1、BRITISH STANDARD BS EN ISO 13696:2002 Optics and optical instruments Test methods for radiation scattered by optical components The European Standard EN ISO 13696:2002 has the status of a British Standard ICS 37.020 BS EN ISO 13696:2002 This British Standard, having been prepared under the direction
2、 of the Consumer Products and Services Sector Policy and Strategy Committee, was published under the authority of the Standards Policy and Strategy Committee on 30 August 2002 BSI 30 August 2002 ISBN 0 580 40323 8 National foreword This British Standard is the official English language version of EN
3、 ISO 13696:2002. It is identical with ISO 13696:2002. The UK participation in its preparation was entrusted to Technical Committee CPW/172, Optics and optical instruments, which has the responsibility to: A list of organizations represented on this committee can be obtained on request to its secreta
4、ry. Cross-references The British Standards which implement international or European publications referred to in this document may be found in the BSI Catalogue under the section entitled “International Standards Correspondence Index”, or by using the “Search” facility of the BSI Electronic Catalogu
5、e or of British Standards Online. This publication does not purport to include all the necessary provisions of a contract. Users are responsible for their correct application. Compliance with a British Standard does not of itself confer immunity from legal obligations. aid enquirers to understand th
6、e text; present to the responsible international/European committee any enquiries on the interpretation, or proposals for change, and keep the UK interests informed; monitor related international and European developments and promulgate them in the UK. Summary of pages This document comprises a fron
7、t cover, an inside front cover, the EN ISO title page, the EN ISO foreword page, the ISO title page, pages ii to v, a blank page, pages 1 to 26, an inside back cover and a back cover. The BSI copyright date displayed in this document indicates when the document was last issued. Amendments issued sin
8、ce publication Amd. No. Date CommentsEUROPEANSTANDARD NORMEEUROPENNE EUROPISCHENORM ENISO13696 July2002 ICS37.020 Englishversion OpticsandopticalinstrumentsTestmethodsforradiation scatteredbyopticalcomponents(ISO13696:2002) OptiqueetinstrumentsdoptiqueMthodesdessaidu rayonnementdiffusparlescomposant
9、soptiques(ISO 13696:2002) OptikundoptischeInstrumenteBestimmungvon StreustrahlunghervorgerufendurchoptischeKomponenten (ISO13696:2002) ThisEuropeanStandardwasapprovedbyCENon8June2002. CENmembersareboundtocomplywiththeCEN/CENELECInternalRegulationswhichstipulatetheconditionsforgivingthisEurope an Sta
10、ndardthestatusofanationalstandardwithoutanyalteration.Uptodatelistsandbibliographicalreferencesconcernings uchnational standardsmaybeobtainedonapplicationtotheManagementCentreortoanyCENmember. ThisEuropeanStandardexistsinthreeofficialversions(English,French,German).Aversioninanyotherlanguagemadebytr
11、a nslation undertheresponsibilityofaCENmemberintoitsownlanguageandnotifiedtotheManagementCentrehasthesamestatusasthe official versions. CENmembersarethenationalstandardsbodiesofAustria,Belgium,CzechRepublic,Denmark,Finland,France,Germany,Greece, Iceland,Ireland,Italy,Luxembourg,Malta,Netherlands,Nor
12、way,Portugal,Spain,Sweden,SwitzerlandandUnitedKingdom. EUROPEANCOMMITTEEFORSTANDARDIZATION COMITEUROPENDENORMALISATION EUROPISCHESKOMITEEFRNORMUNG ManagementCentre:ruedeStassart,36B1050Brussels 2002CEN Allrightsofexploitationinanyformandbyanymeansreserved worldwideforCENnationalMembers. Ref.No.ENISO
13、13696:2002EINESO31:6962002(E) 2 Foreword Thisdocument(ISO13696:2002)hasbeenpreparedbyTechnicalCommitteeISO/TC172 “Opticsandopticalinstruments“incollaborationwithTechnicalCommitteeCEN/TC123“Lasers andlaserrelatedequipment“,thesecretariatofwhichisheldbyDIN. ThisEuropeanStandardshallbegiventhestatusofa
14、nationalstandard,eitherbypublicationof anidenticaltextorbyendorsement,atthelatestbyJanuary2003,andconflictingnational standardsshallbewithdrawnatthelatestbyJanuary2003. AccordingtotheCEN/CENELECInternalRegulations,thenationalstandardsorganizationsof thefollowingcountriesareboundtoimplementthisEurope
15、anStandard:Austria,Belgium,Czech Republic,Denmark,Finland,France,Germany,Greece,Iceland,Ireland,Italy,Luxembourg, Malta,Netherlands,Norway,Portugal,Spain,Sweden,SwitzerlandandtheUnitedKingdom. NOTEFROMCMC TheforewordissusceptibletobeamendedonreceptionoftheGerman languageversion.Theconfirmedoramended
16、foreword,andwhenappropriate,thenormative annexZAforthereferencestointernationalpublicationswiththeirrelevantEuropean publicationswillbecirculatedwiththeGermanversion. Endorsementnotice ThetextoftheInternationalStandardISO13696:2002hasbeenapprovedbyCENasa EuropeanStandardwithoutanymodifications. ENIS
17、O13696:2002Reference number ISO 13696:2002(E) INTERNATIONAL STANDARD ISO 13696 First edition 2002-07-15 Optics and optical instruments Test methods for radiation scattered by optical components Optique et instruments doptique Mthodes dessai du rayonnement diffus par les composants optiques ENISO1369
18、6:2002ENISO13696:2002iiISO :696312200()E ISO 2002 All irthgs resdevre iii Contents Page Foreword.iv Introduction.v 1 Scope 1 2 Normative references1 3 Terms, definitions and symbols.1 3.1 Terms and definitions .1 3.2 Symbols and units.3 4 Test method .3 4.1 Principle3 4.2 Measurement arrangement and
19、 test equipment 3 4.3 Arrangement with high sensitivity.6 4.4 Preparation of specimens.6 5 Procedure .7 5.1 General7 5.2 Alignment procedure.7 5.3 Measurement procedure.8 6 Evaluation.8 6.1 Determination of the total scattering value.8 6.2 Error budget .11 7 Test report 11 Annex A (informative) Set-
20、up with a Coblentz sphere 13 Annex B (informative) Example of test report15 Annex C (informative) Statistical evaluation example.19 Annex D (informative) Example for selection of spacing23 Bibliography26 ENISO13696:2002iiiISO :696312002(E) vi ISO 2002 All irthgs resdevre Foreword ISO (the Internatio
21、nal Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been
22、established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standar
23、dization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 3. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least
24、 75 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of this International Standard may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. International Standard ISO 13696 was prepare
25、d by Technical Committee ISO/TC 172, Optics and optical instruments, Subcommittee SC 9, Electro-optical systems. Annexes A to D of this International Standard are for information only. ENISO13696:2002ivISO :696312200()E ISO 2002 All irthgs resdevre v Introduction In most applications, scattering in
26、optical components reduces the efficiency and deteriorates the image-forming quality of optical systems. Scattering is predominantly produced by imperfections of the coatings and the optical surfaces of the components. Common surface features which contribute to optical scattering are imperfections
27、of substrates, thin films and interfaces, surface and interface roughness, or contamination and scratches. These imperfections deflect a fraction of the incident radiation from the specular path. The spatial distribution of this scattered radiation is dependent on the wavelength of the incident radi
28、ation and on the individual optical properties of the component. For most applications in laser technology and optics, the amount of total loss produced by scattering is a useful quality criterion of an optical component. This International Standard describes a testing procedure for the correspondin
29、g quantity, the total scattering (TS) value, which is defined by the measured values of backward scattering and forward scattering. The measurement principle described in this International Standard is based on an Ulbricht sphere as the integrating element for scattered radiation. An alternative app
30、aratus with a Coblentz hemisphere, which is also frequently employed for collecting scattered light, is described in annex A. Currently, advanced studies on the comparability and the limitations of both light collecting elements are being performed (e.g. round robin tests, EUREKA-project EUROLASER:
31、CHOCLAB). ENISO13696:2002vINTENRATIONAL TSANDADR ISO :696312002(E) ISO 2002 All irthgs resdevre 1 Optics and optical instruments Test methods for radiation scattered by optical components 1 Scope This International Standard specifies procedures for the determination of the total scattering by coated
32、 and uncoated optical surfaces. Procedures are given for measuring the contributions of the forward scattering and backward scattering to the total scattering of an optical component. This International Standard applies to coated and uncoated optical components with optical surfaces that have a radi
33、us of curvature of more than 10 m. The wavelength range includes the ultraviolet, the visible and the infrared spectral regions. 2 Normative references The following normative documents contain provisions which, through reference in this text, constitute provisions of this International Standard. Fo
34、r dated references, subsequent amendments to, or revisions of, any of these publications do not apply. However, parties to agreements based on this International Standard are encouraged to investigate the possibility of applying the most recent editions of the normative documents indicated below. Fo
35、r undated references, the latest edition of the normative document referred to applies. Members of ISO and IEC maintain registers of currently valid International Standards. ISO 11145, Optics and optical instruments Lasers and laser-related equipment Vocabulary and symbols ISO 14644-1:1999, Cleanroo
36、ms and associated controlled environments Part 1: Classification of air cleanliness 3 Terms, definitions and symbols 3.1 Terms and definitions For the purposes of this International Standard, the terms and definitions given in ISO 11145 and the following apply. 3.1.1 scattered radiation fraction of
37、the incident radiation that is deflected from the specular optical path 3.1.2 front surface optical surface that interacts first with the incident radiation 3.1.3 rear surface surface that interacts last with the transmitted radiation ENISO13696:20021ISO :696312002(E) 2 ISO 2002 All irthgs resdevre
38、3.1.4 backward scattering fraction of radiation scattered by the optical component into the backward halfspace NOTE Backward halfspace is defined by the halfspace that contains the incident beam impinging upon the component and that is limited by a plane containing the front surface of the optical c
39、omponent. 3.1.5 forward scattering fraction of radiation scattered by the optical component into the forward halfspace NOTE Forward halfspace is defined by the halfspace that contains the beam transmitted by the component and that is limited by a plane containing the rear surface of the optical comp
40、onent. 3.1.6 total scattering ratio of the total power generated by all contributions of scattered radiation into the forward or the backward halfspace or both to the power of the incident radiation NOTE The halfspace in which the scattering is measured should be clearly stated. 3.1.7 diffuse reflec
41、tance standard diffuse reflector with known total reflectance NOTE Commonly used diffuse reflectance standards are fabricated from barium sulfate or polytetrafluoroethylene powders (see Table 2). The total reflectance of reflectors freshly prepared from these materials is typically greater than 0,98
42、 in the spectral range given in Table 2, and it can be considered as a 100 % reflectance standard. For increasing the accuracy, diffuse reflectance standards with lower reflectance values can be realized by mixtures of polytetrafluoroethylene powder and powders of absorbing materials. (See reference
43、 5 in the Bibliography.) 3.1.8 range of acceptance angle range from the minimum to the maximum angle with respect to the reflected or transmitted beam that can be collected by the integrating element 3.1.9 angle of polarization angle between the major axis of the instantaneous ellipse of the inciden
44、t radiation and the plane of incidence NOTE 1 For non-normal incidence, the plane of incidence is defined by the plane which contains the direction of propagation of the incident radiation and the normal at the point of incidence. NOTE 2 The angle of polarization, , is identical to the azimuth, (acc
45、ording to ISO 12005), if the reference axis is located in the plane of incidence. ENISO13696:20022ISO :696312200()E ISO 2002 All irthgs resdevre 3 3.2 Symbols and units of measure Table 1 Symbols and units of measure Symbol Term Unit Wavelength nm Angle of incidence degrees Angle of polarization deg
46、rees d Beam diameter on the surface of the specimen mm P inc Power of the incident radiation W P bac Total power, backward scattered radiation W P for Total power, forward scattered radiation W S bac Backward scattering S for Forward scattering V s,bac Detector signal for the specimen, backward scat
47、tering V V s,for Detector signal for the specimen, forward scattering V V c Detector signal, diffuse reflectance standard V V u Detector signal, test ports open V s Transmittance of specimen at wavelength, s Reflectance of specimen at wavelength, r i Sample position mm N Number of test sites per sur
48、face 4 Test method 4.1 Principle The fundamental principle (see Figure 1) of the measurement apparatus is based on the collection and integration of the scattered radiation. For this purpose, a hollow sphere with a diffusely reflecting coating on the inner surface (Ulbricht sphere) is employed. Beam ports are necessary for th
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