1、BSI Standards PublicationBS ISO 17859:2015Fine ceramics (advancedceramics, advanced technicalceramics) Measurementmethod of piezoelectric strainat high electric fieldBS ISO 17859:2015 BRITISH STANDARDNational forewordThis British Standard is the UK implementation of ISO 17859:2015. The UK participat
2、ion in its preparation was entrusted to TechnicalCommittee RPI/13, Advanced technical ceramics.A list of organizations represented on this committee can be obtained on request to its secretary.This publication does not purport to include all the necessary provisions of a contract. Users are responsi
3、ble for its correct application. The British Standards Institution 2015.Published by BSI Standards Limited 2015ISBN 978 0 580 79374 5 ICS 81.060.30 Compliance with a British Standard cannot confer immunity from legal obligations.This British Standard was published under the authority of the Standard
4、s Policy and Strategy Committee on 30 September 2015.Amendments/corrigenda issued since publicationDate T e x t a f f e c t e dBS ISO 17859:2015 ISO 2015Fine ceramics (advanced ceramics, advanced technical ceramics) Measurement method of piezoelectric strain at high electric fieldCramiques technique
5、s Mthode de mesurage de la contrainte pizolectrique champ lectrique levINTERNATIONAL STANDARDISO17859First edition2015-09-01Reference numberISO 17859:2015(E)BS ISO 17859:2015ISO 17859:2015(E)ii ISO 2015 All rights reservedCOPYRIGHT PROTECTED DOCUMENT ISO 2015, Published in SwitzerlandAll rights rese
6、rved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either IS
7、O at the address below or ISOs member body in the country of the requester.ISO copyright officeCh. de Blandonnet 8 CP 401CH-1214 Vernier, Geneva, SwitzerlandTel. +41 22 749 01 11Fax +41 22 749 09 47copyrightiso.orgwww.iso.orgBS ISO 17859:2015ISO 17859:2015(E)Foreword iv1 Scope . 12 Normative referen
8、ces 13 Terms and definitions, and symbols 13.1 Terms and definitions . 13.2 Symbols . 24 Measuring environment . 25 Specimens 25.1 General . 25.2 Shape and size . 35.3 Electrodes 35.4 Polarization 36 Principle 37 Measurement equipment 37.1 Equipment . 37.2 Components of equipment . 47.3 Environment
9、of specimen holder . 57.4 Calibration of measurement equipment . 58 Measurement conditions . 59 Measurement procedures . 510 Calculations and results 611 Test report . 6Annex A (informative) Example of reference sample . 8 ISO 2015 All rights reserved iiiContents PageBS ISO 17859:2015ISO 17859:2015(
10、E)ForewordISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a
11、technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matter
12、s of electrotechnical standardization.The procedures used to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO documents should be noted. This docum
13、ent was drafted in accordance with the editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all suc
14、h patent rights. Details of any patent rights identified during the development of the document will be in the Introduction and/or on the ISO list of patent declarations received (see www.iso.org/patents).Any trade name used in this document is information given for the convenience of users and does
15、 not constitute an endorsement.For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment, as well as information about ISOs adherence to the WTO principles in the Technical Barriers to Trade (TBT) see the following URL: Foreword - Supplementary informat
16、ionThe committee responsible for this document is ISO/TC 206, Fine ceramics.iv ISO 2015 All rights reservedBS ISO 17859:2015INTERNATIONAL STANDARD ISO 17859:2015(E)Fine ceramics (advanced ceramics, advanced technical ceramics) Measurement method of piezoelectric strain at high electric field1 ScopeT
17、his International Standard specifies the measurement method of piezoelectric strain at high electric field for high power piezoelectric devices. This International Standard is intended to be used to determine the piezoelectric strain coefficient of the materials by measuring strain vs. electric fiel
18、d: applied electric field: 0 to 2 MV/m; frequency of electric field: 0,1 to 1 Hz.2 Normative referencesThe following documents, in whole or in part, are normatively referenced in this document and are indispensable for its application. For dated references, only the edition cited applies. For undate
19、d references, the latest edition of the referenced document (including any amendments) applies.IEC 60122-1, Quartz crystal units of assessed quality Part 1: Generic specificationIEC 60483, Guide to dynamic measurements of piezoelectric ceramics with high electromechanical couplingEN 50324-1, Piezoel
20、ectric properties of ceramic materials and components Part 1: Terms and definitionsEN 50324-2, Piezoelectric properties of ceramic materials and components Part 2: Method of measurement Low power3 Terms and definitions, and symbols3.1 Terms and definitionsFor the purposes of this document, the terms
21、 and definitions given in IEC 60122-1, IEC 60483, EN 50324-1, EN 50324-2 and the following apply.3.1.1applied wave formshape of voltage applied to specimen as a function of timeNote 1 to entry: Triangular waves are used in this International Standard.3.1.2signal generatorapparatus which controls the
22、 applied wave form3.1.3power sourcehigh-voltage amplifier which generates an electric-field (E-field) applied to the specimen ISO 2015 All rights reserved 1BS ISO 17859:2015ISO 17859:2015(E)3.1.4E-field induced strainstrain of the specimen which is induced by applying the E-fieldNote 1 to entry: The
23、 value is given by the ratio of displacement to specimen thickness.3.1.5displacement meterapparatus which measures the E-field induced strain3.1.6mobile contactmobile electrode which simultaneously holds the specimen and applies voltage to the specimen3.1.7maximum E-fieldEmaxmaximum value of applied
24、 E-field3.1.8maximum strainSmaxstrain at maximum E-field3.1.9residual strainSrstrain when E-field is removed3.1.10strain vs. E-field curvecontinuously plotted curve of strain as a function of E-field3.2 Symbolsf frequencydmax= Smax/EmaxEhelectric field at which the strain difference between the up-
25、and down-curves shows a maximumShstrain difference between the up- and down-curves at EhHmax= Sh/Smax4 Measuring environmentThe measurement should be carried out in an environment free from acoustic noise and vibrations. It is desirable to control the measurement temperature 25 5 C and relative humi
26、dity less than 60 %.5 Specimens5.1 GeneralThe test specimen shall be of any ceramics that can be cut into desired shapes such as disks and quadrilateral plates. There is no limit in specimen size and shape, if the specimen is held horizontally with a small tilt.2 ISO 2015 All rights reservedBS ISO 1
27、7859:2015ISO 17859:2015(E)5.2 Shape and sizeSpecimens are made by cutting out from ceramics or single crystals. The shape of the specimen should be disk or quadrilateral plate, with smooth surfaces. Thickness distribution less than 1 % is desirable within the plate. The standard dimensions of the sp
28、ecimen are 0,3 mm - 1,0 mm in thickness, 5 mm - 15 mm in size, and 15 - 25 in the ratio of size to thickness. A desirable example of such disc is 0,5 mm in thickness and 10 mm in diameter.5.3 ElectrodesElectrodes should be deposited on both sides of the specimen plate, leaving the edge region free.
29、This edge region should have an area of less than 10 % of the sample surface. The electrode is desirable with tough adhesion and without deterioration. An example of such electrode metal is Au, Ag and Pt.5.4 PolarizationThe specimen should be treated by a poling procedure. Polarized direction should
30、 be shown on the specimen surface. Typically the positive side of the sample is marked with a dot or cross.6 PrincipleThe strain of the specimen is induced by the piezoelectric effect when an electric field is applied between the two electrodes of the specimen. The strain is detected as the thicknes
31、s variation of the specimen using a displacement meter. The strain vs. E-field curve is drawn, and the piezoelectric constant is calculated from this curve.7 Measurement equipment7.1 EquipmentFigure 1 shows an example of a system block diagram for piezoelectric strain measurement.125346Key1 signal g
32、enerator2 power source3 displacement meter4 displacement sensor5 monitor6 specimenFigure 1 Schematic diagram of piezoelectric strain measurement ISO 2015 All rights reserved 3BS ISO 17859:2015ISO 17859:2015(E)7.2 Components of equipment7.2.1 Signal generator. A function generator is recommended to g
33、enerate the triangular waveform with the frequency range of 0,1 Hz to 1 Hz. Figure 2 shows an example of an applied waveform.7.2.2 Power source. A power source which can generate voltages as high as several kV should be used.7.2.3 Displacement meter. A measuring accuracy of 10 nm is needed for the d
34、isplacement sensor. Both contact and non-contact sensors can be used. Different kinds of measuring system which have the required measuring accuracy can be used, such as differential inductive displacement gauge, magneto-resistance type linear displacement sensor, laser interferometer, capacitive me
35、thod, etc.7.2.4 Monitor. Instruments such as analog-to-digital converters and oscilloscopes are used for monitoring the relation between applied E-field and displacement, and for data acquisition.YEmax024Xf = 0.25 HzEmax= 1 MV/mKeyX time (s)Y E (MV/m)Figure 2 Example of applied wave form7.2.5 Specim
36、en holder. The specimen can be held horizontally or vertically. The specimen is placed between a stationary contact and a moving contact. The tip of the moving contact is recommended to have a sphere shape with a radius less than 2 mm. The tip of the stationary contact should be flat with a diameter
37、 less than 30 % of specimen diameter. The mechanical stress to the specimen shall be kept as low as possible in the measurement. The specimen holder has a structure which stably holds the specimen under applied E-field between both electrodes of the specimen. Figure 3 shows an example of specimen ho
38、lder structure. The bottom of the stationary contact is fixed in a metal base which is connected to the ground. The moving contact is supported by a linear bearing, which is fixed in a polymer block and is connected by a wire to the power source.4 ISO 2015 All rights reservedBS ISO 17859:2015ISO 178
39、59:2015(E)7654123Key1 specimen2 stationary contact3 metal stand4 moving contact5 linear bearing6 polymer block7 wire to power sourceFigure 3 Example of specimen holder structure7.3 Environment of specimen holderThe specimen holder should be placed on an anti-vibration stage. A cover of the specimen
40、holder is recommended to remove acoustic noise and to maintain a constant specimen temperature. It is effective to prevent discharge by immersing the specimen in isolation oil, although the use of isolation oil is not mandatory.7.4 Calibration of measurement equipmentThe measurement system shall be
41、calibrated by using a reference sample (see Annex A for an example), which is accompanied by measured Smaxdata using the calibrated equipment. Measurement conditions and procedures for the reference sample are specified in Clause 8 and Clause 9, respectively. It is desirable that the measured strain
42、 at 1 MV/m is within the permissible range of the reference sample. If the measured value is out of range, it is recommended firstly to confirm movement of the mobile contact. If the mobile contact moves normally, then it is recommended to carry out calibration of signal generator, power source and
43、displacement meter.8 Measurement conditionsStrain vs. E-field curves are measured with unipolar change of E-field: the direction of the E-field should be parallel to the specimen poling direction. Triangular wave excitation should be used for the measurement. One cycle is defined by a ramp from 0 MV
44、/m to the maximum E-field, the up-curve, followed by a ramp down to 0 MV/m, the down-curve, continuously. The frequency of the E-field is defined as the inverse time of one cycle. The time interval between each cycle can be chosen arbitrarily. The maximum E-field is less than 2 MV/m.9 Measurement pr
45、ocedures ISO 2015 All rights reserved 5BS ISO 17859:2015ISO 17859:2015(E)a) Measure the specimen thickness repeatedly three times using a micrometre. Calculate average thickness from the measured values.b) Place the specimen in the specimen holder.c) Measure the strain vs. E-field curves using a ser
46、ies of 5 triangular wave cycles. Record the measurement data of cycle numbers 3, 4 and 5. The number of sampling data points in one curve should be larger than 100.10 Calculations and resultsAnalyse the strain vs. E-field curves and calculate the parameters, Smax, Emax (MV/m), dmax(m/MV), Eh(MV/m),
47、Sh, Hmaxand Sr, as shown in Figure 4. Then record the values of the parameters for each curve with three significant figures.YSmaxdmax= Smax/ EmaxHmax= Sh/ SmaxShEhEmaxSr0XKeyX E-field (MV/m)Y strainFigure 4 Analysis method of strain vs. E-field curve11 Test reportA test report should be written in
48、order to include the experimental results properly in the written form. The experimental conditions shall be indicated with the following information:a) the test date, laboratory and name(s) of the operator(s);b) the product type of specimen and name if possible; product-type may include material, s
49、hape, composition, etc.c) the measured thickness of the specimen;d) a list of the equipment used for the test, with schematic diagrams and photographs of the measurement system and specimen holder;e) a description of the measurement environment of the specimen holder;6 ISO 2015 All rights reservedBS ISO 17859:2015ISO 17859:2015(E)f) the setup conditions (maximum applied voltage, maximum applied E-field, frequency of the E-field, and time interval between tests i.e. waiting time) of each measurement;g) the measure
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