EN ISO 14644-13-2017 en Cleanrooms and associated controlled environments - Part 13 Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical .pdf

1、Cleanrooms and associated controlled environmentsPart 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2017)BS EN ISO 14644-13:2017BSI Standards PublicationWB11885_BSI_StandardCovs_2013_AW.indd 1 15/05/2013 15:06EUROPEA

2、N STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 14644-13 August 2017 ICS 13.040.35 English Version Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2017) Salles

3、 propres et environnements matriss apparents - Partie 13: Nettoyage des surfaces afin dobtenir des niveaux de propret par rapport aux classifications particulaire et chimique (ISO 14644-13:2017) Reinrume und zugehrige Reinraumbereiche - Teil 13: Reinigung von Oberflchen zur Erreichung definierter Re

4、inheitsgrade hinsichtlich Partikel- und Chemikalienklassifikationen (ISO 14644-13:2017) This European Standard was approved by CEN on 26 May 2017. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of

5、a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member. This European Standard exists in three official versions (English, French, German).

6、 A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cy

7、prus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and

8、United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels 2017 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No.

9、 EN ISO 14644-13:2017 ENational forewordThis British Standard is the UK implementation of EN ISO 14644-13:2017.The UK participation in its preparation was entrusted to Technical Committee LBI/30, Cleanroom technology.A list of organizations represented on this committee can be obtained on request to

10、 its secretary.This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. The British Standards Institution 2017Published by BSI Standards Limited 2017ISBN 978 0 580 82492 0ICS 13.040.35Compliance with a British Standar

11、d cannot confer immunity from legal obligations.This British Standard was published under the authority of the Standards Policy and Strategy Committee on 30 September 2017.Amendments/corrigenda issued since publicationDate Text affectedBRITISH STANDARDBS EN ISO 1464413:2017EUROPEAN STANDARD NORME EU

12、ROPENNE EUROPISCHE NORM EN ISO 14644-13 August 2017 ICS 13.040.35 English Version Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2017) Salles propres et environ

13、nements matriss apparents - Partie 13: Nettoyage des surfaces afin dobtenir des niveaux de propret par rapport aux classifications particulaire et chimique (ISO 14644-13:2017) Reinrume und zugehrige Reinraumbereiche - Teil 13: Reinigung von Oberflchen zur Erreichung definierter Reinheitsgrade hinsic

14、htlich Partikel- und Chemikalienklassifikationen (ISO 14644-13:2017) This European Standard was approved by CEN on 26 May 2017. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard

15、 without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member. This European Standard exists in three official versions (English, French, German). A version in any o

16、ther language made by translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republi

17、c, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United Kingdom. EUR

18、OPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels 2017 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. EN ISO 14644-13:20

19、17 EBS EN ISO 1464413:2017EN ISO 14644-13:2017 (E) 3 European foreword This document (EN ISO 14644-13:2017) has been prepared by Technical Committee ISO/TC 209 “Cleanrooms and associated controlled environments” in collaboration with Technical Committee CEN/TC 243 “Cleanroom technology” the secretar

20、iat of which is held by BSI. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by February 2018 and conflicting national standards shall be withdrawn at the latest by February 2018. Attention is drawn

21、to the possibility that some of the elements of this document may be the subject of patent rights. CEN shall not be held responsible for identifying any or all such patent rights. According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following countries are b

22、ound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portu

23、gal, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom. Endorsement notice The text of ISO 14644-13:2017 has been approved by CEN as EN ISO 14644-13:2017 without any modification. ISO 14644-13:2017(E)ForewordISO (the International Organization for Standar

24、dization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to

25、 be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.The procedures used

26、 to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO documents should be noted. This document was drafted in accordance with the editorial rules of

27、 the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any patent rights identifi

28、ed during the development of the document will be in the Introduction and/or on the ISO list of patent declarations received (see www .iso .org/ patents).Any trade name used in this document is information given for the convenience of users and does not constitute an endorsement.For an explanation o

29、n the voluntary nature of standards, the meaning of ISO specific terms and expressions related to conformity assessment, as well as information about ISOs adherence to the World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT) see the following URL: www .iso .org/ iso/ fo

30、reword .html.This document was prepared by Technical Committee ISO/TC 209, Cleanrooms and associated controlled environments.A list of all parts in the ISO 14644 series can be found on the ISO website. ISO 2017 All rights reserved vBS EN ISO 1464413:2017ISO 14644-13:2017(E)ForewordISO (the Internati

31、onal Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been

32、 established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standa

33、rdization.The procedures used to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO documents should be noted. This document was drafted in accordanc

34、e with the editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details

35、of any patent rights identified during the development of the document will be in the Introduction and/or on the ISO list of patent declarations received (see www .iso .org/ patents).Any trade name used in this document is information given for the convenience of users and does not constitute an end

36、orsement.For an explanation on the voluntary nature of standards, the meaning of ISO specific terms and expressions related to conformity assessment, as well as information about ISOs adherence to the World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT) see the followin

37、g URL: www .iso .org/ iso/ foreword .html.This document was prepared by Technical Committee ISO/TC 209, Cleanrooms and associated controlled environments.A list of all parts in the ISO 14644 series can be found on the ISO website. ISO 2017 All rights reserved vBS EN ISO 1464413:2017ISO 14644-13:2017

38、(E)IntroductionThe term surface refers to the interface between two phases. For the purpose of this document, the surface is a solid. A “clean surface” is where one or more of the contamination categories (particles, chemical) are under control due to cleaning/decontamination. The degree of cleanlin

39、ess is specified in the corresponding surface cleanliness classifications (see ISO 14644-9 and ISO 14644-10). Different cleaning methods are necessary depending on the degree of cleanliness (cleanliness class) required. This document gives guidance on the selection of cleaning methods to achieve spe

40、cified cleanliness levels. For the selection procedure, the aspects of surface description, cleanliness specifications, types of contamination, cleaning techniques, material compatibility, and assessment methodology are taken into consideration. Most of the methods are suitable for removal of more t

41、han one contamination category at the same time; therefore, a common standard for the selection of a cleaning method for both particles, as well as chemical contamination, is needed.vi ISO 2017 All rights reservedBS EN ISO 1464413:2017ISO 14644-13:2017(E)IntroductionThe term surface refers to the in

42、terface between two phases. For the purpose of this document, the surface is a solid. A “clean surface” is where one or more of the contamination categories (particles, chemical) are under control due to cleaning/decontamination. The degree of cleanliness is specified in the corresponding surface cl

43、eanliness classifications (see ISO 14644-9 and ISO 14644-10). Different cleaning methods are necessary depending on the degree of cleanliness (cleanliness class) required. This document gives guidance on the selection of cleaning methods to achieve specified cleanliness levels. For the selection pro

44、cedure, the aspects of surface description, cleanliness specifications, types of contamination, cleaning techniques, material compatibility, and assessment methodology are taken into consideration. Most of the methods are suitable for removal of more than one contamination category at the same time;

45、 therefore, a common standard for the selection of a cleaning method for both particles, as well as chemical contamination, is needed.vi ISO 2017 All rights reserved Cleanrooms and associated controlled environments Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of p

46、article and chemical classifications1 ScopeThis document gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It prov

47、ides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) classes and which techniques should be considered to achieve these specified levels.The appropriateness of cleani

48、ng techniques will make reference to the cleanliness classes and associated test methods found in ISO 14644-9 and ISO 14644-10.The following matters of general guidance will be provided: expected surface cleanliness levels; suitability of cleaning methods; compatibility of surfaces with the cleaning

49、 technique; assessment of cleaning appropriateness.The following will be excluded from this document: classification of cleaning methods; product produced within a cleanroom; specific surface-related cleaning methods; detailed description of cleaning mechanisms, methods and procedures of various cleaning methods; detailed material characteristics; description of damage mechanisms by cleaning processes and time-dependent effects; references to interactive bonding forces between contaminants and surfaces or generation processes