DIN ISO 10110-8-2012 Optics and photonics - Preparation of drawings for optical elements and systems - Part 8 Surface texture roughness and waviness (ISO 10110-8 2010)《光学及光学仪器 光学元件.pdf

1、February 2012 Translation by DIN-Sprachendienst.English price group 12No part of this translation may be reproduced without prior permission ofDIN Deutsches Institut fr Normung e. V., Berlin. Beuth Verlag GmbH, 10772 Berlin, Germany,has the exclusive right of sale for German Standards (DIN-Normen).I

2、CS 01.100.20; 37.020!$ys“1868059www.din.deDDIN ISO 10110-8Optics and photonics Preparation of drawings for optical elements and systems Part 8: Surface texture; roughness and waviness (ISO 10110-8:2010)English translation of DIN ISO 10110-8:2012-02Optik und Photonik Erstellung von Zeichnungen fr opt

3、ische Elemente und Systeme Teil 8: Oberflchengte; Rauheit und Welligkeit (ISO 10110-8:2010)Englische bersetzung von DIN ISO 10110-8:2012-02Optique et photonique Indications sur les dessins pour lments et systmes optiques Partie 8: tat de surface; rugosit et ondulation (ISO 10110-8:2010)Traduction an

4、glaise de DIN ISO 10110-8:2012-02SupersedesDIN ISO 10110-8:2000-02www.beuth.deDocument comprises pagesIn case of doubt, the German-language original shall be considered authoritative.2302.12 A comma is used as the decimal marker. Contents Page National foreword .3 National Annex NA (informative) Bib

5、liography .3 1 Scope 5 2 2 Normative references 5 3 Terms and definitions5 4 Description of surface texture 8 4.1 General 8 4.2 Description of matt surfaces 9 4.3 Description of optically smooth surfaces .9 5 Indication in drawings .11 5.1 General 11 5.2 Indication for matt surface texture .11 5.3 I

6、ndication for optically smooth surface texture 12 5.4 Location 14 Annex A (informative) Specification of texture for optically smooth surfaces in terms of microdefects .15 Annex B (informative) Relationship between surface texture and scattering characteristic of textured surfaces .16 Annex C (infor

7、mative) Examples of indication of surface texture requirements 18 Bibliography 22 DIN ISO 10110-8:2012-02 National foreword This standard has been prepared by Technical Committee ISO/TC 172 “Optics and photonics”, Subcommittee SC 1 “Fundamental standards” (Secretariat: DIN, Germany). The responsible

8、 German body involved in its preparation was the Normenausschuss Feinmechanik und Optik (Optics and Precision Mechanics Standards Committee). DIN ISO 10110-8 is part of a series of standards dealing with the preparation of drawings for optical elements and systems (see National Annex NA, Bibliograph

9、y). DIN ISO 10110 Supplement 1 lists the differences between the DIN ISO 10110 standards series and the DIN 3140 series. The DIN Standards corresponding to the International Standards referred to in this document are as follows: ISO 1302:2002 DIN EN ISO 1302:2002-06 ISO 4287:1997 DIN EN ISO 4287:201

10、0-07 Amendments This standard differs from DIN ISO 10110-8:2000-02 as follows: a) Clause 1 “Scope” has been extended to include waviness; b) Clause 3 “Terms and definitions” has been revised, e.g. 3.3 specular optically smooth surface has been modified to read 3.3 optically smooth surface; c) indica

11、tions in drawings have been modified, e.g. for optically smooth surface textures; d) the revised version of ISO 10110-8:2010 has been adopted without any modification. Previous editions DIN 3140: 1958-10 DIN 3140-8: 1969-08, 1973-06, 1978-10 DIN ISO 10110-8: 2000-02 National Annex NA (informative) B

12、ibliography DIN EN ISO 1302:2002-06, Geometrical Product Specifications (GPS) Indication of surface texture in technical product documentation DIN EN ISO 3274, Geometrical Product Specifications (GPS) Surface texture: Profile method Nominal characteristics of contact (stylus) instruments DIN EN ISO

13、4287:2010-07, Geometrical Product Specifications (GPS) Surface texture: Profile method Terms, definitions and surface texture parameters 3 DIN ISO 10110-8:2012-02 DIN EN ISO 11562, Geometrical Product Specifications (GPS) Surface texture: Profile method Metrological characteristics of phase correct

14、filters DIN EN ISO 25178-2, Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters DIN ISO 10110-1, Optics and photonics Preparation of drawings for optical elements and systems Part 1: General DIN ISO 10110-2, Optics and optical ins

15、truments Preparation of drawings for optical elements and systems Part 2: Material imperfections Stress birefringence DIN ISO 10110-3, Optics and optical instruments Preparation of drawings for optical elements and systems Part 3: Material imperfections Bubbles and inclusions DIN ISO 10110-4, Optics

16、 and optical instruments Preparation of drawings for optical elements and systems Part 4: Material imperfections Inhomogenity and striae DIN ISO 10110-5, Optics and photonics Preparation of drawings for optical elements and systems Part 5: Surface form tolerances DIN ISO 10110-6, Optics and optical

17、instruments Preparation of drawings for optical elements and systems Part 6: Centring tolerances DIN ISO 10110-9, Optics and optical instruments Preparation of drawings for optical elements and systems Part 9: Surface treatment and coating DIN ISO 10110-10, Optics and photonics Preparation of drawin

18、gs for optical elements and systems Part 10: Table representing data of optical elements and cemented assemblies DIN ISO 10110-11, Optics and optical instruments Preparation of drawings for optical elements and systems Part 11: Non-toleranced data DIN ISO 10110-12, Optics and photonics Preparation o

19、f drawings for optical elements and systems Part 12: Aspheric surfaces DIN ISO 10110-14, Optics and photonics Preparation of drawings for optical elements and systems Part 14: Wavefront deformation tolerance DIN ISO 10110-17, Optics and photonics Preparation of drawings for optical elements and syst

20、ems Part 17: Laser irradiation damage threshold DIN ISO 10110 Supplement 1, Optics and optical instruments Preparation of drawings for optical elements and systems Comparison DIN ISO 10110 DIN 3140 Index DIN-Taschenbuch 304, Technische Produktdokumentation Erstellung von Zeichnungen fr optische Elem

21、ente und Systeme (Technical product documentation Preparation of drawings for optical elements and systems) 4 DIN ISO 10110-8:2012-02 DIN ISO 10110-7, Optics and photonics Preparation of drawings for optical elements and systems Part 7: Surface imperfection tolerances1 Scope ISO 10110 specifies the

22、presentation of design and functional requirements for optical elements in technical drawings used for manufacturing and inspection. This part of ISO 10110 specifies rules for the indication of the surface texture of optical elements. Surface texture is the characteristic of a surface that can be ef

23、fectively described with statistical methods. Typically, surface texture is associated with high spatial frequency errors (roughness) and mid-spatial frequency errors (waviness). This part of ISO 10110 is primarily intended for the specification of polished optics. This part of ISO 10110 describes a

24、 method for characterizing the residual surface that is left after detrending by subtracting the surface form. The control of the surface form is specified in ISO 10110-5 and ISO 10110-12, it is not specified in this part of ISO 10110. 2 Normative references The following referenced documents are in

25、dispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO 1302:2002, Geometrical Product Specifications (GPS) Indication of surface texture in t

26、echnical product documentation ISO 4287:1997, Geometrical Product Specifications (GPS) Surface texture: Profile method Terms, definitions and surface texture parameters 3 Terms and definitions For the purposes of this document, terms and definitions given in ISO 4287 and the following apply. 3.1 sur

27、face texture characteristic relating to the profile of an optical surface that can be effectively described with statistical methods NOTE Localized defects, known as surface imperfections, are specified in ISO 10110-7. Optics and photonics Preparation of drawings for optical elements and systems Par

28、t 8: Surface texture; roughness and waviness 5 DIN ISO 10110-8:2012-02 3.2 matt surface optical surface for which the height variation of the surface texture is not considerably smaller than the wavelength of light NOTE Matt surfaces are usually produced by brittle grinding of glass or other dielect

29、ric material, or by etching. 3.3 optically smooth surface optical surface for which the height variation of the surface texture is considerably smaller than the wavelength of light NOTE 1 Due to the smaller height variation, the amount of light scattered is small. NOTE 2 Optically smooth surfaces ar

30、e usually produced by polishing or moulding. 3.4 microdefect small irregularity in an optically smooth surface; i.e. location where the surface height differs from the average surface height by more than twice the standard deviation NOTE Usually, microdefects are pits remaining after an incomplete p

31、olish, although they can also be due to mishandling and contamination during polishing. Microdefects are of concern because they produce large-angle scattering. Microdefects are not considered surface imperfections as treated in ISO 10110-7 because they are usually reasonably uniformly distributed o

32、ver the surface and thus have a global characteristic associated with texture. 3.5 detrending fitting and removing a surface form from a set of measured data NOTE 1 Detrending is usually applied to the input data to avoid masking low-amplitude high frequency errors with the large amplitude, low freq

33、uency surface form errors. The resultant set of data points represents the residual surface. NOTE 2 For the purposes of this part of ISO 10110, the surface form used for detrending is a polynomial fit to the measured surface with an order sufficient to remove all spatial wavelengths longer than the

34、spatial bandwidth of the specification. 3.6 measured surface Zmfunction of raw surface measurement data, prior to detrending 3.7 surface form Zffit to a measured surface NOTE In a typical 2D polynomial fit to a surface, the surface polynomial can be written as a Zernike polynomial or another polynom

35、ial equation. For example in Cartesian coordinates: f11(, ) (, )pqij ijijZ xy C P xy=(1) where Pijis a polynomial function of order p,q that describes the underlying shape of the surface. 6 DIN ISO 10110-8:2012-02 3.8 residual surface Z function that is calculated by subtracting the surface form Zff

36、rom a measured surface ZmNOTE 1 For example in 2D, this is expressed mathematically as: Z(x,y) = Zm(x,y) Zf(x,y) or in polar coordinates Z(r,) = Zm(r,) Zf(r,). NOTE 2 Neglecting correction factors for instrument response, the residual surface is taken as the surface height data. 3.9 sampled surface

37、data residual surface data, Z(xm,yn), sampled on a discrete m by n grid of points (xm,yn) 3.10 evaluation length length over which the surface texture is to be evaluated NOTE Typically this is synonymous with trace length in a profile measurement. The default evaluation length is five times the uppe

38、r limit of the spatial bandwidth. 3.11 spatial wavelength peak to peak scale-length of a sinusoidal surface undulation, especially when viewed in a Fourier transform NOTE See ISO 3274 and ISO 11562 for more information. 3.12 spatial bandwidth range of surface spatial wavelengths which are to be incl

39、uded in the specification NOTE This is equivalent to the term “transmission band” as used in ISO 1302. In order to prevent confusion with spectral transmission bands, the term “spatial bandwidth” is used instead of “transmission band” in this part of ISO 10110. 3.13 root mean square roughness rms ro

40、ughness Rq square root of the mean of the square of the residual surface height in a region for short spatial wavelengths 3.14 root mean square waviness rms waviness Wq square root of the mean of the square of the residual surface height in a region for spatial wavelengths between those of surface r

41、oughness and surface form 3.15 power spectral density PSD squared magnitude of the Fourier transform of the residual surface height function along one dimension using an appropriate weighting function 3.16 surface lay symbol symbol indicating the lay of the surface profile parameter NOTE According t

42、o ISO 1302:2002, Table 2, the following symbols are used for surface lay; R (radial), C (circular), X (crossed), = (parallel to projection), (perpendicular to projection), etc. 7 DIN ISO 10110-8:2012-02 3.17 local slope difference between the heights at two points on the residual surface, divided by

43、 the distance between the points NOTE 1 The local slope is expressed in microradians. NOTE 2 In one dimension, the surface slope points can be computed directly from the surface heights by successive differences: ()()11()dnnnxZxZxx+=where n = 1,2, n1 (2) NOTE 3 This differencing calculation always r

44、esults in one less data point in the slope profile. NOTE 4 This is the equivalent of the property symbolized by dZ/dX in ISO 4287:1997, but generalized so that it can be calculated along any direction or lay and in any coordinate system. 3.18 root mean square slope rms slope Rq square root of the me

45、an of the square of the local slopes in a region on a residual surface NOTE The root mean square slope is expressed in microradians. 4 Description of surface texture 4.1 General Surface texture is a global statistical characteristic of the profile of the optical surface, and it is assumed for this p

46、art of ISO 10110 that the character and magnitude of the texture in any one area of the surface is similar to that in all other areas of the same surface. This assumption is made so that a measurement made in one part of an indicated test region or surface may be considered representative of the ent

47、ire test region or surface. Unless stated otherwise, the indication of surface texture applies to surfaces before coating. This is an exception to the general statement in ISO 10110-1:2006, Clause 3, paragraph 1. Materials having a crystal structure and production processes such as diamond turning c

48、an give rise to non-random surface texture. Care should be used in applying statistical surface properties for surface texture with these types of surfaces. Because the magnitude of the measured roughness is a function of the spatial wavelengths considered, this part of ISO 10110 provides for the indication of the spatial bandwidth. This part of ISO 10110 makes use of the terminology of profilometry, as specified in ISO 4287. Altho