BS EN ISO 14644-8-2013 Cleanrooms and associated controlled environments Classification of air cleanliness by chemical concentration (ACC)《洁净室和相关受控环境 利用化学浓缩的空气洁净度分类(ACC)》.pdf

1、raising standards worldwideNO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAWBSI Standards PublicationBS EN ISO 14644-8:2013Cleanrooms and associated controlled environmentsPart 8: Classification of air cleanliness by chemical concentration (ACC)BS EN ISO 14644-8:2013 BRITISH STA

2、NDARDNational forewordThis British Standard is the UK implementation of EN ISO 14644-8:2013. It is identical to ISO 14644-8:2013. It supersedes BS EN ISO 14644-8:2006 which is withdrawn.The UK participation in its preparation was entrusted to Technical Committee LBI/30, Cleanroom technology.A list o

3、f organizations represented on this committee can be obtained on request to its secretary.This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. The British Standards Institution 2013. Published by BSI Standards Lim

4、ited 2013ISBN 978 0 580 75693 1 ICS 13.040.35 Compliance with a British Standard cannot confer immunity from legal obligations.This British Standard was published under the authority of the Standards Policy and Strategy Committee on 28 February 2013.Amendments issued since publicationDate Text affec

5、tedEUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 14644-8 February 2013 ICS 13.040.35 Supersedes EN ISO 14644-8:2006English Version Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2013) Salles propre

6、s et environnements matriss apparents - Partie 8: Classification de la propret chimique de lair (ISO 14644-8:2013) Reinrume und zugehrige Reinraumbereiche - Teil 8: Klassifizierung der Luftreinheit anhand der Chemikalienkonzentration (ACC) (ISO 14644-8:2013) This European Standard was approved by CE

7、N on 9 February 2013. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standard

8、s may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notif

9、ied to the CEN-CENELEC Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Ice

10、land, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG Management Centr

11、e: Avenue Marnix 17, B-1000 Brussels 2013 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. EN ISO 14644-8:2013: EBS EN ISO 14644-8:2013EN ISO 14644-8:2013 (E) 3 Foreword This document (EN ISO 14644-8:2013) has been prepared by Technica

12、l Committee ISO/TC 209 “Cleanroomsand associated controlled environments“ in collaboration with Technical Committee CEN/TC 243 “Cleanroomtechnology” the secretariat of which is held by BSI. This European Standard shall be given the status of a national standard, either by publication of an identical

13、text or by endorsement, at the latest by August 2013, and conflicting national standards shall be withdrawn atthe latest by August 2013. Attention is drawn to the possibility that some of the elements of this document may be the subject of patentrights. CEN and/or CENELEC shall not be held responsib

14、le for identifying any or all such patent rights. This document supersedes EN ISO 14644-8:2006. According to the CEN-CENELEC Internal Regulations, the national standards organizations of the followingcountries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus

15、, CzechRepublic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece,Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal,Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United King

16、dom. Endorsement notice The text of ISO 14644-8:2013 has been approved by CEN as EN ISO 14644-8:2013 without any modification. BS EN ISO 14644-8:2013ISO 14644-8:2013(E) ISO 2013 All rights reserved iiiContents PageForeword ivIntroduction v1 Scope . 1g884g3 g17g145g148g143g131g150g139g152g135g3g148g1

17、35g136g135g148g135g144g133g135g149 1g885g3 g23g135g148g143g149g3g131g144g134g3g134g135g976g139g144g139g150g139g145g144g149 . 1g885g484g883g3 g10g135g144g135g148g131g142 . 13.2 Contaminant categories 2g886g3 g6g142g131g149g149g139g976g139g133g131g150g139g145g144 3g886g484g883g3 g10g135g144g135g148g13

18、1g142 . 34.2 ISO-ACC descriptor format . 3g887g3 g7g135g143g145g144g149g150g148g131g150g139g145g144g3g145g136g3g133g145g143g146g142g139g131g144g133g135 55.1 Principle 55.2 Testing 55.3 Test report . 6Annex A (informative)g3g19g131g148g131g143g135g150g135g148g149g3g136g145g148g3g133g145g144g149g139g1

19、34g135g148g131g150g139g145g144 7Annex B (informative)g3g23g155g146g139g133g131g142g3g133g145g144g150g131g143g139g144g131g144g150g149 11Annex C (informative)g3g23g155g146g139g133g131g142g3g143g135g150g138g145g134g149g3g145g136g3g143g135g131g149g151g148g135g143g135g144g150 .15Annex D (informative)g3g6

20、g145g144g149g139g134g135g148g131g150g139g145g144g3g145g136g3g149g146g135g133g139g976g139g133g3g148g135g147g151g139g148g135g143g135g144g150g149g3g136g145g148g3g149g135g146g131g148g131g150g139g152g135g3g134g135g152g139g133g135g149 19g5g139g132g142g139g145g137g148g131g146g138g155 .21BS EN ISO 14644-8:2

21、013ISO 14644-8:2013(E)Forewordg12g22g18g3g523g150g138g135g3g12g144g150g135g148g144g131g150g139g145g144g131g142g3g18g148g137g131g144g139g156g131g150g139g145g144g3g136g145g148g3g22g150g131g144g134g131g148g134g139g156g131g150g139g145g144g524g3g139g149g3g131g3g153g145g148g142g134g153g139g134g135g3g136g1

22、35g134g135g148g131g150g139g145g144g3g145g136g3g144g131g150g139g145g144g131g142g3g149g150g131g144g134g131g148g134g149g3g132g145g134g139g135g149g3g523g12g22g18g3g143g135g143g132g135g148g3g132g145g134g139g135g149g524g484g3g23g138g135g3g153g145g148g141g3g145g136g3g146g148g135g146g131g148g139g144g137g3g1

23、2g144g150g135g148g144g131g150g139g145g144g131g142g3g22g150g131g144g134g131g148g134g149g3g139g149g3g144g145g148g143g131g142g142g155g3g133g131g148g148g139g135g134g3g145g151g150g3g150g138g148g145g151g137g138g3 g12g22g18g3 g150g135g133g138g144g139g133g131g142g3 g133g145g143g143g139g150g150g135g135g149g4

24、84g3 g8g131g133g138g3 g143g135g143g132g135g148g3 g132g145g134g155g3 g139g144g150g135g148g135g149g150g135g134g3 g139g144g3 g131g3 g149g151g132g140g135g133g150g3 g136g145g148g3 g153g138g139g133g138g3 g131g3 g150g135g133g138g144g139g133g131g142g3committee has been established has the right to be repres

25、ented on that committee. International g145g148g137g131g144g139g156g131g150g139g145g144g149g481g3 g137g145g152g135g148g144g143g135g144g150g131g142g3 g131g144g134g3 g144g145g144g486g137g145g152g135g148g144g143g135g144g150g131g142g481g3 g139g144g3 g142g139g131g139g149g145g144g3 g153g139g150g138g3 g12g

26、22g18g481g3 g131g142g149g145g3 g150g131g141g135g3 g146g131g148g150g3 g139g144g3 g150g138g135g3 g153g145g148g141g484g3g12g22g18g3 g133g145g142g142g131g132g145g148g131g150g135g149g3 g133g142g145g149g135g142g155g3 g153g139g150g138g3 g150g138g135g3 g12g144g150g135g148g144g131g150g139g145g144g131g142g3 g

27、8g142g135g133g150g148g145g150g135g133g138g144g139g133g131g142g3 g6g145g143g143g139g149g149g139g145g144g3 g523g12g8g6g524g3 g145g144g3 g131g142g142g3 g143g131g150g150g135g148g149g3 g145g136g3g135g142g135g133g150g148g145g150g135g133g138g144g139g133g131g142g3g149g150g131g144g134g131g148g134g139g156g131

28、g150g139g145g144g484g12g144g150g135g148g144g131g150g139g145g144g131g142g3g22g150g131g144g134g131g148g134g149g3g131g148g135g3g134g148g131g136g150g135g134g3g139g144g3g131g133g133g145g148g134g131g144g133g135g3g153g139g150g138g3g150g138g135g3g148g151g142g135g149g3g137g139g152g135g144g3g139g144g3g150g138

29、g135g3g12g22g18g512g12g8g6g3g7g139g148g135g133g150g139g152g135g149g481g3g19g131g148g150g3g884g484The main task of technical committees is to prepare International Standards. Draft International g22g150g131g144g134g131g148g134g149g3 g131g134g145g146g150g135g134g3 g132g155g3 g150g138g135g3 g150g135g13

30、3g138g144g139g133g131g142g3 g133g145g143g143g139g150g150g135g135g149g3 g131g148g135g3 g133g139g148g133g151g142g131g150g135g134g3 g150g145g3 g150g138g135g3 g143g135g143g132g135g148g3 g132g145g134g139g135g149g3 g136g145g148g3 g152g145g150g139g144g137g484g3g19g151g132g142g139g133g131g150g139g145g144g3

31、g131g149g3 g131g144g3 g12g144g150g135g148g144g131g150g139g145g144g131g142g3 g22g150g131g144g134g131g148g134g3 g148g135g147g151g139g148g135g149g3 g131g146g146g148g145g152g131g142g3 g132g155g3 g131g150g3 g142g135g131g149g150g3 g889g887g3 g936g3 g145g136g3 g150g138g135g3 g143g135g143g132g135g148g3 g132

32、g145g134g139g135g149g3casting a vote.g4g150g150g135g144g150g139g145g144g3g139g149g3g134g148g131g153g144g3g150g145g3g150g138g135g3g146g145g149g149g139g132g139g142g139g150g155g3g150g138g131g150g3g149g145g143g135g3g145g136g3g150g138g135g3g135g142g135g143g135g144g150g149g3g145g136g3g150g138g139g149g3g13

33、4g145g133g151g143g135g144g150g3g143g131g155g3g132g135g3g150g138g135g3g149g151g132g140g135g133g150g3g145g136g3g146g131g150g135g144g150g3g148g139g137g138g150g149g484g3g12g22g18g3g149g138g131g142g142g3g144g145g150g3g132g135g3g138g135g142g134g3g148g135g149g146g145g144g149g139g132g142g135g3g136g145g148g3

34、g139g134g135g144g150g139g136g155g139g144g137g3g131g144g155g3g145g148g3g131g142g142g3g149g151g133g138g3g146g131g150g135g144g150g3g148g139g137g138g150g149g484g12g22g18g3g883g886g888g886g886g486g890g3g153g131g149g3g146g148g135g146g131g148g135g134g3g132g155g3g23g135g133g138g144g139g133g131g142g3g6g145g1

35、43g143g139g150g150g135g135g3g12g22g18g512g23g6g3g884g882g891g481g3g6g142g135g131g144g148g145g145g143g149g3g131g144g134g3g131g149g149g145g133g139g131g150g135g134g3g133g145g144g150g148g145g142g142g135g134g3environments.g12g22g18g3g883g886g888g886g886g3g133g145g144g149g139g149g150g149g3g145g136g3g150g1

36、38g135g3g136g145g142g142g145g153g139g144g137g3g146g131g148g150g149g481g3g151g144g134g135g148g3g150g138g135g3g137g135g144g135g148g131g142g3g150g139g150g142g135g3g6g142g135g131g144g148g145g145g143g149g3g131g144g134g3g131g149g149g145g133g139g131g150g135g134g3g133g145g144g150g148g145g142g142g135g134g3en

37、vironments: g19g131g148g150g3g887g483g3g6g142g131g149g149g139g980g139g133g131g150g139g145g144g3g145g136g3g131g139g148g3g133g142g135g131g144g142g139g144g135g149g149 g19g131g148g150g3g888g483g3g22g146g135g133g139g980g139g133g131g150g139g145g144g149g3g136g145g148g3g150g135g149g150g139g144g137g3g131g144

38、g134g3g143g145g144g139g150g145g148g139g144g137g3g150g145g3g146g148g145g152g135g3g133g145g144g150g139g144g151g135g134g3g133g145g143g146g142g139g131g144g133g135g3g153g139g150g138g3g12g22g18g3g887g890g892g890g890g486g887 g19g131g148g150g3g889g483g3g23g135g149g150g3g143g135g150g138g145g134g149 g19g131g1

39、48g150g3g890g483g3g7g135g149g139g137g144g481g3g133g145g144g149g150g148g151g133g150g139g145g144g3g131g144g134g3g149g150g131g148g150g486g151g146 g19g131g148g150g3g891g483g3g18g146g135g148g131g150g139g145g144g149 g19g131g148g150g3g892g483g3g25g145g133g131g132g151g142g131g148g155 g19g131g148g150g3g893g4

40、83g3g22g135g146g131g148g131g150g139g152g135g3g134g135g152g139g133g135g149g3g523g133g142g135g131g144g3g131g139g148g3g138g145g145g134g149g481g3g137g142g145g152g135g132g145g154g135g149g481g3g139g149g145g142g131g150g145g148g149g481g3g143g139g144g139g486g135g144g152g139g148g145g144g143g135g144g150g149g52

41、4 g19g131g148g150g3g894g483g3g6g142g131g149g149g139g980g139g133g131g150g139g145g144g3g145g136g3g131g139g148g3g133g142g135g131g144g142g139g144g135g149g149g3g132g155g3g133g138g135g143g139g133g131g142g3g133g145g144g133g135g144g150g148g131g150g139g145g144g3g523g4g6g6g524 g19g131g148g150g3g895g483g3g6g14

42、2g131g149g149g139g980g139g133g131g150g139g145g144g3g145g136g3g149g151g148g136g131g133g135g3g133g142g135g131g144g142g139g144g135g149g149g3g132g155g3g146g131g148g150g139g133g142g135g3g133g145g144g133g135g144g150g148g131g150g139g145g144 g19g131g148g150g3g887g886g483g3g6g142g131g149g149g139g980g139g133g

43、131g150g139g145g144g3g145g136g3g149g151g148g136g131g133g135g3g133g142g135g131g144g142g139g144g135g149g149g3g132g155g3g133g138g135g143g139g133g131g142g3g133g145g144g133g135g144g150g148g131g150g139g145g144g23g138g139g149g3 g149g135g133g145g144g134g3 g135g134g139g150g139g145g144g3 g133g131g144g133g135g

44、142g149g3 g131g144g134g3 g148g135g146g142g131g133g135g149g3 g150g138g135g3 g976g139g148g149g150g3 g135g134g139g150g139g145g144g3 g523ISO 14644-8g483g884g882g882g888g524g481g3 g153g138g139g133g138g3 g138g131g149g3 g132g135g135g144g3g150g135g133g138g144g139g133g131g142g142g155g3g148g135g152g139g149g13

45、5g134g484iv ISO 2013 All rights reserved BS EN ISO 14644-8:2013ISO 14644-8:2013(E)IntroductionCleanrooms and associated controlled environments provide for the control of airborne particulate contamination to levels appropriate for accomplishing contamination-sensitive activities. Products and g146g

46、148g145g133g135g149g149g135g149g3g150g138g131g150g3g132g135g144g135g976g139g150g3g136g148g145g143g3g150g138g135g3g133g145g144g150g148g145g142g3g145g136g3g131g139g148g132g145g148g144g135g3g133g145g144g150g131g143g139g144g131g150g139g145g144g3g139g144g133g142g151g134g135g3g150g138g145g149g135g3g139g14

47、4g3g149g151g133g138g3g139g144g134g151g149g150g148g139g135g149g3g131g149g3g131g135g148g145g149g146g131g133g135g481g3g143g139g133g148g145g135g142g135g133g150g148g145g144g139g133g149g481g3g146g138g131g148g143g131g133g135g151g150g139g133g131g142g149g481g3g143g135g134g139g133g131g142g3g134g135g152g139g13

48、3g135g149g481g3g136g145g145g134g481g3g138g135g131g142g150g138g133g131g148g135g481g3g145g146g150g139g133g149g481g3g139g144g149g150g148g151g143g135g144g150g131g150g139g145g144g481g3g152g131g133g151g151g143g3g150g135g133g138g144g145g142g145g137g155g481g3g133g145g131g150g139g144g137g149g481g3g146g138g14

49、5g150g145g152g145g142g150g131g139g133g149g481g3g134g139g149g146g142g131g155g149g481g3g15g8g7g149g481g3g133g145g131g150g139g144g137g149g481g3g131g151g150g145g143g145g150g139g152g135g3g131g144g134g3g149g151g148g136g131g133g135g3g131g144g131g142g155g149g139g149g484g12g144g3g149g145g143g135g3g145g136g3g150g138g135g149g135g3g139g144g134g151g149g150g148g139g135g149g481g3g150g138g135g3g146g148g145g134g151g133g150g3g145g148g3g146g148g145g133g135g149g149g3g133g131g144g3g132g135g3g149g135g1