EN ISO 11146-1-2005 en Lasers and laser-related equipment - Test methods for laser beam widths divergence angles and beam propagation ratios - Part 1 Stigmatic and simple astigmati.pdf

1、BRITISH STANDARD BS EN ISO 11146-1:2005 Lasers and laser-related equipment Test methods for laser beam widths, divergence angles and beam propagation ratios Part 1: Stigmatic and simple astigmatic beams The European Standard EN ISO 11146-1:2005 has the status of a British Standard ICS 31.260 BS EN I

2、SO 11146-1:2005 This British Standard was published under the authority of the Standards Policy and Strategy Committee on 9 February 2005 BSI 9 February 2005 ISBN 0 580 45417 7 National foreword This British Standard is the official English language version of EN ISO 11146-1:2005. It is identical wi

3、th ISO 11146-1:2005. It partially supersedes BS EN ISO 11146:2000 which will be withdrawn on publication of BS EN ISO 11146-2. The UK participation in its preparation was entrusted to Technical Committee CPW/172, Optics and optical instruments, which has the responsibility to: A list of organization

4、s represented on this committee can be obtained on request to its secretary. Cross-references The British Standards which implement international or European publications referred to in this document may be found in the BSI Catalogue under the section entitled “International Standards Correspondence

5、 Index”, or by using the “Search” facility of the BSI Electronic Catalogue or of British Standards Online. This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. Compliance with a British Standard does not of itself

6、 confer immunity from legal obligations. aid enquirers to understand the text; present to the responsible international/European committee any enquiries on the interpretation, or proposals for change, and keep the UK interests informed; monitor related international and European developments and pro

7、mulgate them in the UK. Summary of pages This document comprises a front cover, an inside front cover, the EN ISO title page, the EN ISO foreword page, the ISO title page, pages ii to v, a blank page, pages 1 to 16, an inside back cover and a back cover. The BSI copyright notice displayed in this do

8、cument indicates when the document was last issued. Amendments issued since publication Amd. No. Date CommentsEUROPEANSTANDARD NORMEEUROPENNE EUROPISCHENORM ENISO111461 January2005 ICS31.260 Englishversion LasersandlaserrelatedequipmentTestmethodsforlaser beamwidths,divergenceanglesandbeampropagatio

9、nratios Part1:Stigmaticandsimpleastigmaticbeams(ISO11146 1:2005) LasersetquipementsassocisauxlasersMthodes dessaideslargeursdufaisceau,anglesdedivergenceet facteursdelimitedediffractionPartie1:Faisceaux stigmatiquesetastigmatiquessimples(ISO111461:2005) LaserundLaseranlagenPrfverfahrenfr Laserstrahl

10、abmessungen,Divergenzwinkelund BeugungsmazahlenTeil1:Stigmatischeundeinfach astigmatischeStrahlen(ISO111461:2005) ThisEuropeanStandardwasapprovedbyCENon6October2004. CENmembersareboundtocomplywiththeCEN/CENELECInternalRegulationswhichstipulatetheconditionsforgivingthisEurope an Standardthestatusofan

11、ationalstandardwithoutanyalteration.Uptodatelistsandbibliographicalreferencesconcernings uchnational standardsmaybeobtainedonapplicationtotheCentralSecretariatortoanyCENmember. ThisEuropeanStandardexistsinthreeofficialversions(English,French,German).Aversioninanyotherlanguagemadebytra nslation under

12、theresponsibilityofaCENmemberintoitsownlanguageandnotifiedtotheCentralSecretariathasthesamestatusast heofficial versions. CENmembersarethenationalstandardsbodiesofAustria,Belgium,Cyprus,CzechRepublic,Denmark,Estonia,Finland,France, Germany,Greece,Hungary,Iceland,Ireland,Italy,Latvia,Lithuania,Luxemb

13、ourg,Malta,Netherlands,Norway,Poland,Portugal, Slovakia, Slovenia,Spain,Sweden,SwitzerlandandUnitedKingdom. EUROPEANCOMMITTEEFORSTANDARDIZATION COMITEUROPENDENORMALISATION EUROPISCHESKOMITEEFRNORMUNG ManagementCentre:ruedeStassart,36B1050Brussels 2005CEN Allrightsofexploitationinanyformandbyanymeans

14、reserved worldwideforCENnationalMembers. Ref.No.ENISO111461:2005:E Foreword This document (EN ISO 11146-1:2005) has been prepared by Technical Committee ISO/TC 172 “Optics and optical instruments“ in collaboration with Technical Committee CEN/TC 123 “Lasers and laser-related equipment“, the secretar

15、iat of which is held by DIN. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by July 2005, and conflicting national standards shall be withdrawn at the latest by July 2005. According to the CEN/CENEL

16、EC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta

17、, Netherlands, Norway, Poland, Portugal, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom. Endorsement notice The text of ISO 11146-1:2005 has been approved by CEN as EN ISO 11146-1:2005 without any modifications. ENISO111461:2005 Reference number ISO 11146-1:2005(E)INTERNATIONAL AD

18、NATSDR ISO 164111- tide tsriFino -500251-10 Lasers and laser-related equipment Test methods for laser beam widths, divergence angles and beam propagation ratios Part 1: Stigmatic and simple astigmatic beams Lasers et quipements associs aux lasers Mthodes dessai des largeurs du faisceau, angles de di

19、vergence et facteurs de limite de diffraction Partie 1: Faisceaux stigmatiques et astigmatiques simples Referecne unbmer OSI -6411102:1)E(50 OSI 5002INTERNATIONAL STANDARD ISO 11146-1 First edition 2005-01-15 a sresaLsal dneretaler-d qepiumne t tseT temhodf soeb resal rma wihtds, idveegrna eclgndna

20、se aebm rpapoitagno soitar :1 traP mgitSaa citdn isa elpmsitamgtci maebs saLres teiuqepstnem sasocis xua salers htMdose sedsai sed ralgrues ud afsic,uae algnse ed vidergence te caftrues ed iltime d edirffcaitno raPtie :1 Fasiceaux stgitamiuqse sa tetimgitaseuq simpsel ENISO111461:2005 ii ENISO111461

21、:2005 iiiContents Page Foreword iv Introduction v 1 Scope 1 2 Normative references. 1 3 Terms and definitions. 1 4 Coordinate systems 6 5 Test principles. 6 5.1 Applicability. 6 5.2 Beam widths and beam diameter 6 5.3 Beam divergence angles 6 5.4 Beam propagation ratios 6 5.5 Combined measurement of

22、 beam waist locations, beam widths, beam divergence angles and beam propagation ratios. 7 6 Measurement arrangement and test equipment 7 6.1 General. 7 6.2 Preparation 7 6.3 Control of environment 7 6.4 Detector system 7 6.5 Beam-forming optics and optical attenuators . 8 6.6 Focusing system. 8 7 Be

23、am widths and beam diameter measurement 8 7.1 Test procedure 8 7.2 Evaluation 8 8 Measurement of divergence angles 10 8.1 Test procedure 10 8.2 Evaluation 10 9 Combined determination of beam waist locations, beam widths, divergence angles and beam propagation ratios 11 10 Test report 13 Bibliography

24、 . 16 ENISO111461:2005iv Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested i

25、n a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commis

26、sion (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2. The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical

27、 committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. ISO 11146-1 was prepared by Technical Committee ISO/TC 172, Optics and photonics, Subcommittee SC 9, Electro-optical systems. T

28、his first edition of ISO 11146-1, together with ISO/TR 11146-3 cancels and replaces ISO 11146:1999, the contents of which have been technically revised and augmented. ISO 11146 consists of the following parts, under the general title Lasers and laser-related equipment Test methods for laser beam wid

29、ths, divergence angles and beam propagation ratios: Part 1: Stigmatic and simple astigmatic beams Part 2: General astigmatic beams Part 3: Intrinsic and geometrical laser beam classification, propagation and details of test methods (Technical Report) ENISO111461:2005 vIntroduction The propagation pr

30、operties of every laser beam can be characterized within the method of second order moments by ten independent parameters (see ISO/TR 11146-3). However, due to their higher symmetry most laser beams of practical interest need fewer parameters for a complete description. Most lasers of practical use

31、emit beams which are stigmatic or simple astigmatic because of their resonator design. This part of ISO 11146 describes the measurement methods for stigmatic and simple astigmatic beams while Part 2 deals with the measurement procedures for general astigmatic beams. For beams of unknown type the met

32、hods of Part 2 shall be applied. Beam characterization based on the method of second order moments as described in both parts is only valid within the paraxial approximation. The theoretical description of beam characterization and propagation as well as the classification of laser beams is given in

33、 ISO/TR 11146-3, which is an informative Technical Report and describes the procedures for background subtraction and offset correction. In this part of ISO 11146, the second order moments of the power (energy) density distribution are used for the determination of beam widths. However, there may be

34、 problems experienced in the direct measurement of these quantities in the beams from some laser sources. In this case, other indirect methods of the measurement of the second order moments may be used as long as comparable results are achievable. In ISO/TR 11146-3, three alternative methods for bea

35、m width measurement and their correlation with the method used in this part of ISO 11146 are described. These methods are: variable aperture method; moving knife-edge method; moving slit method. The problem of the dependence of the measuring result on the truncation limits of the integration area ha

36、s been investigated and evaluated by an international round robin experiment carried out in 1997. The results of this round robin testing were taken into consideration during the preparation of this document. The International Organization for Standardization (ISO) draws attention to the fact that i

37、t is claimed that compliance with this document may involve the use of a patent concerning the determination of beam characteristics by measuring along the beam caustic of the transformed beam produced by a lens as described in 5.5. ISO takes no position concerning the evidence, validity and scope o

38、f this patent right. The holder of this patent right (U.S. No. 5,267,012) has assured ISO that he is willing to negotiate licences under reasonable and non-discriminatory terms and conditions with applicants throughout the world. In this respect, the statement of the holder of this patent right is r

39、egistered with the ISO. Information may be obtained from: Coherent Inc. 5100 Patrick Henry Drive Santa Clara, CA 95056-0980 USA Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights other than those identified above. ISO shall not be hel

40、d responsible for identifying any or all such patent rights. ENISO111461:2005blankINTENRATIONAL TSANDADR IS-64111 O1:(5002E)1Lasers and laser-related equipment Test methods for laser beam widths, divergence angles and beam propagation ratios Part 1: Stigmatic and simple astigmatic beams 1 Scope This

41、 part of ISO 11146 specifies methods for measuring beam widths (diameter), divergence angles and beam propagation ratios of laser beams. This part of ISO 11146 is only applicable for stigmatic and simple astigmatic beams. If the type of the beam is unknown, and for general astigmatic beams, ISO 1114

42、6-2 should be applied. 2 Normative references The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO

43、 11145, Optics and optical instruments Lasers and laser-related equipment Vocabulary and symbols ISO 11146-2, Lasers and laser-related equipment Test methods for laser beam widths, divergence angles and beam propagation ratios Part 2: General astigmatic beams ISO 13694, Optics and optical instrument

44、s Lasers and laser-related equipment Test methods for laser beam power (energy) density distribution IEC 61040:1990, Power and energy measuring detectors, instruments and equipment for laser radiation 3 Terms and definitions For the purposes of this document, the terms and definitions given in ISO 1

45、1145, ISO 13694, IEC 61040 and the following apply. NOTE The x-, y- and z-axes in these definitions refer to the laboratory system as described in Clause 4. Here and throughout this document the term “power density distribution E(x,y,z)” refers to continuous wave sources. It might be replaced by “en

46、ergy density distribution H(x,y,z)” in case of pulsed sources. 3.1 first order moments of a power density distribution , xy centroid coordinates of the power density distribution of a cross section of a beam given as (,) d d () (,) d d Exyzxxy xz Exyz x y = (1) ENISO111461:20052 and (,) d d () (,) d

47、 d Exyzy x y yz Exyz x y = (2) NOTE For practical application, the infinite integration limits are reduced in a specific manner as given in Clause 7. 3.2 second order moments of a power density distribution 222 , x yx y normalized weighted integrals over the power density distribution, given as 2 22

48、 x (,) ( )d d () (,) d d Exyz x x x y zx Exyz x y = (3) and 2 22 y (,) ( )d d () (,) d d Exyz y y x y zy Exyzx y = (4) and 2 xy (,) ( ) ( ) d d () (,) d d Exyzxxyyxy zx y Exyz x y = (5) NOTE 1 For practical application, the infinite integration limits are reduced in a specific manner as given in Clause 7. NOTE