DIN EN ISO 25178-606-2016 Geometrical product specification (GPS) - Surface texture Areal - Part 606 Nominal characteristics of non-contact (focus variation) instruments (ISO 25178.pdf

1、December 2016 English price group 17No part of this translation may be reproduced without prior permission ofDIN Deutsches Institut fr Normung e. V., Berlin. Beuth Verlag GmbH, 10772 Berlin, Germany,has the exclusive right of sale for German Standards (DIN-Normen).ICS 17.040.40!%E“2599134www.din.deD

2、IN EN ISO 25178-606Geometrical product specification (GPS) Surface texture: Areal Part 606: Nominal characteristics of noncontact (focus variation) instruments (ISO 25178606:2015);English version EN ISO 25178606:2015,English translation of DIN EN ISO 25178-606:2016-12Geometrische Produktspezifikatio

3、n (GPS) Oberflchenbeschaffenheit: Flchenhaft Teil 606: Merkmale von berhrungslos messenden Gerten (Fokusvariation) (ISO 25178606:2015);Englische Fassung EN ISO 25178606:2015,Englische bersetzung von DIN EN ISO 25178-606:2016-12Spcification gomtrique des produits (GPS) tat de surface: Surfacique Part

4、ie 606: Caractristiques nominales des instruments sans contact ( variation focale) (ISO 25178606:2015);Version anglaise EN ISO 25178606:2015,Traduction anglaise de DIN EN ISO 25178-606:2016-12www.beuth.deDocument comprises 36 pagesDTranslation by DIN-Sprachendienst.In case of doubt, the German-langu

5、age original shall be considered authoritative.01.17 DIN EN ISO 25178-606:2016-12 2 A comma is used as the decimal marker. National foreword This document (EN ISO 25178-606:2015) has been prepared by Technical Committee ISO/TC 213 “Dimensional and geometrical product specifications and verification”

6、 (Secretariat: DS, Denmark) in collaboration with Technical Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” (Secretariat: AFNOR, France). The responsible German body involved in its preparation was DIN-Normenausschuss Technische Grundlagen (DIN Standards Com

7、mittee Technical Fundamentals), Working Committee NA 152-03-03 AA Oberflchen. The DIN Standards corresponding to the International Standards referred to in this document are as follows: ISO 3274:1996 DIN EN ISO 3274:1998-04 ISO 4287:1997 DIN EN ISO 4287:1998-10 ISO 8015 DIN EN ISO 8015 ISO 14253-1 D

8、IN EN ISO 14253-1 ISO 14406:2010 DIN EN ISO 14406:2011-04 ISO 14978:2006 DIN EN ISO 14978:2006-11 ISO 17450-1 DIN EN ISO 17450-1 ISO 25178-2:2012 DIN EN ISO 25178-2:2012-09 ISO 25178-3:2012 DIN EN ISO 25178-3:2012-11 ISO 25178-6:2010 DIN EN ISO 25178-6:2010-06 ISO 25178-601 DIN EN ISO 25178-601 ISO

9、25178-602 DIN EN ISO 25178-602 DIN EN ISO 25178-606:2016-12 3 National Annex NA (informative) Bibliography DIN EN ISO 3274:1998-04, Geometrical products specifications (GPS) Surface texture: Profile method Nominal characteristics of contact (stylus) instruments (ISO 3274:1996) DIN EN ISO 4287:1998-1

10、0, Geometrical products specifications (GPS) Surface texture: Profile method Terms, definitions and surface texture parameters (ISO 4287:1997) DIN EN ISO 8015, Geometrical product specifications (GPS) Fundamentals Concepts, principles and rules DIN EN ISO 14253-1, Geometrical product specifications

11、(GPS) Inspection by measurement of workpieces and measuring equipment Part 1: Decision rules for proving conformity or nonconformity with specifications DIN EN ISO 14406:2011-04, Geometrical product specifications (GPS) Extraction (ISO 14406:2010) DIN EN ISO 14978:2006-11, Geometrical product specif

12、ications (GPS) General concepts and requirements for GPS measuring equipment (ISO 14978:2006) DIN EN ISO 17450-1, Geometrical product specifications (GPS) General concepts Part 1: Model for geometrical specification and verification DIN EN ISO 25178-2:2012-09, Geometrical product specifications (GPS

13、) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters (ISO 25178-2:2012) DIN EN ISO 25178-3:2012-11, Geometrical product specifications (GPS) Surface texture: Areal Part 3: Specification operators (ISO 25178-3:2012) DIN EN ISO 25178-6:2010-06, Geometrical product specifi

14、cations (GPS) Surface texture: Areal Part 6: Classification of methods for measuring surface texture (ISO 25178-6:2010) DIN EN ISO 25178-601, Geometrical products specifications (GPS) Surface texture: Areal Part 601: Nominal characteristics of contact (stylus) instruments DIN EN ISO 25178-602, Geome

15、trical products specifications (GPS) Surface texture: Areal Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments DIN EN ISO 25178-606:2016-12 4 This page is intentionally blank EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 25178-606 June 2015 ICS 17.040.

16、20 English Version Geometrical product specification (GPS) - Surface texture: Areal -Part 606: Nominal characteristics of non-contact(focus variation) instruments (ISO 25178-606:2015) Spcification gomtrique des produits (GPS) - tat de surface: Surfacique - Partie 606: Caractristiques nominales des i

17、nstruments sans contact ( variation focale) (ISO 25178-606:2015) Geometrische Produktspezifikation (GPS) - Oberflchenbeschaffenheit: Flchenhaft - Teil 606: Merkmale von berhrungslos messenden Gerten (Fokusvariation) (ISO 25178-606:2015) This European Standard was approved by CEN on 21 February 2015.

18、 CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on

19、application to the CEN-CENELEC Management Centre or to any CEN member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELE

20、C Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy,

21、 Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG CEN-CENELEC Management Centre: Avenue

22、 Marnix 17, B-1000 Brussels 2015 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. EN ISO 25178-606:2015 EEuropeanforeword .3Introduction 61 Scope .72 Normative references 73 Terms and definitions .73.1 Terms and definitions related to

23、all areal surface texture measurement methods .83.2 Terms and definitions related to x- and y-scanning systems . 153.3 Terms and definitions related to optical systems 173.4 Terms and definitions related to optical properties of the workpiece 193.5 Terms and definitions specific to focus variation i

24、nstruments 194 Description of the influence quantities .224.1 General 224.2 Overview . 234.3 Influence quantities . 23Annex A (informative) Components of a focus variation microscope .25Annex B (informative) Relation to the GPS matrix model .31Bibliography .32Contents PageDIN EN ISO 25178-606:2016-1

25、2ENISO25178-606:2015 (E)2Foreword .4European foreword This document (EN ISO 25178-606:2015) has been prepared by Technical Committee ISO/TC 213 “Dimensional and geometrical product specifications and verification” in collaboration with Technical Committee CEN/TC 290 “Dimensional and geometrical prod

26、uct specification and verification” the secretariat of which is held by AFNOR This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by December 2015, and conflicting national standards shall be withdrawn a

27、t the latest by December 2015. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such patent rights. According to the CEN-CENELEC Internal Regulations, the

28、national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia,

29、 Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom. Endorsement notice The text of ISO 25178-606:2015 has been approved by CEN as EN ISO 25178-606:2015 without any modification. DIN EN ISO 25178

30、-606:2016-12 ENISO25178-606:2015 (E)3 ForewordISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body

31、interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotech

32、nical Commission (IEC) on all matters of electrotechnical standardization.The procedures used to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO d

33、ocuments should be noted. This document was drafted in accordance with the editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held respon

34、sible for identifying any or all such patent rights. Details of any patent rights identified during the development of the document will be in the Introduction and/or on the ISO list of patent declarations received (see www.iso.org/patents).Any trade name used in this document is information given f

35、or the convenience of users and does not constitute an endorsement.For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment, as well as information about ISOs adherence to the WTO principles in the Technical Barriers to Trade (TBT), see the following U

36、RL: Foreword Supplementary information .The committee responsible for this document is ISO/TC 213, Dimensional and geometrical product specifications and verification.ISO 25178 consists of the following parts, under the general title Geometrical product specification (GPS) Surface texture: Areal : P

37、art 1: Indication des tats de surface Part 2: Terms, definitions and surface texture parameters Part 3: Specification operators Part 6: Classification of methods for measuring surface texture Part 70: Material measures Part 71: Software measurement standards Part 72: Format de fichier XML x3p Part 6

38、01: Nominal characteristics of contact (stylus) instruments Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments Part 604: Nominal characteristics of non-contac

39、t (coherence scanning interferometry) instruments Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments Part 606: Nominal characteristics of non-contact (focus variation) instruments Part 701: Calibration and measurement standards for contact (stylus) instrumentsDIN EN

40、 ISO 25178-606:2016-12ENISO25178-606:2015 (E)4 The following parts are planned: Part 73: Defects on material measures Terms and definitions Part 600: Metrological characteristics for areal-topography measuring methods Part 607: Nominal characteristics of non-contact (imaging confocal microscopy) ins

41、trumentsDIN EN ISO 25178-606:2016-12 ENISO25178-606:2015 (E)5 IntroductionThis part of ISO 25178 is a geometrical product specification (GPS) standard and is to be regarded as a general GPS standard (see ISO/TR 14638). It influences the chain link 5 of the chain of standards on areal surface texture

42、.The ISO/GPS Masterplan given in ISO/TR 14638 gives an overview of the ISO/GPS system of which this part of ISO 25178 is a part of. The fundamental rules of ISO/GPS given in ISO 8015 apply to this part of ISO 25178 and the default decision rules given in ISO 14253-1 apply to specifications made in a

43、ccordance with this part of ISO 25178, unless otherwise indicated.For more detailed information of the relation of this part of ISO 25178 to other standards and the GPS matrix model, see Annex B.This part of ISO 25178 describes the metrological characteristics of focus variation microscopes designed

44、 for the measurement of surface topography maps.For more detailed information on the focus variation technique, see Annex A.NOTE Portions of this part of ISO 25178, particularly the informative sections, describe patented systems and methods. This information is provided only to assist users in unde

45、rstanding the operating principles of focus variation. This part of ISO 25178 is not intended to establish priority for any intellectual property, nor does it imply a license to proprietary technologies described herein.DIN EN ISO 25178-606:2016-12ENISO25178-606:2015 (E)6 1 ScopeThis part of ISO 251

46、78 defines the metrological characteristics of a particular non-contact method measuring surface texture using a focus variation (FV) sensor.2 Normative referencesThe following documents, in whole or in part, are normatively referenced in this document and are indispensable for its application. For

47、dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.ISO 3274:1996, Geometrical Product Specifications (GPS) Surface texture: Profile method Nominal characteristics of contact (stylus) instrumentsIS

48、O 4287:1997, Geometrical Product Specifications (GPS) Surface texture: Profile method Terms, definitions and surface texture parametersISO 10934-2:2007, Optics and optical instruments Vocabulary for microscopy Part 2: Advanced techniques in light microscopyISO 14978:2006, Geometrical product specifications (GPS) General concepts and requirements for GPS measuring eq