DIN EN ISO 13694-2016 Optics and photonics - Lasers and laser-related equipment - Test methods for laser beam power (energy) density distribution (ISO 13694 2015) German version EN.pdf

1、August 2016 English price group 13No part of this translation may be reproduced without prior permission ofDIN Deutsches Institut fr Normung e. V., Berlin. Beuth Verlag GmbH, 10772 Berlin, Germany,has the exclusive right of sale for German Standards (DIN-Normen).ICS 31.260!%Y.3“2541116www.din.deDIN

2、EN ISO 13694Optics and photonics Lasers and laser-related equipment Test methods for laser beam power (energy) density distribution (ISO 13694:2015);English version EN ISO 13694:2015,English translation of DIN EN ISO 13694:2016-08Optik und Photonik Laser und Laseranlagen Prfverfahren fr die Leistung

3、s-(Energie-)dichteverteilung von Laserstrahlen (ISO 13694:2015);Englische Fassung EN ISO 13694:2015,Englische bersetzung von DIN EN ISO 13694:2016-08Optique et photonique Lasers et quipements associs aux lasers Mthodes dessai de distribution de la densit de puissance (dnergie) du faisceau laser (ISO

4、 13694:2015);Version anglaise EN ISO 13694:2015,Traduction anglaise de DIN EN ISO 13694:2016-08SupersedesDIN EN ISO 13694:2000-11 andDIN EN ISO 13694 Corrigendum 1:2008-07www.beuth.deDocument comprises 24 pagesDTranslation by DIN-Sprachendienst.In case of doubt, the German-language original shall be

5、 considered authoritative.08.16 DIN EN ISO 13694:2016-08 2 A comma is used as the decimal marker. National foreword This document (EN ISO 13694:2015) has been prepared by Technical Committee ISO/TC 172 “Optics and photonics in collaboration with Technical Committee CEN/TC 123 “Lasers and photonics”

6、(Secretariat: DIN, Germany). The responsible German body involved in its preparation was DIN-Normenausschuss Feinmechanik und Optik (DIN Standards Committee Optics and Precision Mechanics), Working Committee NA 027-01-18 AA Laser und elektro-optische Systeme. The DIN Standards corresponding to the I

7、nternational Standards referred to in this document are as follows: ISO 11145 DIN EN ISO 11145 ISO 11146 DIN EN ISO 11146 (all parts) ISO 11554 DIN EN ISO 11554 ISO 61040 DIN EN 61040 Amendments This standard differs from DIN EN ISO 13694:2000-11 and DIN EN ISO 13694 Corrigendum 1:2008-07 as follows

8、: a) the definition of power density distribution E (x, y, z) has been revised; a definition of the power density E (x0, y0, z) has been added; b) the definition of energy density distribution H (x, y, z) has been revised; a definition of the energy density H (x0, y0, z) has been added; c) the term

9、“threshold power energy density” has been replaced by “clip-level power energy density”. The index “T” indicating “threshold” has been replaced by “CL” accordingly; d) the term “effective power energy” has been replaced by “clip-level power energy”; e) in 3.2.5, the formula for beam ellipticity has

10、been revised; f) the term “effective irradiation area” has been replaced by “clip-level irradiation area”; g) the notation E(z) H(z) indicating the clip-level average power energy density has been replaced by Eave(z), Have(z) ; h) Figure 1 has been revised taking into account the items a) and g) of

11、this list. Previous editions DIN EN ISO 13694: 2000-11 DIN EN ISO 13694 Corrigendum 1: 2008-07 DIN EN ISO 13694:2016-08 3 National Annex NA (informative) Bibliography 1 DIN EN 61040, Power and energy measuring detectors, instruments and equipment for laser radiation 2 DIN EN ISO 11145, Optics and ph

12、otonics Lasers and laser-related equipment Vocabulary and symbols 3 DIN EN ISO 11146 (all parts), Lasers and laser-related equipment Test methods for laser beam widths, divergence angles and beam propagation ratios 4 DIN EN ISO 11554, Optics and photonics Lasers and laser-related equipment Test meth

13、ods for laser beam power, energy and temporal characteristics DIN EN ISO 13694:2016-08 4 This page is intentionally blank EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 13694 December 2015 ICS 31.260 Supersedes EN ISO 13694:2000English Version Optics and photonics - Lasers and laser-relate

14、d equipment - Test methods for laser beam power (energy) density distribution (ISO 13694:2015) Optique et photonique - Lasers et quipements associs aux lasers - Mthodes dessai de distribution de la densit de puissance (dnergie) du faisceau laser (ISO 13694:2015) Optik und Photonik - Laser und Lasera

15、nlagen - Prfverfahren fr die Leistungs- (Energie-)dichteverteilung von Laserstrahlen(ISO 13694:2015)This European Standard was approved by CEN on 19 September 2015. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Stand

16、ard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member. This European Standard exists in three official versions (English

17、, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Bul

18、garia, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, T

19、urkey andUnited Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels 2015 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members.

20、 Ref. No. EN ISO 13694:2015 EForeword .4Introduction .51 Scope .62 Normative references 63 Terms and definitions .63.1 Measured quantities . 63.2 Characterizing parameters . 84 Coordinate system .115 Characterizing parameters derived from the measured spatial distribution .126 Test principle 127 Mea

21、surement arrangement and test equipment .127.1 General 127.2 Preparation . 127.3 Control of environment 137.4 Detector system . 137.5 Beam-forming optics, optical attenuators, and beam splitters 138 Test procedure .148.1 Equipment preparation 148.2 Detector calibration procedure . 148.2.1 Spatial ca

22、libration 148.2.2 Power energy calibration 148.3 Data recording and noise correction 158.3.1 General. 158.3.2 Correction by background-map subtraction 158.3.3 Correction by average background subtraction.169 Evaluation .169.1 Choice and optimization of integration limits 169.2 Control and optimizati

23、on of background corrections 1610 Test report 17Annex A (informative) Test report .18Contents PageEN ISO 13694:2015 (E)DIN EN ISO 13694:2016-08 2European foreword .4European foreword This document (EN ISO 13694:2015) has been prepared by Technical Committee ISO/TC 172 “Optics and photonics“ in colla

24、boration with Technical Committee CEN/TC 123 “Lasers and photonics” the secretariat of which is held by DIN. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by June 2016, and conflicting national sta

25、ndards shall be withdrawn at the latest by June 2016. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such patent rights. This document supersedes EN ISO

26、13694:2000. According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia,

27、 France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom. Endorsement notice The text of ISO 13694:2015 has been approved by CEN as E

28、N ISO 13694:2015 without any modification. EN ISO 13694:2015 (E)DIN EN ISO 13694:2016-08 3 ForewordISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried ou

29、t through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO co

30、llaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.The procedures used to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different appr

31、oval criteria needed for the different types of ISO documents should be noted. This document was drafted in accordance with the editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).Attention is drawn to the possibility that some of the elements of this document may be the s

32、ubject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any patent rights identified during the development of the document will be in the Introduction and/or on the ISO list of patent declarations received (see www.iso.org/patents).Any tr

33、ade name used in this document is information given for the convenience of users and does not constitute an endorsement.For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment, as well as information about ISOs adherence to the WTO principles in the T

34、echnical Barriers to Trade (TBT) see the following URL: Foreword - Supplementary informationThe committee responsible for this document is ISO/TC 172, Optics and photonics, Subcommittee SC 9, Electro-optical systems.This second edition cancels and replaces the first edition (ISO 13694:2000), which h

35、as been technically revised with the following changes:a) the definition of power density distribution E (x, y, z) has been revised, a definition of the power density E (x0, y0, z) has been added;b) the definition of energy density distribution H (x, y, z) has been revised, a definition of the energ

36、y density H (x0, y0, z) has been added;c) the term “threshold power energy density” has been replaced by “clip-level power energy density”. The index “T” indicating “threshold” has been replaced by “CL” accordingly;d) the term “effective power energy” has been replaced by “clip-level power energy”;e

37、) in 3.2.5, the formula for beam ellipticity has been revised;f) the term “effective irradiation area” has been replaced by “clip-level irradiation area”;g) the notation Ez() Hz() indicating the clip-level average power energy density has been replaced by Ezave(), Hzave();h) Figure 1 has been revise

38、d taking into account the items a) and g) of this list.It also incorporates the corrigendum ISO 13694:2000/Cor 1:2005.EN ISO 13694:2015 (E)DIN EN ISO 13694:2016-08 4 IntroductionMany applications of lasers involve using the near-field as well as the far-field power energy density distribution of the

39、 beam. The power energy density distribution of a laser beam is characterized by the spatial distribution of irradiant power energy density with lateral displacement in a particular plane perpendicular to the direction of propagation. In general, the power energy density distribution of the beam cha

40、nges along the direction of propagation. Depending on the power energy, size, wavelength, polarization, and coherence of the beam, different methods of measurement are applicable in different situations. Five methods are commonly used: camera arrays (1D and 2D), apertures, pinholes, slits, and knife

41、 edges.This International Standard provides definitions of terms and symbols to be used in referring to power density distribution, as well as requirements for its measurement. For pulsed lasers, the distribution of time-integrated power density (i.e. energy density) is the quantity most often measu

42、red.According to ISO 11145, it is possible to use two different definitions for describing and measuring the laser beam diameter. One definition is based on the measurement of the encircled power energy; the other is based on determining the spatial moments of the power energy density distribution o

43、f the laser beam.The use of spatial moments is necessary for calculating the beam propagation factor, K, and the beam propagation ratio, M2, from measurements of the beam widths at different distances along the propagation axis. ISO 11146 describes this measurement procedure. For other applications,

44、 other definitions for the beam diameter can be used. For some quantities used in this International Standard, the first definition (encircled power energy) is more appropriate and easier to use.The International Organization for Standardization (ISO) draws attention to the fact that it is claimed t

45、hat compliance with this document can involve the use of patents concerning the inclusion of negative noise values in background evaluation of CCD camera images as described in 8.3.2.ISO takes no position concerning the evidence, validity, and scope of this patent right.The holder of this patent rig

46、ht (U.S. No. 5,418,562 and 5,440,562, and PCT WO 94/27401) has assured ISO that they are willing to negotiate licenses under reasonable and non-discriminatory terms and conditions with applicants throughout the world. In this respect, the statement of the holder of this patent right is registered wi

47、th ISO. Information can be obtained from:Spiricon Inc.Laser Beam Diagnostics2600 North MainLogan, UT 84341USAEN ISO 13694:2015 (E)DIN EN ISO 13694:2016-08 5 1 ScopeThis International Standard specifies methods by which the measurement of power energy density distribution is made and defines paramete

48、rs for the characterization of the spatial properties of laser power energy density distribution functions at a given plane.The methods given in this International Standard are intended to be used for the testing and characterization of both continuous wave (cw) and pulsed laser beams used in optics and optical instruments.2 Normative referencesThe following documents, in whole or in part, are normatively referenced in this document and are indispensable