EN ISO 25178-606-2015 en Geometrical product specification (GPS) - Surface texture Areal - Part 606 Nominal characteristics of non-contact (focus variation) instruments《产品几何技术规范(GP.pdf

1、BSI Standards PublicationBS EN ISO 25178-606:2015Geometrical productspecification (GPS) Surfacetexture: ArealPart 606: Nominal characteristics of non-contact (focus variation) instrumentsBS EN ISO 25178-606:2015 BRITISH STANDARDNational forewordThis British Standard is the UK implementation of EN IS

2、O 25178-606:2015.The UK participation in its preparation was entrusted to Technical Committee TDW/4, Technical Product Realization.A list of organizations represented on this committee can be obtained on request to its secretary.This publication does not purport to include all the necessary provisio

3、ns of a contract. Users are responsible for its correct application. The British Standards Institution 2015.Published by BSI Standards Limited 2015ISBN 978 0 580 76436 3 ICS 17.040.20 Compliance with a British Standard cannot confer immunity from legal obligations.This British Standard was published

4、 under the authority of the Standards Policy and Strategy Committee on 30 June 2015.Amendments/corrigenda issued since publicationDate T e x t a f f e c t e dEUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 25178-606 June 2015 ICS 17.040.20 English Version Geometrical product specification (

5、GPS) - Surface texture: Areal - Part 606: Nominal characteristics of non-contact (focus variation) instruments (ISO 25178-606:2015) Spcification gomtrique des produits (GPS) - tat de surface: Surfacique - Partie 606: Caractristiques nominales des instruments sans contact ( variation focale) (ISO 251

6、78-606:2015) Geometrische Produktspezifikation (GPS) - Oberflchenbeschaffenheit: Flchenhaft - Teil 606: Merkmale von berhrungslos messenden Gerten (Fokusvariation) (ISO 25178-606:2015) This European Standard was approved by CEN on 21 February 2015. CEN members are bound to comply with the CEN/CENELE

7、C Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or

8、to any CEN member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same status as the offic

9、ial versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands,

10、Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels 2015 CEN All rights of e

11、xploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. EN ISO 25178-606:2015 EBS EN ISO 25178-606:2015EN ISO 25178-606:2015 (E) 3 European foreword This document (EN ISO 25178-606:2015) has been prepared by Technical Committee ISO/TC 213“Dimensional and geomet

12、rical product specifications and verification” in collaboration with TechnicalCommittee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat ofwhich is held by AFNOR This European Standard shall be given the status of a national standard, either by publicat

13、ion of an identicaltext or by endorsement, at the latest by December 2015, and conflicting national standards shall be withdrawnat the latest by December 2015. Attention is drawn to the possibility that some of the elements of this document may be the subject of patentrights. CEN and/or CENELEC shal

14、l not be held responsible for identifying any or all such patent rights. According to the CEN-CENELEC Internal Regulations, the national standards organizations of the followingcountries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, CzechRepublic, Denmar

15、k, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece,Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal,Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom. Endorsement notice

16、 The text of ISO 25178-606:2015 has been approved by CEN as EN ISO 25178-606:2015 without anymodification. BS EN ISO 25178-606:2015ISO 25178-606:2015(E)Foreword ivIntroduction vi1 Scope . 12 Normative references 13 Terms and definitions . 13.1 Terms and definitions related to all areal surface textu

17、re measurement methods . 23.2 Terms and definitions related to x- and y-scanning systems 93.3 Terms and definitions related to optical systems 113.4 Terms and definitions related to optical properties of the workpiece 133.5 Terms and definitions specific to focus variation instruments 134 Descriptio

18、n of the influence quantities .164.1 General 164.2 Overview . 174.3 Influence quantities . 17Annex A (informative) Components of a focus variation microscope .19Annex B (informative) Relation to the GPS matrix model .25Bibliography .27 ISO 2015 All rights reserved iiiContents PageBS EN ISO 25178-606

19、:2015ISO 25178-606:2015(E)ForewordISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested i

20、n a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commis

21、sion (IEC) on all matters of electrotechnical standardization.The procedures used to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO documents sho

22、uld be noted. This document was drafted in accordance with the editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for id

23、entifying any or all such patent rights. Details of any patent rights identified during the development of the document will be in the Introduction and/or on the ISO list of patent declarations received (see www.iso.org/patents).Any trade name used in this document is information given for the conve

24、nience of users and does not constitute an endorsement.For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment, as well as information about ISOs adherence to the WTO principles in the Technical Barriers to Trade (TBT), see the following URL: Foreword

25、 Supplementary information .The committee responsible for this document is ISO/TC 213, Dimensional and geometrical product specifications and verification.ISO 25178 consists of the following parts, under the general title Geometrical product specification (GPS) Surface texture: Areal : Part 1: Indic

26、ation des tats de surface Part 2: Terms, definitions and surface texture parameters Part 3: Specification operators Part 6: Classification of methods for measuring surface texture Part 70: Material measures Part 71: Software measurement standards Part 72: Format de fichier XML x3p Part 601: Nominal

27、characteristics of contact (stylus) instruments Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments Part 604: Nominal characteristics of non-contact (coherence

28、 scanning interferometry) instruments Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments Part 606: Nominal characteristics of non-contact (focus variation) instruments Part 701: Calibration and measurement standards for contact (stylus) instrumentsiv ISO 2015 All ri

29、ghts reservedBS EN ISO 25178-606:2015ISO 25178-606:2015(E)The following parts are planned: Part 73: Defects on material measures Terms and definitions Part 600: Metrological characteristics for areal-topography measuring methods Part 607: Nominal characteristics of non-contact (imaging confocal micr

30、oscopy) instruments ISO 2015 All rights reserved vBS EN ISO 25178-606:2015ISO 25178-606:2015(E)IntroductionThis part of ISO 25178 is a geometrical product specification (GPS) standard and is to be regarded as a general GPS standard (see ISO/TR 14638). It influences the chain link 5 of the chain of s

31、tandards on areal surface texture.The ISO/GPS Masterplan given in ISO/TR 14638 gives an overview of the ISO/GPS system of which this part of ISO 25178 is a part of. The fundamental rules of ISO/GPS given in ISO 8015 apply to this part of ISO 25178 and the default decision rules given in ISO 14253-1

32、apply to specifications made in accordance with this part of ISO 25178, unless otherwise indicated.For more detailed information of the relation of this part of ISO 25178 to other standards and the GPS matrix model, see Annex B.This part of ISO 25178 describes the metrological characteristics of foc

33、us variation microscopes designed for the measurement of surface topography maps.For more detailed information on the focus variation technique, see Annex A.NOTE Portions of this part of ISO 25178, particularly the informative sections, describe patented systems and methods. This information is prov

34、ided only to assist users in understanding the operating principles of focus variation. This part of ISO 25178 is not intended to establish priority for any intellectual property, nor does it imply a license to proprietary technologies described herein.vi ISO 2015 All rights reservedBS EN ISO 25178-

35、606:2015INTERNATIONAL STANDARD ISO 25178-606:2015(E)Geometrical product specification (GPS) Surface texture: Areal Part 606: Nominal characteristics of non-contact (focus variation) instruments1 ScopeThis part of ISO 25178 defines the metrological characteristics of a particular non-contact method m

36、easuring surface texture using a focus variation (FV) sensor.2 Normative referencesThe following documents, in whole or in part, are normatively referenced in this document and are indispensable for its application. For dated references, only the edition cited applies. For undated references, the la

37、test edition of the referenced document (including any amendments) applies.ISO 3274:1996, Geometrical Product Specifications (GPS) Surface texture: Profile method Nominal characteristics of contact (stylus) instrumentsISO 4287:1997, Geometrical Product Specifications (GPS) Surface texture: Profile m

38、ethod Terms, definitions and surface texture parametersISO 10934-2:2007, Optics and optical instruments Vocabulary for microscopy Part 2: Advanced techniques in light microscopyISO 14978:2006, Geometrical product specifications (GPS) General concepts and requirements for GPS measuring equipmentISO 1

39、7450-1, Geometrical product specifications (GPS) General concepts Part 1: Model for geometrical specification and verificationISO 25178-2:2012, Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parametersISO 25178-3:2012, Geometrical produ

40、ct specifications (GPS) Surface texture: Areal Part 3: Specification operatorsISO 25178-6:2010, Geometrical product specifications (GPS) Surface texture: Areal Part 6: Classification of methods for measuring surface textureISO 25178-601, Geometrical product specifications (GPS) Surface texture: Area

41、l Part 601: Nominal characteristics of contact (stylus) instrumentsISO 25178-602, Geometrical product specifications (GPS) Surface texture: Areal Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments3 Terms and definitionsFor the purposes of this document, the terms

42、 and definitions given in ISO 3274, ISO 4287, ISO 10934-2 ISO 17450-1, ISO 14978, ISO 25178-2, ISO 25178-3, ISO 25178-6, ISO 25178-601, ISO 25178-602, and the following apply. ISO 2015 All rights reserved 1BS EN ISO 25178-606:2015ISO 25178-606:2015(E)3.1 Terms and definitions related to all areal su

43、rface texture measurement methods3.1.1areal referencecomponent of the instrument that generates a reference surface with respect to which the surface topography is measured3.1.2coordinate system of the instrumentright hand orthonormal system of axes (x, y, z) defined as: (x, y) is the plane establis

44、hed by the areal reference (3.1.1) of the instrument (note that there are optical instruments that do not posses a physical areal guide); z-axis is mounted parallel to the optical axis and is perpendicular to the (x, y) plane for an optical instrumentNote 1 to entry: See Figure 1.Note 2 to entry: No

45、rmally, the x-axis is the tracing axis and the y-axis is the stepping axis (this note is valid for instruments that scan in the horizontal plane).Note 3 to entry: See also specification coordinate system ISO 25178-2:2012, 3.1.2 and measurement coordinate system ISO 25178-6:2010, 3.1.1.3.1.3measureme

46、nt loopclosed chain which comprises of all the components connecting the workpiece and the probe, e.g. the means of positioning, the work holding fixture, the measuring stand, the drive unit, and the probing system (3.5.3)Note 1 to entry: See Figure 1.Note 2 to entry: The measurement loop will be su

47、bjected to external and internal disturbances that influence the measurement uncertainty.2 ISO 2015 All rights reservedBS EN ISO 25178-606:2015ISO 25178-606:2015(E)Key1 coordinate system of the instrument2 measurement loopFigure 1 Coordinate system and measurement loop of the instrument3.1.4real sur

48、face of a workpieceset of features which physically exist and separate the entire workpiece from the surrounding mediumNote 1 to entry: The real surface is a mathematical representation of the surface that is independent of the measurement process.Note 2 to entry: See also mechanical surface ISO 251

49、78-2:2012, 3.1.1.1 or ISO 14406:2010, 3.1.1 and electromagnetic surface ISO 25178-2:2012, 3.1.1.2 or ISO 14406:2010, 3.1.2.Note 3 to entry: The electromagnetic surface considered for one type of optical instrument can be different from the electromagnetic surface for other types of optical instruments.SOURCE: ISO 17450-1:20113.1.5surface probedevice that converts the surface height into a signal during measurementNote 1 to entry: In earlier International Standards, this w