BS ISO 16063-41-2011 Methods for the calibration of vibration and shock transducers Calibration of laser vibrometers《震动和冲击传感器的校准方法 激光振动计的校准》.pdf

1、raising standards worldwideNO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAWBSI Standards PublicationBS ISO 16063-41:2011Methods for the calibrationof vibration and shocktransducersPart 41: Calibration of laser vibrometersBS ISO 16063-41:2011 BRITISH STANDARDNational forewordThi

2、s British Standard is the UK implementation of ISO16063-41:2011.The UK participation in its preparation was entrusted to TechnicalCommittee GME/21/2, Mechanical vbration, shock and conditionmonitoring - Vibration and shock measuring instruments and testingequipment.A list of organizations represente

3、d on this committee can beobtained on request to its secretary.This publication does not purport to include all the necessaryprovisions of a contract. Users are responsible for its correctapplication. BSI 2011ISBN 978 0 580 64936 3ICS 17.160Compliance with a British Standard cannot confer immunity f

4、romlegal obligations.This British Standard was published under the authority of theStandards Policy and Strategy Committee on 30 September 2011.Amendments issued since publicationDate Text affectedBS ISO 16063-41:2011Reference numberISO 16063-41:2011(E)ISO 2011INTERNATIONAL STANDARD ISO16063-41First

5、 edition2011-08-01Methods for the calibration of vibration and shock transducers Part 41: Calibration of laser vibrometers Mthodes pour ltalonnage des transducteurs de vibrations et de chocs Partie 41: talonnage des vibromtres laser BS ISO 16063-41:2011ISO 16063-41:2011(E) COPYRIGHT PROTECTED DOCUME

6、NT ISO 2011 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either ISO at the address below or ISOs member body i

7、n the country of the requester. ISO copyright office Case postale 56 CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail copyrightiso.org Web www.iso.org Published in Switzerland ii ISO 2011 All rights reservedBS ISO 16063-41:2011ISO 16063-41:2011(E) ISO 2011 All rights reserved ii

8、iContents Page Foreword iv 1 Scope 1 2 Normative references 1 3 Classification of laser vibrometers and principles of test methods 2 4 Uncertainty of measurement 4 5 Requirements for apparatus and other conditions 5 6 Preferred amplitudes and frequencies 14 7 Common procedure for primary calibration

9、 (methods 1, 2 and 3) . 15 8 Method using fringe counting (method 1) 15 9 Method using minimum-point detection (method 2) . 16 10 Methods using sine approximation: method 3 (homodyne version) and method 3 (heterodyne version) . 18 11 Method using comparison to a reference transducer (method 4) 20 12

10、 Report of calibration results 21 Annex A (normative) Uncertainty components in the primary calibration by laser interferometry of vibration and shock transducers . 31 Annex B (informative) Three versions of method 3 based on laser Doppler velocimetry 36 Annex C (informative) Example of calculation

11、of measurement uncertainty in calibration of a laser vibrometer 40 Annex D (informative) Phase shift calibration of laser vibrometers 42 Bibliography 44 BS ISO 16063-41:2011ISO 16063-41:2011(E) iv ISO 2011 All rights reservedForeword ISO (the International Organization for Standardization) is a worl

12、dwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on

13、that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted i

14、n accordance with the rules given in the ISO/IEC Directives, Part 2. The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard

15、 requires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO 16063-41 was prepared by

16、 Technical Committee ISO/TC 108, Mechanical vibration, shock and condition monitoring, Subcommittee SC 3, Use and calibration of vibration and shock measuring instruments. ISO 16063 consists of the following parts, under the general title Methods for the calibration of vibration and shock transducer

17、s: Part 1: Basic concepts Part 11: Primary vibration calibration by laser interferometry Part 12: Primary vibration calibration by the reciprocity method Part 13: Primary shock calibration using laser interferometry Part 15: Primary angular vibration calibration by laser interferometry Part 21: Vibr

18、ation calibration by comparison to a reference transducer Part 22: Shock calibration by comparison to a reference transducer Part 31: Testing of transverse vibration sensitivity Part 41: Calibration of laser vibrometers The following parts are under preparation: Part 16: Calibration by Earths gravit

19、ation BS ISO 16063-41:2011INTERNATIONAL STANDARD ISO 16063-41:2011(E) ISO 2011 All rights reserved 1Methods for the calibration of vibration and shock transducers Part 41: Calibration of laser vibrometers 1 Scope This part of ISO 16063 specifies the instrumentation and procedures for performing prim

20、ary and secondary calibrations of rectilinear laser vibrometers in the frequency range typically between 0,4 Hz and 50 kHz. It specifies the calibration of laser vibrometer standards designated for the calibration of either laser vibrometers or mechanical vibration transducers in accredited or non-a

21、ccredited calibration laboratories, as well as the calibration of laser vibrometers by a laser vibrometer standard or by comparison to a reference transducer calibrated by laser interferometry. The specification of the instrumentation contains requirements on laser vibrometer standards. Rectilinear

22、laser vibrometers can be calibrated in accordance with this part of ISO 16063 if they are designed as laser optical transducers with, or without, an indicating instrument to sense the motion quantities of displacement or velocity, and to transform them into proportional (i.e. time-dependent) electri

23、cal output signals. These output signals are typically digital for laser vibrometer standards and usually analogue for laser vibrometers. The output signal or the reading of a laser vibrometer can be the amplitude and, in addition, occasionally the phase shift of the motion quantity (acceleration in

24、cluded). In this part of ISO 16063, the calibration of the modulus of complex sensitivity is explicitly specified (phase calibration is provided in Annex D). NOTE Laser vibrometers are available for measuring vibrations having frequencies in the megahertz and gigahertz ranges. To date, vibration exc

25、iters are not available for generating such high frequencies. The calibration of these laser vibrometers can be estimated by the electrical calibration of their signal processing subsystems utilizing appropriate synthetic Doppler signals under the following preconditions: the optical subsystem of th

26、e laser vibrometer to be calibrated has been proven to comply with defined requirements comparable to those given in 5.5.3; synthetic Doppler signals are generated as an equivalent substitute for the output of the photodetectors. More detailed specifications of this approach (see Reference 25) lie o

27、utside the scope of this part of ISO 16063. 2 Normative references The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any ame

28、ndments) applies. ISO 266, Acoustics Preferred frequencies ISO 5348, Mechanical vibration and shock Mechanical mounting of accelerometers ISO 16063-1:1998, Methods for the calibration of vibration and shock transducers Part 1: Basic concepts ISO 16063-11:1999, Methods for the calibration of vibratio

29、n and shock transducers Part 11: Primary vibration calibration by laser interferometry BS ISO 16063-41:2011ISO 16063-41:2011(E) 2 ISO 2011 All rights reservedISO 16063-21, Methods for the calibration of vibration and shock transducers Part 21: Vibration calibration by comparison to a reference trans

30、ducer ISO/IEC Guide 99, International vocabulary of metrology Basic and general concepts and associated terms (VIM) 3 Classification of laser vibrometers and principles of test methods 3.1 Classification of laser vibrometers 3.1.1 A laser vibrometer standard (LVS) is a reference standard containing

31、a laser interferometer, designed and intended to serve as a reference to calibrate laser vibrometers and/or vibration transducers. NOTE Methods 1, 2, and 3 are applicable to the primary calibration of LVSs. 3.1.2 A laser vibrometer (LV) is a measuring instrument containing a laser interferometer, de

32、signed and intended to perform vibration measurements. NOTE Methods 1, 2, and 3 are applicable to the primary calibration of LVs, and method 4 is applicable to the secondary calibration of LVs. The reference accelerometer used for method 4 is calibrated by method 1, 2 or 3. For specific requirements

33、, see 5.11. 3.1.3 A laser optical transducer is a measurement transducer sensing, by laser light, the motion quantities of displacement or velocity and transforming these quantities into a proportional time-dependent output signal. 3.2 Principles of test methods 3.2.1 General. Four methods are speci

34、fied in analogy to ISO 16063-11 (laser interferometry) and ISO 16063-21 (comparison to a reference transducer), respectively. Methods 1, 3, and 4 provide for calibrations at preferred displacement amplitudes, velocity amplitudes and acceleration amplitudes at various frequencies. Method 2 requires c

35、alibrations at fixed displacement amplitudes (velocity amplitude and acceleration amplitude vary with frequency). For each interferometric method specified in this part of ISO 16063 (see 3.2.2 to 3.2.4), currently a specific frequency range applies. In fact, the applicability of the particular metho

36、ds mainly depends on the displacement or velocity amplitudes measurable within given measurement uncertainties. These, however, not only depend on the measurement method itself but also on the frequency-dependent properties of the vibration exciters available. Using adequate vibration exciters to ge

37、nerate sufficient displacement or velocity amplitudes, the upper frequency limits of all methods can be expanded to 100 kHz and even beyond. The primary method 3 (see 3.2.4) and the comparison method 4 (see 3.2.5) are applicable at frequencies lower than 0,4 Hz. 3.2.2 Method 1, the fringe-counting m

38、ethod, is a vibration measurement method using a homodyne interferometer with a single output (see Note 2) in conjunction with instrumentation for fringe counting of the interferometer signal. Considering that the displacement corresponding to the distance between two fringes (intensity maxima or in

39、tensity minima) is given by half the wavelength of the principal lines in the emission spectrum of neon of the He-Ne laser, the displacement amplitude can be calculated from the number of fringes counted during a given number (e.g. 1 000) of vibration periods. For details, see Clause 8 and, for furt

40、her information, ISO 16063-11:1999, B.1. NOTE 1 Method 1 is applicable to the primary calibration of the laser vibrometer (modulus only) in the frequency range 1 Hz to 800 Hz and, under special conditions, at lower and higher frequencies. In Reference 26, the applicability of method 1 has been demon

41、strated at frequencies up to 347 kHz. NOTE 2 Alternatively, the homodyne interferometer signal from one of the two outputs of a quadrature interferometer can be used. BS ISO 16063-41:2011ISO 16063-41:2011(E) ISO 2011 All rights reserved 3NOTE 3 The electronic fringe counting can be substituted by th

42、e signal coincidence method (see References 1 23 24), which indicates a displacement amplitude of a quarter wavelength, /4, of the laser light (158,2 nm for a red helium-neon laser). In the general case, the interferometer signal shows relative maxima and minima at the times when the vibration displ

43、acement approaches its positive and negative peak values, respectively. In the discrete case (158,2 nm), the relative signal maxima and minima approach the same signal level from the negative and positive directions, respectively (“coincidence”). By observing the interferometer signal as a function

44、of time on an oscilloscope and adjusting the vibration amplitude to the level where a bright sharp line appears, the discrete amplitude (158,2 nm) is identified. The bright line varies with time as the initial phase of the interferometer signal varies due to low-frequency motion. In Reference 26, th

45、e applicability of the signal coincidence method has been demonstrated at frequencies up to 160 kHz. 3.2.3 Method 2, the minimum-point method, is a vibration measurement method using a homodyne interferometer with a single output in conjunction with instrumentation for zero-point detection of a comp

46、onent of the frequency spectrum of the interferometer signal. Considering the frequency spectrum of the intensity and adjusting the vibration amplitude to the level at which the component of the same frequency as the vibration frequency is zero, the displacement amplitude can be calculated from the

47、argument corresponding to the respective zero point of the Bessel function of the first kind and first order. For details, see Clause 9 and, for further information, ISO 16063-11:1999, B.2. NOTE 1 Method 2 can be used for modulus calibration in the frequency range 800 Hz to 10 kHz with an electro-dy

48、namic vibration exciter, and up to 50 kHz and higher with a vibration exciter for large vibration amplitudes, preferably a piezo-electric vibration exciter. In Reference 27, the applicability of method 2 has been demonstrated at frequencies up to 50 kHz. NOTE 2 For displacement amplitudes smaller th

49、an that of the first minimum point (193 nm for the J1Bessel function, 121 nm for the J0 Bessel function), the Bessel function ratio method (e.g. see Reference 22) can be applied if the uncertainty requirements of Clause 4 are complied with. 3.2.4 Method 3, the sine-approximation method, is a vibration measurement method using a homodyne or heterodyne interferometer with two electrical outputs in quadrature (i.e. phase-shifted by 90) in conjunction with instrumentation for signal sampling and pr