DIN EN ISO 18452-2016 Fine ceramics (advanced ceramics advanced technical ceramics) - Determination of thickness of ceramic films by contact-probe profilometer (ISO 18452 2005) Ger.pdf

1、September 2016 English price group 10No part of this translation may be reproduced without prior permission ofDIN Deutsches Institut fr Normung e. V., Berlin. Beuth Verlag GmbH, 10772 Berlin, Germany,has the exclusive right of sale for German Standards (DIN-Normen).ICS 81.060.30!%ZV“2559651www.din.d

2、eDIN EN ISO 18452Fine ceramics (advanced ceramics, advanced technical ceramics) Determination of thickness of ceramic films by contactprobe profilometer (ISO 18452:2005);English version EN ISO 18452:2016,English translation of DIN EN ISO 18452:2016-09Hochleistungskeramik Bestimmung der Dicke keramis

3、cher Schichten mit einem Kontaktprofilometer (ISO 18452:2005);Englische Fassung EN ISO 18452:2016,Englische bersetzung von DIN EN ISO 18452:2016-09Cramiques techniques Dtermination de lpaisseur des films cramiques avec un profilomtre contact (ISO 18452:2005);Version anglaise EN ISO 18452:2016,Traduc

4、tion anglaise de DIN EN ISO 18452:2016-09SupersedesDIN EN 10711:200306www.beuth.deDocument comprises 15 pagesDTranslation by DIN-Sprachendienst.In case of doubt, the German-language original shall be considered authoritative.09.16 DIN EN ISO 18452:2016-09 2 A comma is used as the decimal marker. Nat

5、ional foreword The text of ISO 18452:2005 has been prepared by Technical Committee ISO/TC 206 “Fine ceramics” and has been taken over as EN ISO 18452:2016 by Technical Committee CEN/TC 184 “Advanced technical ceramics” (Secretariat: DIN, Germany). At present a DIN committee does not exist for this s

6、tandard since the parties concerned have not shown any interest in work on the subject. The DIN Standard corresponding to the International Standard referred to in this document is as follows: ISO 3274 DIN EN ISO 3274 Amendments This standard differs from DIN EN 1071-1:2003-06 as follows: a) the sco

7、pe is more precise, i.e. the method is deemed as being suitable for film thicknesses in the range of 10 nm to 10 000 nm; b) Clause 3 “Terms and definitions” has been added; c) Figure 1 has been revised; d) Subclause 7.3 “Number of test pieces” has been added; e) ISO 18452:2005 has been adopted. Prev

8、ious editions DIN V ENV 1071-1: 1993-11 DIN EN 1071-1: 2003-06 National Annex NA (informative) Bibliography DIN EN ISO 3274, Geometrical product specifications (GPS) Surface texture: Profile method Nominal characteristics of contact (stylus) instruments EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE N

9、ORM EN ISO 18452 April 2016 ICS 81.060.30 Supersedes EN 1071-1:2003English Version Fine ceramics (advanced ceramics, advanced technical ceramics) Determination of thickness of ceramic films by contact-probe profilometer (ISO 18452:2005) Cramiques techniques Dtermination de lpaisseur des films cramiq

10、ues avec un profilomtre contact (ISO 18452:2005) Hochleistungkerami Bestimmung der Dicke keramischer Schichten mit einem Kontaktprofilometer (ISO 18452:2005) This European Standard was approved by CEN on 25 March 2016. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which s

11、tipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member. This Europe

12、an Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same status as the official versions. CEN members are

13、the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Roma

14、nia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey andUnited Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels 2016 CEN All rights of exploitation in any form and by

15、any means reserved worldwide for CEN national Members. Ref. No. EN ISO 18452:2016 EEN ISO 18452:2016 (E) 2 Contents Page European foreword . 3 Foreword 4 1 Scope 5 2 Normative references 5 3 Terms and definitions . 5 4 Principle of measurement . 5 5 Test environment 5 6 Apparatus . 6 7 Test pieces .

16、 7 8 Procedure. 8 9 Calculation . 9 10 Limits to step height . 9 11 Test report 10 Annex A (informative) Effect of amplification factor and levelling error on measured layer thickness . 11 DIN EN ISO 18452:2016-09 EN ISO 18452:2016 (E) 3 European foreword The text of ISO 18452:2005 has been prepared

17、 by Technical Committee ISO/TC 206 “Fine ceramics” of the International Organization for Standardization (ISO) and has been taken over as EN ISO 18452:2016 by Technical Committee CEN/TC 184 “Advanced technical ceramics” the secretariat of which is held by DIN. This European Standard shall be given t

18、he status of a national standard, either by publication of an identical text or by endorsement, at the latest by October 2016, and conflicting national standards shall be withdrawn at the latest by October 2016. Attention is drawn to the possibility that some of the elements of this document may be

19、the subject of patent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such patent rights. This document supersedes EN 1071-1:2003. According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following countries are bound to imple

20、ment this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania,

21、 Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom. Endorsement notice The text of ISO 18452:2005 has been approved by CEN as EN ISO 18452:2016 without any modification. DIN EN ISO 18452:2016-09 ForewordISO (the International Organization for Standardization) is a worldwi

22、de federation of national standards bodies(ISO member bodies). The work of preparing International Standards is normally carried out through ISOtechnical committees. Each member body interested in a subject for which a technical committee has beenestablished has the right to be represented on that c

23、ommittee. International organizations, governmental andnon-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the InternationalElectrotechnical Commission (IEC) on all matters of electrotechnical standardization.International Standards are drafted in accorda

24、nce with the rules given in the ISO/IEC Directives, Part 2.The main task of technical committees is to prepare International Standards. Draft International Standardsadopted by the technical committees are circulated to the member bodies for voting. Publication as anInternational Standard requires ap

25、proval by at least 75 % of the member bodies casting a vote.Attention is drawn to the possibility that some of the elements of this document may be the subject of patentrights. ISO shall not be held responsible for identifying any or all such patent rights.ISO 18452 was prepared by Technical Committ

26、ee ISO/TC 206, Fine ceramics.EN ISO 18452:2016 (E) DIN EN ISO 18452:2016-09 41 ScopeThis International Standard specifies a method for the determination of the film thickness of a fine ceramic filmand ceramic coatings by a contact-probe profilometer. The method is suitable for film thicknesses in th

27、e rangeof to .NOTE The method requires a distinct and clearly formed boundary between coated and uncoated parts of the substrate.2 Normative referencesThe following referenced documents are indispensable for the application of this document. For datedreferences, only the edition cited applies. For u

28、ndated references, the latest edition of the referenced document(including any amendments) applies.ISO 3274, Geometrical Product Specifications (GPS) Surface texture: Profile method Nominalcharacteristics of contact (stylus) instruments3 Terms and definitionsFor the purposes of this document, the fo

29、llowing terms and definitions apply.3.1 fine ceramic filmcoating consisting of a fine ceramic material which thinly covers the substrate surfaceEXAMPLE Typical materials are oxides, carbides, nitrides, etc., deposited by methods such as vacuum evaporating,sputtering, chemical vapour deposition, etc.

30、4 Principle of measurementThis International Standard concerns the measurement of the film thickness of fine ceramic coatings on asubstrate using a contact-probe profilometer. The film thickness shall be calculated from the profile which isobtained by scanning the contact probe in the direction , as

31、 shown in Figure 1. The profile is inproportion to the difference in height between the parts covered and not covered with the fine ceramic film.5 Test environmentThe test shall be carried out in an environment free from mechanical vibrations that may affect themeasurement.10 nm 10 000 nmCBAEN ISO 1

32、8452:2016 (E) DIN EN ISO 18452:2016-09 5 6 Apparatus6.1 Contact-probe profilometerThe contact-probe profilometer shall be in accordance with ISO 3274. The instrument shall be calibrated byusing step-height calibration standards in accordance with the limits given in Clause 10.In metrology, it is alw

33、ays very important to have calibration and checking conditions corresponding to themeasurement conditions. Therefore, the calibration or certified reference materials should be as similar aspossible to the step height to be measured.6.2 Contact probeThe stylus chip of a contact probe is made of diam

34、ond, and has a conical shape. The vertical angle of the chipis or . The radius of the chip is any of , , , and .NOTE The effect of the stylus-tip radius on the lateral profile resolution, i. e. the step-edge broadening due to the bluntnessof the tip (see Figure 2), should be considered. However, due

35、 to the horizontal compression of the displayed picture (fargreater vertical than horizontal magnification), this effect can be neglected for routine coating thickness measurementswhere definitive horizontal resolution is unimportant.Key1 contact probe2film3 level difference4 substratefilm thickness

36、Figure 1 Principle of measurement using the contact-probe profilometert60902 m 5 m 10 m 12,5 mEN ISO 18452:2016 (E) DIN EN ISO 18452:2016-09 67 Test pieces7.1 General considerationThe test pieces shall comprise a fine ceramic thin film coated onto the surface of a substrate such as glass, ora piece

37、cut from such an item.The test pieces shall have dimensions sufficient to ensure stability on the test piece support of the profilometer.Select a representative test specimen from the coating to be tested. Clean the specimen, using an appropriatemethod for the coating, so that it is free from dust,

38、oil, moisture and any other surface films. The test-pieces maybe produced by machining from a larger board on which the fine ceramic thin film was formed to the appropriatesize.NOTE 1 The level difference is formed by taking away part of the film by chemical etching, or by depositing the film throug

39、ha mask.NOTE 2 When covering part of the substrate during deposition, it can happen that the deposition rate near the step isinfluenced by the covering medium. This results in a step which is not representative for the coating thickness. This can beprevented by using very thin covering plates, or it

40、 can be circumvented by etching away part of the coating after the coatingprocess.7.2 Surface conditionsBecause surface roughness will affect the result, the value of both substrate and coating shall be no greaterthan of the step height, and the average wavelength of the roughness shall be of AB for

41、 thesubstrate or CD for the coating (see Figure 3).NOTE The repeatability of the step-height measurement depends on the electronic noise level of the instrument, thedigitization increment of the signal and the mechanical stability of the stylus or sample motion. However, the major source ofstatistic

42、al variation in calculated step heights is the surface roughness of the step specimen, which is the ultimateuncertainty in assigning a height value to a stylus step profile.Key1 substrate2stepFigure 2 Broading of the step “B” due to the bluntness (radius ) of the stylus tiprRa1/5 10 %RaEN ISO 18452:

43、2016 (E) DIN EN ISO 18452:2016-09 7 Systematic errors are related to non-parallel reference lines at both sides of the step either due to insufficientlyflat substrates or to local coating thickness artefacts related to sample preparation.7.3 Number of test piecesAt least three test pieces shall be u

44、sed.8 Procedure8.1 Calibrate the contact-probe profilometer (6.1).8.2 Level the sample so that the uncoated portion of the substrate is parallel to the -axis datum of themeasuring machine. Procedures for this will depend upon the machine being used. Errors in levelling will resultin differences betw

45、een the measured and the true value of the coating thickness (see Annex A). As shown inAnnex A, the magnitude of the error depends on both the angular levelling error and the ratio width of thestep/coating thickness.Step height = Key1 direction of travel of stylusXHorizontal.YVertical.-position of p

46、oint B-position of point CFigure 3 Procedure for the determination of the coating step-height thicknessyhyLybyycyxEN ISO 18452:2016 (E) DIN EN ISO 18452:2016-09 88.3 Set the stylus loading to its lowest value (from to ) and scan the step striding over the leveldifference. In order for the limits of

47、the step width (points B and C in Figure 3) to be accurately identified, thetravel for the probe on the uncoated and coated portions of the sample (distances AB and CD respectively; seeFigure 3) shall each be a minimum of .The contact probe should be scanned along a line perpendicular to the boundar

48、y between coated and uncoatedportions of the substrate.To avoid damage to the profile of the step, scanning shall take place in the direction from the coating surface tothe substrate surface, i.e. down the step given in Clause 4.NOTE It is desirable that the stylus loading is small so that it does n

49、ot give rise to damage of the coating or the substrate.However, if the stylus loading is too small it may pick up external vibrations and produce an irregular profile.8.4 Inspect the scan, for example by light microscopy, in order to determine whether any damage to thesample has occurred.8.5 Repeat the procedure to give five measurements for each sample tested. Because the surfaces on eitherside of the step are often not flat and not parallel, a single