1、BRITISH STANDARD Gas cylinders Gas cylinder valve connections ror use in the microelectronics industry Part 1 : Outlet connections The European Standard EN IS0 10692-1:2001 has the status ofa British Standard ICs 23.020.30 BS EN IS0 10692- 1 1200 1 Wk present to the responsible international/Europea
2、n committee any enquiries on the interpretation, or proposals for change, and keep the UK interests informed; monitor related international and European developments and promulgate them in the UK. - A list of organizations represented on this committee can be obtained on request to its secretary. Cr
3、 oss-r e fer enc e s Attention is drawn to the fact that CEN and CENLEC Standards normally annex which lists normative references to international publications. The British Standards which implement these international or European publications may be found in the BSI Standards Catalogue under the se
4、ction entitled “International Standards Correspondence Index”, or by using the “Find” facility of the BSI Standards Electronic Catalogue. A British Standard does not purport to include all the necessary provisions of a contract. Users of British Standards are responsible for their correct applicatio
5、n. Compliance with a British Standard does not of itself confer immunity from legal obligations. Summary of pages This document comprises a front cover, an inside front cover, the EN IS0 title page, the EN IS0 foreword page, the IS0 title page, pages ii to iv, pages 1 to 17, a blank page, the Annex
6、ZA page and a back cover. The BSI copyright date displayed in this document indicates when the document was last issued. This British Standard, having been prepared under the direction of the Engineering Sector Policy and Strategy- Committee. was vublished Amendments issued since publication under t
7、he authority of the O BSI 12 September 2001 ISBN O 580 37522 6 EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN IS0 10692-1 August 2001 ICs 23.020.30 English version Gas cylinders - Gas cylinder valve connections for use in the microelectronics industry - Part 1 : Outlet connections (IS0 10692-1
8、 12001) Bouteilles gaz - Raccords pour robinets de bouteilles gaz pour lindustrie de la microledronique - Partie 1: Raccords de sortie (IS0 10692-1:2001) Ortsbewegliche Gasflaschen - Ventilanschlsse fr die Anwendung in der Mikroelektonik - Teil 1 : Seitenanschlsse (IS0 10692-1:2001) This European St
9、andard was approved by CEN on 16 June 2001. CEN members are bound to comply with the CENKENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning s
10、uch national standards may be obtained on application to the Management Centre or to any CEN member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language
11、and notified to the Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Czech Republic, Denmark, Finland, France, Germany, Greece, Iceland, Ireland, Italy, Luxembourg, Netherlands, Norway, Portugal, Spain, Sweden, Switzer
12、land and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION EUROPISCHES KOMITEE FR NORMUNG COMIT EUROPEN DE NORMALISATION Management Centre: rue de Stassart, 36 B-1050 Brussels O 2001 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No
13、. EN IS0 10692-1:2001 E EN IS0 10692-12001 Foreword The text of the International Standard IS0 10692-1 :2001 has been prepared by Technical Committee ISO/TC 58 “Gas cylinders“ in collaboration with Technical Committee CEN/TC 23 “Transportable gas cylinders“, the secretariat of which is held by BSI.
14、This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by February 2002, and conflicting national standards shall be withdrawn at the latest by February 2002. According to the CENKENELEC Internal Regulation
15、s, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Czech Republic, Denmark, Finland, France, Germany, Greece, Iceland, Ireland, Italy, Luxembourg, Netherlands, Norway, Portugal, Spain, Sweden, Switzerland and the United
16、 Kingdom. Endorsement notice The text of the International Standard IS0 10692-1 :2001 was approved by CEN as a European Standard without any modification. 4 NOTE: Normative references to International Standards are listed in annex ZA (normative). 2 INTERNATIONAL STANDARD IS0 10692-1 First edition 20
17、01-08-15 Gas cylinders - Gas cylinder valve connections for use in the micro-electronics industry - Part 1: Outlet connections Boufeilles gaz - Raccords pour robinefs de boufeilles gaz pour Iindusfrie de la microlecfronique - Partie 1: Raccords de sortie Reference number IS0 10692-1:2001(E) os1 1002
18、 II EN IS0 10692-1:20bd Contents Page Foreword . iv 1 Scope 1 2 Normative references 1 3 General requirements 1 4 General design . 2 5 Dimensions . 2 6 630 and 640 series connections . 2 7 710 and 720 series connections . 6 8 Components common to both series 10 9 Thread profile . 12 10 Allocation of
19、 outlet to single gases listed in annex A . 12 11 Allocation of other gases and of gas mixtures to outlets . 13 Annex A (normative) Mandatory outlet allocations for selected single gases . 14 Annex B (informative) Examples showing how to use the information given in clauses 10 and 11 16 Bibliography
20、 17 Annex ZA (normative) Normative references to international publications with their relevant European publications Inside back cover . 111 EN IS0 10692-f:dOOl Foreword IS0 (the International Organization for Standardization) is a worldwide federation of national standards bodies (IS0 member bodie
21、s). The work of preparing International Standards is normally carried out through IS0 technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and n
22、on-governmental, in liaison with ISO, also take part in the work. IS0 collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Pa
23、rt 3. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of
24、this part of IS0 10692 may be the subject of patent rights. IS0 shall not be held responsible for identifying any or all such patent rights. International Standard IS0 10692-1 was prepared by Technical Committee ISO/TC 58, Gas cylinders, Subcommittee SC 2, Cylinder fiffings. IS0 10692 consists of th
25、e following parts, under the general title Gas cylinders - Gas cylinder valve connecfions for use in fhe micro-elecfronics indusfry : - Par 1: Ouflef connecfions - Par 2: Specificafion and type fesfing for valve fo cylinder connecfions Annex A forms a normative part of this part of IS0 10692. Annex
26、B is for information only. iv EN IS0 10692-12001 Gas cylinders - Gas cylinder valve connections for use in the mi cro-elect ro n ics i nd ust ry - Part 1: Outlet connections 1 Scope This part of IS0 10692 applies to the outlet connections of gas cylinder valves for gases and gas mixtures and concern
27、s special requirements where the highest levels of cleanliness and freedom from particles are demanded for the manufacture of microelectronic components or similar applications. 2 Normative references The following normative documents contain provisions which, through reference in this text, constit
28、ute provisions of this part of IS0 10692. For dated references, subsequent amendments to, or revisions of, any of these publications do not apply. However, parties to agreements based on this part of IS0 10692 are encouraged to investigate the possibility of applying the most recent editions of the
29、normative documents indicated below. For undated references, the latest edition of the normative document referred to applies. Members of IS0 and IEC maintain registers of currently valid International Standards. IS0 68-2, IS0 general-purpose screw fhreads - Basic profile - Par 2: Inch screw fhreads
30、. IS0 6506-1, Mefallic maferials - Brinell hardness fesf - Par 1: Tesf mefhod. IS0 10156, Gases and gas mixfures - Deferminafion of fire pofenfial and oxidizing ability for fhe selecfion of cylinder valve ouflefs. IS0 10297, Gas cylinders - Refillable gas cylinder valves - Specificafion and type fes
31、fing. IS0 10298, Deferminafion of toxicity of a gas or gas mixfure. IS0 11114-1, Transporable gas cylinders - Compafibilify of cylinder and valve maferials wifh gas confenfs - Par 1: Mefallic maferials. 3 General requirements 3.1 Materials The following materials and specifications are recommended:
32、- For valve and nipple: AISI 316L, microfinished, hardness at least 130 HBW in accordance with IS0 6506-1; - For the union nut: AISI 304, threading silver plated. Other materials and values may be chosen if they give at least equivalent performance in terms of yield stress and resistance to corrosio
33、n (see IS0 11 114-1). 1 EN IS0 10692-f:dO01 3.2 Operation For these connections the outboard leak rate shall not exceed a value of 1 x 10-7 mbar.lw1 at 137 bar helium when the connection is tightened to 50 N.m. When this outboard leak rate is obtained, an inboard helium leak rate shall be no greater
34、 than 1 x 10-9 mbar.lw1 The gasket shall be an unused recessed flat, uncoated gasket of Ni 200, fully annealed with the requirements of 8.1. Its hardness shall be HBW 2,5/62,5: 80 to 100 HBW (in accordance with IS0 6506-1) with a surface finish 0,8 pm turned in the sealing area. Gaskets of other mat
35、erials, e.g. polymers, may be used if they do not compromise the leak integrity of the connection and are compatible with the duty. These gaskets shall be used at a torque appropriate for the material. NOTE should be used only once. Conditions of use may cause significant differences in both the inb
36、oard and outboard leak rates, e.g. nickel gaskets 3.3 Marking The valves shall be marked with the requirements listed in IS0 10297, as far as appropriate. In addition to all the required valve marking the letters “nnn“, where nnn is the outlet number, shall be marked. 4 General design Figure 1 shows
37、 the connection in the assembled state (view from the top). The nipple tip has two notches to facilitate the removal of the gasket. A pair of keys on the nipple and of the corresponding key ways on the valve prevent rotation of the parts during assembly. The keys shall be opposite to each other and
38、vertically oriented. The antirotational device shall always be in place. The nut shall not engage on the outlet thread until the antirotational pins fitted to the plug are engaged in the slots on the valve outlet. An alternative way to design the antirotational device of the nipple is described in 8
39、.3. The union nut shall have two venting holes opposite to each other. 5 Dimensions Dimensions for the outlet connections are given in Figures 2 to 9. Only dimensions explicitly given there are mandatory. Others shall be chosen as appropriate. All dimensions are in millimetres. The thread definition
40、 is given in clause 9. The diameters dA, dB, dM and dN are not dimensioned in the figures because they assume different values for each connection. They are chosen in such a way that combinations other than the intended ones are impossible. The diameters dA and dB on the valve outlet as well as dM a
41、nd dN on the nipple shall be concentric within 0,05 mm full indicator movement because these are critical dimensions for safety. 6 630 and 640 series connections Details of the valve outlet are given in Figure 2. Figure 3 gives details of the nipple. The values of the diameters dA, dB, dM and dN for
42、 the 630 and 640 series connections are given in Table 1. Figure 4 shows the union nut. 2 EN IS0 10692-1:20bd Key 1 Valve outlet 2 Nipple 3 Union nut 4 Gasket and circlips Figure 1 - Assembly drawing of the connections (view from the top) 3 EN IS0 10692-f:dO01 X 4 11 ,I min. I d2 I d3 I d4 I I I l6
43、I 42,54 max. r2 10,62 dl 10,71 8,13 max. 23,37 d3 23,49 1,030 external a 0,25 rl 0,38 0,76 r2 0,89 45“ f 5“ 30“ f 5“ 60“ f 1“ I a Nominal diameter in inches Figure 2 -Valve outlet of the 630 and 640 series connections (view from the top) EN IS0 10692-1:20bd a 8 I In1 X 5 EN IS0 10692-f:dO01 13 14 I-
44、 II -I 23,24 -:,25 d3 17,70 f 0,13 28,7 f 0,25 d5 1,98 I 11 I 18,14f0,13 I dl I 26,59 f 0,25 31,8 hexagonal I 12 I 11,4min. I d2 I 1,035 internal a a 30“ f 5“ 71 8 720 722 724 726 728 17,56 17,65 21,37 21,46 17,38 17,47 21,19 21,28 17,91 18,OO 21 ,o1 21,lO 17,73 17,83 20,83 20,92 18,27 18,36 20,65 2
45、0,75 18,09 18,18 20,48 20,57 18,62 18,71 20,30 20,39 18,44 18,54 20,12 20,21 18,98 19,07 19,94 20,04 18,80 18,89 19,77 19,86 19,33 19,43 19,33 19,43 19,16 19,25 19,16 19,25 Figure 4 - Union nut of the 630 and 640 series connections 7 710 and 720 series connections The connections of the 710 and 720
46、series are similar to those of the 630 and the 640 series, except for the thread and the corresponding dimensions and for the diameters dA, dB, dM and dN. Figure 5 gives details of the valve outlet. Figure 6 shows details of the nipple. The values of the diameters dA, dB, dM and dN for the 710 and 7
47、20 series connections are given in Table 2. Figure 7 shows the union nut. Table 2 - Diameters for the 710 and 720 connections 6 EN IS0 10692-1:20bd l6 17 I I 42,54 max. r2 0,76 r2 0,89 4,09 l7 4,19 a 45“ f 5“ X I 4 I 8,13 max. 0,25 rl 0,38 I I I a Nominal diameter in inches Figure 5 -Valve outlet of
48、 the 710 and 720 series connections (view from the top) 7 EN IS0 10692-f:dO01 b 8 - II 1 I1*1 8 1, 88 11 12 13 14 15 EN IS0 10692-1:20bd 18,14 f 0,13 dl 28,96 f 0,13 11,4 minimum d2 1 ,I 30 internal a 2324 - :,25 d3 17,70 f 0,13 28,7 f 0,25 d5 1,98 f 0,13 34,93 hexagonal a 30“ f 5“ J Figure 7 - Unio
49、n nut of the 710 and 720 series connections 9 EN IS0 10692-f:dO01 12 13 8 Components common to both series O d2 12,19 f 0,13 Oi30 -0,05 12,45 d3 12,52 d3 O 29 72 - o, 1 o 8.1 Gasket and clip rl - Dimensional details of a gasket (typically Ni 200) and the corresponding stainless steel wire clip are given in Figure 8. The clip holds the gasket in the nipple bore to prevent it from falling out. 0,81 maximum d5 14,99 d5 15,ll - d6 0,94 f 0,13 +-i- I 14 I 3,18f0,13 I d4 I 14,28 d4 14,40 I 8.2 Blind plug Figure 9 shows the blind plug used, e.g., for blocking the
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