DIN EN ISO 25178-602-2011 Geometrical product specifications (GPS) - Surface texture Areal - Part 602 Nominal characteristics of non-contact (confocal chromatic probe) instruments .pdf

1、January 2011 Translation by DIN-Sprachendienst.English price group 16No part of this translation may be reproduced without prior permission ofDIN Deutsches Institut fr Normung e. V., Berlin. Beuth Verlag GmbH, 10772 Berlin, Germany,has the exclusive right of sale for German Standards (DIN-Normen).IC

2、S 17.040.30!$l5“1739618www.din.deDDIN EN ISO 25178-602Geometrical product specifications (GPS) Surface texture: Areal Part 602: Nominal characteristics of non-contact (confocal chromaticprobe) instruments (ISO 25178-602:2010)English translation of DIN EN ISO 25178-602:2011-01Geometrische Produktspez

3、ifikation (GPS) Oberflchenbeschaffenheit: Flchenhaft Teil 602: Merkmale von berhrungslos messenden Gerten (mit chromatisch konfokalerSonde) (ISO 25178-602:2010)Englische bersetzung von DIN EN ISO 25178-602:2011-01Spcification gomtrique des produits (GPS) tat de surface: Surfacique Partie 602: Caract

4、ristiques nominales des instruments sans contact ( capteur confocalchromatique) (ISO 25178-602:2010)Traduction anglaise de DIN EN ISO 25178-602:2011-01www.beuth.deDocument comprises pagesIn case of doubt, the German-language original shall be considered authoritative.3701.11 DIN EN ISO 25178-602:201

5、1-01 2 A comma is used as the decimal marker. National foreword This standard has been prepared by Technical Committee ISO/TC 213 “Dimensional and geometrical product specifications and verification”, Working Group WG 16 “Areal and profile surface texture” in collaboration with Technical Committee C

6、EN/TC 290 “Dimensional and geometrical product specification and verification” (Secretariat: AFNOR, France). The responsible German body involved in its preparation was the Normenausschuss Technische Grundlagen (Fundamental Technical Standards Committee), Working Committee NA 152-03-03 AA Oberflchen

7、. The DIN Standards corresponding to the International Standards referred to in this document are as follows: ISO 3274:1996 DIN EN ISO 3274:1998-04 ISO 4287 DIN EN ISO 4287 ISO 10360-1 DIN EN ISO 10360-1 ISO/IEC Guide 99:2007 International vocabulary of metrology Basic and general concepts and assoc

8、iated terms (VIM) National Annex NA (informative) Bibliography DIN EN ISO 3274:1998-04, Geometrical Product Specifications (GPS) Surface texture: Profile method Nominal characteristics of contact (stylus) instruments DIN EN ISO 4287, Geometrical Product Specifications (GPS) Surface texture: Profile

9、method Terms, definitions and surface texture parameters DIN EN ISO 10360-1, Geometrical Product Specifications (GPS) Acceptance and reverification tests for coordinate measuring machines (CMM) Part 1: Vocabulary International vocabulary of metrology Basic and general concepts and associated terms (

10、VIM), ISBN 978-3-410-20070-3 EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 25178-602 July 2010 ICS 17.040.20 English Version Geometrical product specifications (GPS) - Surface texture: Areal - Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments (ISO 251

11、78-602:2010) Spcification gomtrique des produits (GPS) - tat de surface: Surfacique - Partie 602: Caractristiques nominales des instruments sans contact ( capteur confocal chromatique) (ISO 25178-602:2010) Geometrische Produktspezifikation (GPS) - Oberflchenbeschaffenheit: Flchenhaft - Teil 602: Mer

12、kmale von berhrungslos messenden Gerten (mit chromatisch konfokaler Sonde) (ISO 25178-602:2010) This European Standard was approved by CEN on 6 May 2010. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the sta

13、tus of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN Management Centre or to any CEN member. This European Standard exists in three official versions (English, French, German).

14、A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Cze

15、ch Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUR

16、OPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG Management Centre: Avenue Marnix 17, B-1000 Brussels 2010 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. EN ISO 25178-602:2010: EContents DIN EN ISO 25178-602:2011-01 EN ISO 25178-

17、602:2010 (E) 2 Page Foreword3 Introduction .4 1 Scope 5 2 Normative references 5 3 Terms and definitions .5 4 Summary of metrological characteristics .19 Annex A (normative) Classification of the different configurations for areal surface texture scanning instrument .20 Annex B (informative) General

18、 principles.21 Annex C (normative) Concept diagrams.29 Annex D (informative) Relation to the GPS matrix.31 Bibliography 33 Foreword This document (EN ISO 25178-602:2010) has been prepared by Technical Committee ISO/TC 213 Committee CEN/TC 290 “Dimensional and geometrical product specification and ve

19、rification” the secretariat of which is held by AFNOR. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by January 2011, and conflicting national standards shall be withdrawn at the latest by January

20、2011. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such patent rights. According to the CEN/CENELEC Internal Regulations, the national standards organi

21、zations of the following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Port

22、ugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and the United Kingdom. Endorsement notice The text of ISO 25178-602:2010 has been approved by CEN as a EN ISO 25178-602:2010 without any modification. Dimensional and geometrical product specifications and verification in collaboration w

23、ith Technical “ ”DIN EN ISO 25178-602:2011-01 EN ISO 25178-602:2010 (E) 3 Introduction This part of ISO 25178 is a geometrical product specification standard and is to be regarded as a general GPS standard (see ISO/TR 14638). It influences chain link 5 of the chain of standards on roughness profile,

24、 waviness profile and primary profile and areal surface texture. For more detailed information on the relationship of this standard to the GPS matrix model, see Annex D. The confocal chromatic optical principle can be implemented in various set-ups. The configuration described in this document compr

25、ises three basic elements: an optoelectronic controller, a linking fibre optic cable and a chromatic objective (sometimes called “optical pen”). Several techniques are possible to create the axial chromatic dispersion or to extract the height information from the reflected light. In addition to impl

26、ementations as point sensors, chromatic dispersion may be integrated into line sensors and field sensors. Annex B describes in detail confocal chromatic imaging and its implementation into distance measurement probes. This type of instrument is mainly designed for areal measurements, but it is also

27、able to perform profile measurements. This part of ISO 25178 describes the metrological characteristics of an optical profiler using a confocal chromatic probe based on axial chromatic dispersion of white light, designed for the measurement of areal surface texture. For more detailed information on

28、the chromatic probe instrument technique, see Annex B. Reading this annex before the main body may lead to a better understanding of this part of ISO 25178. DIN EN ISO 25178-602:2011-01 EN ISO 25178-602:2010 (E) 4 1 Scope This part of ISO 25178 defines the design and metrological characteristics of

29、a particular non-contact instrument for measuring surface texture using a confocal chromatic probe based on axial chromatic dispersion of white light. 2 Normative references The following referenced documents are indispensable for the application of this document. For dated references, only the edit

30、ion cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO 3274:1996, Geometrical Product Specifications (GPS) Surface texture: Profile method Nominal characteristics of contact (stylus) instruments ISO 4287, Geometrical Product S

31、pecifications (GPS) Surface texture: Profile method Terms, definitions and surface texture parameters ISO 10360-1, Geometrical Product Specifications (GPS) Acceptance and reverification tests for coordinate measuring machines (CMM) Part 1: Vocabulary ISO/IEC Guide 99:2007, International vocabulary o

32、f metrology Basic and general concepts and associated terms (VIM) 3 Terms and definitions For the purposes of this document, the terms and definitions given in ISO 3274, ISO 4287, ISO 10360-1, ISO/IEC Guide 99 and the following apply. NOTE Several of the terms given below are common to other types o

33、f instruments that use single point sensors and lateral scanning. DIN EN ISO 25178-602:2011-01 EN ISO 25178-602:2010 (E) 5 3.1 General terms and definitions 3.1.1 coordinate system of the instrument orthonormal system of axes (X,Y,Z) defined as: (X,Y) is the plane established by the areal reference

34、guide of the instrument; the Z axis is mounted parallel to the optical axis and is perpendicular to the (X,Y) plane NOTE Normally, the X-axis is the tracing axis and the Y-axis is the stepping axis. 3.1.2 measurement loop closed chain which comprises all components connecting the workpiece and the c

35、hromatic probe (3.3.2), e.g. the means of positioning, the workholding fixture, the measuring stand, the drive unit (3.2.3 and 3.2.4) and the probing system (3.3.1) See Figure 1. NOTE The measuring loop will be subjected to external and internal disturbances which influence the measurement uncertain

36、ty. Key 1 coordinate system of the instrument 2 measurement loop Figure 1 Coordinate system and measurement loop of the instrument 3.1.3 real surface of a workpiece set of features which physically exist and separate the entire workpiece from the surrounding medium ISO 14660-1:1999, definition 2.4 D

37、IN EN ISO 25178-602:2011-01 EN ISO 25178-602:2010 (E) 6 3.1.4 real electro-magnetic surface surface obtained by the electro-magnetic interaction with the real surface of a work piece ISO 14406:1), definition 3.2.2 NOTE The real electro-magnetic surface considered for the instrument described in this

38、 part of ISO 25178 may be different from the real electro-magnetic surface for other types of optical instruments. 3.1.5 primary extracted surface finite set of data points sampled from the primary surface ISO 14406:1), definition 3.7 3.1.6 measurement error error of measurement error measured quant

39、ity value minus a reference quantity value NOTE 1 The concept of “measurement error” can be used both a) when there is a single reference quantity value to refer to, which occurs if a calibration is made by means of a measurement standard with a measured quantity value having a negligible measuremen

40、t uncertainty or if a conventional quantity value is given, in which case the measurement error is known, and b) if a measurand is supposed to be represented by a unique true quantity value or a set of true quantity values of negligible range, in which case the measurement error is not known. NOTE 2

41、 Measurement error should not be confused with production error or mistake. ISO/IEC Guide 99:2007, definition 2.16 3.1.7 systematic measurement error systematic error of measurement systematic error component of measurement error (3.1.6) that in replicate measurements remains constant or varies in a

42、 predictable manner NOTE 1 A reference quantity value for a systematic measurement error is a true quantity value, or a measured quantity value of a measurement standard of negligible measurement uncertainty, or a conventional quantity value. NOTE 2 Systematic measurement error, and its causes, can

43、be known or unknown. A correction (3.1.11) can be applied to compensate for a known systematic measurement error. NOTE 3 Systematic measurement error equals measurement error minus random measurement error (3.1.8). ISO/IEC Guide 99:2007, definition 2.17 3.1.8 random measurement error random error of

44、 measurement random error component of measurement error (3.1.6) that in replicate measurements varies in an unpredictable manner 1) To be published. DIN EN ISO 25178-602:2011-01 EN ISO 25178-602:2010 (E) 7 NOTE 1 A reference quantity value for a random measurement error is the average that would en

45、sue from an infinite number of replicate measurements of the same measurand. NOTE 2 Random measurement errors of a set of replicate measurements form a distribution that can be summarized by its expectation, which is generally assumed to be zero, and its variance. NOTE 3 Random measurement error equ

46、als measurement error minus systematic measurement error (3.1.7). ISO/IEC Guide 99:2007, definition 2.19 3.1.9 adjustment of a measuring instrument adjustment set of operations carried out on a measuring system so that it provides prescribed indications corresponding to given values of a quantity to

47、 be measured NOTE 1 Types of adjustment of a measuring system include zero adjustment of a measuring system, offset adjustment, and span adjustment (sometimes called gain adjustment). NOTE 2 Adjustment of a measuring system should not be confused with calibration, which is a prerequisite for adjustm

48、ent. NOTE 3 After an adjustment of a measuring system, the measuring system must usually be recalibrated. ISO/IEC Guide 99:2007, definition 3.11 NOTE 4 This is an operation normally carried out by the instrument manufacturer because it requires specialized equipment and knowledge that users normally do not have. 3.1.10 user adjustment measuring instrument adjustment of a measuring instrument (3.1.9) employing only the means at the disposal of the user NOTE This is an operation no