BS EN ISO 25178-602-2010 Geometrical product specifications (GPS) - Surface texture - Areal - Nominal characteristics of non-contact (confocal chromatic probe) instruments《产品几何技术规范.pdf

1、raising standards worldwideNO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAWBSI Standards PublicationBS EN ISO 25178-602:2010Geometrical productspecifications (GPS) Surfacetexture: ArealPart 602: Nominal characteristics ofnon-contact (confocal chromatic probe)instruments (ISO 25

2、178-602:2010)BS EN ISO 25178-602:2010 BRITISH STANDARDNational forewordThis British Standard is the UK implementation of EN ISO25178-602:2010.The UK participation in its preparation was entrusted to TechnicalCommittee TDW/4, Technical Product Realization.A list of organizations represented on this c

3、ommittee can beobtained on request to its secretary.This publication does not purport to include all the necessaryprovisions of a contract. Users are responsible for its correctapplication. BSI 2010ISBN 978 0 580 60203 0ICS 17.040.20Compliance with a British Standard cannot confer immunity fromlegal

4、 obligations.This British Standard was published under the authority of theStandards Policy and Strategy Committee on 31 July 2010Amendments issued since publicationDate Text affectedEUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 25178-602 July 2010 ICS 17.040.20 English Version Geometrica

5、l product specifications (GPS) - Surface texture: Areal - Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments (ISO 25178-602:2010) Spcification gomtrique des produits (GPS) - tat de surface: Surfacique - Partie 602: Caractristiques nominales des instruments sans c

6、ontact ( capteur confocal chromatique) (ISO 25178-602:2010) Geometrische Produktspezifikation (GPS) - Oberflchenbeschaffenheit: Flchenhaft - Teil 602: Merkmale von berhrungslos messenden Gerten (mit chromatisch konfokaler Sonde) (ISO 25178-602:2010) This European Standard was approved by CEN on 6 Ma

7、y 2010. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtai

8、ned on application to the CEN Management Centre or to any CEN member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN Managem

9、ent Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlan

10、ds, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG Management Centre: Avenue Marnix 17, B-1000 Brussels 2010 CEN All rights of exploitation in a

11、ny form and by any means reserved worldwide for CEN national Members. Ref. No. EN ISO 25178-602:2010: EBS EN ISO 25178-602:2010EN ISO 25178-602:2010 (E) 3 Foreword This document (EN ISO 25178-602:2010) has been prepared by Technical Committee ISO/TC 213 “Dimensional and geometrical product specifica

12、tions and verification“ in collaboration with Technical Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of which is held by AFNOR. This European Standard shall be given the status of a national standard, either by publication of an identical

13、text or by endorsement, at the latest by January 2011, and conflicting national standards shall be withdrawn at the latest by January 2011. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and/or CENELEC shall not be held respo

14、nsible for identifying any or all such patent rights. According to the CEN/CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finla

15、nd, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and the United Kingdom. Endorsement notice The text of ISO 25178-602:2010 has been approved by CEN as a

16、EN ISO 25178-602:2010 without any modification. BS EN ISO 25178-602:2010ISO 25178-602:2010(E) ISO 2010 All rights reserved iiiContents Page Foreword iv Introduction.v 1 Scope1 2 Normative references1 3 Terms and definitions .1 4 Summary of metrological characteristics.15 Annex A (normative) Classifi

17、cation of the different configurations for areal surface texture scanning instrument .16 Annex B (informative) General principles 17 Annex C (normative) Concept diagrams 25 Annex D (informative) Relation to the GPS matrix 27 Bibliography29 BS EN ISO 25178-602:2010ISO 25178-602:2010(E) iv ISO 2010 Al

18、l rights reservedForeword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subj

19、ect for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IE

20、C) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2. The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committ

21、ees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be

22、held responsible for identifying any or all such patent rights. ISO 25178-602 was prepared by Technical Committee ISO/TC 213, Dimensional and geometrical product specifications and verification. ISO 25178 consists of the following parts, under the general title Geometrical product specifications (GP

23、S) Surface texture: Areal: Part 2: Terms, definitions and surface texture parameters Part 3: Specification operators Part 6: Classification of methods for measuring surface texture Part 7: Software measurement standards Part 601: Nominal characteristics of contact (stylus) instruments Part 602: Nomi

24、nal characteristics of non-contact (confocal chromatic probe) instruments Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments Part 701: Calibration and measurement standards for contact (stylus) instruments The following parts are under preparatio

25、n: Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments Part 605: Nominal characteristics of non-contact (point autofocusing) instruments BS EN ISO 25178-602:2010ISO 25178-602:2010(E) ISO 2010 All rights reserved vIntroduction This part of ISO 25178 is a g

26、eometrical product specification standard and is to be regarded as a general GPS standard (see ISO/TR 14638). It influences chain link 5 of the chain of standards on roughness profile, waviness profile and primary profile and areal surface texture. For more detailed information on the relationship o

27、f this standard to the GPS matrix model, see Annex D. The confocal chromatic optical principle can be implemented in various set-ups. The configuration described in this document comprises three basic elements: an optoelectronic controller, a linking fibre optic cable and a chromatic objective (some

28、times called “optical pen”). Several techniques are possible to create the axial chromatic dispersion or to extract the height information from the reflected light. In addition to implementations as point sensors, chromatic dispersion may be integrated into line sensors and field sensors. Annex B de

29、scribes in detail confocal chromatic imaging and its implementation into distance measurement probes. This type of instrument is mainly designed for areal measurements, but it is also able to perform profile measurements. This part of ISO 25178 describes the metrological characteristics of an optica

30、l profiler using a confocal chromatic probe based on axial chromatic dispersion of white light, designed for the measurement of areal surface texture. For more detailed information on the chromatic probe instrument technique, see Annex B. Reading this annex before the main body may lead to a better

31、understanding of this part of ISO 25178. BS EN ISO 25178-602:2010BS EN ISO 25178-602:2010INTERNATIONAL STANDARD ISO 25178-602:2010(E) ISO 2010 All rights reserved 1Geometrical product specifications (GPS) Surface texture: Areal Part 602: Nominal characteristics of non-contact (confocal chromatic pro

32、be) instruments 1 Scope This part of ISO 25178 defines the design and metrological characteristics of a particular non-contact instrument for measuring surface texture using a confocal chromatic probe based on axial chromatic dispersion of white light. 2 Normative references The following referenced

33、 documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO 3274:1996, Geometrical Product Specifications (GPS) Surface texture:

34、Profile method Nominal characteristics of contact (stylus) instruments ISO 4287, Geometrical Product Specifications (GPS) Surface texture: Profile method Terms, definitions and surface texture parameters ISO 10360-1, Geometrical Product Specifications (GPS) Acceptance and reverification tests for co

35、ordinate measuring machines (CMM) Part 1: Vocabulary ISO/IEC Guide 99:2007, International vocabulary of metrology Basic and general concepts and associated terms (VIM) 3 Terms and definitions For the purposes of this document, the terms and definitions given in ISO 3274, ISO 4287, ISO 10360-1, ISO/I

36、EC Guide 99 and the following apply. NOTE Several of the terms given below are common to other types of instruments that use single point sensors and lateral scanning. BS EN ISO 25178-602:2010ISO 25178-602:2010(E) 2 ISO 2010 All rights reserved3.1 General terms and definitions 3.1.1 coordinate syste

37、m of the instrument orthonormal system of axes (X,Y,Z) defined as: (X,Y) is the plane established by the areal reference guide of the instrument; the Z axis is mounted parallel to the optical axis and is perpendicular to the (X,Y) plane NOTE Normally, the X-axis is the tracing axis and the Y-axis is

38、 the stepping axis. 3.1.2 measurement loop closed chain which comprises all components connecting the workpiece and the chromatic probe (3.3.2), e.g. the means of positioning, the workholding fixture, the measuring stand, the drive unit (3.2.3 and 3.2.4) and the probing system (3.3.1) See Figure 1.

39、NOTE The measuring loop will be subjected to external and internal disturbances which influence the measurement uncertainty. Key 1 coordinate system of the instrument 2 measurement loop Figure 1 Coordinate system and measurement loop of the instrument 3.1.3 real surface of a workpiece set of feature

40、s which physically exist and separate the entire workpiece from the surrounding medium ISO 14660-1:1999, definition 2.4 BS EN ISO 25178-602:2010ISO 25178-602:2010(E) ISO 2010 All rights reserved 33.1.4 real electro-magnetic surface surface obtained by the electro-magnetic interaction with the real s

41、urface of a work piece ISO 14406:1), definition 3.2.2 NOTE The real electro-magnetic surface considered for the instrument described in this part of ISO 25178 may be different from the real electro-magnetic surface for other types of optical instruments. 3.1.5 primary extracted surface finite set of

42、 data points sampled from the primary surface ISO 14406:1), definition 3.7 3.1.6 measurement error error of measurement error measured quantity value minus a reference quantity value NOTE 1 The concept of “measurement error” can be used both a) when there is a single reference quantity value to refe

43、r to, which occurs if a calibration is made by means of a measurement standard with a measured quantity value having a negligible measurement uncertainty or if a conventional quantity value is given, in which case the measurement error is known, and b) if a measurand is supposed to be represented by

44、 a unique true quantity value or a set of true quantity values of negligible range, in which case the measurement error is not known. NOTE 2 Measurement error should not be confused with production error or mistake. ISO/IEC Guide 99:2007, definition 2.16 3.1.7 systematic measurement error systematic

45、 error of measurement systematic error component of measurement error (3.1.6) that in replicate measurements remains constant or varies in a predictable manner NOTE 1 A reference quantity value for a systematic measurement error is a true quantity value, or a measured quantity value of a measurement

46、 standard of negligible measurement uncertainty, or a conventional quantity value. NOTE 2 Systematic measurement error, and its causes, can be known or unknown. A correction (3.1.11) can be applied to compensate for a known systematic measurement error. NOTE 3 Systematic measurement error equals mea

47、surement error minus random measurement error (3.1.8). ISO/IEC Guide 99:2007, definition 2.17 3.1.8 random measurement error random error of measurement random error component of measurement error (3.1.6) that in replicate measurements varies in an unpredictable manner 1) To be published. BS EN ISO

48、25178-602:2010ISO 25178-602:2010(E) 4 ISO 2010 All rights reservedNOTE 1 A reference quantity value for a random measurement error is the average that would ensue from an infinite number of replicate measurements of the same measurand. NOTE 2 Random measurement errors of a set of replicate measureme

49、nts form a distribution that can be summarized by its expectation, which is generally assumed to be zero, and its variance. NOTE 3 Random measurement error equals measurement error minus systematic measurement error (3.1.7). ISO/IEC Guide 99:2007, definition 2.19 3.1.9 adjustment of a measuring instrument adjustment set of operations carried out on a measuring system so that it provides prescribed indications corresponding to given values of a quantity to be measured NOTE 1 Types of a