BS ISO 16242-2011 Surface chemical analysis Recording and reporting data in Auger electron spectroscopy (AES)《表面化学分析 俄歇电子能谱术的记录和报告数据(AEC)》.pdf

1、raising standards worldwideNO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAWBSI Standards PublicationBS ISO 16242:2011Surface chemical analysis Recording and reporting data in Auger electron spectroscopy (AES)BS ISO 16242:2011 BRITISH STANDARDNational forewordThis British Standa

2、rd is the UK implementation of ISO 16242:2011. The UK participation in its preparation was entrusted to T e c h n i c a l Committee CII/60, Surface chemical analysis.A list of organizations represented on this committee can be obtained on request to its secretary.This publication does not purport to

3、 include all the necessary provisions of a contract. Users are responsible for its correct application. BSI 2011 ISBN 978 0 580 66875 3 ICS 71.040.40 Compliance with a British Standard cannot confer immunity from legal obligations.This British Standard was published under the authority of the Standa

4、rds Policy and Strategy Committee on 31 December 2011.Amendments issued since publicationDate T e x t a f f e c t e dBS ISO 16242:2011Surface chemical analysis Recording and reporting data in Auger electron spectroscopy (AES)Analyse chimique des surfaces Enregistrement et notification des donnes en

5、spectroscopie des lectrons Auger (AES) ISO 2011Reference numberISO 16242:2011(E)First edition2011-12-01ISO16242INTERNATIONAL STANDARDBS ISO 16242:2011ISO 16242:2011(E)COPYRIGHT PROTECTED DOCUMENT ISO 2011All rights reserved. Unless otherwise specified, no part of this publication may be reproduced o

6、r utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either ISO at the address below or ISOs member body in the country of the requester.ISO copyright officeCase postale 56 CH-1211 Geneva 20Tel. + 41 22 749 01 11Fa

7、x + 41 22 749 09 47E-mail copyrightiso.orgWeb www.iso.orgPublished in Switzerlandii ISO 2011 All rights reservedBS ISO 16242:2011ISO 16242:2011(E) ISO 2011 All rights reserved iiiContents PageForeword .vIntroduction .vi1 Scope 12 Normative references .13 Terms and definitions .14 Symbols and abbrevi

8、ated terms .15 Levels of recording and reporting 25.1 General .25.2 Analysts record .25.3 Spectra .35.4 Quantitative information 35.5 Compositional depth profiles .45.6 Maps and linescans 45.7 Chemical-state data 56 Release of data to the customer .5Annex A (informative) Examples of spectra 6Bibliog

9、raphy .10BS ISO 16242:2011ForewordISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested i

10、n a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commis

11、sion (IEC) on all matters of electrotechnical standardization.International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical c

12、ommittees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote.Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall no

13、t be held responsible for identifying any or all such patent rights.ISO 16242 was prepared by Technical Committee ISO/TC 201, Surface chemical analysis, Subcommittee SC 2, General procedures.ISO 16242:2011(E)iv ISO 2011 All rights reservedBS ISO 16242:2011IntroductionAuger electron spectroscopy is u

14、sed for experimental and routine surface analysis of a wide range of test specimen types. The results of the analysis should be recorded in a standard format that should include sufficient detail to allow the experiment to be repeated. This material should be available for reporting, as required.Exp

15、erimental conditions and data acquisition parameters should be included so that the quality of the data can be assessed.ISO 16242:2011(E) ISO 2011 All rights reserved vBS ISO 16242:2011BS ISO 16242:2011INTERNATIONAL STANDARD ISO 16242:2011(E)Surface chemical analysis Recording and reporting data in

16、Auger electron spectroscopy (AES)1 ScopeThis International Standard specifies the minimum level of information to be reported by the analyst following the analysis of a test specimen using Auger electron spectroscopy (AES). It includes information that is to be recorded on or in the analytical recor

17、d.2 Normative referencesThe following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.ISO 17973, Surface chemica

18、l analysis Medium-resolution Auger electron spectrometers Calibration of energy scales for elemental analysisISO 17974, Surface chemical analysis High-resolution Auger electron spectrometers Calibration of energy scales for elemental and chemical-state analysisISO 18115-1, Surface chemical analysis

19、Vocabulary Part 1: General terms and terms used in spectroscopy3 Terms and definitionsFor the purposes of this document, the terms and definitions given in ISO 18115-1 and the following apply.3.1ex situoutside the analytical system3.2in situinside the analytical system4 Symbols and abbreviated terms

20、AES Auger electron spectroscopyKLL shorthand notation for an Auger line resulting from an electron hole in the K shell, electron transfer from the L shell to the K shell vacancy and simultaneous emission of the Auger electron from the L shellKVV shorthand notation for an Auger line resulting from an

21、 electron hole in the K shell, electron transfer from a valence band (“V”) to the K shell vacancy and simultaneous emission of the Auger electron from the valence bandSimilar notation is used for the L, M and further Auger series. ISO 2011 All rights reserved 1BS ISO 16242:20115 Levels of recording

22、and reporting5.1 GeneralThis International Standard defines the minimum level of information that shall be recorded and reported by an analyst following the analysis of a test specimen using AES. The levels of recording and reporting are separated into six main areas:a) the analysts record book or e

23、lectronic log (e.g. computer data-storage system);b) spectra;c) quantitative analysis of the specimen;d) compositional depth profiles;e) element maps, linescans or images;f) chemical information obtained from the specimen.5.2 Analysts record5.2.1 Specimen identification and preparationFor each indiv

24、idual specimen, the record book or electronic log shall contain the following information (sufficient information shall be recorded to allow the measurements to be repeated at a later date):a) the name and contact address of the laboratory or the individual providing the specimen, with electronic ad

25、dress and telephone number when available;b) a unique specimen number;c) a description of the specimen before and after analysis (including details of its physical appearance, its roughness, its colour and any other distinguishing features);d) the date of the measurement(s);e) the name of the analys

26、t, and the analysts department and affiliation;f) all details concerning ex situ specimen preparation before analysis (including details of the method of mounting by tape or clip, the orientation on the specimen holder with respect to any specific surface features, whether the specimen was cut and,

27、if so, how, details of any solvent-cleaning, etc.) (see NOTE 1);g) all details concerning in situ specimen preparation before analysis (relevant details include inert ion cleaning, specimen heating, fracture, etc.) (see NOTE 2).NOTE 1 Guidelines for preparation and mounting of specimens are given in

28、 ISO 18116.NOTE 2 Handling of specimens prior to analysis is described in ISO 18117.5.2.2 Analytical conditionsA detailed list of the analytical conditions shall be recorded in the record book and/or the electronic log (sufficient information shall be recorded to allow the measurements to be repeate

29、d at a later date). The information shall include:a) the name or identification of the equipment used;b) the primary electron beam energy and the angle of incidence;c) the specimen current or beam current;ISO 16242:2011(E)2 ISO 2011 All rights reservedBS ISO 16242:2011d) the type of detector, the nu

30、mber of detectors and, in the case of multichannel detectors, the working mode;e) the analyser energy resolution;f) the spectrometer retardation ratio or pass energy, and slit widths, if applicable;g) the take-off angle used for the measurement;h) the pressure of the analysis chamber before and duri

31、ng the analysis;i) the beam diameter under the analytical conditions if pertinent to the analysis, e.g. for imaging or mapping (if the beam is scanned during acquisition, state over what distance);j) the start energy;k) the end energy or scan width and the number of cycles;l) the number of data poin

32、ts, expressed as an integer or as volts/step, and the width of the energy channel;m) the acquisition time, expressed as the time/step or as a total time indicating the measurement time and the beam exposure time;n) when data are collected in an analogue differential mode, the analogue modulation.All

33、 the above information shall be subsequently given to the customer, if requested, along with the analysis of the AES data by the instrument operator. The customer and the analyst will define the format used to transfer this information. For example, the experimental information may be contained in t

34、he appendix or the experimental section of a report.The kinetic-energy scale of the Auger electron spectrometer shall be calibrated in accordance with either ISO 17973 or ISO 17974 or in accordance with the manufacturers documented calibration procedure.5.3 SpectraAll AES spectra supplied to a custo

35、mer shall include the following minimum information:a) peak or region labels, e.g. Cu KLL;b) an abscissa label, e.g. kinetic energy, E (eV);c) abscissa tic marks showing the energy as width of scan, e.g. 0 eV to 1 200 eV, or as energy/division;d) an ordinate label which, for direct spectra, might be

36、 e.g. counts/s or counts and, for differentiated data, dC/dE, where C = counts, with a note if a transmission function correction has been applied;e) for direct spectra, ordinate tic marks, showing intensity as counts/s or counts per division (see the Note);f) details of all the data-processing func

37、tions applied to the raw spectrum, for example differentiation, smoothing, transmission function correction, spike removal.NOTE For differentiated spectra, tic marks are appropriate, but the axis is, nominally, unitless.Further information may be included at the discretion of the analyst or at the r

38、equest of the customer. Examples of spectra are shown in Annex A (see Figures A.1 to A.4).5.4 Quantitative informationWhen the AES data are processed and supplied to a customer as quantitative data, the following information on the method of quantification shall also be available to the customer, if

39、 required:a) the quantification model, e.g. homogeneous solid, homogeneous solid under a contamination layer, layered solid;ISO 16242:2011(E) ISO 2011 All rights reserved 3BS ISO 16242:2011b) the intensity parameter chosen, e.g. peak area, peak height, differential peak-to-peak height, differential

40、peak-to-background height (see the Note);c) details of the elements included in the quantification and those deliberately excluded;d) the type of background fitted to the data, with start and end points, if appropriate;e) the analyser transmission function and sensitivity factors used and their sour

41、ce, e.g. manufacturers, in-house standards, theory);f) any other correction terms used and their justification, e.g. dead time, spectrometer energy window, specimen roughness, matrix effects);g) details of data-processing techniques applied, such as factor analysis or least-squares fitting;h) an est

42、imate of the errors in quantification, as discussed for example in ISO 20903.NOTE Methods used to determine peak intensities and information required when reporting results are described in ISO 20903.5.5 Compositional depth profilesCompositional depth profiles may be presented as a montage of spectr

43、a or as depth profiles derived from peak area or peak-to-peak measurements on derivative spectra. If the data are quantified, the factors listed in 5.4 shall be considered and noted where appropriate. In addition, the method of quantification of the depth of analysis of ion-sputtered depth profiles

44、(which may be estimated with respect to the sputter rate of a standard material, such as thin films of Ta2O5on Ta or SiO2on silicon, under the same conditions or measured directly by profilometer) shall be recorded (see Annex A, Figures A.5 and A.6).NOTE The measurement of sputtered depth in depth p

45、rofiling is described in ISO/TR 15969.Where depth profiles are acquired from taper sections or dimpled craters, the depth can be estimated by geometrical calculation. The following information shall be available to be supplied with the compositional profiles, if required:a) an ordinate label, e.g. t

46、he atomic fraction (together with details of quantification as outlined in 5.4), or nominal counts if direct spectra are used;b) ordinate tic marks showing the atomic fraction or, for direct spectra, counts or simply a scale in arbitrary units;c) an abscissa label, i.e. sputtering time or estimated

47、depth;d) abscissa tic marks showing time or depth;e) for ion-sputtered profiles, the sputtering rate and the sputtering-rate calibration material used;f) details of the ion beam energy and current;g) details of the specimen area sputtered and the dimensions scanned, where appropriate.5.6 Maps and li

48、nescansWhen Auger maps or linescans (see Annex A, Figure A.7) are provided, the following additional information shall be supplied to the customer, as required (if the information is provided as part of a depth profile, also include the details requested in 5.5):a) the identity of the mapped AES pea

49、k and its energy, together with details of any background removal procedure;ISO 16242:2011(E)4 ISO 2011 All rights reservedBS ISO 16242:2011b) details of the map field of view or any scale marker included (note that it is preferable to include information for both X and Y directions as these are frequently not equivalent; many current systems do not include Y direction information and this shall be reported);c) details of the map field of view calibration in the X and Y directions;d) details of the property mapped, e.g. atomic per