1、BRITISH STANDARD BS EN ISO 11670:2003 Incorporating Corrigenda Nos. 1, 2 and 3 Lasers and laser-related equipment Test methods for laser beam parameters Beam positional stability The European Standard EN ISO 11670:2003 has the status of a British Standard ICS 31.260 BS EN ISO 11670:2003 This British
2、 Standard was published under the authority of the Standards Policy and Strategy Committee on 25 April 2003 BSI 9 May 2005 ISBN 0 580 41699 2 National foreword This British Standard is the official English language version of EN ISO 11670:2003. It is identical with ISO 11670:2003, including Technica
3、l Corrigendum May 2004. It supersedes BS EN ISO 11670:2000 which is withdrawn. The UK participation in its preparation was entrusted to Technical Committee CPW/172, Optics and optical instruments, which has the responsibility to: A list of organizations represented on this committee can be obtained
4、on request to its secretary. Cross-references The British Standards which implement international or European publications referred to in this document may be found in the BSI Catalogue under the section entitled “International Standards Correspondence Index”, or by using the “Search” facility of th
5、e BSI Electronic Catalogue or of British Standards Online. This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. Compliance with a British Standard does not of itself confer immunity from legal obligations. aid enq
6、uirers to understand the text; present to the responsible international/European committee any enquiries on the interpretation, or proposals for change, and keep the UK interests informed; monitor related international and European developments and promulgate them in the UK. Summary of pages This do
7、cument comprises a front cover, an inside front cover, the EN ISO title page, the EN ISO foreword page, the ISO title page, pages ii to v, a blank page, pages 1 to 15, the Annex ZA page, an inside back cover and a back cover. The BSI copyright notice displayed in this document indicates when the doc
8、ument was last issued. Amendments issued since publication Amd. No. Date Comments 14576 Corrigendum No. 1 11 July 2003 Replacing the EN ISO foreword page and incorporating the Annex ZA page 15229 Corrigendum No. 2 1 July 2004 Replaced equations (10), (11), (20), (21), (22), (23), (27), (28) and (33)
9、 15533 Corrigendum No. 3 9 May 2005 Addition of an Endorsement notice to ForewordEUROPEANSTANDARD NORMEEUROPENNE EUROPISCHENORM ENISO11670 April2003 ICS31.260 SupersedesENISO11670:1999 Englishversion LasersandlaserrelatedequipmentTestmethodsforlaser beamparametersBeampositionalstability(ISO11670:200
10、3) LasersetquipementsassocisauxlasersMthodes dessaidesparamtresdufaisceaulaserStabilitde visedufaisceau(ISO11670:2003) LaserundLaseranlagenPrfverfahrenfr LaserstrahlparameterStrahllagestabilitt(ISO 11670:2003) ThisEuropeanStandardwasapprovedbyCENon21February2003. CENmembersareboundtocomplywiththeCEN
11、/CENELECInternalRegulationswhichstipulatetheconditionsforgivingthisEurope an Standardthestatusofanationalstandardwithoutanyalteration.Uptodatelistsandbibliographicalreferencesconcernings uchnational standardsmaybeobtainedonapplicationtotheManagementCentreortoanyCENmember. ThisEuropeanStandardexistsi
12、nthreeofficialversions(English,French,German).Aversioninanyotherlanguagemadebytra nslation undertheresponsibilityofaCENmemberintoitsownlanguageandnotifiedtotheManagementCentrehasthesamestatusasthe official versions. CENmembersarethenationalstandardsbodiesofAustria,Belgium,CzechRepublic,Denmark,Finla
13、nd,France,Germany,Greece, Hungary,Iceland,Ireland,Italy,Luxembourg,Malta,Netherlands,Norway,Portugal,Slovakia,Spain,Sweden,SwitzerlandandUn ited Kingdom. EUROPEANCOMMITTEEFORSTANDARDIZATION COMITEUROPENDENORMALISATION EUROPISCHESKOMITEEFRNORMUNG ManagementCentre:ruedeStassart,36B1050Brussels 2003CEN
14、 Allrightsofexploitationinanyformandbyanymeansreserved worldwideforCENnationalMembers. Ref.No.ENISO11670:2003ECORRECTED20030625 Foreword Thisdocument(ENISO11670:2003)hasbeenpreparedbyTechnicalCommitteeISO/TC172 “Opticsandopticalinstruments“incollaborationwithTechnicalCommitteeCEN/TC123“Lasers andlas
15、errelatedequipment“,thesecretariatofwhichisheldbyDIN. ThisEuropeanStandardshallbegiventhestatusofanationalstandard,eitherbypublicationof anidenticaltextorbyendorsement,atthelatestbyOctober2003,andconflictingnational standardsshallbewithdrawnatthelatestbyOctober2003. ThisdocumentsupersedesENISO11670:
16、1999. AccordingtotheCEN/CENELECInternalRegulations,thenationalstandardsorganizationsof thefollowingcountriesareboundtoimplementthisEuropeanStandard:Austria,Belgium,Czech Republic,Denmark,Finland,France,Germany,Greece,Hungary,Iceland,Ireland,Italy, Luxembourg,Malta,Netherlands,Norway,Portugal,Slovaki
17、a,Spain,Sweden,Switzerlandand theUnitedKingdom. Endorsementnotice ThetextofISO11670:2003hasbeenapprovedbyCENasENISO11670:2003withoutany modifications. NOTENormativereferencestoInternationalStandardsarelistedinAnnexZA(normative). ENISO11670:2003Endorsement notice The text of ISO 11670:2003/Cor.1:2004
18、 has been approved by CEN as a European Corrigendum without any modifications. INTERNATIONAL STANDARD ISO 11670 Second edition 2003-04-01 Reference number ISO 11670:2003(E) Lasers and laser-related equipment Test methods for laser beam parameters Beam positional stability Lasers et quipements associ
19、s aux lasers Mthodes dessai des paramtres du faisceau laser Stabilit de vise du faisceauENISO11670:2003Incorporating Technical Corrigendum 2004-05-15 ISO :07611(3002)E ii ISO 3002 All rithgs reresvde id FDPscalimer ThFDP si fam eliy ctnome niat deddebyepfa.sec In cacnadrociw eth sebodA sneciliycilop
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24、 Fxa + 22 14 0 94774 9 Eam-il ocpyrithgios.ogr Web wwwi.soo.rg ENISO11670:2003 iii Contents Page 1 Scope 1 2 Normative references 1 3 Terms and definitions 1 4 Coordinate systems and beam axis . 3 4.1 Beam axis distribution 3 4.2 Coordinate systems 3 5 Test principles 5 5.1 Beam positional stability
25、 5 5.2 Beam angular stability 5 6 Measurement arrangement, test equipment and auxiliary devices 5 6.1 Preparation 5 6.2 Control of environment . 5 6.3 Detection system . 6 6.4 Beam-forming optics, optical attenuators, beam splitters, focusing elements . 6 6.5 Calibration 6 7 Test procedures . 7 7.1
26、General . 7 7.2 Beam positional stability 7 7.3 Beam angular stability 7 8 Evaluation . 7 8.1 Beam positional stability 7 8.2 Beam angular stability 8 9 Test report 10 Annex A (informative) Propagation of absolute beam stability 12 Annex B (informative) Decoupling of short- and long-term fluctuation
27、s 15 ENISO11670:2003iv Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in
28、a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commissi
29、on (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2. The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical c
30、ommittees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall n
31、ot be held responsible for identifying any or all such patent rights. ISO 11670 was prepared by Technical Committee ISO/TC 172, Optics and optical instruments, Subcommittee SC 9, Electro-optical systems. This second edition cancels and replaces the first edition (ISO 11670:1999), Clauses 3 and 9 of
32、which have been technically revised. Annexes A and B have been added. ENISO11670:2003 v Introduction The centre of a laser beam is defined as the centroid or first-order spatial moment of the power density distribution. The current propagation axis of a beam is then the straight line connecting two
33、centroids measured at two different planes simultaneously in a uniform, homogeneous medium. Beam axis instability may be characterized by transverse displacements and angular movements that are either monotonic, periodic or stochastic in time. The movement of a laser beam may be randomly distributed
34、 and uniform in amplitude in all directions. In general, the beam may move a greater amount in one direction. If one direction predominates, the procedures specified in this International Standard can be used to identify that dominant direction (the beam -axis) and its azimuthal location relative to
35、 the axes of the laboratory system. This International Standard provides general principles for the measurement of these quantities. In addition, definitions of terminology and symbols to be used in referring to beam position are provided. x ENISO11670:2003. iv ANRETNIITOTS LANDNADRA ISO 76113002:0)
36、E(1 Lasers and laser-related equipment Test methods for laser beam parameters Beam positional stability 1S c o p e This International Standard specifies methods for determining laser beam positional as well as angular stability. The test methods given in this International Standard are intended to b
37、e used for the testing and characterization of lasers. 2 Normative references The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (includ
38、ing any amendments) applies. ISO 11145:2001, Optics and optical instruments Lasers and laser-related equipment Vocabulary and symbols ISO 11146:1999, Lasers and laser-related equipment Test methods for laser beam parameters Beam widths, divergence angle and beam propagation factor IEC 61040:1990, Po
39、wer and energy measuring detectors, instruments and equipment for laser radiation 3 Terms and definitions For the purposes of this document, the terms and definitions given in IEC 61040, ISO 11145 and ISO 11146 and the following apply. 3.1 angular movement , angular movement of the laser beam in the
40、 - and - planes, respectively NOTE These quantities are defined in the beam axis system , , . If the ratio of the quantity in the direction to that in thedirection does not exceed 1,15:1, the quantity is regarded as rotationally symmetric and only one number may be given. The symbol without index is
41、 used in that case. 3.2 beam angular stability , twice the standard deviation of the measured angular movement NOTE These quantities are defined in the beam axis system , , . If the ratio of the quantity in the direction to that in thedirection does not exceed 1,15:1, the quantity is regarded as rot
42、ationally symmetric and only one number may be given. The symbol without index is used in that case. 3.3 pivot point of intersection of all momentary beam axes with the -axis NOTE The measurement of the pivot is not a subject of this International Standard, because it does not necessarily exist. x y
43、 xz yz xyz x y x y xyz x y z ENISO11670:20032 3.4 transverse displacement , distance of transverse displacement of the laser beam in the - and -directions, respectively NOTE 1 These quantities are defined in the beam axis system , , . If the ratio of the quantity in the direction to that in the dire
44、ction does not exceed 1,15:1, the quantity is regarded as rotationally symmetric and only one number may be given. The symbol without index is used in that case. NOTE 2 The measurement of the transverse displacement is not a subject of this International Standard. 3.5 beam positional movement positi
45、onal movement of the centroid of the laser beam in the plane NOTE The positional movement at plane results from the superposition of transverse displacement and/or angular movement of the laser beam. 3.6 beam positional stability , four times the standard deviation of the measured beam positional mo
46、vement at plane NOTE These quantities are defined in the beam axis system , , . If the ratio of the quantity in the direction to that in thedirection does not exceed 1,15:1, the quantity is regarded as rotationally symmetric and only one number may be given. The symbol without index is used in that
47、case. 3.7 relative beam angular stability , , beam angular stability divided by the divergence angle NOTE For elliptical beams, an effective divergence angle should be used, since the principal axes of the beam positional stability in general will not coincide with the principal axes of the laser be
48、am propagation. 3.8 relative beam positional stability , , beam positional stability at plane divided by the beam diameter at plane NOTE For elliptical beams, an effective beam diameter should be used, since the principal axes of the beam positional stability in general will not coincide with the principal axes of the laser be
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