EN 60204-33-2011 en Safety of machinery - Electrical equipment of machines - Part 33 Requirements for semiconductor fabrication equipment《机械安全性 机器电动设备 第33部分 半导体制造设备要求》.pdf

1、raising standards worldwideNO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAWBSI Standards PublicationSafety of machinery Electrical equipment of machinesPart 33: Requirements for semiconductor fabrication equipmentBS EN 60204-33:2011National forewordThis British Standard is the

2、UK implementation of EN 60204-33:2011. It isidentical to IEC 60204-33:2010.The UK participation in its preparation was entrusted to Technical CommitteeMCE/3, Safeguarding of machinery.A list of organizations represented on this committee can be obtained onrequest to its secretary.This publication do

3、es not purport to include all the necessary provisions of acontract. Users are responsible for its correct application. BSI 2011ISBN 978 0 580 57313 2ICS 13.110; 25.040.30; 29.020Compliance with a British Standard cannot confer immunity fromlegal obligations.This British Standard was published under

4、 the authority of the StandardsPolicy and Strategy Committee on 31 August 2011.Amendments/corrigenda issued since publicationDate Text affectedBRITISH STANDARDBS EN 60204-33:2011The CENELEC common modifications have been implemented at the appropriate places in the text. The start and finish of each

5、 common modification is indicated in the text by tags .EUROPEAN STANDARD EN 60204-33 NORME EUROPENNE EUROPISCHE NORM March 2011 CENELEC European Committee for Electrotechnical Standardization Comit Europen de Normalisation Electrotechnique Europisches Komitee fr Elektrotechnische Normung Management

6、Centre: Avenue Marnix 17, B - 1000 Brussels 2011 CENELEC - All rights of exploitation in any form and by any means reserved worldwide for CENELEC members. Ref. No. EN 60204-33:2011 E ICS 13.110; 25.040.30; 29.020 English version Safety of machinery - Electrical equipment of machines - Part 33: Requi

7、rements for semiconductor fabrication equipment (IEC 60204-33:2009, modified) Scurit des machines - Equipement lectrique des machines - Partie 33: Exigences pour les quipements de fabrication des semi-conducteurs (CEI 60204-33:2009, modifie) Sicherheit von Maschinen - Elektrische Ausrstungen von Mas

8、chinen - Teil 33: Anforderungen an Fertigungsausrstungen fr Halbleiter (IEC 60204-33:2009, modifiziert) This European Standard was approved by CENELEC on 2011-02-28. CENELEC members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European

9、Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the Central Secretariat or to any CENELEC member. This European Standard exists in three official versions (English,

10、 French, German). A version in any other language made by translation under the responsibility of a CENELEC member into its own language and notified to the Central Secretariat has the same status as the official versions. CENELEC members are the national electrotechnical committees of Austria, Belg

11、ium, Bulgaria, Croatia, Cyprus, the Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and the United Kingdom. F

12、oreword The text of the International Standard IEC 60204-33:2009, prepared by IEC TC 44, Safety of machinery - Electrotechnical aspects, together with common modifications prepared by the Technical Committee CENELEC TC 44X, Safety of machinery: electrotechnical aspects, was submitted to the formal v

13、ote and was approved by CENELEC as EN 60204-33 on 2011-02-28. The following dates were fixed: latest date by which the EN has to be implemented at national level by publication of an identical national standard or by endorsement (dop) 2012-02-28 latest date by which the national standards conflictin

14、g with the EN have to be withdrawn (dow) 2014-02-28 This European Standard has been prepared under Mandate M/396 given to CENELEC by the European Commission and the European Free Trade Association and covers essential requirements of EC Directive 2006/42/EC. See Annex ZZ. Annexes ZA and ZZ have been

15、 added by CENELEC. _ Endorsement notice The text of the International Standard IEC 60204-33:2009 was approved by CENELEC as a European Standard with agreed common modifications as given below. 2 BS EN 60204-33:2011EN 60204-33:2011 (E)Annex ZA (normative) Normative references to international publica

16、tions with their corresponding European publications The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) appli

17、es. NOTE Where an International Publication has been modified by common modifications, indicated by (mod), the relevant EN/HD applies. Publication Year Title EN/HD Year IEC 60034-11 2004 Rotating electrical machines - Part 11: Thermal protection EN 60034-11 2004 IEC 60038 - IEC standard voltages - -

18、 IEC 60073 2002 Basic and safety principles for man-machine interface, marking and identification - Coding principles for indicators and actuators EN 60073 2002 IEC 60364-4-41 (mod) 2005 Low-voltage electrical installations - Part 4-41: Protection for safety - Protection against electric shock HD 60

19、364-4-41 + corr. July 2007 2007 IEC 60364-4-43 (mod) 2008 Low voltage electrical installations - Part 4-43: Protection for safety - Protection against overcurrent HD 60364-4-43 2010 IEC 60364-6 (mod) 2006 Low voltage electrical installations - Part 6: Verification HD 60364-6 2007 IEC 60417 Data-base

20、 Graphical symbols for use on equipment - - IEC 60445 (mod) 2006 Basic and safety principles for man-machine interface, marking and identification - Identification of equipment terminals and conductor terminations EN 60445 2007 IEC 60446 2007 Basic and safety principles for man-machine interface, ma

21、rking and identification - Identification of conductors by colours or alphanumerics EN 60446 2007 IEC 60447 2004 Basic and safety principles for man-machine interface, marking and identification - Actuating principles EN 60447 2004 IEC 60529 1989 Degrees of protection provided by enclosures (IP Code

22、) EN 60529 + corr. May 1991 1993 IEC 60617 Data-base Graphical symbols for diagrams - - IEC 60695-11-10 1999 Fire hazard testing - Part 11-10: Test flames - 50 W horizontal and vertical flame test methods EN 60695-11-10 1999 IEC 60950-1 (mod) 2005 Information technology equipment - Safety - Part 1:

23、General requirements EN 60950-1 + A11 2006 2009 3 BS EN 60204-33:2011EN 60204-33:2011 (E)Publication Year Title EN/HD Year IEC 61010-1 2001 Safety requirements for electrical equipment for measurement, control, and laboratory use - Part 1: General requirements EN 61010-1 + corr. June 2001 2002 IEC 6

24、1032 1997 Protection of persons and equipment by enclosures - Probes for verification EN 61032 1998 IEC 61310 series Safety of machinery - Indication, marking and actuation EN 61310 series IEC 61310-1 2007 Safety of machinery - Indication, marking and actuation - Part 1: Requirements for visual, aco

25、ustic and tactile signals EN 61310-1 2008 IEC 61508 series Functional safety of electrical/electronic/programmable electronic safety-related systems EN 61508 series IEC 61557-3 2007 Electrical safety in low voltage distribution systems up to 1 000 V a.c. and 1 500 V d.c. - Equipment for testing, mea

26、suring or monitoring of protective measures - Part 3: Loop impedance EN 61557-3 2007 IEC 61558-1 2005 Safety of power transformers, power supplies, reactors and similar products - Part 1: General requirements and tests EN 61558-1 + corr. August 2005 2006 IEC 61558-2-6 2009 Safety of transformers, re

27、actors, power supply units and similar products for supply voltages up to 1 100 V - Part 2-6: Particular requirements and tests for safety isolating transformers and power supply units incorporating safety isolating transformers EN 61558-2-6 2009 IEC 61800-5-1 2007 Adjustable speed electrical power

28、drive systems - Part 5-1: Safety requirements - Electrical, thermal and energy EN 61800-5-1 2007 IEC 62061 2005 Safety of machinery - Functional safety of safety-related electrical, electronic and programmable electronic control systems EN 62061 + corr. February 2005 2010 ISO 12100-2 2003 Safety of

29、machinery - Basic concepts, general principles for design - Part 2: Technical principles EN ISO 12100-2 2003 ISO 13849 series Safety of machinery - Safety-related parts of control systems EN ISO 13849 series ISO 13849-1 1)1999 Safety of machinery - Safety-related parts of control systems - Part 1: G

30、eneral principles for design - - 1)Superseded by ISO 13849-1:2006 “Safety of machinery - Safety-related parts of control systems - Part 1: General principles for design”. 4 BS EN 60204-33:2011EN 60204-33:2011 (E)Publication Year Title EN/HD Year ISO 13851 2002 Safety of machinery - Two-hand control

31、devices - Functional aspects and design principles - - 5 BS EN 60204-33:2011EN 60204-33:2011 (E)Annex ZZ (informative) Coverage of Essential Requirements of EC Directives This European Standard has been prepared under a mandate given to CENELEC by the European Commission and the European Free Trade

32、Association and within its scope the standard covers only the following essential requirements out of those given in Annex I of EC Directive 2006/42/EC: 1.2.1 1.2.2 1.2.3 1.2.4.1 1.2.4.3 1.2.4.4 1.2.6 1.5.1 1.5.4 1.6.3 (for isolation of electrical supplies) 1.6.4 (for access to electrical equipment)

33、 1.7.1.1 1.7.1.2 1.7.2 (for residual risks of an electrical nature) 1.7.4.2(e) Compliance with this standard provides one means of conformity with the specified essential requirements of the Directive concerned. WARNING: Other requirements and other EC Directives may be applicable to the products fa

34、lling within the scope of this standard. 6 BS EN 60204-33:2011EN 60204-33:2011 (E)CONTENTS INTRODUCTION. 3H15 1 Scope. 4H16 2 Normative references 5H17 3 Terms and definitions . 6H18 4 General requirements . 7H28 4.1 General considerations 8H28 4.2 Selection of electrical equipment 9H29 4.3 Electric

35、al supply 10H29 4.3.1 General . 11H29 4.4 Physical environment and operating conditions 12H29 4.4.1 General . 13H29 4.4.2 Contaminants 14H30 4.4.3 Ionizing and non-ionizing radiation . 15H30 4.4.4 Vibration, shock, and bump 16H30 4.5 Transportation and storage 17H30 4.6 Provisions for handling 138H

36、30 4.7 Installation. 19H30 5 Incoming supply conductor terminations and devices for disconnecting and switching off . 20H30 5.1 Incoming supply conductor terminations. 21H30 5.1.1 General . 232H 30 5.1.2 Termination of the supply conductors . 23H30 5.1.3 Neutral conductor 234H 31 5.1.4 Terminal iden

37、tification 235H 31 5.2 Terminal for connection to the external protective earthing system . 236H 31 5.3 Supply disconnecting (isolating) device 27H31 5.3.1 General . 28H31 5.3.2 Type 29H32 5.3.3 Requirements 30H32 5.3.4 Operating means . 31H33 5.3.5 Supply disconnecting device mounting . 32H33 5.3.6

38、 Supply disconnecting device door interlock. 33H33 5.3.7 UPS disconnection. 34H33 5.4 Additional disconnecting devices 35H34 5.5 Protection against unauthorized, inadvertent and/or mistaken connection of plug/socket combination 36H34 6 Protection against electric shock. 37H34 6.1 General . 38H34 6.2

39、 Protection against direct contact 39H34 6.2.1 General . 40H34 6.2.2 Protection by enclosures 41H35 6.2.3 Protection by insulation of live parts . 42H35 6.2.4 Protection against residual voltages . 43H35 6.3 Protection against indirect contact . 44H36 6.3.1 General . 45H36 6.3.2 Prevention of the oc

40、currence of a touch voltage . 46H36 7 BS EN 60204-33:2011EN 60204-33:2011 (E)6.3.3 Protection by automatic disconnection of supply. 47H37 6.4 Protection by the use of PELV 48H38 6.4.1 General requirements 49H38 6.4.2 Sources for PELV 50H38 6.4.3 Design to minimise risks of live working . 51H39 6.5 P

41、rotection of skilled persons and instructed persons against inadvertent contact with hazardous-live-parts . 52H39 6.5.1 General . 53H39 6.5.2 Obstacles 54H39 6.5.3 Probe holes . 55H39 7 Protection of equipment 56H39 7.1 General . 57H39 7.2 Overcurrent protection . 540 8H40 7.2.1 General . 59H40 7.2.

42、2 Supply conductors . 60H40 7.2.3 Neutral conductor protection 61H40 7.2.4 Socket outlets and their associated conductors 62H40 7.2.5 Lighting circuits H40 7.2.6 Transformers. 64H40 7.2.7 Location of overcurrent protective devices 65H40 7.2.8 Overcurrent protective devices. 66H41 7.2.9 Rating and se

43、tting of overcurrent protective devices. 67H41 7.3 Protection of motors against overheating . 648H 42 7.3.1 General . 69H42 7.3.2 Overload protection 70H43 7.3.3 Over-temperature protection 71H43 7.4 Motor overspeed protection 72H43 7.5 Abnormal temperature detection 73H43 7.6 Protection against sup

44、ply interruption or voltage reduction and subsequent restoration . 74H44 7.7 Earth fault/residual current protection. 75H44 7.8 Phase sequence protection 76H44 7.9 Protection against overvoltages due to lightning and to switching surges 77H44 7.10 Electrolytic capacitors 78H44 8 Equipotential bondin

45、g . 79H45 8.1 General . 80H45 8.2 Protective bonding circuit. 81H47 8.2.1 General . 82H47 8.2.2 Protective conductors 83H48 8.2.3 Continuity of the protective bonding circuit . 84H48 8.2.4 Exclusion of switching devices from the protective bonding circuit 85H49 8.2.5 Protective conductor connecting

46、points 86H49 8.2.6 Mobile machines 87H49 8.2.7 Limitation of touch current on cord and plug connected equipment . 88H50 8.3 Functional bonding 89H50 8.4 Measures to limit the effects of high leakage current 90H50 9 Control circuits, emergency off (EMO), and protective interlock circuits . 91H50 9.1

47、Control circuits 92H50 9.1.1 Control circuit supply . 93H50 8 BS EN 60204-33:2011EN 60204-33:2011 (E)9.1.2 DC circuits derived from an a.c. supply 94H50 9.1.3 Start functions . 95H50 9.1.4 Stop functions 96H51 9.1.5 Operating modes . 97H51 9.1.6 Multiple control stations . 98H51 9.2 Emergency Off (E

48、MO) . 99H51 9.2.1 General . 100H51 9.2.2 Circuits to be de-energized 101H52 9.2.3 Requirements for EMO circuits. 102H52 9.3 Operations other than emergency off . 103H52 9.3.1 General . 104H52 9.3.2 Start 105H52 9.3.3 Stop. 106H53 9.3.4 Other control functions. 107H53 9.3.5 Cableless control . 108H54

49、 9.4 Protective interlocks 109H54 9.4.1 General . 110H54 9.4.2 Protective interlock circuit design . 111H54 9.5 Suspension of safety functions and/or protective measures 112H56 10 Operator interfaces. 113H56 10.1 General . 114H56 10.1.1 General device requirements . 115H56 10.1.2 Location and mounting. 116H56 10.1.3 Degree of protection 117H56 10.1.4 Portable and pendant control stations 118H57 10.2 Push-buttons . 119H57 10.2.1 Colours 120H57 10.2.2 Markings 121H58 10.3 Indicator lights. 122H58 10.