1、BS EN ISO25178-6:2010ICS 17.040.20NO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAWBRITISH STANDARDGeometrical productspecifications (GPS) Surface texture: ArealPart 6: Classification of methodsfor measuring surface texture (ISO25178-6:2010)This British Standardwas published und
2、er theauthority of the StandardsPolicy and StrategyCommittee on 31 May 2010 BSI 2010ISBN 978 0 580 70750 6Amendments/corrigenda issued since publicationDate CommentsBS EN ISO 25178-6:2010National forewordThis British Standard is the UK implementation of EN ISO25178-6:2010.The UK participation in its
3、 preparation was entrusted to TechnicalCommittee TDW/4, Technical Product Realization.A list of organizations represented on this committee can be obtained onrequest to its secretary.This publication does not purport to include all the necessary provisionsof a contract. Users are responsible for its
4、 correct application.Compliance with a British Standard cannot confer immunityfrom legal obligations.EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 25178-6 February 2010 ICS 17.040.20 English Version Geometrical product specifications (GPS) - Surface texture: Areal - Part 6: Classification
5、 of methods for measuring surface texture (ISO 25178-6:2010) Spcification gomtrique des produits (GPS) - tat de surface: Surfacique - Partie 6: Classification des mthodes de mesurage de ltat de surface (ISO 25178-6:2010) Geometrische Produktspezifikation (GPS) - Oberflchenbeschaffenheit: Flchenhaft
6、- Teil 6: Klassifizierung von Methoden zur Messung der Oberflchenbeschaffenheit (ISO 25178-6:2010) This European Standard was approved by CEN on 16 January 2010. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard
7、 the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN Management Centre or to any CEN member. This European Standard exists in three official versions (English, French, G
8、erman). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyp
9、rus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION C
10、OMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG Management Centre: Avenue Marnix 17, B-1000 Brussels 2010 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. EN ISO 25178-6:2010: EBS EN ISO 25178-6:2010EN ISO 25178-6:2010 (E)
11、 3 Foreword This document (EN ISO 25178-6:2010) has been prepared by Technical Committee ISO/TC 213 “Dimensional and geometrical product specifications and verification“ in collaboration with Technical Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secr
12、etariat of which is held by AFNOR. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by August 2010, and conflicting national standards shall be withdrawn at the latest by August 2010. Attention is dra
13、wn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such patent rights. According to the CEN/CENELEC Internal Regulations, the national standards organizations of the followi
14、ng countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovaki
15、a, Slovenia, Spain, Sweden, Switzerland and the United Kingdom. Endorsement notice The text of ISO 25178-6:2010 has been approved by CEN as a EN ISO 25178-6:2010 without any modification. BS EN ISO 25178-6:2010ISO 25178-6:2010(E) ISO 2010 All rights reserved iiiContents Page Foreword iv Introduction
16、.v 1 Scope1 2 Normative references1 3 Terms and definitions .1 3.1 General terms 1 3.2 Definitions for classification of surface texture measurement methods 2 3.3 Terms and descriptions for specific methods3 4 Classification scheme.5 Annex A (informative) Metrological limitations8 Annex B (informati
17、ve) Relation to the GPS matrix model.9 Bibliography10 BS EN ISO 25178-6:2010ISO 25178-6:2010(E) iv ISO 2010 All rights reservedForeword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing Internati
18、onal Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with IS
19、O, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2. The main task of technical co
20、mmittees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to the
21、 possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO 25178-6 was prepared by Technical Committee ISO/TC 213, Dimensional and geometrical product specifications and verificatio
22、n. ISO 25178 consists of the following parts, under the general title Geometrical product specifications (GPS) Surface texture: Areal: Part 2: Terms, definitions and surface texture parameters Part 3: Specification operators Part 6: Classification of methods for measuring surface texture Part 7: Sof
23、tware measurement standards Part 601: Nominal characteristics of contact (stylus) instruments Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments Part 701: Cal
24、ibration and measurement standards for contact (stylus) instruments The following parts are under preparation: Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments Part 605: Nominal characteristics of non-contact (point autofocusing) instruments BS EN ISO
25、25178-6:2010ISO 25178-6:2010(E) ISO 2010 All rights reserved vIntroduction This part of ISO 25178 is a geometrical product specification (GPS) standard and is to be regarded as a general GPS standard (see ISO/TR 146382). It influences the chain link 5 of the chain of standards on roughness profile,
26、waviness profile, primary profile and areal surface texture. This part of ISO 25178 describes a classification system for methods used primarily for the measurement of surface texture. The classification system provides a context for the development of other parts of ISO 25178 that describe characte
27、ristics and measurement standards for some of the individual methods. Such a classification is also intended to aid in choosing and understanding various types of methods and in determining which standards apply to their application. The classification system is aimed to be as general as possible. H
28、owever, instruments may exist that do not clearly fit within any single method class. BS EN ISO 25178-6:2010BS EN ISO 25178-6:2010INTERNATIONAL STANDARD ISO 25178-6:2010(E) ISO 2010 All rights reserved 1Geometrical product specifications (GPS) Surface texture: Areal Part 6: Classification of methods
29、 for measuring surface texture 1 Scope This part of ISO 25178 describes a classification system for methods used primarily for the measurement of surface texture. It defines three classes of methods, illustrates the relationships between the classes, and briefly describes specific methods. 2 Normati
30、ve references The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO 4287:1997, Geometrical Product
31、Specifications (GPS) Surface texture: Profile method Terms, definitions and surface texture parameters ISO 25178-2:1), Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters ISO/IEC Guide 99:2007, International vocabulary of metrolog
32、y Basic and general concepts and associated terms (VIM) 3 Terms and definitions 3.1 General terms For the purposes of this document, the terms and definitions given in ISO 4287, ISO 25178-2, ISO/IEC Guide 99 and the following apply. 3.1.1 measurement coordinate system system of coordinates in which
33、surface texture parameters are measured NOTE 1 If the nominal surface is a plane (or portion of a plane), it is usual to use a rectangular coordinate system in which the axes form a right-handed Cartesian set, the X-axis being the direction of tracing co-linear with the mean line and the Y-axis also
34、 lying on the nominal surface, and the Z-axis being in an outward direction (from the material to the surrounding medium). The rectangular coordinate system is adopted in this part of ISO 25178 except for 3.2.1, Note 3, and 3.3.3, where a cylindrical coordinate system is described. NOTE 2 See also s
35、pecification coordinate system ISO 25178-2:. 1) To be published. BS EN ISO 25178-6:2010ISO 25178-6:2010(E) 2 ISO 2010 All rights reserved3.1.2 surface profile profile that results from the intersection of the real surface by a specified plane NOTE In practice, it is usual to choose a plane with a no
36、rmal that nominally lies parallel to the real surface and in a suitable direction. ISO 4287:1997, definition 3.1.4 3.1.3 ordinate value z(x, y) height of the surface at position (x, y) 3.2 Definitions for classification of surface texture measurement methods 3.2.1 line-profiling method surface topog
37、raphy measurement method that produces a two-dimensional graph or profile of the surface irregularities as measurement data, which may be represented mathematically as a height function z(x) NOTE 1 By contrast, areal-topography (3.2.2) and area-integrating (3.2.3) methods are used to quantify the su
38、rface texture over a selected area of a surface instead of over single profiles. NOTE 2 Examples of instruments that were developed specifically to measure line profiles include contact stylus scanning1, early versions of the phase-shifting interferometer3, and the optical differential profiler45. N
39、OTE 3 Certain methods have rotational scanning within a cylindrical coordinate system and measure circular profiles, that is, z as a function of angle . One example is the circular interferometric profiler6. 3.2.2 areal-topography method surface measurement method that produces a topographical image
40、 of a surface, which may be represented mathematically as a height function z(x, y) of two independent variables (x, y) NOTE 1 Examples of methods that have been developed or adapted for areal-topography measurements include contact stylus scanning7, phase-shifting interferometric microscopy8, coher
41、ence scanning interferometry910, confocal microscopy11, confocal chromatic microscopy12, structured light projection1314(including triangulation), focus variation microscopy15, optical differential profiler45, digital holography microscopy16, point autofocus profiling1718, angle-resolved scanning el
42、ectron microscopy (SEM)1920, SEM stereoscopy2122, scanning tunnelling microscopy23, and atomic force microscopy2425. The areal measurement capability of these methods is often derived from a set of parallel profiles scanned sequentially or from manipulation of 2D images in microscope cameras. All of
43、 these methods may also be used to produce line-profiling results as well. NOTE 2 For methods that form a surface topography image z(x, y) from sequential profiles such as a set of parallel profiles z(x), care should be taken to ascertain the accuracy of measurement along the slow axis z(y). Althoug
44、h z(x, y) topographic images may be displayed for an areal texture method, in some cases the method may not actually be sensitive to z(y) topography changes, or the accuracy of z(y) profiling may be limited by the drift of the instrument. 3.2.3 area-integrating method surface measurement method that
45、 measures a representative area of a surface and produces numerical results that depend on area-integrated properties of the surface texture NOTE 1 These methods do not produce line-profile data z(x) or areal-topography data z(x, y). NOTE 2 Examples of instruments that have been developed as area-in
46、tegrating methods include those that use the techniques of total integrated light scatter26, angle-resolved light scatter27, parallel-plate capacitance28and pneumatic (flow) measurement29. NOTE 3 Area-integrating methods have been used in conjunction with calibrated roughness comparison specimens or
47、 calibrated pilot specimens as comparators to distinguish the surface texture of parts manufactured by similar processes or to perform repetitive surface texture assessments. BS EN ISO 25178-6:2010ISO 25178-6:2010(E) ISO 2010 All rights reserved 33.3 Terms and descriptions for specific methods 3.3.1
48、 contact stylus scanning surface topography measurement method whereby the probing system uses a contacting stylus whose motion is converted into a signal as a function of position NOTE See ISO 25178-601 for more information. 3.3.2 phase-shifting interferometric microscopy PSI surface topography mea
49、surement method whereby an optical microscope with illumination of a known effective wavelength is integrated with an interferometric attachment and produces multiple successive optical images with interferometric fringes from which the profile or areal surface topography image is calculated NOTE 1 Bands of light and dark interferometric fringes are produced in images when two or more mutually coherent optical beams are combined. NOTE 2 See ISO 2
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