BS ISO 20523-2017 Carbon based films Classification and designations《碳基薄膜 分类和名称》.pdf

1、Carbon based films Classification and designationsBS ISO 20523:2017BSI Standards PublicationWB11885_BSI_StandardCovs_2013_AW.indd 1 15/05/2013 15:06 ISO 2017Carbon based films Classification and designationsFilms base de carbone Classification et dsignationsINTERNATIONAL STANDARDISO20523First editio

2、n2017-09Reference numberISO 20523:2017(E)National forewordThis British Standard is the UK implementation of ISO 20523:2017.The UK participation in its preparation was entrusted to Technical Committee STI/33, Electrodeposited and related coatings.A list of organizations represented on this committee

3、can be obtained on request to its secretary.This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. The British Standards Institution 2017 Published by BSI Standards Limited 2017ISBN 978 0 580 92967 0ICS 25.220.99Com

4、pliance with a British Standard cannot confer immunity from legal obligations.This British Standard was published under the authority of the Standards Policy and Strategy Committee on 30 September 2017.Amendments/corrigenda issued since publicationDate Text affectedBRITISH STANDARDBS ISO 20523:2017

5、ISO 2017Carbon based films Classification and designationsFilms base de carbone Classification et dsignationsINTERNATIONAL STANDARDISO20523First edition2017-09Reference numberISO 20523:2017(E)BS ISO 20523:2017ISO 20523:2017(E)ii ISO 2017 All rights reservedCOPYRIGHT PROTECTED DOCUMENT ISO 2017, Publ

6、ished in SwitzerlandAll rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permiss

7、ion can be requested from either ISO at the address below or ISOs member body in the country of the requester.ISO copyright officeCh. de Blandonnet 8 CP 401CH-1214 Vernier, Geneva, SwitzerlandTel. +41 22 749 01 11Fax +41 22 749 09 47copyrightiso.orgwww.iso.orgBS ISO 20523:2017ISO 20523:2017(E)ii ISO

8、 2017 All rights reservedCOPYRIGHT PROTECTED DOCUMENT ISO 2017, Published in SwitzerlandAll rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on th

9、e internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below or ISOs member body in the country of the requester.ISO copyright officeCh. de Blandonnet 8 CP 401CH-1214 Vernier, Geneva, SwitzerlandTel. +41 22 749 01 11Fax +41 22 749 09 4

10、7copyrightiso.orgwww.iso.orgISO 20523:2017(E)Foreword ivIntroduction v1 Scope . 12 Normative references 13 Terms and definitions . 14 Abbreviated terms 25 Deposition . 26 Classification 26.1 General . 26.2 Main carbon film groups . 26.3 Classification criteria . 26.3.1 General 26.3.2 Crystallinity 3

11、6.3.3 Ratio of CC sp2to sp3hybridization 36.3.4 Hydrogen content 36.3.5 Content of additional elements . 36.4 Coating architecture . 36.4.1 Monolayer 36.4.2 Multilayer . 36.4.3 Gradient layers. 36.5 Classification table . 37 Polymer-like carbon films 58 Amorphous carbon films . 59 Diamond films . 61

12、0 Graphite films 6Annex A (informative) Deposition methods . 7Annex B (informative) Characterization methods . 8Bibliography .10 ISO 2017 All rights reserved iiiContents PageBS ISO 20523:2017ISO 20523:2017(E)ForewordISO (the International Organization for Standardization) is a worldwide federation o

13、f national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. In

14、ternational organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.The procedures used to develop this document and those i

15、ntended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO documents should be noted. This document was drafted in accordance with the editorial rules of the ISO/IEC Directives, Part 2 (see

16、www.iso.org/directives).Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any patent rights identified during the development of the documen

17、t will be in the Introduction and/or on the ISO list of patent declarations received (see www.iso.org/patents).Any trade name used in this document is information given for the convenience of users and does not constitute an endorsement.For an explanation on the voluntary nature of standards, the me

18、aning of ISO specific terms and expressions related to conformity assessment, as well as information about ISOs adherence to the World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT) see the following URL: www.iso.org/iso/foreword.html.This document was prepared by ISO/T

19、C 107, Metallic and other inorganic coatings.iv ISO 2017 All rights reservedBS ISO 20523:2017ISO 20523:2017(E)ForewordISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is

20、normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part

21、in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.The procedures used to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular

22、 the different approval criteria needed for the different types of ISO documents should be noted. This document was drafted in accordance with the editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).Attention is drawn to the possibility that some of the elements of this do

23、cument may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any patent rights identified during the development of the document will be in the Introduction and/or on the ISO list of patent declarations received (see www.iso.

24、org/patents).Any trade name used in this document is information given for the convenience of users and does not constitute an endorsement.For an explanation on the voluntary nature of standards, the meaning of ISO specific terms and expressions related to conformity assessment, as well as informati

25、on about ISOs adherence to the World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT) see the following URL: www.iso.org/iso/foreword.html.This document was prepared by ISO/TC 107, Metallic and other inorganic coatings.iv ISO 2017 All rights reserved ISO 20523:2017(E)Intr

26、oductionCarbon based films are applied as a coating to modify the surface properties of parts or to synthesize the carbon material. The applications cover machine elements, tools, optics, electronics, medical engineering, microsystem technology, electrochemistry, acoustics, decoration and many more.

27、 Carbon based films exist as many different types, which differ significantly in their properties. It is therefore important to choose the right film type for a given application.The aim of this document is to provide a consistent classification that covers all carbon based film types. Furthermore,

28、the classified film types are named with a system of consistent designations. This enables both providers and users to compare different carbon based films on common nomenclature. ISO 2017 All rights reserved vBS ISO 20523:2017BS ISO 20523:2017Carbon based films Classification and designations1 Scop

29、eThis document specifies classification, designations and short names for carbon based films. These are films in which carbon is the predominant constituent part and which are deposited by physical vapour deposition (PVD) or chemical vapour deposition (CVD) process. This includes amorphous carbon-ba

30、sed films, also called diamond-like carbon films (DLC), as well as CVD diamond films, graphite and polymer-like films.This document is applicable to those films which are produced on an industrial scale. Additional carbon based films are under development.This document refers to the material of carb

31、on based films. It does not refer to the entire coating that can consist of a main functional layer with additional layers below or on top.A layer can change in composition and/or material property over its thickness. Such layers are called gradient layers. The definitions in this document refer to

32、non-gradient layers.A carbon based film can include other elements like hydrogen, metal elements or others. Metal constituents can be included as metal carbides. Films with additional elements are only covered by this document if carbon is the predominant constituent part. Carbon incorporated as car

33、bide, as can be present in metal-containing amorphous carbon films (a-C:Me, a-C:H:Me), does not count to this amount.This document does not apply to the class of carbon materials such as fullerenes, carbon nanotubes and graphene.2 Normative referencesThere are no normative references in this documen

34、t.3 Terms and definitionsFor the purposes of this document, the following terms and definitions apply.ISO and IEC maintain terminological databases for use in standardization at the following addresses: IEC Electropedia: available at http:/www.electropedia.org/ ISO Online browsing platform: availabl

35、e at http:/www.iso.org/obp3.1substrateworkpiece upon which deposition is to take place3.2nanocrystallinepolycrystalline form with a crystallite size in the range of 1 nm to 500 nm, measured on the growth side of the film3.3microcrystallinepolycrystalline form with a crystallite size in the range of

36、0,5 m to 10 m, measured on the growth side of the filmINTERNATIONAL STANDARD ISO 20523:2017(E) ISO 2017 All rights reserved 1BS ISO 20523:2017ISO 20523:2017(E)4 Abbreviated termsPVD physical vapour depositionCVD chemical vapour deposition5 DepositionMany different PVD and CVD methods are used to dep

37、osit carbon based films. The properties of a carbon film type may differ depending on the deposition method. A list of common deposition methods is given in Annex A.6 Classification6.1 GeneralThe classification of carbon based films is based on the material composition.6.2 Main carbon film groupsCar

38、bon based films are subdivided into the following main groups according to their chemical bonding state: polymer-like carbon films, where the carbon atoms are linked in chain formations, with crosslinks between the chains, and which contain a high amount of hydrogen (polymer-like); amorphous carbon

39、films, where the carbon atoms are in a random, cross-linked arrangement (amorphous); crystalline carbon films, which are characterized by a regular arrangement of the carbon atoms, such that crystals are formed, subdivided into: diamond films, where the carbon atoms are arranged in the diamond cryst

40、al lattice, and graphite films, where the carbon atoms are arranged in the graphite crystal lattice.Polymer-like carbon films may also be called plasma-polymer films.The group of amorphous carbon films are also called diamond-like carbon films (DLC films).From the main groups, further film types are

41、 classified according to the criteria described in 6.3.6.3 Classification criteria6.3.1 GeneralFor the classification, the following properties and criteria are used: crystallinity; ratio of sp2to sp3of CC bonds; hydrogen content; content of additional elements.Methods for the characterization of th

42、ese properties are given in Annex B.2 ISO 2017 All rights reservedBS ISO 20523:2017ISO 20523:2017(E)4 Abbreviated termsPVD physical vapour depositionCVD chemical vapour deposition5 DepositionMany different PVD and CVD methods are used to deposit carbon based films. The properties of a carbon film ty

43、pe may differ depending on the deposition method. A list of common deposition methods is given in Annex A.6 Classification6.1 GeneralThe classification of carbon based films is based on the material composition.6.2 Main carbon film groupsCarbon based films are subdivided into the following main grou

44、ps according to their chemical bonding state: polymer-like carbon films, where the carbon atoms are linked in chain formations, with crosslinks between the chains, and which contain a high amount of hydrogen (polymer-like); amorphous carbon films, where the carbon atoms are in a random, cross-linked

45、 arrangement (amorphous); crystalline carbon films, which are characterized by a regular arrangement of the carbon atoms, such that crystals are formed, subdivided into: diamond films, where the carbon atoms are arranged in the diamond crystal lattice, and graphite films, where the carbon atoms are

46、arranged in the graphite crystal lattice.Polymer-like carbon films may also be called plasma-polymer films.The group of amorphous carbon films are also called diamond-like carbon films (DLC films).From the main groups, further film types are classified according to the criteria described in 6.3.6.3

47、Classification criteria6.3.1 GeneralFor the classification, the following properties and criteria are used: crystallinity; ratio of sp2to sp3of CC bonds; hydrogen content; content of additional elements.Methods for the characterization of these properties are given in Annex B.2 ISO 2017 All rights r

48、eserved ISO 20523:2017(E)6.3.2 CrystallinityCarbon based films are non-crystalline (e.g. amorphous, polymer-like) or crystalline. If crystalline, they can vary in relation to their lattice type (diamond lattice, graphite lattice) and the crystallite size (nanocrystalline, microcrystalline).6.3.3 Rat

49、io of CC sp2to sp3hybridizationThe carbon atoms of the applied carbon film are able to form different hybridization states (sp3, sp2and sp1). Depending on the ratio of the different hybridization states, a different ratio of C-C-, C=C- and CC-bonds is realized. The ratio of CC sp2to sp3bonds of the carbon film types differs significantly.6.3.4 Hydrogen contentHydrogen may be present in carbon based films up to several 10 atomic %.6.3.5 Content of additional elementsBesides hydrogen, carbon based films