BS EN ISO 14644-10-2013 Cleanrooms and associated controlled environments Classification of surface cleanliness by chemical concentration《洁净室和相关控制环境 通过化学浓缩进行表面清洁度分类》.pdf

1、raising standards worldwideNO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAWBSI Standards PublicationBS EN ISO 14644-10:2013Cleanrooms and associated controlled environmentsPart 10: Classification of surface cleanliness by chemical concentrationBS EN ISO 14644-10:2013 BRITISH ST

2、ANDARDNational forewordThis British Standard is the UK implementation of EN ISO14644-10:2013.The UK participation in its preparation was entrusted to TechnicalCommittee LBI/30, Cleanroom technology.A list of organizations represented on this committee can beobtained on request to its secretary.This

3、publication does not purport to include all the necessaryprovisions of a contract. Users are responsible for its correctapplication. The British Standards Institution 2013. Published by BSI StandardsLimited 2013 ISBN 978 0 580 66236 2 ICS 13.040.35 Compliance with a British Standard cannot confer im

4、munity fromlegal obligations.This British Standard was published under the authority of theStandards Policy and Strategy Committee on 30 April 2013. Amendments issued since publicationDate Text affectedEUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 14644-10 March 2013 ICS 13.040.35 English

5、 Version Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013) Salles propres et environnements matriss apparents - Partie 10: Classification de la propret chimique des surfaces (ISO 14644-10:2013) Reinrume un

6、d zugehrige Reinraumbereiche - Teil 10: Klassifizierung der chemischen Oberflchenreinheit (ISO 14644-10:2013) This European Standard was approved by CEN on 2 February 2013. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this Europe

7、an Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member. This European Standard exists in three official versions

8、(English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belg

9、ium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switze

10、rland, Turkey and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG Management Centre: Avenue Marnix 17, B-1000 Brussels 2013 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Re

11、f. No. EN ISO 14644-10:2013: EBS EN ISO 14644-10:2013EN ISO 14644-10:2013 (E) 3 Foreword This document (EN ISO 14644-10:2013) has been prepared by Technical Committee ISO/TC 209 “Cleanrooms and associated controlled environments“ in collaboration with Technical Committee CEN/TC 243 “Cleanroom techno

12、logy” the secretariat of which is held by BSI. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by September 2013, and conflicting national standards shall be withdrawn at the latest by September 2013

13、. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such patent rights. According to the CEN-CENELEC Internal Regulations, the national standards organizati

14、ons of the following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta

15、, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom. Endorsement notice The text of ISO 14644-10:2013 has been approved by CEN as EN ISO 14644-10:2013 without any modification. BS EN ISO 14644-10:2013ISO 14644-10:2013(E) ISO

16、 2013 All rights reserved iiiContents PageForeword iv1 Scope . 1g884g3 g17g145g148g143g131g150g139g152g135g3g148g135g136g135g148g135g144g133g135g149 1g885g3 g23g135g148g143g149g3g131g144g134g3g134g135g976g139g144g139g150g139g145g144g149 . 1g886g3 g6g142g131g149g149g139g976g139g133g131g150g139g145g14

17、4 2g886g484g883g3 g19g148g139g144g133g139g146g142g135g149g3g136g145g148g3g135g149g150g131g132g142g139g149g138g139g144g137g3g133g142g131g149g149g139g976g139g133g131g150g139g145g144g3g145g136g3g133g142g135g131g144g3g149g151g148g136g131g133g135g149g3g139g144g3g133g142g135g131g144g148g145g145g143g149g3g

18、131g144g134g3controlled environments 2g886g484g884g3 g6g142g131g149g149g139g976g139g133g131g150g139g145g144g3g136g145g148g3g149g151g148g136g131g133g135g3g133g142g135g131g144g142g139g144g135g149g149g3g132g155g3g133g138g135g143g139g133g131g142g3g133g145g144g133g135g144g150g148g131g150g139g145g144 . 24

19、.3 ISO-SCC designation . 44.4 Converter for substances into surface atomic concentration . 4g887g3 g16g135g131g149g151g148g139g144g137g3g131g144g134g3g143g145g144g139g150g145g148g139g144g137g3g150g138g135g3g133g142g135g131g144g142g139g144g135g149g149g3g145g136g3g149g151g148g136g131g133g135g149g3g136

20、g145g148g3g133g138g135g143g139g133g131g142g3g133g145g144g150g131g143g139g144g131g150g139g145g144g3g131g144g134g3g134g135g143g145g144g149g150g148g131g150g139g145g144g3g145g136g3g133g145g143g146g142g139g131g144g133g135 . 55.1 Criteria for good cleanliness assessment . 55.2 Documentation and reporting

21、. 6Annex A (informative)g3g6g145g144g152g135g148g149g139g145g144g3g132g135g150g153g135g135g144g3g134g139g136g136g135g148g135g144g150g3g151g144g139g150g3g135g154g146g148g135g149g149g139g145g144g149g3g145g136g3g149g151g148g136g131g133g135g3g133g145g144g133g135g144g150g148g131g150g139g145g144g3g136g145

22、g148g3g133g138g135g143g139g133g131g142g3g149g151g132g149g150g131g144g133g135g149 . 8Annex B (informative)g3g19g131g148g131g143g135g150g135g148g149g3g139g144g976g142g151g135g144g133g139g144g137g3g150g135g149g150g139g144g137g3g131g144g134g3g139g144g150g135g148g146g148g135g150g131g150g139g145g144g3g145

23、g136g3g148g135g149g151g142g150g149 15Annex C (informative)g3g8g149g149g135g144g150g139g131g142g3g133g145g144g149g139g134g135g148g131g150g139g145g144g149g3g136g145g148g3g131g3g137g145g145g134g3g133g142g135g131g144g142g139g144g135g149g149g3g131g149g149g135g149g149g143g135g144g150 16Annex D (informativ

24、e)g3g16g135g150g138g145g134g149g3g136g145g148g3g150g135g149g150g139g144g137g3g149g151g148g136g131g133g135g3g133g142g135g131g144g142g139g144g135g149g149g3g132g155g3g133g138g135g143g139g133g131g142g3g133g145g144g133g135g144g150g148g131g150g139g145g144 .17Annex E (informative)g3g23g135g149g150g3g148g13

25、5g133g145g148g134g3g134g145g133g151g143g135g144g150g131g150g139g145g144 28g5g139g132g142g139g145g137g148g131g146g138g155 .29BS EN ISO 14644-10:2013ISO 14644-10:2013(E)Forewordg12g22g18g3g523g150g138g135g3g12g144g150g135g148g144g131g150g139g145g144g131g142g3g18g148g137g131g144g139g156g131g150g139g145

26、g144g3g136g145g148g3g22g150g131g144g134g131g148g134g139g156g131g150g139g145g144g524g3g139g149g3g131g3g153g145g148g142g134g153g139g134g135g3g136g135g134g135g148g131g150g139g145g144g3g145g136g3g144g131g150g139g145g144g131g142g3g149g150g131g144g134g131g148g134g149g3g132g145g134g139g135g149g3g523g12g22g

27、18g3g143g135g143g132g135g148g3g132g145g134g139g135g149g524g484g3g23g138g135g3g153g145g148g141g3g145g136g3g146g148g135g146g131g148g139g144g137g3g12g144g150g135g148g144g131g150g139g145g144g131g142g3g22g150g131g144g134g131g148g134g149g3g139g149g3g144g145g148g143g131g142g142g155g3g133g131g148g148g139g13

28、5g134g3g145g151g150g3g150g138g148g145g151g137g138g3 g12g22g18g3 g150g135g133g138g144g139g133g131g142g3 g133g145g143g143g139g150g150g135g135g149g484g3 g8g131g133g138g3 g143g135g143g132g135g148g3 g132g145g134g155g3 g139g144g150g135g148g135g149g150g135g134g3 g139g144g3 g131g3 g149g151g132g140g135g133g1

29、50g3 g136g145g148g3 g153g138g139g133g138g3 g131g3 g150g135g133g138g144g139g133g131g142g3committee has been established has the right to be represented on that committee. International g145g148g137g131g144g139g156g131g150g139g145g144g149g481g3 g137g145g152g135g148g144g143g135g144g150g131g142g3 g131g1

30、44g134g3 g144g145g144g486g137g145g152g135g148g144g143g135g144g150g131g142g481g3 g139g144g3 g142g139g131g139g149g145g144g3 g153g139g150g138g3 g12g22g18g481g3 g131g142g149g145g3 g150g131g141g135g3 g146g131g148g150g3 g139g144g3 g150g138g135g3 g153g145g148g141g484g3g12g22g18g3 g133g145g142g142g131g132g1

31、45g148g131g150g135g149g3 g133g142g145g149g135g142g155g3 g153g139g150g138g3 g150g138g135g3 g12g144g150g135g148g144g131g150g139g145g144g131g142g3 g8g142g135g133g150g148g145g150g135g133g138g144g139g133g131g142g3 g6g145g143g143g139g149g149g139g145g144g3 g523g12g8g6g524g3 g145g144g3 g131g142g142g3 g143g1

32、31g150g150g135g148g149g3 g145g136g3g135g142g135g133g150g148g145g150g135g133g138g144g139g133g131g142g3g149g150g131g144g134g131g148g134g139g156g131g150g139g145g144g484g12g144g150g135g148g144g131g150g139g145g144g131g142g3g22g150g131g144g134g131g148g134g149g3g131g148g135g3g134g148g131g136g150g135g134g3g

33、139g144g3g131g133g133g145g148g134g131g144g133g135g3g153g139g150g138g3g150g138g135g3g148g151g142g135g149g3g137g139g152g135g144g3g139g144g3g150g138g135g3g12g22g18g512g12g8g6g3g7g139g148g135g133g150g139g152g135g149g481g3g19g131g148g150g3g884g484The main task of technical committees is to prepare Intern

34、ational Standards. Draft International g22g150g131g144g134g131g148g134g149g3 g131g134g145g146g150g135g134g3 g132g155g3 g150g138g135g3 g150g135g133g138g144g139g133g131g142g3 g133g145g143g143g139g150g150g135g135g149g3 g131g148g135g3 g133g139g148g133g151g142g131g150g135g134g3 g150g145g3 g150g138g135g3

35、g143g135g143g132g135g148g3 g132g145g134g139g135g149g3 g136g145g148g3 g152g145g150g139g144g137g484g3g19g151g132g142g139g133g131g150g139g145g144g3 g131g149g3 g131g144g3 g12g144g150g135g148g144g131g150g139g145g144g131g142g3 g22g150g131g144g134g131g148g134g3 g148g135g147g151g139g148g135g149g3 g131g146g1

36、46g148g145g152g131g142g3 g132g155g3 g131g150g3 g142g135g131g149g150g3 g889g887g3 g936g3 g145g136g3 g150g138g135g3 g143g135g143g132g135g148g3 g132g145g134g139g135g149g3casting a vote.g4g150g150g135g144g150g139g145g144g3g139g149g3g134g148g131g153g144g3g150g145g3g150g138g135g3g146g145g149g149g139g132g1

37、39g142g139g150g155g3g150g138g131g150g3g149g145g143g135g3g145g136g3g150g138g135g3g135g142g135g143g135g144g150g149g3g145g136g3g150g138g139g149g3g134g145g133g151g143g135g144g150g3g143g131g155g3g132g135g3g150g138g135g3g149g151g132g140g135g133g150g3g145g136g3g146g131g150g135g144g150g3g148g139g137g138g150

38、g149g484g3g12g22g18g3g149g138g131g142g142g3g144g145g150g3g132g135g3g138g135g142g134g3g148g135g149g146g145g144g149g139g132g142g135g3g136g145g148g3g139g134g135g144g150g139g136g155g139g144g137g3g131g144g155g3g145g148g3g131g142g142g3g149g151g133g138g3g146g131g150g135g144g150g3g148g139g137g138g150g149g48

39、4g12g22g18g3g883g886g888g886g886g486g883g882g3g153g131g149g3g146g148g135g146g131g148g135g134g3g132g155g3g23g135g133g138g144g139g133g131g142g3g6g145g143g143g139g150g150g135g135g3g12g22g18g512g23g6g3g884g882g891g481g3g6g142g135g131g144g148g145g145g143g149g131g144g134g131g149g149g145g133g139g131g150g13

40、5g134g133g145g144g150g148g145g142g142g135g134environments.g12g22g18g3g883g886g888g886g886g3g133g145g144g149g139g149g150g149g3g145g136g3g150g138g135g3g136g145g142g142g145g153g139g144g137g3g146g131g148g150g149g481g3g151g144g134g135g148g3g150g138g135g3g137g135g144g135g148g131g142g3g150g139g150g142g135g

41、3g6g142g135g131g144g148g145g145g143g149g131g144g134g131g149g149g145g133g139g131g150g135g134g133g145g144g150g148g145g142g142g135g134environments: g19g131g148g150g3g887g483g6g142g131g149g149g139g980g139g133g131g150g139g145g144g145g136g131g139g148g133g142g135g131g144g142g139g144g135g149g149g132g155g146

42、g131g148g150g139g133g142g135g133g145g144g133g135g144g150g148g131g150g139g145g144 g19g131g148g150g3g888g483g22g146g135g133g139g980g139g133g131g150g139g145g144g149g136g145g148g150g135g149g150g139g144g137g131g144g134g143g145g144g139g150g145g148g139g144g137g150g145g146g148g145g152g135g133g145g144g150g13

43、9g144g151g135g134g133g145g143g146g142g139g131g144g133g135g153g139g150g138 ISO 14644-1 g19g131g148g150g3g889g483g23g135g149g150g143g135g150g138g145g134g149 g19g131g148g150g890g483g7g135g149g139g137g144g481g133g145g144g149g150g148g151g133g150g139g145g144g131g144g134g149g150g131g148g150g486g151g146 Par

44、t 5: Operations g19g131g148g150g892g483g25g145g133g131g132g151g142g131g148g155 g19g131g148g150g893g483g22g135g146g131g148g131g150g139g152g135g134g135g152g139g133g135g149g523g133g142g135g131g144g131g139g148g138g145g145g134g149g481g137g142g145g152g135g132g145g154g135g149g481g139g149g145g142g131g150g14

45、5g148g149g481g143g139g144g139g486g135g144g152g139g148g145g144g143g135g144g150g149g524 g19g131g148g150g894g483g6g142g131g149g149g139g980g139g133g131g150g139g145g144g145g136g131g139g148g133g142g135g131g144g142g139g144g135g149g149g132g155g133g138g135g143g139g133g131g142g133g145g144g133g135g144g150g148g

46、131g150g139g145g144g523g4g6g6g524 g19g131g148g150g895g483g6g142g131g149g149g139g980g139g133g131g150g139g145g144g145g136g149g151g148g136g131g133g135g133g142g135g131g144g142g139g144g135g149g149g132g155g146g131g148g150g139g133g142g135g133g145g144g133g135g144g150g148g131g150g139g145g144 g19g131g148g150g

47、887g886g483g6g142g131g149g149g139g980g139g133g131g150g139g145g144g145g136g149g151g148g136g131g133g135g133g142g135g131g144g142g139g144g135g149g149g132g155g133g138g135g143g139g133g131g142g133g145g144g133g135g144g150g148g131g150g139g145g144The following part is under preparation: g19g131g148g150g887g88

48、8g483g6g142g131g149g149g139g980g139g133g131g150g139g145g144g145g136g131g139g148g133g142g135g131g144g142g139g144g135g149g149g132g155g144g131g144g145g149g133g131g142g135g146g131g148g150g139g133g142g135g133g145g144g133g135g144g150g148g131g150g139g145g144g6g142g135g131g144g139g144g137g3g145g136g3g149g15

49、1g148g136g131g133g135g149g3g150g145g3g131g133g138g139g135g152g135g3g134g135g976g139g144g135g134g3g142g135g152g135g142g149g3g145g136g3g133g142g135g131g144g142g139g144g135g149g149g3g139g144g3g150g135g148g143g149g3g145g136g3g146g131g148g150g139g133g142g135g3g131g144g134g3g133g138g135g143g139g133g131g142g3g133g142g131g149g149g139g976g139g133g131g150g139g145g144g149g3g153g139g142g142g3g136g145g148g143g3g150g138g135g3g149g151g132g140g135g133g150g3g145g136g3g131g3g136g151g150g151g148g135g3g19g131g148g150g3g883g885g484iv ISO 2013 All rights reserved