DIN ISO 14999-4-2016 Optics and photonics - Interferometric measurement of optical elements and optical systems - Part 4 Interpretation and evaluation of tolerances specified in IS.pdf

1、April 2016 English price group 15No part of this translation may be reproduced without prior permission ofDIN Deutsches Institut fr Normung e. V., Berlin. Beuth Verlag GmbH, 10772 Berlin, Germany,has the exclusive right of sale for German Standards (DIN-Normen).ICS 37.020!%R0“2471327www.din.deDIN IS

2、O 14999-4Optics and photonics Interferometric measurement of optical elements and optical systems Part 4: Interpretation and evaluation of tolerances specified in ISO 10110 (ISO 14999-4:2015),English translation of DIN ISO 14999-4:2016-04Optik und Photonik Interferometrische Messung von optischen El

3、ementen und Systemen Teil 4: Interpretation und Beurteilung der Toleranzen nach ISO 10110 (ISO 14999-4:2015),Englische bersetzung von DIN ISO 14999-4:2016-04Optique et photonique Mesurage interfromtrique de composants et de systmes optiques Partie 4: Directives pour lvaluation des tolrances spcifies

4、 dans lISO 10110 (ISO 14999-4:2015),Traduction anglaise de DIN ISO 14999-4:2016-04SupersedesDIN ISO 14999-4:2008-12www.beuth.deDocument comprises 32 pagesDTranslation by DIN-Sprachendienst.In case of doubt, the German-language original shall be considered authoritative.04.16 A comma is used as the d

5、ecimal marker. National foreword .3Introduction 51 Scope .62 Normative references 63 Terms and definitions .63.1 Mathematical definitions . 63.2 Definition of optical functions . 73.3 Definition of values related to the optical functions defined in 3.2 . 83.4 Definition of Zernike polynomials . 123.

6、5 Definitions of functions and terms for tolerancing the slope deviation . 123.6 Definitions of values for tolerancing the slope deviation 134 Relating interferometric measurements to surface form deviation or transmitted wavefront deformation .164.1 Test areas 164.2 Quantities . 164.3 Single-pass t

7、ransmitted wavefront deformation 164.4 Double-pass transmitted wavefront deformation .164.5 Surface form deviation 164.6 Conversion to other wavelengths 165 Representation of the measured wavefront deviation as Zernike coefficients 176 Tolerancing of the slope deviation 176.1 One-dimensional measure

8、ment of the slope deviation 176.2 Two-dimensional measurement of the slope deviation .20Annex A (normative) Visual interferogram analysis 21Annex B (normative) Zernike polynomials 29Bibliography .32Contents PageDIN ISO 14999-4:2016-04 2National Annex NA (informative) Bibliography 4National foreword

9、This document (ISO 14999-4:2015) has been prepared by Technical Committee ISO/TC 172 “Optics and photonics”, Subcommittee SC 1 “Fundamental standards” (Secretariat: DIN, Germany). The responsible German body involved in its preparation was DIN-Normenausschuss Feinmechanik und Optik (DIN Standards Co

10、mmittee Optics and Precision Mechanics), Working Committee NA 027-01-02 AA Grundnormen fr die Optik, Working Group Messverfahren fr die Optik. Attention is drawn to the possibility that some elements of this document may be the subject of patent rights. DIN and/or DKE shall not be held responsible f

11、or identifying any or all such patent rights. ISO 14999 consists of the following parts, under the general title Optics and photonics null Interferometric measurement of optical elements and optical systems: Part 1: Terms, definitions and fundamental relationships Part 2: Measurement and evaluation

12、techniques Part 3: Calibration and validation of interferometric test equipment and measurements Part 4: Interpretation and evaluation of tolerances specified in ISO 10110 Parts 1, 2 and 3 of the standard have been published as ISO Technical Reports. The DIN Standards corresponding to the Internatio

13、nal Standards referred to in Clause 2 of this standard are as follows: ISO 10110-5 DIN ISO 10110-5 ISO 10110-14 DIN ISO 10110-14 Amendments This standard differs from DIN ISO 14999-4:2008-12 as follows: a) clauses for tolerancing cylindrical and torical wavefronts have been added; b) a representatio

14、n of the measured wavefront deformation in terms of Zernike coefficients has been added; c) clauses for tolerancing the slope deviation have been added; d) the name of quantity A has been changed to “power deviation”. For further details, see 3.3.1, Note 2 to entry. Previous editions DIN 3140: 1958-

15、10 DIN 3140-5: 1969-06, 1978-10 DIN ISO 10110-5: 2000-02 DIN ISO 10110-14: 2004-02 DIN ISO 14999-4: 2008-12 DIN ISO 14999-4:2016-04 3 National Annex NA (informative) Bibliography DIN EN ISO 4287, Geometrical product specifications (GPS) Surface texture: Profile method Terms, definitions and surface

16、texture parameters (ISO 4287:1997 + Cor 1:1998 + Cor 2:2005 + Amd 1:2009) DIN EN ISO 25178 (all parts), Geometrical product specifications (GPS) Surface texture: Areal DIN ISO 10110-5, Optics and photonics Preparation of drawings for optical elements and systems Part 5: Surface form tolerances DIN I

17、SO 10110-14, Optics and photonics Preparation of drawings for optical elements and systems Part 14: Wavefront deformation tolerance DIN ISO 14999-4:2016-04 4 IntroductionThis part of ISO 14999 provides a theoretical frame upon which are based indications from ISO 10110-5 and/or ISO 10110-14.A table

18、listing the corresponding nomenclature, functions, and values used in ISO 10110-5 and ISO 14999-4 is given in ISO 10110-5, Annex B.ISO 10110-5 refers to deformations in the form of an optical surface and provides a means forspecifying tolerances for certain types of surface deformations in terms of

19、“nanometers”.ISO 10110-14 refers to deformations of a wavefront transmitted once through an optical system and provides a means of specifying similar deformation types in terms of optical “wavelengths”.As it is common practice to measure the surface form deviation interferometrically as the wavefron

20、t deformation caused by a single reflection from the optical surface at normal (90 to surface) incidence, it is possible to describe a single definition of interferometric data reduction that can be used in both cases. One “fringe spacing” (as defined in ISO 10110-5) is equal to a surface deformatio

21、n that causes a deformation of the reflected wavefront of one wavelength.Certain scaling factors apply depending on the type of interferometric arrangement, e.g. whether the test object is being measured in single pass or double pass.Due to the potential for confusion and misinterpretation, units of

22、 nanometres rather than units of “fringe spacings” or “wavelengths” are to be used for the value of surface form deviation or the value of wavefront deformation, where possible. Where “fringe spacings” or “wavelengths” are used as units, the wavelength is also to be specified.N1)National footnote: T

23、he German term “Formabweichung einer optischen Oberflche” was previously referred to as “Passfehler”. N1)DIN ISO 14999-4:2016-04 5 Optics and photonics Interferometric measurement of optical elements and optical systems Part 4: Interpretation and evaluation of tolerances specified in ISO 101101 Scop

24、eThis part of ISO 14999 applies to the interpretation of interferometric data relating to the measurement of optical elements.This part of ISO 14999 gives definitions of the optical functions and values specified in the preparation of drawings for optical elements and systems, made in accordance wit

25、h ISO 10110-5 and/or ISO 10110-14 for which the corresponding nomenclature, functions, and values are listed in ISO 10110-5, Annex B. It also provides guidance for their interferometric evaluation by visual analysis.2 Normative referencesThe following documents, in whole or in part, are normatively

26、referenced in this document and are indispensable for its application. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.ISO 10110-5, Optics and photonics Preparation of drawings for optical

27、elements and systems Part 5: Surface form tolerancesISO 10110-14, Optics and photonics Preparation of drawings for optical elements and systems Part 14: Wavefront deformation toleranceISO/TR 14999-2, Optics and photonics Interferometric measurement of optical elements and optical systems Part 2: Mea

28、surement and evaluation techniques3 Terms and definitions3.1 Mathematical definitions3.1.1functionmathematical description of the measured wavefront deformation and its decomposition into componentsNote 1 to entry: The functions used in this part of ISO 14999 are scalar functions.3.1.2peak-to-valley

29、 valuePV ( f )maximum value of the function within the region of interest minus the minimum value of the function within the region of interest3.1.3root mean square valuerms ( f )value given by either of the following integral expressions:DIN ISO 14999-4:2016-04 6 a) Cartesian variables x and yrms (

30、)ddddwhereffxyxyxyxyxyx=(),212yyA()b) Polar variables r and rms (ddddwhereffr rrrrrr),=()212rA,()Note 1 to entry: This integral may be approximated by the standard deviation if the usage includes removal of the mean value of the wavefront (piston) and provided that the measurement resolution is spec

31、ified and is sufficient.3.2 Definition of optical functionsNOTE 1 For the relationship of interferometric measurements to surface form deviation and transmitted wavefront deformation, see Clause 4.NOTE 2 The optical functions given in this subclause are used either for rotationally invariant (spheri

32、cal or aspherical) wavefronts (depicted in Figure 1) or cylindrical wavefronts (depicted in Figure 2). The functions corresponding to each are grouped together; the functions for rotationally invariant wavefronts first and the functions for cylindrical wavefronts follow. The functions for rotational

33、ly invariant wavefronts are unchanged with respect to ISO 14999-4:2007.NOTE 3 The term cylindrical waveform is used here as synonym for circular cylindrical, non-circular cylindrical, and torical wavefronts. The functions can also be applied for general wavefronts that are close to cylindrical or to

34、rical ones.3.2.1measured wavefront deformationfMWDfunction representing the distances between the measured wavefront and the nominal theoretical wavefront, measured normal to the nominal theoretical wavefrontNote 1 to entry: See Figure 1 a) and Figure 2 a).Note 2 to entry: In case of tactile measure

35、ment where the measurement values are usually taken along z-direction, the measurement values have to be converted to the measured wavefront deformation fMWD(distance perpendicular to the theoretical surface).3.2.2tiltfTLTplane function representing the best (in the sense of the rms fit) linear appr

36、oximation to the measured wavefront deformation fMWDNote 1 to entry: See Figure 1 b) and Figure 2 b).3.2.3twist-function describing rotational misalignment for cylindrical wavefrontsfTWSTfunction of the saddle form used for eliminating rotational misalignmentfxyconst xyTWST(,).*=DIN ISO 14999-4:2016

37、-04 7 Note 1 to entry: See Figure 2 c).Note 2 to entry: A rotational misalignment (twist) of the cylindrical axes of the test wave and the surface (respectively, the object under test and the optics generating or compensating the cylindrical or torical phase front) results in an additive term in the

38、 form of a saddle. This term could be eliminated or minimized by careful alignment of the setup. In most practical cases, it is more useful to eliminate this term by removing it mathematically.3.2.4wavefront deformationfWDfunction resulting after subtraction of the tilt fTLTfrom the measured wavefro

39、nt deformation fMWDff fWD MWDTLT=Note 1 to entry: See Figure 1 c).3.2.5wavefront deformation for cylindrical wavefrontsfWD,CYfunction resulting after subtraction of the tilt fTLTand fTWSTfrom the measured wavefront deformation, fMWDfxyf xy fxyf xyWD,CYMWD TLTTWST(,)(,) (,)(,)=Note 1 to entry: See Fi

40、gure 2 d).3.2.6wavefront spherical approximationfWSfunction of spherical form that best (in the sense of the rms fit) approximates the wavefront deformation fWDNote 1 to entry: See Figure 1 d).3.2.7wavefront circular cylindrical approximationfWC, x, fWC, yfunctions of cylindrical form that best (in

41、the sense of the rms fit) approximate the wavefront deformation fWD,CYfxyR RxconstWC,x x,fitx,fit(,).= +22fxyR RyconstWC,y y,fity,fit(, = +22Note 1 to entry: See Figure 2 e) and Figure 2 f).3.2.8wavefront irregularityfWIfunction resulting after subtraction of the wavefront spherical approximation fW

42、Sfrom the wavefront deformation fWDff fWI WD WS=Note 1 to entry: See Figure 1 e).DIN ISO 14999-4:2016-04 8 3.2.9wavefront irregularity for cylindrical wavefrontsfWI, CYfunction resulting after subtraction of the wavefront circular cylindrical approximations fWC, xand fWC, yfxyf xy fxyf xyWI, CY WD,

43、CY WC,xWC,y(,)(,) (,)(,)=Note 1 to entry: See Figure 2 g).3.2.10wavefront aspheric approximationfWRIrotationally invariant aspherical function that best (in the sense of the rms fit) approximates the wavefront irregularity, fWINote 1 to entry: See Figure 1 f).3.2.11wavefront non-circular cylindrical

44、 approximationfWTI, x, fWTI, ytranslationally invariant non-circular cylindrical function that best (in the sense of the rms fit) approximates the wavefront irregularity for cylindrical wavefronts, fWI, CYin x and y direction, respectivelyfxyf xWTI,xWTI,x(,)=()fxyf yWTI,yWTI,y(,)=()Note 1 to entry:

45、See Figure 2 h) and Figure 2 i).3.2.12rotationally varying wavefront deviationfWRVfunction resulting after subtraction of the wavefront aspheric approximation fWRIfrom the wavefront irregularity fWIfffWRVWIWRI=Note 1 to entry: See Figure 1 g).3.2.13translationally varying wavefront deviationfWTVfunc

46、tion resulting after subtraction of the wavefront non-circular cylindrical approximation fWTI, xand fWTI, yff ffWTVWI,CY WTI,xWTI,y=Note 1 to entry: See Figure 2 j).3.3 Definition of values related to the optical functions defined in 3.23.3.1power deviationPV ( fWS)peak-to-valley value of the approx

47、imating spherical wavefrontNote 1 to entry: PV (fWS) corresponds to the quantity A in ISO 10110-5 and ISO 10110-14.DIN ISO 14999-4:2016-04 9 Note 2 to entry: Previous versions of this part of ISO 14999 used the term sagitta deviation to represent this value. For better clarity, the term sagitta deviation has been replaced with power deviation to more accurately reflect the distance normal to a reference surface, whereas sagitta deviat