EN ISO 25178-701-2010 en Geometrical product specifications (GPS) - Surface texture Areal - Part 701 Calibration and measurement standards for contact (stylus) instruments《产品的几何技术规.pdf

1、raising standards worldwideNO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAWBSI Standards PublicationBS EN ISO 25178-701:2010Geometrical productspecifications (GPS) Surfacetexture: ArealPart 701: Calibration and measurementstandards for contact (stylus) instruments(ISO 25178-701

2、:2010)BS EN ISO 25178-701:2010 BRITISH STANDARDNational forewordThis British Standard is the UK implementation of EN ISO25178-701:2010.The UK participation in its preparation was entrusted to TechnicalCommittee TDW/4, Technical Product Realization.A list of organizations represented on this committe

3、e can beobtained on request to its secretary.This publication does not purport to include all the necessaryprovisions of a contract. Users are responsible for its correctapplication. BSI 2010ISBN 978 0 580 60440 9ICS 17.040.20Compliance with a British Standard cannot confer immunity fromlegal obliga

4、tions.This British Standard was published under the authority of theStandards Policy and Strategy Committee on 31 July 2010Amendments issued since publicationDate Text affectedEUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 25178-701 July 2010 ICS 17.040.20 English Version Geometrical produ

5、ct specifications (GPS) - Surface texture: Areal - Part 701: Calibration and measurement standards for contact (stylus) instruments (ISO 25178-701:2010) Spcification gomtrique des produits (GPS) - tat de surface: Surfacique - Partie 701: talonnage et talons de mesure pour les instruments contact ( p

6、alpeur) (ISO 25178-701:2010) Geometrische Produktspezifikation (GPS) - Oberflchenbeschaffenheit: Flchenhaft - Teil 701: Kalibrierung und Normale fr berhrend messende Gerte (mit Taster) (ISO 25178-701:2009) This European Standard was approved by CEN on 6 May 2010. CEN members are bound to comply with

7、 the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN Management Cen

8、tre or to any CEN member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN Management Centre has the same status as the offici

9、al versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slova

10、kia, Slovenia, Spain, Sweden, Switzerland and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG Management Centre: Avenue Marnix 17, B-1000 Brussels 2010 CEN All rights of exploitation in any form and by any means reserved worldwide

11、for CEN national Members. Ref. No. EN ISO 25178-701:2010: EBS EN ISO 25178-701:2010EN ISO 25178-701:2010 (E) 3 Foreword This document (EN ISO 25178-701:2010) has been prepared by Technical Committee ISO/TC 213 “Dimensional and geometrical product specifications and verification“ in collaboration wit

12、h Technical Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of which is held by AFNOR. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by Jan

13、uary 2011, and conflicting national standards shall be withdrawn at the latest by January 2011. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such paten

14、t rights. According to the CEN/CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Icelan

15、d, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and the United Kingdom. Endorsement notice The text of ISO 25178-701:2010 has been approved by CEN as a EN ISO 25178-701:2010 without any modificati

16、on. BS EN ISO 25178-701:2010ISO 25178-701:2010(E) ISO 2010 All rights reserved iiiContents Page Foreword iv Introduction.v 1 Scope1 2 Normative references1 3 Terms and definitions .2 4 General .2 5 Measurement standards .2 6 Calibration and periodical verification procedures .11 Annex A (informative

17、) Assessment of the residual errors .18 Annex B (informative) Example of an instrument data sheet.20 Annex C (informative) Relation with the GPS matrix 23 Bibliography25 BS EN ISO 25178-701:2010ISO 25178-701:2010(E) iv ISO 2010 All rights reservedForeword ISO (the International Organization for Stan

18、dardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right

19、 to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International S

20、tandards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2. The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an

21、International Standard requires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO 25

22、178-701 was prepared by Technical Committee ISO/TC 213, Dimensional and geometrical product specifications and verification. ISO 25178 consists of the following parts, under the general title Geometrical product specifications (GPS) Surface texture: Areal: Part 2: Terms, definitions and surface text

23、ure parameters Part 3: Specification operators Part 6: Classification of methods for measuring surface texture Part 7: Software measurement standards Part 601: Nominal characteristics of contact (stylus) instruments Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instrume

24、nts Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments Part 701: Calibration and measurement standards for contact (stylus) instruments The following parts are under preparation: Part 604: Nominal characteristics of non-contact (coherence scannin

25、g interferometry) instruments Part 605: Nominal characteristics of non-contact (point autofocusing) instruments BS EN ISO 25178-701:2010ISO 25178-701:2010(E) ISO 2010 All rights reserved vIntroduction This part of ISO 25178 is a geometrical product specification standard and is to be regarded as a g

26、eneral GPS standard (see ISO/TR 14638). It influences chain link 6 of the chains of standards on areal surface texture. For more detailed information of the relation of this standard to the GPS matrix model, see Annex C. This part of ISO 25178 concerns the areal surface texture measuring instruments

27、 for which it defines the systematic errors linked with main metrological characteristics of the instrument if they are not given by the manufacturer, the calibration operation mode, the analysis of the results for the assessment of the potential errors, and the decision rules for corrective actions

28、. It allows the evaluation of the part of the measurement uncertainty which is linked with the metrological characteristics of the instrument and which influences the assessment of areal surface texture parameters. These metrological characteristics are verified by testing the instrument with the me

29、asurement standards defined hereafter or with the measurement standards described in ISO 5436-1 and ISO 5436-2, and with complementary standards like optical flats. The aim is to assess the errors in the corrected X, Y and Z quantities by using material measurement standards having simple geometry (

30、i.e. optical flat, sphere, etc.) for which the uncertainty is lower than for surface texture standards, their characteristics are independent of the surface texture parameters. The calibration procedure reports on the status of the measurement equipment. Depending on the report, the user can decide

31、to perform the corrective actions or to alert the equipment manufacturer. The method is as follows: a) assessment of the errors on the fundamental corrected quantities X, Y and Z; b) assessment of the uncertainty due to the mathematical algorithms used for filtering and for computation of parameters

32、, checked with the help of software measurement standards as defined in ISO 5436-2 and ISO 25178-7. BS EN ISO 25178-701:2010BS EN ISO 25178-701:2010INTERNATIONAL STANDARD ISO 25178-701:2010(E) ISO 2010 All rights reserved 1Geometrical product specifications (GPS) Surface texture: Areal Part 701: Cal

33、ibration and measurement standards for contact (stylus) instruments 1 Scope This part of ISO 25178 specifies the characteristics of material measures used as measurement standards, the estimation methods of the residual errors, and the calibration methods and tests for acceptance and periodical re-v

34、erification for areal surface texture contact (stylus) measurement instruments. 2 Normative references The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the re

35、ferenced document (including any amendments) applies. ISO 3274, Geometrical Product Specifications (GPS) Surface texture: Profile method Nominal characteristics of contact (stylus) instruments ISO 5436-1:2000, Geometrical Product Specifications (GPS) Surface texture: Profile method; Measurement stan

36、dards Part 1: Material measures ISO 5436-2, Geometrical Product Specifications (GPS) Surface texture: Profile method; Measurement standards Part 2: Software measurement standards ISO 12085, Geometrical Product Specifications (GPS) Surface texture: Profile method Motif parameters ISO 12179:2000, Geom

37、etrical Product Specifications (GPS) Surface texture: Profile method Calibration of contact (stylus) instruments ISO/TS 12181-1, Geometrical Product Specifications (GPS) Roundness Part 1: Vocabulary and parameters of roundness ISO/TS 12780-1, Geometrical Product Specifications (GPS) Straightness Par

38、t 1: Vocabulary and parameters of straightness ISO/TS 12781-1, Geometrical Product Specifications (GPS) Flatness Part 1: Vocabulary and parameters of flatness BS EN ISO 25178-701:2010ISO 25178-701:2010(E) 2 ISO 2010 All rights reservedISO/TS 14253-2, Geometrical Product Specifications (GPS) Inspecti

39、on by measurement of workpieces and measuring equipment Part 2: Guide to the estimation of uncertainty in GPS measurement, in calibration of measuring equipment and in product verification ISO 25178-2, Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and sur

40、face texture parameters ISO 25178-601, Geometrical product specifications (GPS) Surface texture: Areal Part 601: Nominal characteristics of contact (stylus) instruments ISO/IEC Guide 99:2007, International vocabulary of metrology Basic and general concepts and associated terms (VIM) 3 Terms and defi

41、nitions For the purpose of this document, the terms and definitions given in ISO 3274, ISO 25178-2, ISO 25178-601 and ISO/IEC Guide 99 apply. 4 General A material measurement standard can be used for two different purposes: calibration of the metrological characteristics, followed by assessment of t

42、he measurement uncertainty; user adjustment of the instrument (see ISO 25178-601), which establishes correction factors of the measured quantities. Both of these depend on the metrological characteristics of the measurement standards. The measurement standards presented below are suitable for both p

43、urposes; nevertheless, they have been especially designed for the assessment and for the correction of systematic errors. This is due to the fact that the characteristics of those standards permit the calibration of quantities such as X, Y and Z through the assessment and the verification of adjustm

44、ent coefficients Cx, Cyand Cz(see ISO 25178-601). However, these material measurement standards do not permit the assessment of errors due to filtering and computation algorithms. These algorithms can be tested using software measurement standards (see ISO 5436-2 and ISO 25178-7). Moreover, most of

45、the material measurement standards presented below permit the verification and the correction of the perpendicular deviation between X and Y drive units. The measurement standards defined in ISO 5436-1 are designed for the calibration of quantities which permit the assessment of profile parameters.

46、This part of ISO 25178 provides default methods for the assessment of the software measurement standards. Nevertheless, the method and the characteristics of the measurement standard should be supplied by the manufacturer. 5 Measurement standards 5.1 Types of standards The different types of measure

47、ment standards are given in Table 1. BS EN ISO 25178-701:2010ISO 25178-701:2010(E) ISO 2010 All rights reserved 3Table 1 Type of measurement standards Type Name ER1 Measurement standard with two parallel grooves ER2 Measurement standard with four grooves forming a rectangle ER3 Measurement standard

48、with a circular groove ES Measurement standard with a sphere/plane intersection CS Measurement standard with a contour profile CG Crossed-grating measurement standard It is necessary to choose a measurement standard having characteristics in accordance with the metrological characteristics of the in

49、strument under consideration. Therefore, a non-exhaustive list of significant characteristics is supplied below for each measurement standard. 5.2 Description of the measurement standards 5.2.1 Type ER: Groove standard 5.2.1.1 General The ER standards contain two or more triangular grooves. These grooves are characterized by: the depth, d; the angle between the flanks, ; the intersection line of their respective flanks. The parallelism and th