1、raising standards worldwideNO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAWBSI Standards PublicationBS ISO 10110-8:2010Optics and photonics Preparation of drawings foroptical elements and systemsPart 8: Surface texture; roughness andwavinessBS ISO 10110-8:2010 BRITISH STANDARDN
2、ational forewordThis British Standard is the UK implementation of ISO 10110-8:2010.It supersedes BS ISO 10110-8:1997 which is withdrawn.The UK participation in its preparation was entrusted to TechnicalCommittee CPW/172/1, Optics and Photonics - FundamentalStandards.A list of organizations represent
3、ed on this committee can beobtained on request to its secretary.This publication does not purport to include all the necessaryprovisions of a contract. Users are responsible for its correctapplication. BSI 2010ISBN 978 0 580 63750 6ICS 01.100.20; 37.020Compliance with a British Standard cannot confe
4、r immunity fromlegal obligations.This British Standard was published under the authority of theStandards Policy and Strategy Committee on 31 October 2010.Amendments issued since publicationDate Text affectedBS ISO 10110-8:2010Reference numberISO 10110-8:2010(E)ISO 2010INTERNATIONAL STANDARD ISO10110
5、-8Second edition2010-10-01Optics and photonics Preparation of drawings for optical elements and systems Part 8: Surface texture; roughness and wavinessOptique et photonique Indications sur les dessins pour lments et systmes optiques Partie 8: tat de surface; rugosit et ondulation BS ISO 10110-8:2010
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9、 given below. COPYRIGHT PROTECTED DOCUMENT ISO 2010 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either ISO at
10、 the address below or ISOs member body in the country of the requester. ISO copyright office Case postale 56 CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail copyrightiso.org Web www.iso.org Published in Switzerland ii ISO 2010 All rights reservedBS ISO 10110-8:2010ISO 10110-8:2
11、010(E) ISO 2010 All rights reserved iiiContents Page Foreword iv 1 Scope1 2 Normative references1 3 Terms and definitions .1 4 Description of surface texture4 4.1 General .4 4.2 Description of matt surfaces5 4.3 Description of optically smooth surfaces.5 5 Indication in drawings.7 5.1 General .7 5.2
12、 Indication for matt surface texture 7 5.3 Indication for optically smooth surface texture .8 5.4 Location10 Annex A (informative) Specification of texture for optically smooth surfaces in terms of microdefects 11 Annex B (informative) Relationship between surface texture and scattering characterist
13、ic of textured surfaces.12 Annex C (informative) Examples of indication of surface texture requirements .14 Bibliography18 BS ISO 10110-8:2010ISO 10110-8:2010(E) iv ISO 2010 All rights reservedForeword ISO (the International Organization for Standardization) is a worldwide federation of national sta
14、ndards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International or
15、ganizations, governmental and non-governmental, in liaison with ISO, also take Part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules give
16、n in the ISO/IEC Directives, Part 2. The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 7
17、5 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO 10110-8 was prepared by Technical Committee ISO/TC 172,
18、Optics and photonics, Subcommittee SC 1, Fundamental standards. This second edition cancels and replaces the first edition (ISO 10110-8:1997), which has been technically revised. ISO 10110 consists of the following parts, under the general title Optics and photonics Preparation of drawings for optic
19、al elements and systems: Part 1: General Part 2: Material imperfections Stress birefringence Part 3: Material imperfections Bubbles and inclusions Part 4: Material imperfections Inhomogeneity and striae Part 5: Surface form tolerances Part 6: Centring tolerances Part 7: Surface imperfection toleranc
20、es Part 8: Surface texture; roughness and waviness Part 9: Surface treatment and coating Part 10: Table representing data of optical elements and cemented assemblies Part 11: Non-toleranced data Part 12: Aspheric surfaces Part 14: Wavefront deformation tolerance Part 17: Laser irradiation damage thr
21、eshold BS ISO 10110-8:2010INTERNATIONAL STANDARD ISO 10110-8:2010(E) ISO 2010 All rights reserved 1Optics and photonics Preparation of drawings for optical elements and systems Part 8: Surface texture; roughness and waviness 1 Scope ISO 10110 specifies the presentation of design and functional requi
22、rements for optical elements in technical drawings used for manufacturing and inspection. This part of ISO 10110 specifies rules for the indication of the surface texture of optical elements. Surface texture is the characteristic of a surface that can be effectively described with statistical method
23、s. Typically, surface texture is associated with high spatial frequency errors (roughness) and mid-spatial frequency errors (waviness). This part of ISO 10110 is primarily intended for the specification of polished optics. This part of ISO 10110 describes a method for characterizing the residual sur
24、face that is left after detrending by subtracting the surface form. The control of the surface form is specified in ISO 10110-5 and ISO 10110-12, it is not specified in this part of ISO 10110. 2 Normative references The following referenced documents are indispensable for the application of this doc
25、ument. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO 1302:2002, Geometrical Product Specifications (GPS) Indication of surface texture in technical product documentation ISO 4287:199
26、7, Geometrical Product Specifications (GPS) Surface texture: Profile method Terms, definitions and surface texture parameters 3 Terms and definitions For the purposes of this document, terms and definitions given in ISO 4287 and the following apply. 3.1 surface texture characteristic relating to the
27、 profile of an optical surface that can be effectively described with statistical methods NOTE Localized defects, known as surface imperfections, are specified in ISO 10110-7. BS ISO 10110-8:2010ISO 10110-8:2010(E) 2 ISO 2010 All rights reserved3.2 matt surface optical surface for which the height v
28、ariation of the surface texture is not considerably smaller than the wavelength of light NOTE Matt surfaces are usually produced by brittle grinding of glass or other dielectric material, or by etching. 3.3 optically smooth surface optical surface for which the height variation of the surface textur
29、e is considerably smaller than the wavelength of light NOTE 1 Due to the smaller height variation, the amount of light scattered is small. NOTE 2 Optically smooth surfaces are usually produced by polishing or moulding. 3.4 microdefect small irregularity in an optically smooth surface; i.e. location
30、where the surface height differs from the average surface height by more than twice the standard deviation NOTE Usually, microdefects are pits remaining after an incomplete polish, although they can also be due to mishandling and contamination during polishing. Microdefects are of concern because th
31、ey produce large-angle scattering. Microdefects are not considered surface imperfections as treated in ISO 10110-7 because they are usually reasonably uniformly distributed over the surface and thus have a global characteristic associated with texture. 3.5 detrending fitting and removing a surface f
32、orm from a set of measured data NOTE 1 Detrending is usually applied to the input data to avoid masking low-amplitude high frequency errors with the large amplitude, low frequency surface form errors. The resultant set of data points represents the residual surface. NOTE 2 For the purposes of this p
33、art of ISO 10110, the surface form used for detrending is a polynomial fit to the measured surface with an order sufficient to remove all spatial wavelengths longer than the spatial bandwidth of the specification. 3.6 measured surface Zmfunction of raw surface measurement data, prior to detrending 3
34、.7 surface form Zffit to a measured surface NOTE In a typical 2D polynomial fit to a surface, the surface polynomial can be written as a Zernike polynomial or another polynomial equation. For example in Cartesian coordinates: f11(, ) (, )pqij ijijZ xy C P xy=(1) where Pijis a polynomial function of
35、order p,q that describes the underlying shape of the surface. BS ISO 10110-8:2010ISO 10110-8:2010(E) ISO 2010 All rights reserved 33.8 residual surface Z function that is calculated by subtracting the surface form Zffrom a measured surface ZmNOTE 1 For example in 2D, this is expressed mathematically
36、 as: Z(x,y) = Zm(x,y) Zf(x,y) or in polar coordinates Z(r,) = Zm(r,) Zf(r,). NOTE 2 Neglecting correction factors for instrument response, the residual surface is taken as the surface height data. 3.9 sampled surface data residual surface data, Z(xm,yn), sampled on a discrete m by n grid of points (
37、xm,yn) 3.10 evaluation length length over which the surface texture is to be evaluated NOTE Typically this is synonymous with trace length in a profile measurement. The default evaluation length is five times the upper limit of the spatial bandwidth. 3.11 spatial wavelength peak to peak scale-length
38、 of a sinusoidal surface undulation, especially when viewed in a Fourier transform NOTE See ISO 3274 and ISO 11562 for more information. 3.12 spatial bandwidth range of surface spatial wavelengths which are to be included in the specification NOTE This is equivalent to the term “transmission band” a
39、s used in ISO 1302. In order to prevent confusion with spectral transmission bands, the term “spatial bandwidth” is used instead of “transmission band” in this part of ISO 10110. 3.13 root mean square roughness rms roughness Rq square root of the mean of the square of the residual surface height in
40、a region for short spatial wavelengths 3.14 root mean square waviness rms waviness Wq square root of the mean of the square of the residual surface height in a region for spatial wavelengths between those of surface roughness and surface form 3.15 power spectral density PSD squared magnitude of the
41、Fourier transform of the residual surface height function along one dimension using an appropriate weighting function 3.16 surface lay symbol symbol indicating the lay of the surface profile parameter NOTE According to ISO 1302:2002, Table 2, the following symbols are used for surface lay; R (radial
42、), C (circular), X (crossed), = (parallel to projection), (perpendicular to projection), etc. BS ISO 10110-8:2010ISO 10110-8:2010(E) 4 ISO 2010 All rights reserved3.17 local slope difference between the heights at two points on the residual surface, divided by the distance between the points NOTE 1
43、The local slope is expressed in microradians. NOTE 2 In one dimension, the surface slope points can be computed directly from the surface heights by successive differences: ()()11()dnnnxZxZxx+=where n = 1,2, n1 (2) NOTE 3 This differencing calculation always results in one less data point in the slo
44、pe profile. NOTE 4 This is the equivalent of the property symbolized by dZ/dX in ISO 4287:1997, but generalized so that it can be calculated along any direction or lay and in any coordinate system. 3.18 root mean square slope rms slope Rq square root of the mean of the square of the local slopes in
45、a region on a residual surface NOTE The root mean square slope is expressed in microradians. 4 Description of surface texture 4.1 General Surface texture is a global statistical characteristic of the profile of the optical surface, and it is assumed for this part of ISO 10110 that the character and
46、magnitude of the texture in any one area of the surface is similar to that in all other areas of the same surface. This assumption is made so that a measurement made in one part of an indicated test region or surface may be considered representative of the entire test region or surface. Unless state
47、d otherwise, the indication of surface texture applies to surfaces before coating. This is an exception to the general statement in ISO 10110-1:2006, Clause 3, paragraph 1. Materials having a crystal structure and production processes such as diamond turning can give rise to non-random surface textu
48、re. Care should be used in applying statistical surface properties for surface texture with these types of surfaces. Because the magnitude of the measured roughness is a function of the spatial wavelengths considered, this part of ISO 10110 provides for the indication of the spatial bandwidth. This
49、part of ISO 10110 makes use of the terminology of profilometry, as specified in ISO 4287. Although the main effect of surface roughness is optical scattering, no reference is made to scattering measurements because there are causes of scattering other than texture (details of the relationship between surface texture and optical scattering are given in the Bibliography). Although the terminology in this part of ISO 10110 is that of profilometry, areal measurements (that i
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