1、BRITISH STANDARD BS EN ISO 13695:2004 Optics and photonics Lasers and laser related equipment Test methods for the spectral characteristics of lasers The European Standard EN ISO 13695:2004 has the status of a British Standard ICS 31.260 BS EN ISO 13695:2004 This British Standard was published under
2、 the authority of the Standards Policy and Strategy Committee on 16 July 2004 BSI 16 July 2004 ISBN 0 580 44068 0 National foreword This British Standard is the official English language version of EN ISO 13695:2004. It is identical with ISO 13695:2004. The UK participation in its preparation was en
3、trusted to Technical Committee CPW/172, Optics and optical instruments, which has the responsibility to: A list of organizations represented on this committee can be obtained on request to its secretary. Cross-references The British Standards which implement international or European publications re
4、ferred to in this document may be found in the BSI Catalogue under the section entitled “International Standards Correspondence Index”, or by using the “Search” facility of the BSI Electronic Catalogue or of British Standards Online. This publication does not purport to include all the necessary pro
5、visions of a contract. Users are responsible for its correct application. Compliance with a British Standard does not of itself confer immunity from legal obligations. aid enquirers to understand the text; present to the responsible international/European committee any enquiries on the interpretatio
6、n, or proposals for change, and keep the UK interests informed; monitor related international and European developments and promulgate them in the UK. Summary of pages This document comprises a front cover, an inside front cover, the EN ISO title page, the EN ISO foreword page, the ISO title page, p
7、ages ii to v, a blank page, pages 1 to 25 and a back cover. The BSI copyright notice displayed in this document indicates when the document was last issued. Amendments issued since publication Amd. No. Date CommentsEUROPEANSTANDARD NORMEEUROPENNE EUROPISCHENORM ENISO13695 June2004 ICS31.260 Englishv
8、ersion OpticsandphotonicsLasersandlaserrelatedequipment Testmethodsforthespectralcharacteristicsoflasers(ISO 13695:2004) OptiqueetphotoniqueLasersetquipementassociaux lasersMthodesdessaidescaractristiquesspectrales deslasers(ISO13695:2004) ThisEuropeanStandardwasapprovedbyCENon23April2004. CENmember
9、sareboundtocomplywiththeCEN/CENELECInternalRegulationswhichstipulatetheconditionsforgivingthisEurope an Standardthestatusofanationalstandardwithoutanyalteration.Uptodatelistsandbibliographicalreferencesconcernings uchnational standardsmaybeobtainedonapplicationtotheCentralSecretariatortoanyCENmember
10、. ThisEuropeanStandardexistsinthreeofficialversions(English,French,German).Aversioninanyotherlanguagemadebytra nslation undertheresponsibilityofaCENmemberintoitsownlanguageandnotifiedtotheCentralSecretariathasthesamestatusast heofficial versions. CENmembersarethenationalstandardsbodiesofAustria,Belg
11、ium,Cyprus,CzechRepublic,Denmark,Estonia,Finland,France, Germany,Greece,Hungary,Iceland,Ireland,Italy,Latvia,Lithuania,Luxembourg,Malta,Netherlands,Norway,Poland,Portugal, Slovakia, Slovenia,Spain,Sweden,SwitzerlandandUnitedKingdom. EUROPEANCOMMITTEEFORSTANDARDIZATION COMITEUROPENDENORMALISATION EUR
12、OPISCHESKOMITEEFRNORMUNG ManagementCentre:ruedeStassart,36B1050Brussels 2004CEN Allrightsofexploitationinanyformandbyanymeansreserved worldwideforCENnationalMembers. Ref.No.ENISO13695:2004:E Foreword This document (EN ISO 13695:2004) has been prepared by Technical Committee ISO/TC 172 “Optics and op
13、tical instruments“ in collaboration with Technical Committee CEN/TC 123 “Lasers and laser-related equipment“, the secretariat of which is held by DIN. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest
14、by December 2004, and conflicting national standards shall be withdrawn at the latest by December 2004. According to the CEN/CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Cyprus, Czech Re
15、public, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom. Endorsement notice The text of ISO 13695:2004 has been approve
16、d by CEN as EN ISO 13695:2004 without any modifications. ENISO13695:2004 Reference number ISO 13695:2004(E)INTERNATIONAL STANDARD ISO 13695 First edition 2004-06-01 Optics and photonics Lasers and laser-related equipment Test methods for the spectral characteristics of lasers Optique et photonique L
17、asers et quipement associ aux lasers Mthodes dessai des caractristiques spectrales des lasers ENISO13695:2004IS:59631 O4002(E) DPlcsid Fremia ihTs PDF file may ctnoian emdebt dedyfepcaes. In ccaocnadrw eith Aebods licensilop gnic,y this file mairp eb ynted iv roweb detu slahl ton ide ebtlnu deess th
18、e typefaces whice era hml era deddebicsnede to i dnanstlaled t noeh computfrep reormign tide ehtin.g In wodlnidaot gnhis file, trapise atpecc tiereht nser ehnopsiiblity fo not infriigngn Aebods licensilop gnic.y ehT ISO tneClar Secrteiraat caceptl on siibality in this .aera Ai ebods a tredamafo kr A
19、ebod SystemI sncotaropr.de teDails fo teh softwacudorp erts sut deo crtaee this PDF file cna f ebi dnuon tlareneG eh Info leratit evo the file; tP ehDc-Frtaeion marapterew setpo erimizde for irpnti.gn Evyre caer neeb sah taken to sneeru that the file is suitlbae fosu re yb ISO memdob rebeis. In tlnu
20、 ehikletneve y ttah lborp aem leratit gno it is f,dnuo plsaee inform ttneC ehlar Secrteiraat ta the serddaig sleb nevwo. ii ENISO13695:2004 iiiContents Page Foreword iv Introduction v 1 Scope 1 2 Normative references . 1 3 Terms and definitions. 1 4 Symbols and abbreviated terms 8 5 Traceability 9 6
21、 Measurement of wavelength and bandwidth . 9 6.1 General. 9 6.2 Types of measurements. 10 6.3 Equipment selection . 11 6.4 Measurements in air . 11 6.5 Measurements at low resolution . 12 6.6 Measurement at higher resolution 14 7 Measurement of wavelength stability . 17 7.1 Dependence of the wavelen
22、gth on operating conditions. 17 7.2 Wavelength stability of a single frequency laser. 17 8 Test report 18 Annex A (informative) Refractive index of air 20 Annex B (informative) Criteria for the choice of a grating monochromator and its accessories Calibration. 21 Annex C (informative) Criteria for t
23、he choice of a Fabry-Perot interferometer 24 Bibliography . 25 ENISO13695:2004iv Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through
24、 ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborate
25、s closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2. The main task of technical committees is to prepare International Standards
26、. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of this
27、 document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO 13695 was prepared by Technical Committee ISO/TC 172, Optics and photonics, Subcommittee SC 9, Electro-optical systems. ENISO13695:2004 vIntroduction The spectral chara
28、cteristics of a laser, such as its peak wavelength or spectral linewidth, are important for potential applications. Examples are the specific application requirements of interferometry and lithography. This International Standard gives definitions of key parameters describing the spectral characteri
29、stics of a laser, and provides guidance on performing measurements to determine these parameters for common laser types. The acceptable level of uncertainty in the measurement of wavelength will vary according to the intended application. Therefore, equipment selection and measurement and evaluation procedures are outlined for three accuracy classes. To standardize reporting of spectral characteristics measurement results, a report example is also included. ENISO13695:2004ENISO13695:2004
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