EN ISO 15367-2-2005 en Lasers and laser-related equipment - Test methods for determination of the shape of a laser beam wavefront - Part 2 Shack-Hartmann sensors《激光及激光相关设备 激光束波前形状测.pdf

1、BRITISH STANDARDBS EN ISO 15367-2:2005Lasers and laser-related equipment Test methods for determination of the shape of a laser beam wavefront Part 2: Shack-Hartmann sensorsThe European Standard EN ISO 15367-2:2005 has the status of a British StandardICS 31.260g49g50g3g38g50g51g60g44g49g42g3g58g44g5

2、5g43g50g56g55g3g37g54g44g3g51g40g53g48g44g54g54g44g50g49g3g40g59g38g40g51g55g3g36g54g3g51g40g53g48g44g55g55g40g39g3g37g60g3g38g50g51g60g53g44g42g43g55g3g47g36g58BS EN ISO 15367-2:2005This British Standard was published under the authority of the Standards Policy and Strategy Committee on 29 Septembe

3、r 2006 BSI 2006ISBN 0 580 49142 0National forewordThis British Standard was published by BSI. It is the UK implementation of EN ISO 15367-2:2005. It is identical with ISO 15367-2:2005.The UK participation in its preparation was entrusted to Technical Committee CPW/172, Optics and photonics.A list of

4、 organizations represented on CPW/172 can be obtained on request to its secretary.This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application.Compliance with a British Standard cannot confer immunity from legal obligation

5、s.Amendments issued since publicationAmd. No. Date CommentsEUROPEAN STANDARDNORME EUROPENNEEUROPISCHE NORMEN ISO 15367-2March 2005ICS 31.260English versionLasers and laser-related equipment - Test methods fordetermination of the shape of a laser beam wavefront - Part 2:Shack-Hartmann sensors (ISO 15

6、367-2:2005)Lasers et quipements associs aux lasers - Mthodesdessai pour la dtermination de la forme du front donde dufaisceau laser - Partie 2: Senseurs Shack-Hartmann (ISO15367-2:2005)Laser und Laseranlagen - Prfverfahren fr dieBestimmung der Wellenfrontform von Laserstrahlen - Teil2: Shack-Hartman

7、n-Sensoren (ISO 15367-2:2005)This European Standard was approved by CEN on 21 February 2005.CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this EuropeanStandard the status of a national standard without any alteration. Up-to-date l

8、ists and bibliographical references concerning such nationalstandards may be obtained on application to the Central Secretariat or to any CEN member.This European Standard exists in three official versions (English, French, German). A version in any other language made by translationunder the respon

9、sibility of a CEN member into its own language and notified to the Central Secretariat has the same status as the officialversions.CEN members are the national standards bodies of Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France,Germany, Greece, Hungary, Iceland, Ireland,

10、Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Slovakia,Slovenia, Spain, Sweden, Switzerland and United Kingdom.EUROPEAN COMMITTEE FOR STANDARDIZATIONCOMIT EUROPEN DE NORMALISATIONEUROPISCHES KOMITEE FR NORMUNGManagement Centre: rue de Stassart, 36 B-1050 Brussel

11、s 2005 CEN All rights of exploitation in any form and by any means reservedworldwide for CEN national Members.Ref. No. EN ISO 15367-2:2005: EForeword This document (EN ISO 15367-2:2005) has been prepared by Technical Committee ISO/TC 172 “Optics and optical instruments“ in collaboration with Technic

12、al Committee CEN/TC 123 “Lasers and laser-related equipment“, the secretariat of which is held by DIN. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by September 2005, and conflicting national stan

13、dards shall be withdrawn at the latest by September 2005. According to the CEN/CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Ger

14、many, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom. Endorsement notice The text of ISO 15367-2:2005 has been approved by CEN as EN ISO 15367-2:2005 without any

15、modifications. EN ISO 15367-2:2005Reference numberISO 15367-2:2005(E)INTERNATIONAL STANDARD ISO15367-2First edition2005-03-15Lasers and laser-related equipment Test methods for determination of the shape of a laser beam wavefront Part 2: Shack-Hartmann sensors Lasers et quipements associs aux lasers

16、 Mthodes dessai pour la dtermination de la forme du front donde du faisceau laser Partie 2: Senseurs Shack-Hartmann EN ISO 15367-2:2005ii iiiContents Page Foreword iv Introduction v 1 Scope 1 2 Normative references . 1 3 Terms and definitions. 1 4 Symbols and units 3 5 Test principle of Hartmann and

17、 Shack-Hartmann wavefront sensors 4 6 Measurement arrangement and test procedure. 4 6.1 General. 4 6.2 Detector system 4 6.3 Measurement . 7 6.4 Calibration 8 7 Evaluation of wavefront gradients 9 7.1 Background subtraction. 9 7.2 Evaluation 9 8 Wavefront reconstruction 9 8.1 General. 9 8.2 Direct n

18、umerical integration (zonal method) 10 8.3 Modal wavefront reconstruction . 10 9 Wavefront representation. 11 10 Uncertainty. 11 10.1 General. 11 10.2 Statistical measurement errors . 11 10.3 Environmental effects. 12 10.4 Deficiencies in data acquisition 12 10.5 Uncertainties due to geometrical mis

19、alignment 13 11 Test report 13 Annex A (informative) Wavefront reconstruction 17 Annex B (informative) Zernike polynomials for representation of wavefronts 19 Bibliography . 20 EN ISO 15367-2:2005iv Foreword ISO (the International Organization for Standardization) is a worldwide federation of nation

20、al standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. Internatio

21、nal organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rule

22、s given in the ISO/IEC Directives, Part 2. The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at l

23、east 75 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO 15367-2 was prepared by Technical Committee ISO/TC

24、 172, Optics and photonics, Subcommittee SC 9, Electro-optical systems. ISO 15367 consists of the following parts, under the general title Lasers and laser-related equipment Test methods for determination of the shape of a laser beam wavefront: Part 1: Terminology and fundamental aspects Part 2: Sha

25、ck-Hartmann sensors EN ISO 15367-2:2005vIntroduction Characterization of the beam propagation behaviour is necessary in many areas of both laser system development and industrial laser applications. For example, the design of resonator or beam delivery optics strongly relies on detailed and quantita

26、tive information over the directional distribution of the emitted radiation. On-line recording of the laser beam wavefront can also accomplish an optimization of the beam focusability in combination with adaptive optics. Other relevant areas are the monitoring and possible reduction of thermal lensi

27、ng effects, on-line resonator adjustment, laser safety considerations, or “at wavelength” testing of optics including Zernike analysis. There are four sets of parameters that are relevant for the laser beam propagation: power (energy) density distribution (ISO 13694); beam widths, divergence angles

28、and beam propagation ratios (ISO 11146-1 and ISO 11146-2); wavefront (phase) distribution (ISO 15367-1 and this part of ISO 15367); spatial beam coherence (no current standard available). In general, a complete characterization requires the knowledge of the mutual coherence function or spectral dens

29、ity function, at least in one transverse plane. Although the determination of those distributions is possible, the experimental effort is large and commercial instruments capable of measuring these quantities are still not available. Hence, the scope of this standard does not extend to such a univer

30、sal beam description but is limited to the measurement of the wavefront, which is equivalent to the phase distribution in case of spatially coherent beams. As a consequence, an exact prediction of beam propagation is achievable only in the limiting case of high lateral coherence. A number of phase o

31、r wavefront gradient measuring instruments are capable of determining the wavefront or phase distribution. These include, but are not limited to, the lateral shearing interferometer, the Hartmann and Shack-Hartmann wavefront sensor, and the Moir deflectometer. In these instruments, the gradients of

32、either wavefront or phase are measured, from which the two-dimensional phase distribution can be reconstructed. In this document, only Hartmann and Shack-Hartmann wavefront sensors are considered in detail, as they are able to measure the wavefront of both fully coherent and partially coherent beams

33、. A considerable number of such instruments are commercially available. The main advantages of the Hartmann technique are wide dynamic range, high optical efficiency, suitability for partially coherent beams, no requirement of spectral purity, no ambiguity with respect to 2 increment in phase angle,

34、 wavefronts can be acquired/analysed in a single measurement. Instruments which are capable of direct phase or wavefront measurement, as, e.g. self-referencing interferometers, are outside the scope of this part of ISO 15367. EN ISO 15367-2:2005blank1Lasers and laser-related equipment Test methods f

35、or determination of the shape of a laser beam wavefront Part 2: Shack-Hartmann sensors 1 Scope This part of ISO 15367 specifies methods for measurement and evaluation of the wavefront distribution function in a transverse plane of a laser beam utilizing Hartmann or Shack-Hartmann wavefront sensors.

36、This part of ISO 15367 is applicable to fully coherent, partially coherent and general astigmatic laser beams, both for pulsed and continuous operation. Furthermore, reliable numerical methods for both zonal and modal reconstruction of the two-dimensional wavefront distribution together with their u

37、ncertainty are described. The knowledge of the wavefront distribution enables the determination of several wavefront parameters that are defined in ISO 15367-1. 2 Normative references The following referenced documents are indispensable for the application of this document. For dated references, onl

38、y the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO 11145, Optics and optical instruments Lasers and laser-related equipment Vocabulary and symbols ISO 13694, Optics and optical instruments Lasers and laser-relate

39、d equipment Test methods for laser beam power (energy) density distribution ISO 15367-1:2003, Lasers and laser-related equipment Test methods for determination of the shape of a laser beam wavefront Part 1: Terminology and fundamental aspects 3 Terms and definitions For the purposes of this document

40、, the terms and definitions given in ISO 11145 and ISO 15367-1 as well as the following apply. 3.1 array element spacing dx, dydistance between the centres of adjacent pinholes or lenslets in x and y direction 3.2 sub-aperture screen to detector spacing LHspacing of the sub-aperture screen (lenslet

41、array or Hartmann screen) to the detector array NOTE For Shack-Hartmann sensors this is often set to the lenslet focal length. EN ISO 15367-2:20052 3.3 lenslet focal length f focal length of the lenslets for a Shack-Hartmann sensor 3.4 sub-aperture width dsaperture width of the pinholes of a Hartman

42、n screen or lenslets of a Shack-Hartmann array, respectively 3.5 angular dynamic range max maximum usable angular range of Hartmann or Shack-Hartmann sensors NOTE For square apertures, the angular dynamic range is given by maxH2xxdL d = 3.6 wavefront measurement repeatability wr,rms root-mean-square

43、 (r.m.s.) difference between single subsequent measurements wn(x, y) of the same wavefront and the average wavefront w (x, y) () ()()()() ()()()22r,rms1, ,1nn nnkxy xynxy xyE xy w xy w xy E xy w xy w xywk Exy Exy= = where n is the number of the measurement; k is the number of samples taken; ( ),wxy

44、= 11(, ) (, )(, )knnnknnE xy w xyExy=3.7 wavefront measurement accuracy wa,rms average of the r.m.s. difference between a reference wavefront wrand the tilt-corrected wavefront wtc,nafter various amounts of tilt nhave been applied to the reference wavefront 2tc, ra,rms1(, ) (, ) (, )1(, )nnkxynnxyEx

45、yw xy wxywk Exy= =EN ISO 15367-2:20053where n is the nth measurement of the wavefront with tilt x,nand y,napplied; k is the number of samples taken; wtc,nis the tilt-corrected wavefront as follows: tc,(, )nwxy = ,(, )nxnynwxy x y NOTE See also ISO 15367-1:2003, 3.4.7. 4 Symbols and units Table 1 Sym

46、bols and units Symbol Parameter Units Defined in E(x, y), H(x, y) power (energy) density distribution W/cm2, J/cm2ISO 13694 x, y, z mechanical axes (Cartesian coordinates) mm ISO 15367-1:2003, 3.1.5 z beam axis mm ISO 15367-1:2003, 3.1.5 wavelength nm zmlocation of measurement plane mm ISO 15367-1:2

47、003, 3.1.4 w(x, y) average wavefront shape nm ISO 15367-1:2003, 3.1.1 (x, y) phase distribution rad ISO 15367-1:2003, 3.1.1, Note 1 wc(x, y) corrected wavefront nm ISO 15367-1:2003, 3.4.2 s(x, y) approximating spherical surface ISO 15367-1:2003, 3.4.3 Rssdefocus or radius of best sphere mm ISO 15367

48、-1:2003, 3.4.5 wAF(x, y) wavefront aberration function nm ISO 15367-1:2003, 3.4.6 wPVwavefront irregularity nm wrmsweighted r.m.s. deformation nm ISO 15367-1:2003, 3.4.7 dx, dyarray element spacing mm 3.1 LHsub-aperture screen to detector spacing mm 3.2 f lenslet focal length mm 3.3 dpspot size m ds

49、sub-aperture width m 3.4 maxangular dynamic range mrad 3.5 (xc, yc)ijbeam centroid coordinates in sub-aperture ij i.e. the first order moments of the power density distribution in sub-aperture ij mm ISO 11146-1 (xr, yr)ijreference beam coordinates in sub-aperture ij mm (x,y)ijlocal wavefront gradient components (tilt, tip) ISO 15367-1:2003, 3.5.1, 3.5.3wr,rmswavefront measurement repeatability nm 3.6 wa,rmswavefront measurement accuracy nm 3.7 B