPISCHES KOMITEE FR NORMUNGCEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels 2017 CEN Ref. No. EN ISO 11554:2017: EAll righ

6、ts of exploitation in any form and by any means reserved worldwide for CEN national MembersOptics and photonics Lasers and laser-related equipment Test methods for laser beam power, energy and temporal characteristics (ISO 11554:2017)Optique et photonique Lasers et quipements associs aux lasers Mtho

7、des dessai de la puissance et de lnergie des faisceaux lasers et de leurs caractristiques temporelles (ISO 11554:2017)Optik und Photonik Laser und Laseranlagen Prfverfahren fr Leistung, Energie und Kenngren des Zeitverhaltens von Laserstrahlen (ISO 11554:2017)This European Standard was approved by C

8、EN on 5 September 2017.CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standar

9、ds may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member.This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notif

10、ied to the CEN-CENELEC Management Centre has the same status as the official versions.CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Icel

11、and, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United Kingdom.English VersionEN ISO 11554:2017 (E)European ForewordThis document (EN ISO 11554:2017) has been prepared by Tec

12、hnical Committee ISO/TC 172 “Optics and photonics“ in collaboration with Technical Committee CEN/TC 123 “Lasers and photonics” the secretariat of which is held by DIN.This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement

13、, at the latest by March 2018 and conflicting national standards shall be withdrawn at the latest by March 2018.Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN shall not be held responsible for identifying any or all such pate

14、nt rights.This document supersedes EN ISO 11554:2008 .This document has been prepared under a mandate given to CEN by the European Commission and the European Free Trade Association, and supports essential requirements of EU Directive(s).For relationship with EU Directive, see informative Annex ZA,

15、which is an integral part of this document.According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former

16、Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom.Endorsement noticeThe text of ISO 115

17、54:2017 has been approved by CEN as EN ISO 11554:2017 without any modification.2BS EN ISO 11554:2017ISO 11554:2017(E)Foreword ivIntroduction v1 Scope . 12 Normative references 13 Terms and definitions . 14 Symbols and units of measurement . 25 Measurement principles 36 Measurement configuration, tes

18、t equipment and auxiliary devices 36.1 Preparation 36.1.1 Sources with small divergence angles . 36.1.2 Sources with large divergence angles 36.1.3 RIN measurement . 46.1.4 Measurement of small signal cut off frequency 56.2 Control of environmental impacts . 56.3 Detectors 66.4 Beam-forming optics .

19、 76.5 Optical attenuators 77 Measurements . 77.1 General . 77.2 Power of cw lasers . 77.3 Power stability of cw lasers . 87.4 Pulse energy of pulsed lasers . 87.5 Energy stability of pulsed lasers 87.6 Temporal pulse shape, pulse duration, rise time, fall time and peak power . 87.7 Pulse duration st

20、ability 87.8 Pulse repetition rate . 87.9 Relative intensity noise, RIN . 97.10 Small signal cut-off frequency . 98 Evaluation 98.1 General . 98.2 Power of cw lasers 108.3 Power stability of cw lasers 108.4 Pulse energy of pulsed lasers 108.5 Energy stability of pulsed lasers . 108.6 Temporal pulse

21、shape, pulse duration, rise time, fall time and peak power 118.7 Pulse duration stability . 128.8 Pulse repetition rate 138.9 Relative intensity noise, RIN 138.10 Small signal cut-off frequency 139 Test report 13Annex A (informative) Relative intensity noise (RIN) .16Bibliography .18 ISO 2017 All ri

22、ghts reserved iiiContents PageBS EN ISO 11554:2017ISO 11554:2017(E)ForewordISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical

23、committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with

24、the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.The procedures used to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for

25、 the different types of ISO documents should be noted. This document was drafted in accordance with the editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights.

26、 ISO shall not be held responsible for identifying any or all such patent rights. Details of any patent rights identified during the development of the document will be in the Introduction and/or on the ISO list of patent declarations received (see www.iso.org/patents).Any trade name used in this do

27、cument is information given for the convenience of users and does not constitute an endorsement.For an explanation on the voluntary nature of standards, the meaning of ISO specific terms and expressions related to conformity assessment, as well as information about ISOs adherence to the World Trade

28、Organization (WTO) principles in the Technical Barriers to Trade (TBT) see the following URL: www.iso.org/iso/foreword.html.This document was prepared by Technical Committee ISO/TC 172, Optics and photonics, Subcommittee SC 9, Electro-optical systems.This fourth edition cancels and replaces the thir

29、d edition (ISO 11554:2006 ) which has been technically revised. The following changes were made:a) Subclause 3.1: definition of RIN was changed in order to harmonize with ISO 11145:2016.b) Clause 4, note 3: Expression for dB calculation was corrected.c) Figure 3: Explanation of M was modified.d) Sub

30、clause 7.9: Measurement of RIN was added, and former content of 7.9 was moved to 7.10.e) Subclause 7.10: Explanation for the measurement of small signal cut-off frequency was modified.f) Subclause 8.9: Explanation for RIN was added and former content of 8.9 was moved to 8.10.g) Clause 9, item 8): Pa

31、rameters for RIN were added, and former content of item 8) was moved to item 9).h) Equation numbers were renumbered.iv ISO 2017 All rights reservedBS EN ISO 11554:2017ISO 11554:2017(E)IntroductionThe measurement of laser power (energy for pulsed lasers) is a common type of measurement performed by l

32、aser manufacturers and users. Power (energy) measurements are needed for laser safety classification, stability specifications, maximum laser output specifications, damage avoidance, specific application requirements, etc. This document provides guidance on performing laser power (energy) measuremen

33、ts as applied to stability characterization. The stability criteria are described for various temporal regions (e.g. short-term, medium term and long term) and provide methods to quantify these specifications. This document also covers pulse measurements where detector response speed can be critical

34、ly important when analysing pulse shape or peak power of short pulses. To standardize reporting of power (energy) measurement results, a report template is also included.This document is a Type B standard as stated in ISO 12100 .The provisions of this document may be supplemented or modified by a Ty

35、pe C standard.Note that for machines which are covered by the scope of a Type C standard and which have been designed and built according to the provisions of that standard, the provisions of that Type C standard take precedence over the provisions of this Type B standard. ISO 2017 All rights reserv

36、ed vBS EN ISO 11554:2017This page deliberately left blankOptics and photonics Lasers and laser-related equipment Test methods for laser beam power, energy and temporal characteristics (ISO 11554:2017)1 ScopeThis document specifies test methods for determining the power and energy of continuous wave

37、and pulsed laser beams, as well as their temporal characteristics of pulse shape, pulse duration and pulse repetition rate. Test and evaluation methods are also given for the power stability of cw-lasers, energy stability of pulsed lasers and pulse duration stability.The test methods given in this d

38、ocument are used for the testing and characterization of lasers.2 Normative referencesThe following documents are referred to in the text in such a way that some or all of their content constitutes requirements of this document. For dated references, only the edition cited applies. For undated refer

39、ences, the latest edition of the referenced document (including any amendments) applies.ISO 11145 , Optics and photonics Lasers and laser-related equipment Vocabulary and symbolsISO/IEC Guide 99, International vocabulary of metrology Basic and general concepts and associated terms (VIM)IEC 61040:199

40、0 , Power and energy measuring detectors, instruments and equipment for laser radiation3 Terms and definitionsFor the purposes of this document, the terms and definitions given in ISO 11145 , ISO/IEC Guide 99 and the following apply.ISO and IEC maintain terminological databases for use in standardiz

41、ation at the following addresses: ISO Online browsing platform: available at http:/www.iso.org/obp IEC Electropedia: available at http:/www.electropedia.org/ 3.1relative intensity noiseRINR( f ) quotient of the radiant power mean square fluctuations to the mean square radiant power, normalized to a

42、frequency band of unit width RfPfPff()=()()221 (1)Note 1 to entry: The relative intensity noise R( f ) or RIN see Formula (1) is explicitly spoken of as the “relative intensity noise spectral density”, but usually simply referred to as RIN.Note 2 to entry: For further details, see Annex A.INTERNATIO

43、NAL STANDARD ISO 11554:2017(E) ISO 2017 All rights reserved 1BS EN ISO 11554:2017ISO 11554:2017(E)3.2small signal cut off frequencyf cfrequency at which the laser power output modulation drops to half the value obtained at low frequencies when applying small, constant input power modulation and incr

44、easing the frequency4 Symbols and units of measurementThe symbols and units specified in ISO 11145 and in Table 1 are used in this document.Table 1 Symbols and units of measurementSymbol Unit Termf Hz FrequencyfcHz Small signal cut-off frequency f1,f2 Hz Frequency range for which the relative intens

45、ity noise R( f ) is givenk 1 Coverage factor for the determination of uncertaintym 1 Readingm 1 Mean value of readingsP W Power averaged over the sampling periodP WMean power, averaged over the measurement period at the operating con-ditions specified by the manufacturerP 1Relative power fluctuation

46、 to a 95 % confidence level for the appropri-ate sampling period P (1 s) and/or P (1 ms) and/or P (0,1 s) and/or P (1 s)Q J Mean pulse energyQ 1 Relative pulse energy fluctuation to a 95 % confidence levelR( f ) Hz-1or dB/Hz Relative intensity noise, RINS(t) 1 Detector signals 1 Measured standard de

47、viationT s Pulse repetition periodt s Measurement periodUrel1Expanded relative uncertainty corresponding to a 95 % confidence level (coverage factor k = 2)Urel(C) 1Expanded relative uncertainty of calibration corresponding to a 95 % confidence level (coverage factor k = 2)Fs Fall time of laser pulse

48、H1Relative pulse duration fluctuation with regard to Hto a 95 % confidence levelRs Rise time of laser pulse101Relative pulse duration fluctuation with regard to 10to a 95 % confi-dence levelNOTE 1 For further details regarding 95 % confidence level see ISO 2602 1.NOTE 2 The expanded uncertainty is o

49、btained by multiplying the standard uncertainty by a coverage factor k = 2. It is determined according to the Guide to the Expression of Uncertainty in Measurement 3. In general, with this coverage factor, the value of the measurand lies with a probability of approximately 95 % within the interval defined by the expanded uncertainty.NOTE 3 R( f ) expressed in dB/Hz equals 10 log10R( f ) with R( f ) given in Hz-1.2 ISO 2017 All rights reservedBS EN ISO 11554:2017ISO 11554:2017(E)5 Measurement pr