EN ISO 15367-1-2003 en Lasers and laser-related equipment - Test methods for determination of the shape of a laser beam wavefront - Part 1 Terminology and fundamental aspects《激光及激光.pdf

1、BRITISH STANDARD BS EN ISO 15367-1:2003 Incorporating Corrigendum No. 1 Lasers and laser-related equipment Test methods for determination of the shape of a laser beam wavefront Part 1: Terminology and fundamental aspects The European Standard EN ISO 15367-1:2003 has the status of a British Standard

2、ICS 01.040.31; 31.260 BS EN ISO 15367-1:2003 This British Standard was published under the authority of the Standards Policy and Strategy Committee on 22 October 2003 BSI 24 November 2003 ISBN 0 580 42778 1 National foreword This British Standard is the official English language version of EN ISO 15

3、367-1:2003. It is identical with ISO 15367-1:2003. The UK participation in its preparation was entrusted to Technical Committee CPW/172, Optics and optical instruments, which has the responsibility to: A list of organizations represented on this committee can be obtained on request to its secretary.

4、 Cross-references The British Standards which implement international or European publications referred to in this document may be found in the BSI Catalogue under the section entitled “International Standards Correspondence Index”, or by using the “Search” facility of the BSI Electronic Catalogue o

5、r of British Standards Online. This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. Compliance with a British Standard does not of itself confer immunity from legal obligations. aid enquirers to understand the tex

6、t; present to the responsible international/European committee any enquiries on the interpretation, or proposals for change, and keep the UK interests informed; monitor related international and European developments and promulgate them in the UK. Summary of pages This document comprises a front cov

7、er, an inside front cover, the EN ISO title page, the EN ISO Foreword page, the ISO title page, pages ii to vi, pages 1 to 20, the Annex ZA page and a back cover. The BSI copyright notice displayed in this document indicates when the document was last issued. Amendments issued since publication Amd.

8、 No. Date Comments 14872 Corrigendum No. 1 24 November 2003 Correction to EN ISO Foreword page and addition of the Annex ZA pageEUROPEANSTANDARD NORMEEUROPENNE EUROPISCHENORM ENISO153671 September2003 ICS01.040.31;31.260 Englishversion LasersandlaserrelatedequipmentTestmethodsfor determinationofthes

9、hapeofalaserbeamwavefrontPart1: Terminologyandfundamentalaspects(ISO153671:2003) LasersetquipementsassocisauxlasersMthodes dessaipourladterminationdelaformedufrontdondedu faisceaulaserPartie1:Terminologieetaspects fondamentaux(ISO153671:2003) LaserundLaseranlagenPrfverfahrenfrdie BestimmungderWellen

10、frontformvonLaserstrahlenTeil 1:BegriffeundgrundlegendeAspekte(ISO153671:2003) ThisEuropeanStandardwasapprovedbyCENon1September2003. CENmembersareboundtocomplywiththeCEN/CENELECInternalRegulationswhichstipulatetheconditionsforgivingthisEurope an Standardthestatusofanationalstandardwithoutanyalterati

11、on.Uptodatelistsandbibliographicalreferencesconcernings uchnational standardsmaybeobtainedonapplicationtotheManagementCentreortoanyCENmember. ThisEuropeanStandardexistsinthreeofficialversions(English,French,German).Aversioninanyotherlanguagemadebytra nslation undertheresponsibilityofaCENmemberintoit

12、sownlanguageandnotifiedtotheManagementCentrehasthesamestatusasthe official versions. CENmembersarethenationalstandardsbodiesofAustria,Belgium,CzechRepublic,Denmark,Finland,France,Germany,Greece, Hungary,Iceland,Ireland,Italy,Luxembourg,Malta,Netherlands,Norway,Portugal,Slovakia,Spain,Sweden,Switzerl

13、andandUn ited Kingdom. EUROPEANCOMMITTEEFORSTANDARDIZATION COMITEUROPENDENORMALISATION EUROPISCHESKOMITEEFRNORMUNG ManagementCentre:ruedeStassart,36B1050Brussels 2003CEN Allrightsofexploitationinanyformandbyanymeansreserved worldwideforCENnationalMembers. Ref.No.ENISO153671:2003ECORRECTED20031029 Fo

14、reword Thisdocument(ENISO153671:2003)hasbeenpreparedbyTechnicalCommitteeISO/TC172 “Opticsandopticalinstruments“incollaborationwithTechnicalCommitteeCEN/TC123“Lasers andlaserrelatedequipment“,thesecretariatofwhichisheldbyDIN. ThisEuropeanStandardshallbegiventhestatusofanationalstandard,eitherbypublic

15、ationof anidenticaltextorbyendorsement,atthelatestbyMarch2004,andconflictingnational standardsshallbewithdrawnatthelatestbyMarch2004. AccordingtotheCEN/CENELECInternalRegulations,thenationalstandardsorganizationsof thefollowingcountriesareboundtoimplementthisEuropeanStandard:Austria,Belgium,Czech Re

16、public,Denmark,Finland,France,Germany,Greece,Hungary,Iceland,Ireland,Italy, Luxembourg,Malta,Netherlands,Norway,Portugal,Slovakia,Spain,Sweden,Switzerlandand theUnitedKingdom. Endorsementnotice ThetextofISO153671:2003hasbeenapprovedbyCENasENISO153671:2003withoutany modifications. NOTENormativerefere

17、ncestoInternationalStandardsarelistedinAnnexZA(normative). ENISO153671:2003 Reference number ISO 15367-1:2003(E)INTERNATIONAL STANDARD ISO 15367-1 First edition 2003-09-15 Lasers and laser-related equipment Test methods for determination of the shape of a laser beam wavefront Part 1: Terminology and

18、 fundamental aspects Lasers et quipements associs aux lasers Mthodes dessai pour la dtermination de la forme du front donde du faisceau laser Partie 1: Terminologie et aspects fondamentaux ENISO153671:2003ii ENISO153671:2003ISO 15367-1:2003(E) iiiContents Page Foreword iv Introduction v 1 Scope 1 2

19、Normative references. 1 3 Terms and definitions. 2 3.1 General definitions 2 3.2 Definitions associated with power (energy) density distribution 4 3.3 Definitions associated with astigmatism 4 3.4 Definitions related to the characteristics and topography of the wavefront 5 3.5 Definitions related to

20、 wavefront gradient measurements 7 4 Test methods. 8 4.1 Laser types 8 4.2 Safety 8 4.3 Test environment 8 4.4 Beam modification 9 4.5 Detector system 10 4.6 Wavefront measuring instruments 10 5 Test and measurement procedures 11 5.1 Alignment. 11 5.2 Calibration 11 5.3 Visual inspection of automate

21、d data analysis . 11 5.4 Measurement procedures 12 6 Analysis of wavefront quality 12 6.1 Polynomial representation of wavefronts 12 6.2 Computation of wavefront quality. 12 7 Uncertainty. 13 7.1 Requirements for uncertainty estimation. 13 7.2 Sources of uncertainty . 14 8 Test report 14 Annex A (in

22、formative) Astigmatism and laser beams 15 Bibliography . 20 3002:176351OSINEENISO153671:2003ISO 15367-1:2003(E) iv Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standar

23、ds is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take

24、 part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2. The main task of technical committees is

25、to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to the possibility

26、 that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO 15367-1 was prepared by Technical Committee ISO/TC 172, Optics and optical instruments, Subcommittee SC 9, Electro-optical systems. IS

27、O 15367 consists of the following parts, under the general title Lasers and laser-related equipment Test methods for determination of the shape of a laser beam wavefront: Part 1: Terminology and fundamental aspects Part 2: Hartmann-Shack sensors ENISO13002:17635ENISO153671:2003ISO 15367-1:2003(E) vI

28、ntroduction It is important, when designing, operating or maintaining a laser system, to be able to ensure repeatability, predict the propagation behaviour of the laser beam and to assess the safety hazards. There are four sets of parameters that could be measured for the characterization of a laser

29、 beam: power (energy) density distribution (ISO 13694); beam width, divergence angle and beam propagation factor (ISO 11146); phase distribution (ISO 15367); spatial beam coherence. This part of ISO 15367 defines the terminology and symbols to be used when making reference to or measuring the phase

30、distribution in a transverse plane of a laser beam. It specifies the procedures required for the measurement of the azimuth of the principal planes of the phase distribution; the magnitude of astigmatic aberrations; evaluation of the wavefront aberration function and the RMS wavefront deformation. A

31、 useful technique for qualitative assessment of a beam is visual inspection of the fringe pattern in interferograms or an isometric view of a wavefront surface. However, more quantitative methods are needed for quality assurance and transfer of process technology. The measurement techniques indicate

32、d in this part of ISO 15367 allow numerical analysis of the phase distribution in a propagating beam and can provide recordable quantitative results. While it is quite possible to ascribe other conventional aberrations (e.g. coma or spherical aberration) as well as astigmatism to a laser beam, these

33、 are not commonly used. Departure of the wavefront of a beam from some ideal surface is a more common indication of quality. On the other hand, rotational asymmetry has a much wider range of effects in a laser beam than is usually associated with astigmatism imposed on a beam of optical radiation by

34、 conventional optical systems. For this reason, various forms and characteristics of astigmatism in beams are now defined in detail. The provisions of this part of ISO 15367 allow a test report to be commissioned with measurements or analysis of a selection of beam characteristics. Measurements of a

35、stigmatism are important to system designers who wish to specify optical elements for the correction of astigmatic beams. The measurement techniques defined in this part of ISO 15367 can also be used to assess any residual astigmatism after the addition of corrective elements and to aid with alignme

36、nt. A major application of phase distribution measurements comes with the possibility of combining those measurements with a simultaneous measurement of the power (energy) density distribution (ISO 13694) at the same location in the path of a beam. Digital processing of the data can reveal much more

37、 detailed characteristics of the propagating beam than can measurements of the power (energy) envelope resulting from calculation of the beam propagation ratio (ISO 11146). The more detailed information can be important to assessors of laser damage and safety hazards as well as process development e

38、ngineers when it is necessary to know the power (energy) density distribution at the process interaction point. ENISO153671:2003ENISO153671:2003ENISO153671:2003 vi ENISO153671:2003INTENRATIONAL TSANDADR IS-76351 O1:(3002E)I SO 3002 All irhgts seredevr 1Lasers and laser-related equipment Test methods

39、 for determination of the shape of a laser beam wavefront Part 1: Terminology and fundamental aspects 1 Scope This part of ISO 15367 specifies methods for the measurement of the topography of the wavefront of a laser beam by measurement and interpretation of the spatial distribution of the phase of

40、that wavefront across a plane approximately perpendicular to its direction of propagation. Requirements are given for the measurement and analysis of phase distribution data to provide quantitative wavefront parameters and their uncertainty in a test report. The methods described in this part of ISO

41、 15367 are applicable to the testing and characterization of a wide range of beam types from both continuous wave and pulsed lasers. Definitions of parameters describing wavefront deformations are given together with methods for the determination of those parameters from phase distribution measureme

42、nts. 2 Normative references The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO 9334, Optics and

43、optical instruments Optical transfer function Definitions and mathematical relationships ISO 10110-5, Optics and optical instruments Preparation of drawings for optical elements and systems Part 5: Surface form tolerances ISO 11145, Optics and optical instruments Laser and laser-related equipment Vo

44、cabulary and symbols ISO 11146, Lasers and laser-related equipment Test methods for laser beam parameters Beam widths, divergence angle and beam propagation factor ISO 13694, Optics and optical instruments Lasers and laser-related equipment Test methods for laser beam power (energy) density distribu

45、tion ISO 15367-2, Lasers and laser related equipment Test methods for determination of the shape of a laser beam wavefront Part 2: Hartmann-Shack sensors IEC 60825, (All parts), Safety of Laser Products IEC 61040, Power and energy measuring detectors, instruments and equipment for laser radiation EN

46、ISO153671:20031IS-76351 O1:(3002E) 2 I SO 3002 All irhgts seredevr3 Terms and definitions For the purposes of this document, the definitions given in ISO 9334, ISO 10110-5, ISO 11145, ISO 11146, ISO 13694 and IEC 61040 as well as the following apply. 3.1 General definitions 3.1.1 average wavefront s

47、hape w(x,y;z m ) continuous surface w(x,y) that is normal to the time average direction of energy propagation in the electromagnetic field at the measurement plane z = z mNOTE 1 In the case of highly coherent radiation, the continuous surface w(x,y) is a surface of constant phase. The phase distribution (x,y) is then related to the wavefront distribution according to 2 (,) (,) xy wxy = where is the mean wavelength of the light. NOTE 2 A continuous surface does not always exist. 3.1.2 wavefront surface continuous surface w(x,y) that minimizes the power density weighted d