DIN EN ISO 14644-5-2005 Cleanrooms and associated controlled environments - Part 5 Operations (ISO 14644-5 2004) German version EN ISO 14644-5 2004《洁净室和相关控制环境 第5部分 操作》.pdf

1、ICS 13.040.35Cleanrooms and associated controlled environmentsPart 5: Operations(ISO 14644-5:2004)English version of DIN EN ISO 14644-5Reinrume und zugehrige Reinraumbereiche Teil 5: Betrieb (ISO 14644-5:2004)National forewordThis standard has been published in accordance with a decision taken by CE

2、N/TC 243 to adopt, withoutalteration, International Standard ISO 14644-5 as a European Standard.The responsible German body involved in its preparation was the Normenausschuss Heiz- und Raum-lufttechnik (HVAC Standards Committee), Technical Committee Reinraumtechnik.The DIN Standards corresponding t

3、o the International Standards referred to in clause 2 of the EN are asfollows:ISO Standard DIN StandardISO 14644-1 DIN EN ISO 14644-1ISO 14644-2 DIN EN ISO 14644-2ISO 14644-4 DIN EN ISO 14644-4ISO 14698-1 DIN EN ISO 14698-1*)ISO 14698-1 DIN EN ISO 14698-2*)National Annex NAStandards referred to(and

4、not included in Normative references and Bibliography)DIN EN ISO 14644-1 Cleanrooms and associated controlled environments Part 1: Classification of aircleanliness (ISO 14644-1:1999)DIN EN ISO 14644-2 Cleanrooms and associated controlled environments Part 2: Specifications fortesting and monitoring

5、to prove continued compliance with ISO 14644-1(ISO 14644-2:2000)DIN EN ISO 14644-4 Cleanrooms and associated controlled environments Part 4: Design, constructionand start-up (ISO 14644-4:2001)DEUTSCHE NORM March 2005DIN EN ISO 14644-5 No part of this standard may be reproduced without the prior perm

6、ission ofDIN Deutsches Institut fr Normung e.V., Berlin. Beuth Verlag GmbH, 10772 Berlin, Germany,has the exclusive right of sale for German Standards (DIN-Normen).English price group 18www.din.dewww.beuth.de9637720Continued overleaf.Document comprises 47 pages.08.05G4G15G69G83G26G5*) Currently at d

7、raft stage.English versionICS 13.040.35Cleanrooms and associated controlled environmentsPart 5: Operations(ISO 14644-5:2004) 2004. CEN All rights of exploitation in any form and by any meansreserved worldwide for CEN national members.Ref. No. EN ISO 14644-5:2004 EReinrume und zugehrige Reinraum-bere

8、iche Teil 5: Betrieb(ISO 14644-5:2004)This European Standard was approved by CEN on 2004-07-29.CEN members are bound to comply with the CEN/CENELEC Internal Regulationswhich stipulate the conditions for giving this European Standard the status of anational standard without any alteration.Up-to-date

9、lists and bibliographical references concerning such national stand-ards may be obtained on application to the Management Centre or to anyCEN member.The European Standards exist in three official versions (English, French, German).A version in any other language made by translation under the respons

10、ibility of aCEN member into its own language and notified to the Management Centre hasthe same status as the official versions.CEN members are the national standards bodies of Austria, Belgium, Cyprus, theCzech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary,Iceland, Ireland, I

11、taly, Latvia, Lithuania, Luxembourg, Malta, the Netherlands,Norway, Poland, Portugal, Slovakia, Slovenia, Spain, Sweden, Switzerland, andthe United Kingdom.EN ISO 14644-5August 2004Management Centre: rue de Stassart 36, B-1050 BrusselsEuropean Committee for StandardizationComit Europen de Normalisat

12、ionEuropisches Komitee fr NormungSalles propres et environnementsmatriss apparents Partie 5:Exploitation (ISO 14644-5:2004)Page 2EN ISO 14644-5:2004ForewordInternational StandardISO 14644-5:2004 Cleanrooms and associated controlled environments Part 5: Operations(ISO 14644-5:2004),which was prepared

13、 by ISO/TC 209 Cleanrooms and associated controlled environments of the InternationalOrganization for Standardization, has been adopted by Technical Committee CEN/TC 243 Cleanroomtechnology, the Secretariat of which is held by BSI, as a European Standard.This European Standard shall be given the sta

14、tus of a national standard, either by publication of an identical textor by endorsement, and conflicting national standards withdrawn, by February 2005 at the latest.In accordance with the CEN/CENELEC Internal Regulations, the national standards organizations of thefollowing countries are bound to i

15、mplement this European Standard:Austria, Belgium, Cyprus, the Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary,Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal,Slovakia, Slovenia, Spain, Sweden, Switzerland, and the U

16、nited Kingdom.Endorsement noticeThe text of the International Standard ISO 14644-5:2004 was approved by CEN as a European Standard withoutany modification.2333459152024283545Page 3EN ISO 14644-5:2004Page 4EN ISO 14644-5:2004Page 5EN ISO 14644-5:2004Page 6EN ISO 14644-5:2004Page 7EN ISO 14644-5:2004P

17、age 8EN ISO 14644-5:2004Page 9EN ISO 14644-5:2004Page 10EN ISO 14644-5:2004Page 11EN ISO 14644-5:2004Page 12EN ISO 14644-5:2004Page 13EN ISO 14644-5:2004Page 14EN ISO 14644-5:2004Page 15EN ISO 14644-5:2004Page 16EN ISO 14644-5:2004Page 17EN ISO 14644-5:2004Page 18EN ISO 14644-5:2004Page 19EN ISO 14644-5:2004Page 20EN ISO 14644-5:2004Page 21EN ISO 14644-5:2004Page 22EN ISO 14644-5:2004Page 23EN ISO 14644-5:2004Page 24EN ISO 14644-5:2004Page 25EN ISO 14644-5:2004Page 26EN ISO 14644-5:2004Page 27EN ISO 14644-5:2004Page 28EN ISO 14644-5:2004