BS ISO 10110-5-2015 Optics and photonics Preparation of drawings for optical elements and systems Surface form tolerances《光学和光子学 光学元件和系统制图准备 表面形状公差》.pdf

1、BSI Standards PublicationBS ISO 10110-5:2015Optics and photonics Preparation of drawings foroptical elements and systemsPart 5: Surface form tolerancesBS ISO 10110-5:2015 BRITISH STANDARDNational forewordThis British Standard is the UK implementation of ISO 10110-5:2015.It supersedes BS ISO 10110-5:

2、2007 which is withdrawn.The UK participation in its preparation was entrusted to TechnicalCommittee CPW/172, Optics and Photonics.A list of organizations represented on this committee can beobtained on request to its secretary.This publication does not purport to include all the necessaryprovisions

3、of a contract. Users are responsible for its correctapplication. The British Standards Institution 2015. Published by BSI StandardsLimited 2015ISBN 978 0 580 79514 5ICS 01.100.20; 37.020Compliance with a British Standard cannot confer immunity fromlegal obligations.This British Standard was publishe

4、d under the authority of theStandards Policy and Strategy Committee on 31 August 2015.Amendments issued since publicationDate Text affectedBS ISO 10110-5:2015 ISO 2015Optics and photonics Preparation of drawings for optical elements and systems Part 5: Surface form tolerancesOptique et photonique In

5、dications sur les dessins pour lments et systmes optiques Partie 5: Tolrances de forme de surfaceINTERNATIONAL STANDARDISO10110-5Third edition2015-08-01Reference numberISO 10110-5:2015(E)BS ISO 10110-5:2015ISO 10110-5:2015(E)ii ISO 2015 All rights reservedCOPYRIGHT PROTECTED DOCUMENT ISO 2015, Publi

6、shed in SwitzerlandAll rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permissi

7、on can be requested from either ISO at the address below or ISOs member body in the country of the requester.ISO copyright officeCh. de Blandonnet 8 CP 401CH-1214 Vernier, Geneva, SwitzerlandTel. +41 22 749 01 11Fax +41 22 749 09 47copyrightiso.orgwww.iso.orgBS ISO 10110-5:2015ISO 10110-5:2015(E)For

8、eword ivIntroduction vi1 Scope . 12 Normative references 13 Terms and definitions . 14 Specification of tolerances for surface form deviation . 24.1 General . 24.2 Units . 24.3 Wavelength . 35 Indication in drawings 35.1 General . 35.2 Structure of the indication based on code number . 35.2.1 Genera

9、l 35.2.2 Code number . 35.2.3 Basic forms 45.2.4 Additional forms 65.2.5 Area . 85.2.6 Location . 85.3 Structure of the indication in tabular form 95.4 Specification of deviations in sets of Zernike coefficients in tabular form . 96 Examples of tolerance indications 106.1 Examples for indication bas

10、ed on code number .106.2 Examples for indication based on a table . 126.2.1 Aspheric surface 126.2.2 XY - polynomials described surface (Cartesian coordinates) 136.2.3 -polynomials described surface (polar coordinates) .136.2.4 Example for specification of deviations in sets of Zernike coefficients

11、in tabular form 13Annex A (informative) Relationship between power deviation tolerance and radius of curvature tolerance 15Annex B (informative) Comparison of ISO 10110-5 and ISO 14999-4 corresponding nomenclature, functions, and values16Bibliography .20 ISO 2015 All rights reserved iiiContents Page

12、BS ISO 10110-5:2015ISO 10110-5:2015(E)ForewordISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body

13、interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotech

14、nical Commission (IEC) on all matters of electrotechnical standardization.The procedures used to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO d

15、ocuments should be noted. This document was drafted in accordance with the editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held respon

16、sible for identifying any or all such patent rights. Details of any patent rights identified during the development of the document will be in the Introduction and/or on the ISO list of patent declarations received (see www.iso.org/patents).Any trade name used in this document is information given f

17、or the convenience of users and does not constitute an endorsement.For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment, as well as information about ISOs adherence to the WTO principles in the Technical Barriers to Trade (TBT) see the following UR

18、L: Foreword - Supplementary Information. The committee responsible for this document is ISO/TC 172, Optics and photonics, Subcommittee SC 1, Fundamental standards.This third edition cancels and replaces the second edition (ISO 10110-5:2007), which has been technically revised with the following chan

19、ges:a) “nanometres” have been introduced as the standard unit for specifying tolerances for certain types of surface form deviation replacing the former standard unit “fringe spacings”;b) expansion of the scope now including surfaces of higher order such as aspheric, non-circular cylindric, and gene

20、ral surfaces;c) specification of deviations in tabular form has been added;d) a definition of sagitta deviation has been added;e) the name of quantity A has been changed to power deviation (reflecting the change in ISO 14999-4). For further details, see 5.2.3, NOTE 3;f) an informative Annex B has be

21、en added giving a comparison of ISO 10110-5 and ISO 14999-4 regarding corresponding nomenclature, functions, and values.ISO 10110 consists of the following parts, under the general title Optics and photonics Preparation of drawings for optical elements and systems: Part 1: General Part 2: Material i

22、mperfections Stress birefringence Part 3: Material imperfections Bubbles and inclusions Part 4: Material imperfections Inhomogeneity and striae Part 5: Surface form tolerancesiv ISO 2015 All rights reservedBS ISO 10110-5:2015ISO 10110-5:2015(E) Part 6: Centring tolerances Part 7: Surface imperfectio

23、n tolerances Part 8: Surface texture; roughness and waviness Part 9: Surface treatment and coating Part 10: Table representing data of optical elements and cemented assemblies Part 11: Non-toleranced data Part 12: Aspheric surfaces Part 14: Wavefront deformation tolerance Part 17: Laser irradiation

24、damage threshold Part 19: General description of surfaces and components ISO 2015 All rights reserved vBS ISO 10110-5:2015ISO 10110-5:2015(E)IntroductionThis part of ISO 10110 refers to deviations in the form (shape) of an optical surface and provides a means of specifying tolerances for certain typ

25、es of surface form deviation in terms of nanometres.As it is common practice to measure the surface form deviation interferometrically as the wavefront deformation caused by a single reflection from the optical surface at normal (90 to surface) incidence, it is possible to describe a single definiti

26、on of interferometric data reduction that can be used in both cases, i.e. in surface form deviation as well as wavefront deformation. As the analysis of most measurements is software based, the deviations are expressed in nanometres. Interferometrical measurements, however, use the unit “fringe spac

27、ings”. One “fringe spacing” is equal to a surface form deviation that causes a deformation of the reflected wavefront of one wavelength. A value expressed in nanometres is an indication of the actual height deviation of the surface itself (and not that of the reflected wavefront).The surface under t

28、est, together with the test glass is, for example, such an interferometer. The surface form deviation is represented by the wavefront deformation which is the difference between the wavefront reflected by the actual surface and that reflected by the test glass surface.Due to the potential for confus

29、ion and misinterpretation, nanometres rather than fringe spacings are to be used. Where fringe spacings are used as units, the wavelength is also to be specified.In addition, tolerances for slope deviations of surfaces can be given in units of mrad, rad, arcmin, or arcsec.vi ISO 2015 All rights rese

30、rvedBS ISO 10110-5:2015INTERNATIONAL STANDARD ISO 10110-5:2015(E)Optics and photonics Preparation of drawings for optical elements and systems Part 5: Surface form tolerances1 ScopeThis International Standard specifies the presentation of design and functional requirements for optical elements and s

31、ystems in technical drawings used for manufacturing and inspection.This part of ISO 10110 specifies rules for indicating the tolerance for surface form deviation.NOTE The terminology of interferometry employing the unit “fringe spacings” is widely used for the specification of tolerances. However, t

32、he usage of non-interferometric methods for testing of optical parts has recently become more important. Therefore, unlike in the earlier versions of this part of ISO 10110, nanometres shall now be the preferred and standard unit to express surface form deviations. The usage of fringe spacings is st

33、ill permitted given that the base wavelength is explicitly stated.This part of ISO 10110 applies to surfaces of plano, spherical, aspheric, circular and non-circular cylindric, and toric form as well as to surfaces of other non-spherical shape such as generally described surfaces. It does not apply

34、to diffractive surfaces, Fresnel surfaces, and micro-optical surfaces.2 Normative referencesThe following referenced documents, in whole or in part, are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest editio

35、n of the referenced document (including any amendments) applies.ISO 10110-1, Optics and photonics Preparation of drawings for optical elements and systems Part 1: GeneralISO 10110-10, Optics and photonics Preparation of drawings for optical elements and systems Part 10: Table representing data of op

36、tical elements and cemented assembliesISO 10110-19, Optics and photonics Preparation of drawings for optical elements and systems Part 19: General description of surfaces and componentsISO 14999-4, Optics and photonics Interferometric measurement of optical elements and optical systems Part 4: Inter

37、pretation and evaluation of tolerances specified in ISO 101103 Terms and definitionsFor the purposes of this document, the terms and definitions given in ISO 14999-4 and the following apply.3.1surface form deviationfunction representing the distances normal to the surface between a nominal optical s

38、urface form and a measured form described as a measured wavefront deformation fWDor fWD,CYas defined in ISO 14999-4Note 1 to entry: ISO 14999-4 provides the definitions for the deformation functions. ISO 2015 All rights reserved 1BS ISO 10110-5:2015ISO 10110-5:2015(E)3.2sagitta deviationZfunction re

39、presenting the distances along the z-axis between a nominal optical surface form and a measured formNote 1 to entry: Based on interferometric measurement, the values are available along the local surface normal and have to be converted to deviations in the z direction in order to compare them with Z

40、.Note 2 to entry: For simple optical surfaces, the z-axis is often also the optical axis.4 Specification of tolerances for surface form deviation4.1 GeneralThe tolerances for surface form deviation are indicated by specifying the maximum permissible values of the power deviation, irregularity, rotat

41、ionally and/or translationally invariant irregularity. In addition, tolerances for root-mean-square (rms) measures of surface form deviation (rms total, rms irregularity, and rms rotationally and/or translationally varying wavefront irregularity) and tolerances for slope deviation (max and rms value

42、s) may be specified (see ISO 14999-4 for definitions). A surface form deviation based on a sagitta table can also be given in the z-direction and as irregularity as well as slope.Both the surface form tolerances and the tolerances of the slope deviations can vary in different sections and different

43、orientations (x, y) or (, ). In this case, the sampling length and the spatial sampling interval can also deviate from each other.The surface form tolerance can also be defined as coefficients of a Zernike polynomial.NOTE 1 ISO 10110-14 provides a means of specifying only one single tolerance for th

44、e wavefront deformation without any need to specify tolerances for individual surfaces.NOTE 2 Methods for determining the amount of power deviation, irregularity, rotationally and/or translationally invariant irregularity, and slope deviation of a given surface are given in ISO 14999-4.Specifying a

45、slope deviation tolerance or rms slope is recommended for non-spherical surfaces like aspheric, non-circular cylindric, or general surfaces. Depending on the application and complexity, the permissible max slope deviation might also be indicated as an absolute quantity in direction (x, y) or (, ).It

46、 is not necessary that tolerances are specified for all types of surface form deviation.All deviations of the surface but one is defined perpendicular to the theoretical surface. The sagitta deviation, Z, is defined along the z-axis.4.2 UnitsThe maximum permissible values for power deviation, irregu

47、larity, and rotationally and/or translationally invariant irregularity shall be specified in units of nanometres or, if preferred, micrometers or fringe spacings. If a specification is to be given for one or more rms deviation types, it shall be given in units of nanometres or, if preferred, microme

48、ters or fringe spacings.To avoid confusion, the unit “wavelength of light” should never be used for surface form deviations.When a surface is tested interferometrically by reflection at normal incidence, a surface form deviation of one-half the wavelength of light causes a wavefront deviation of one

49、 full wavelength. This results in an interference pattern in which the intensity varies from one bright fringe to the next or from one dark fringe to the next, i.e. one fringe spacing is visible. For the purpose of this part of ISO 10110, the words “fringe spacings” do not refer to the transverse distance between fringes, but to the fact that the 2 ISO 2015 All rights reservedBS ISO 10110-5:2015ISO 10110-5:2015(E)number of fringe spacings visible in the interference pattern corresponds to the numbe