1、April 2016 English price group 14No part of this translation may be reproduced without prior permission ofDIN Deutsches Institut fr Normung e. V., Berlin. Beuth Verlag GmbH, 10772 Berlin, Germany,has the exclusive right of sale for German Standards (DIN-Normen).ICS 01.100.20; 37.020!%Q.“2469711www.d
2、in.deDIN ISO 10110-5Optics and photonics Preparation of drawings for optical elements and systems Part 5: Surface form tolerances (ISO 10110-5:2015),English translation of DIN ISO 10110-5:2016-04Optik und Photonik Erstellung von Zeichnungen fr optische Elemente und Systeme Teil 5: Oberflchenformtole
3、ranzen (ISO 10110-5:2015),Englische bersetzung von DIN ISO 10110-5:2016-04Optique et photonique Indications sur les dessins pour lments et systmes optiques Partie 5: Tolrances de forme de surface (ISO 10110-5:2015),Traduction anglaise de DIN ISO 10110-5:2016-04SupersedesDIN ISO 10110-5:2008-12www.be
4、uth.deDocument comprises 26 pagesDTranslation by DIN-Sprachendienst.In case of doubt, the German-language original shall be considered authoritative.04.16 A comma is used as the decimal marker. National foreword .3Introduction 61 Scope . 72 Normative references 73 Terms and definitions . 74 Specific
5、ation of tolerances for surface form deviation . 84.1 General . 84.2 Units . 84.3 Wavelength . 95 Indication in drawings 95.1 General . 95.2 Structure of the indication based on code number . 95.2.1 General 95.2.2 Code number . 95.2.3 Basic forms . 105.2.4 Additional forms . 125.2.5 Area 145.2.6 Loc
6、ation 145.3 Structure of the indication in tabular form . 155.4 Specification of deviations in sets of Zernike coefficients in tabular form 156 Examples of tolerance indications 166.1 Examples for indication based on code number .166.2 Examples for indication based on a table . 186.2.1 Aspheric surf
7、ace 186.2.2 XY - polynomials described surface (Cartesian coordinates) 196.2.3 -polynomials described surface (polar coordinates) .196.2.4 Example for specification of deviations in sets of Zernike coefficients in tabular form 19Annex A (informative) Relationship between power deviation tolerance an
8、d radius of curvature tolerance 21Annex B (informative) Comparison of ISO 10110-5 and ISO 14999-4 corresponding nomenclature, functions, and values22Bibliography .26Contents PageDIN ISO 10110-5:2016-04 2National Annex NA (informative) Bibliography 5National foreword This document (EN ISO 10110-5:201
9、5) has been prepared by Technical Committee ISO/TC 172 “Optics and photonics”, Subcommittee SC 1 “Fundamental standards” (Secretariat: DIN, Germany). The responsible German body involved in its preparation was DIN-Normenausschuss Feinmechanik und Optik (DIN Standards Committee Optics and Precision M
10、echanics), Working Committee NA 027-01-02 AA Grundnormen fr die Optik, Working Group Zeichnungen fr die Optik. Attention is drawn to the possibility that some elements of this document may be the subject of patent rights. DIN and/or DKE shall not be held responsible for identifying any or all such p
11、atent rights. DIN ISO 10110 consists of the following parts, under the general title Optics and photonics Preparation of drawings for optical elements and systems: Part 1: General Part 2: Material imperfections Stress birefringence Part 3: Material imperfections Bubbles and inclusions Part 4: Materi
12、al imperfections Inhomogeneity and striae Part 5: Surface form tolerances Part 6: Centring tolerances Part 7: Surface imperfection tolerances Part 8: Surface texture Roughness and waviness Part 9: Surface treatment and coating Part 10: Table representing data of optical elements and cemented assembl
13、ies Part 11: Non-toleranced data Part 12: Aspheric surfaces Part 14: Wavefront deformation tolerance Part 17: Laser irradiation damage threshold Part 19: General description of surfaces and components DIN ISO 10110-5:2016-04 3 The DIN Standards corresponding to the International Standards referred t
14、o in this document are as follows: ISO 7944 DIN EN ISO 7944 ISO 10110-1 DIN ISO 10110-1 ISO 10110-10 DIN ISO 10110-10 ISO 10110-11 DIN ISO 10110-11 ISO 10110-12 DIN ISO 10110-12 ISO 10110-14 DIN ISO 10110-14 ISO 10110-19 DIN ISO 10110-19 ISO 14999-4 DIN ISO 14999-4 Amendments This standard differs f
15、rom DIN ISO 10110-5:2008-12 as follows: a) “nanometres” have been introduced as the standard unit for specifying tolerances for certain types of surface form deviation replacing the former standard unit “fringe spacings”; b) the scope has been extended to include surfaces of higher order such as asp
16、heric, non-circular cylindric, and general surfaces; c) a specification for the deviations in tabular form has been added; d) Subclause 3.2 “sagitta deviation” has been added; e) the name of quantity A has been changed to “power deviation” (reflecting the change in ISO 14999-4). For further details,
17、 see 5.2.3, NOTE 3; f) an informative Annex B has been added giving a comparison of ISO 10110-5 and ISO 14999-4 regarding corresponding nomenclature, functions, and values. Previous editions DIN 3140: 1958-10 DIN 3140-5: 1969-06, 1978-10 DIN ISO 10110-5: 2000-02, 2008-12 DIN ISO 10110-5:2016-04 4 Na
18、tional Annex NA (informative) Bibliography DIN EN ISO 7944, Optics and optical instruments Reference wavelengths DIN ISO 10110-1, Optics and photonics Preparation of drawings for optical elements and systems Part 1: General DIN ISO 10110-10, Optics and photonics Preparation of drawings for optical e
19、lements and systems Part 10: Table representing data of optical elements and cemented assemblies DIN ISO 10110-11, Optics and optical instruments Preparation of drawings for optical elements and systems Part 11: Non-toleranced data DIN ISO 10110-12, Optics and photonics Preparation of drawings for o
20、ptical elements and systems Part 12: Aspheric surfaces DIN ISO 10110-14, Optics and photonics Preparation of drawings for optical elements and systems Part 14: Wavefront deformation tolerance DIN ISO 10110-19, Optics and photonics Preparation of drawings for optical elements and systems Part 19: Gen
21、eral description of surfaces and components DIN ISO 14999-4, Optics and photonics Interferometric measurement of optical elements and optical systems Part 4: Interpretation and evaluation of tolerances specified in ISO 10110 DIN ISO 10110-5:2016-04 5 IntroductionThis part of ISO 10110 refers to devi
22、ations in the form (shape) of an optical surface and provides a means of specifying tolerances for certain types of surface form deviation in terms of nanometres.As it is common practice to measure the surface form deviation interferometrically as the wavefront deformation caused by a single reflect
23、ion from the optical surface at normal (90 to surface) incidence, it is possible to describe a single definition of interferometric data reduction that can be used in both cases, i.e. in surface form deviation as well as wavefront deformation. As the analysis of most measurements is software based,
24、the deviations are expressed in nanometres. Interferometrical measurements, however, use the unit “fringe spacings”. One “fringe spacing” is equal to a surface form deviation that causes a deformation of the reflected wavefront of one wavelength. A value expressed in nanometres is an indication of t
25、he actual height deviation of the surface itself (and not that of the reflected wavefront).The surface under test, together with the test glass is, for example, such an interferometer. The surface form deviation is represented by the wavefront deformation which is the difference between the wavefron
26、t reflected by the actual surface and that reflected by the test glass surface.Due to the potential for confusion and misinterpretation, nanometres rather than fringe spacings are to be used. Where fringe spacings are used as units, the wavelength is also to be specified.In addition, tolerances for
27、slope deviations of surfaces can be given in units of mrad, rad, arcmin, or arcsec.DIN ISO 10110-5:2016-04 6 Optics and photonics Preparation of drawings for optical elements and systems Part 5: Surface form tolerances1 ScopeThis International Standard specifies the presentation of design and functi
28、onal requirements for optical elements and systems in technical drawings used for manufacturing and inspection.This part of ISO 10110 specifies rules for indicating the tolerance for surface form deviation.NOTE The terminology of interferometry employing the unit “fringe spacings” is widely used for
29、 the specification of tolerances. However, the usage of non-interferometric methods for testing of optical parts has recently become more important. Therefore, unlike in the earlier versions of this part of ISO 10110, nanometres shall now be the preferred and standard unit to express surface form de
30、viations. The usage of fringe spacings is still permitted given that the base wavelength is explicitly stated.This part of ISO 10110 applies to surfaces of plano, spherical, aspheric, circular and non-circular cylindric, and toric form as well as to surfaces of other non-spherical shape such as gene
31、rally described surfaces .Itdoes not apply to diffractive surfaces, Fresnel surfaces, and micro-optical surfaces.2 Normative referencesThe following referenced documents, in whole or in part, are indispensable for the application of this document. For dated references, only the edition cited applies
32、. For undated references, the latest edition of the referenced document (including any amendments) applies.ISO 10110-1, Optics and photonics Preparation of drawings for optical elements and systems Part 1: GeneralISO 10110-10, Optics and photonics Preparation of drawings for optical elements and sys
33、tems Part 10: Table representing data of optical elements and cemented assembliesISO 10110-19, Optics and photonics Preparation of drawings for optical elements and systems Part 19: General description of surfaces and componentsISO 14999-4, Optics and photonics Interferometric measurement of optical
34、 elements and optical systems Part 4: Interpretation and evaluation of tolerances specified in ISO 101103 Terms and definitionsFor the purposes of this document, the terms and definitions given in ISO 14999-4 and the following apply.3.1surface form deviationfunction representing the distances normal
35、 to the surface between a nominal optical surface form and a measured form described as a measured wavefront deformation fWDor fWD,CYas defined in ISO 14999-4Note 1 to entry: ISO 14999-4 provides the definitions for the deformation functions.N1)National footnote: “generally described surfaces” inclu
36、de freeform surfaces (see also ISO 10110-19). N1)DIN ISO 10110-5:2016-04 7 3.2sagitta deviationZfunction representing the distances along the z-axis between a nominal optical surface form and a measured formNote 1 to entry: Based on interferometric measurement, the values are available along the loc
37、al surface normal and have to be converted to deviations in the z direction in order to compare them with Z.Note 2 to entry: For simple optical surfaces, the z-axis is often also the optical axis.4 Specification of tolerances for surface form deviation4.1 GeneralThe tolerances for surface form devia
38、tion are indicated by specifying the maximum permissible values of the power deviation, irregularity, rotationally and/or translationally invariant irregularity. In addition, tolerances for root-mean-square (rms) measures of surface form deviation (rms total, rms irregularity, and rms rotationally a
39、nd/or translationally varying wavefront irregularity) and tolerances for slope deviation (max and rms values) may be specified (see ISO 14999-4 for definitions). A surface form deviation based on a sagitta table can also be given in the z-direction and as irregularity as well as slope.Both the surfa
40、ce form tolerances and the tolerances of the slope deviations can vary in different sections and different orientations (x, y) or (, ). In this case, the sampling length and the spatial sampling interval can also deviate from each other.The surface form tolerance can also be defined as coefficients
41、of a Zernike polynomial.NOTE 1 ISO 10110-14 provides a means of specifying only one single tolerance for the wavefront deformation without any need to specify tolerances for individual surfaces.NOTE 2 Methods for determining the amount of power deviation, irregularity, rotationally and/or translatio
42、nally invariant irregularity, and slope deviation of a given surface are given in ISO 14999-4.Specifying a slope deviation tolerance or rms slope is recommended for non-spherical surfaces like aspheric, non-circular cylindric, or general surfaces. Depending on the application and complexity, the per
43、missible max slope deviation might also be indicated as an absolute quantity in direction (x, y) or (, ).It is not necessary that tolerances are specified for all types of surface form deviation.All deviations of the surface but one is defined perpendicular to the theoretical surface. The sagitta de
44、viation, Z, is defined along the z-axis.4.2 UnitsThe maximum permissible values for power deviation, irregularity, and rotationally and/or translationally invariant irregularity shall be specified in units of nanometres or, if preferred, micrometers or fringe spacings. If a specification is to be gi
45、ven for one or more rms deviation types, it shall be given in units of nanometres or, if preferred, micrometers or fringe spacings.To avoid confusion, the unit “wavelength of light” should never be used for surface form deviations.When a surface is tested interferometrically by reflection at normal
46、incidence, a surface form deviation of one-half the wavelength of light causes a wavefront deviation of one full wavelength. This results in an interference pattern in which the intensity varies from one bright fringe to the next or from one dark fringe to the next, i.e. one fringe spacing is visibl
47、e. For the purpose of this part of ISO 10110, the words “fringe spacings” do not refer to the transverse distance between fringes, but to the fact that the DIN ISO 10110-5:2016-04 8 number of fringe spacings visible in the interference pattern corresponds to the number of wavelengths of wavefront deviation.NOTE 1 One fringe spacing is 1 1/2 the wavelength (in nanometres) in which a surface form deviation is actually specified.NOTE 2 The specification of a tolerance for an rms deviation type requires that the
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